JPH0223530A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH0223530A JPH0223530A JP17331888A JP17331888A JPH0223530A JP H0223530 A JPH0223530 A JP H0223530A JP 17331888 A JP17331888 A JP 17331888A JP 17331888 A JP17331888 A JP 17331888A JP H0223530 A JPH0223530 A JP H0223530A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- vapor deposition
- electron beam
- recording medium
- polymer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 229920006254 polymer film Polymers 0.000 claims abstract description 10
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 8
- 238000001704 evaporation Methods 0.000 claims description 11
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000005566 electron beam evaporation Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 abstract description 8
- 238000007740 vapor deposition Methods 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 230000005294 ferromagnetic effect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005596 polymer binder Polymers 0.000 description 1
- 239000002491 polymer binding agent Substances 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、強磁性金属薄膜を磁気記録層とする磁気記録
媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a magnetic recording medium using a ferromagnetic metal thin film as a magnetic recording layer.
従来の技術
従来、広く使用されている磁気記録媒体は磁性微粉末と
高分子結合剤とを主体とする磁性塗料を、高分子フィル
ム等の非磁性支持体上に塗布、乾燥して磁性層を形成し
た塗布型の磁気記録媒体である。これに比し、Ｃｏ、Ｃ
ｏ−Ｎｉ等の強磁性金属を真空蒸着法、スパッタリング
等により、非磁性支持体上に、磁気記録層として形成す
る金属薄膜型の磁気記録媒体は、短波長出力が大きくで
きることから、今後の高密度磁気記録を担う媒体として
注目されている〔例えば、アイイーイーイー トランザ
クシッンズ オン マグネティクス （ＩＥＥＥＴＲＡ
ＮＳＡＣＴＩＯＮＳ ＯＮ ＭＡＧＮＥＴＩＣ８）ＶＯ
Ｉ−ＭＡＧ−２１、ＪＥ３．Ｐ、Ｐ １２１７〜１２２
０ （１９８５） ）。Conventional technology Conventionally, widely used magnetic recording media are made by coating a magnetic coating mainly consisting of magnetic fine powder and a polymer binder on a non-magnetic support such as a polymer film and drying it to form a magnetic layer. This is a coating-type magnetic recording medium. In comparison, Co, C
Metal thin film magnetic recording media, in which a ferromagnetic metal such as o-Ni is formed as a magnetic recording layer on a non-magnetic support by vacuum evaporation, sputtering, etc., are expected to have high output in the future because they can produce large output at short wavelengths. It is attracting attention as a medium for density magnetic recording [for example, IEETRA
NSACTIONS ON MAGNETIC8) VO
I-MAG-21, JE3. P, P 1217-122
0 (1985)).
しかしながら、この種の金属薄膜型の磁気記録媒体にお
いては、ＣＯ単体、Ｃｏ−Ｎｉ等の合金を単に非磁性支
持体上に、真空蒸着しただけでは、十分な大きさの抗磁
力Ｈａを有する磁気記録層を得ることは困難である。こ
のような金属薄膜型磁気記録媒体で、大きなＨａを得る
ことの出来る方法として、斜め蒸着法が知られている〔
特公昭４１−１９３８９号公報〕。However, in this type of metal thin film type magnetic recording medium, simply vacuum-depositing CO alone or an alloy such as Co-Ni on a non-magnetic support cannot produce a magnetic recording medium with a sufficiently large coercive force Ha. It is difficult to obtain a recording layer. An oblique evaporation method is known as a method that can obtain a large amount of Ha in such metal thin film magnetic recording media [
Special Publication No. 41-19389].
発明が解決しようとする課題
しかしながら、斜め蒸着法では、蒸着効率が低いといっ
た問題の他に、異方性が非磁性基板の長手方向につくた
め、磁気ディスクとして用いた時、高密度記録特性を十
分発揮させることができないといった課題があり、改善
が望まれていた。Problems to be Solved by the Invention However, in the oblique evaporation method, in addition to the problem of low evaporation efficiency, anisotropy occurs in the longitudinal direction of the nonmagnetic substrate, making it difficult to achieve high-density recording characteristics when used as a magnetic disk. There were issues such as not being able to perform to the fullest, and improvements were desired.
本発明は上記した事情に鑑みなされたもので、等方的で
優れたＣ／Ｈの磁気記録層を高速で得ることの出来る磁
気記録媒体の製造方法を提供するものである。The present invention has been made in view of the above-mentioned circumstances, and provides a method for manufacturing a magnetic recording medium that can produce an isotropic and excellent C/H magnetic recording layer at high speed.
課題を解決するための手段
上記した課題を解決するため、本発明の磁気記録媒体の
製造方法は、高分子フィノ１／ム上に斜め入射でクラス
ターイオンビーム蒸着を行った後、垂直に近い成分で電
子ビーム蒸着して磁気記録層を形成するようにしたもの
である。Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention involves performing cluster ion beam evaporation on a polymer finomum with oblique incidence, and then depositing near-perpendicular components. The magnetic recording layer is formed by electron beam evaporation.
作 用
本発明の磁気記録媒体の製造方法は上記した構成により
、高分子フィルム上に均一な核形成が行われ荷電粒子に
よる不均一性から生じる雑音も少なく、なおかつ上記核
形成による保磁力増大効果が垂直に近い成分の電子ビー
ム蒸着時にも維持され、等方的でありながら雑音の少な
い媒体を製造できることになる。Effect: Due to the above-described structure, the method for manufacturing a magnetic recording medium of the present invention allows uniform nucleation to occur on the polymer film, reduces noise caused by non-uniformity due to charged particles, and has an effect of increasing coercive force due to the nucleation. is maintained even during electron beam evaporation with a nearly vertical component, making it possible to manufacture an isotropic medium with low noise.
実施例
以下、図面を参照しながら本発明の実施例について説明
する。第１図は本発明の製造方法により製造する磁気記
録媒体の拡大断面図である。第１１図で、１はポリエチ
レンテレフタレート、ポリエチレンナフタレート、ホリ
フェニレンサルファイド、ポリエーテルエーテルケトン
、ポリアミド。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium manufactured by the manufacturing method of the present invention. In FIG. 11, 1 is polyethylene terephthalate, polyethylene naphthalate, polyphenylene sulfide, polyether ether ketone, and polyamide.
ポリイミド等の高分子フィルムで必要に応じて水溶性高
分子のミミズ状下塗り層や、無機微粒子や樹脂粒子を配
した微粒子塗布層を配したものでもよい。２はクラスタ
ーイオンビーム蒸着層で３は垂直に近い成分で電子ビー
ム蒸着した磁気記録層である。２はＴｉ、Ｃｒ、Ｇｏ、
ＳＬ等の非磁性層か、３と同じＣｏ−Ｎｉ 、Ｃｏ−Ｔ
ｉ 、Ｃｏ−Ｇｏ 、Ｃｏ−８ｉ 、Ｃｏ −Ｃｒ
。A polymer film such as polyimide may be provided with a worm-like undercoat layer of a water-soluble polymer or a fine particle coating layer containing inorganic fine particles or resin particles, if necessary. 2 is a cluster ion beam deposited layer, and 3 is a magnetic recording layer deposited with an electron beam with nearly perpendicular components. 2 is Ti, Cr, Go,
Non-magnetic layer such as SL, Co-Ni, Co-T same as 3
i, Co-Go, Co-8i, Co-Cr
.
Ｇｏ−０，Ｃｏ−Ｎｉ−０等の強磁性金属薄膜のいずれ
かで、クラスターイオンビーム蒸着で入射角はＣ／Ｎよ
り６ｏ度以上、好ましくはＳＯ度以上の斜め蒸着を行い
、等方性を得るためには、強磁性金属薄膜の時は、３の
膜厚の尾〜％が好ましい。４は保護層でＳｉｏ２膜、カ
ーボン膜、パーフルオロポリエーテル、脂肪酸等を適宜
組み合わせればよい。尚本発明は磁気ディスクが望まし
いが、磁気テープに用いてもよいのは勿論である。A ferromagnetic metal thin film such as Go-0 or Co-Ni-0 is obliquely deposited using cluster ion beam evaporation at an incident angle of at least 6 degrees, preferably at least SO degrees, from C/N to obtain isotropic properties. In order to obtain this, in the case of a ferromagnetic metal thin film, a film thickness of ~3% is preferable. 4 is a protective layer which may be appropriately combined with Sio2 film, carbon film, perfluoropolyether, fatty acid, etc. Although the present invention is preferably applied to a magnetic disk, it is of course possible to use a magnetic tape.
第２図は本発明を実施するのに用いた蒸着装置の要部断
面図である。第２図で６は高分子フィルムで、ｅは円筒
キャンで、絶縁し電位を付与できるよう構成する。７は
巻出し軸、８は巻取り軸で円筒キャンは矢印Ａの方向に
口伝する。９はクラスター蒸発源容器、１０は蒸着材料
Ａ１１１は誘導加熱コイル、１２は高周波コイル、１３
は絶縁導入端子、１４は高周波電源、１６は蒸気流Ａ１
１６は防着板Ａで、１７は防着板Ｂ１１８は電子ビーム
蒸発源容器、１９は蒸着材料Ｂ、２０は電子ビーム発生
器、２１は電子ビーム、２２は蒸気流Ｂで、２３は真空
容器、２４は真空排気系である。FIG. 2 is a sectional view of a main part of a vapor deposition apparatus used to carry out the present invention. In FIG. 2, 6 is a polymer film, and e is a cylindrical can, which is constructed to be insulated and capable of applying a potential. 7 is an unwinding shaft, 8 is a winding shaft, and the cylindrical can is moved in the direction of arrow A. 9 is a cluster evaporation source container, 10 is a vapor deposition material A111 is an induction heating coil, 12 is a high frequency coil, 13
is an insulation introduction terminal, 14 is a high frequency power supply, and 16 is a steam flow A1.
16 is the deposition prevention plate A, 17 is the deposition prevention plate B, 118 is the electron beam evaporation source container, 19 is the evaporation material B, 20 is the electron beam generator, 21 is the electron beam, 22 is the vapor flow B, and 23 is the vacuum container. , 24 is a vacuum evacuation system.
第２図で電子ビーム蒸発源容器を直径５Ｑｃ＋ａの円筒
キャンの真下４ｏｃｌＩＩ−に置いて、クラスター蒸発
源容器を、電子ビーム蒸発源より高分子フィルムの入っ
てくる側へ、水平に２２ｃ＆、垂直に１８１移動した位
置に配した。キャンは一２００Ｖとした。この条件で以
下に具体的な例について比較例との対比で説明する。In Figure 2, place the electron beam evaporation source container directly below the cylindrical can with a diameter of 5Qc+a, and move the cluster evaporation source container 22c horizontally and vertically toward the side where the polymer film enters from the electron beam evaporation source. It was placed at a position moved by 181 points. The can was set to -200V. Under these conditions, a specific example will be explained below in comparison with a comparative example.
厚み４０μｍのポリエチレンテレフタレートフィルム上
に直径１００人のＣｒ２ｏ３ 微粒子を１０ケ／隼２配
Ｉ〜、その上にＣｒ を３００人最小入射角６４度でク
ラスターイオンビーム蒸着した。イオン化は１３．５６
Ｍ、ｅｏｏｗＯ高周波パワーで行った。その後、１．４
Ｘ１０−５Ｔｏｒｒの散゛素分圧下でＣｏ−Ｎ１（Ｃｏ
：８０ｗｔチ）を１０００人電子ビーム蒸着した。On a polyethylene terephthalate film with a thickness of 40 μm, 10 particles of Cr2O3 with a diameter of 10 particles were deposited on a polyethylene terephthalate film at a minimum incidence angle of 64 degrees, and Cr was deposited thereon with a cluster ion beam for 300 particles at a minimum incident angle of 64 degrees. Ionization is 13.56
M, eooowO performed with high frequency power. After that, 1.4
Co-N1 (Co
:80wt) was deposited by 1000 electron beams.
入射角は１３度以内とした。更にモンテフルオス社製の
”フオンブリンＺ−２６″を６０人塗布し、３．６ イ
ンチの磁気ディスクＡに加工した。The angle of incidence was within 13 degrees. Furthermore, 60 people coated the disc with "Fuonblin Z-26" manufactured by Monte Fluos, and processed it into a 3.6-inch magnetic disk A.
次はフイ／ｌ／ム上にＣｏ−Ｃｒ （、Ｃｏ ：８０ｗ
ｔ ％ ）を１２０人最小入射角６７度でクラスター
イオンビーム蒸着した（高周波パワーは１３．５６ｈｔ
ｍ、 ５５０Ｗとした）。Next, apply Co-Cr (, Co: 80w) on the film/l/mu.
t %) was cluster ion beam evaporated on 120 people at a minimum incident angle of 67 degrees (the radio frequency power was 13.56 h).
m, 550W).
引き続きＣｏ−Ｃｒ （Ｃｏ ： ８０ｗ ｔ％）を電
子ビーム蒸着（入射角１８度以内）し、Ｃｏ−Ｃｒ膜厚
をトータルで１０００人とした。この上に同じ潤滑剤を
６０人配し、磁気ディスクＢとした。Subsequently, Co--Cr (Co: 80 wt%) was deposited by electron beam (at an incident angle of 18 degrees or less) to give a total Co--Cr film thickness of 1000. On top of this, 60 people placed the same lubricant to form a magnetic disk B.
比較例Ａとして、高周波スパッタリング法でＣｒ、Ｃｏ
−Ｎ１（Ｃｏ：８０ｗｔ％）を３００人〜１６００人積
層した以外は磁気テ゛イスクＡと同様のものを準備した
。比較例Ｂとして高周波スパッタリング法で、Ｃｏ−Ｃ
ｒ （Ｃｏ ：８０ｗｔ％）垂直磁化膜を２０００人配
した以外は磁気ディスクＢど同様のものを準備した。As Comparative Example A, Cr, Co
A magnetic disk similar to A was prepared except that -N1 (Co: 80 wt%) was laminated by 300 to 1,600 layers. As Comparative Example B, Co-C was
A similar magnetic disk as B was prepared except that 2000 perpendicular magnetization films (Co: 80 wt%) were arranged.
夫々の磁気ディスクをギャップ長０．２６μｍトラック
幅１０μｍのリングヘッドで０．３３μｍのビット長の
信号を記録し再生比較した。比較例ＢのＣ／ＮをｏｄＢ
とした時、比・咬例Ａば−０，７ｄＢ、実施例Ａは＋
ｓ、５ｄＢＳ実施例Ｂは＋３．、ｏｄＢと良好であった
。A signal with a bit length of 0.33 μm was recorded on each magnetic disk using a ring head with a gap length of 0.26 μm and a track width of 10 μm, and reproduction was compared. C/N of comparative example B in odB
When the ratio/bite example A is -0.7 dB, the example A is +
s, 5dBS Example B is +3. , odB, which was good.
実施例Ａ、Ｂは１周に渡って出力は±ｏ、１ｄＢ以内と
均一で、比較例Ｂと同等で比較例Ａ７ふ３ｄＢ より
良好で、より等方性に優れていることがわかる。It can be seen that Examples A and B have uniform outputs of ±o and within 1 dB over one round, which is equivalent to Comparative Example B and better than Comparative Example A7 by 3 dB, and is more excellent in isotropy.
尚、実施例Ｂの条件で全Ｃｏ−０ｒに占めるクラ、７−
ターイオンビーム蒸着層が％以上になると、モジ↓レー
ジランが１ｄＢを越え、九以下になると、保磁力の低下
が目立ち、高密度記録性能が低下することをＣｏ−Ｃｘ
の全厚６００人から２６００人で確認した。In addition, under the conditions of Example B, the proportion of Co-0r in the total Co-0r is 7-
Co-Cx
The total thickness was confirmed to be between 600 and 2,600 people.
尚スパッタリング法に対比して製膜速度は２６〜８０倍
の範囲で同様の結果になることを実施確認した。It has been experimentally confirmed that similar results can be obtained when the film forming rate is 26 to 80 times faster than that of the sputtering method.
発明の効果
以上のように本発明によれば、等方的で優れたＣ／Ｎの
磁気記録媒体を高速で得られるといったすぐれた効果が
ある。Effects of the Invention As described above, according to the present invention, there is an excellent effect that a magnetic recording medium that is isotropic and has an excellent C/N can be obtained at high speed.
第１図は本発明により製造される磁気記録媒体の拡大断
面図、第２図は本発明を実施するのに用いた蒸着装置の
要部断面図である。
１．６・・・・・・高分子フィルム、２・・・・・・ク
ラスターイオンビーム蒸着層、３・・・・・・強磁性金
属薄膜、９・・・・・・クラスター蒸発源容器、１８・
・・・・・電子ビーム蒸発源容器。FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium manufactured according to the present invention, and FIG. 2 is a cross-sectional view of essential parts of a vapor deposition apparatus used to carry out the present invention. 1.6...Polymer film, 2...Cluster ion beam evaporation layer, 3...Ferromagnetic metal thin film, 9...Cluster evaporation source container, 18・
...Electron beam evaporation source container.
Claims (1)
ム蒸着を行った後、垂直に近い成分で電子ビーム蒸着し
て磁気記録層を形成することを特徴とする磁気記録媒体
の製造方法。A method for manufacturing a magnetic recording medium, which comprises performing cluster ion beam evaporation on a polymer film with oblique incidence, and then performing electron beam evaporation with a nearly perpendicular component to form a magnetic recording layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17331888A JPH0223530A (en) | 1988-07-12 | 1988-07-12 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17331888A JPH0223530A (en) | 1988-07-12 | 1988-07-12 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0223530A true JPH0223530A (en) | 1990-01-25 |
Family
ID=15958213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17331888A Pending JPH0223530A (en) | 1988-07-12 | 1988-07-12 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0223530A (en) |
-
1988
- 1988-07-12 JP JP17331888A patent/JPH0223530A/en active Pending
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