JPH02118602A - Production of color filter - Google Patents
Production of color filterInfo
- Publication number
- JPH02118602A JPH02118602A JP63273492A JP27349288A JPH02118602A JP H02118602 A JPH02118602 A JP H02118602A JP 63273492 A JP63273492 A JP 63273492A JP 27349288 A JP27349288 A JP 27349288A JP H02118602 A JPH02118602 A JP H02118602A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- pattern
- color filter
- printing plate
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000011347 resin Substances 0.000 claims abstract description 55
- 229920005989 resin Polymers 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000001055 blue pigment Substances 0.000 claims abstract description 3
- 239000001056 green pigment Substances 0.000 claims abstract description 3
- 239000001054 red pigment Substances 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 12
- 239000000049 pigment Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000003086 colorant Substances 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 238000000576 coating method Methods 0.000 abstract description 11
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000004043 dyeing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- CMMUKUYEPRGBFB-UHFFFAOYSA-L dichromic acid Chemical compound O[Cr](=O)(=O)O[Cr](O)(=O)=O CMMUKUYEPRGBFB-UHFFFAOYSA-L 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、カラーテレビ、カラーカメラ及びカラー表示
デバイス、カラー撮像デバイス等に使用されるカラーフ
ィルタの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing color filters used in color televisions, color cameras, color display devices, color imaging devices, and the like.
従来の技術
一般に、カラーテレビ、カラーカメラ等に使用されるカ
ラーフィルタは、赤、緑、青等の三色よりなる画素がス
トライブ状またはマトリックス状に定められたピッチで
配列されており、特にコントラストを高めるために三色
の画素の間に、黒色の細いストライブまたは、グリッド
（直交格子）を用いている。2. Description of the Related Art In general, color filters used in color televisions, color cameras, etc. have pixels of three colors such as red, green, and blue arranged at a predetermined pitch in a stripe or matrix pattern. Thin black stripes or grids (orthogonal grids) are used between the three color pixels to increase contrast.
従来のカラーフィルタの製法としては、ガラス基板上に
光硬化性樹脂をスピンナーにより塗布し、乾燥させた後
、この試料を転写したいパターンで描画したマスクを用
いて露光し、所要のパターン部（画素）を光硬化させて
硬化樹脂部を得、後に染料によって着色するか、この染
色工程に付帯する不良回避もしくはコスト低減の為、予
め染料または顔料を前記光硬化性樹脂に添加した材料を
用いている。ここで黒、赤、緑、青等の各色のバターニ
ング製膜は前記工程を複数回くりかえしてカラーフィル
タを形成している（特開昭５７−１６４０７号公報参照
）。The conventional manufacturing method for color filters is to apply a photocurable resin onto a glass substrate using a spinner, dry it, and then expose the sample to light using a mask drawn with the pattern you want to transfer. ) to obtain a cured resin part, which is then colored with a dye, or by using a material in which a dye or pigment is added to the photocurable resin in advance in order to avoid defects or reduce costs associated with this dyeing process. There is. Here, to form a color filter for each color such as black, red, green, blue, etc., the above steps are repeated several times to form a color filter (see Japanese Patent Laid-Open No. 16407/1983).
発明が解決しようとする課題
しかしながら従来の方法では、黒色遮光部と画素が重な
り、突起を生じて平坦性を失い、この結果このＬに製膜
される透明電極膜を断線させたり、液晶デバイスに使用
される場合、対向する電極を短絡し表示上の欠陥を生ぜ
せしめていた。Problems to be Solved by the Invention However, in the conventional method, the black light-shielding part and the pixel overlap, creating protrusions and losing flatness.As a result, the transparent electrode film formed on this L may be disconnected, or the liquid crystal device may be damaged. When used, opposing electrodes were short-circuited, causing display defects.
これは、既に形成されたパターン（例えは黒色遮光部）
にざらに樹脂をスピンナーにより塗布して次のパターン
（例えば、赤色画素部）を形成する際に、塗布時、数形
成パターンが障壁となり樹脂の流動が阻害されて新たに
形成したいパターンの周囲の膜厚が不均一になり、特に
樹脂流動方向（回転中心より半径方向）に対して数形成
パターン前部の膜厚は厚くなることに原因があることが
わかった。また、フォトマスクを用いて露光する際、光
の回折により黒色遮光部上の樹脂まで露光光が到達し、
遮光部上に樹脂が光硬化されて残存することも原因とな
っていることも判明した。This is a pattern that has already been formed (for example, a black light shielding part).
When applying resin with a spinner to form the next pattern (for example, a red pixel area), the several formed patterns act as a barrier during application, impeding the flow of the resin and causing the surrounding area of the new pattern to be formed. It was found that the cause of the non-uniformity of the film thickness was that the film thickness was particularly thick at the front of the several patterns in the direction of resin flow (radial direction from the center of rotation). Also, when exposing using a photomask, the exposure light reaches the resin on the black light-shielding part due to light diffraction.
It was also found that the cause of the problem was that the resin was photocured and remained on the light shielding part.
本発明はかかる点に鑑み、欠陥のない安定なパターンを
有するカラーフィルタを容易に製造するカラーフィルタ
方法を提供することを目的とする。In view of the above, an object of the present invention is to provide a color filter method for easily manufacturing a color filter having a stable pattern without defects.
課題を解決するための手段
本発明は、上記課題を解決するため、透明な基材の上に
、遮光パターンを形成し、同試料に赤色、緑色、青色の
うち一種の顔料を分散させた光硬化性樹脂を印刷版を用
いて他色の画素パターン形成部に前記樹脂を付着させる
ことなく転写し、乾燥した後、非塗布面より露光し、現
像、硬化して、画素パターンを形成するものである。Means for Solving the Problems In order to solve the above problems, the present invention forms a light-shielding pattern on a transparent base material, and uses a light-shielding pattern in which one of red, green, and blue pigments is dispersed in the same sample. A method in which a curable resin is transferred to a pixel pattern forming area of another color using a printing plate without adhering the resin, and after drying, the non-coated side is exposed to light, developed, and cured to form a pixel pattern. It is.
作用
本発明の上記方法によれば、印刷版を用いて光硬化性樹
脂を転写するので、樹脂の基材の平面方向の流動ムラに
起因する塗布膜厚のムラがなくなり、平坦性のすぐれた
被膜を形成でき、かつ非塗布面より露光することで、既
に形成された遮光部に倣って、選択的に塗布された部位
だけが、露光されるので、突起のない高精度のカラーフ
ィルタを製造し得る。Effect: According to the above method of the present invention, since the photocurable resin is transferred using a printing plate, there is no unevenness in the coating film thickness caused by uneven flow in the plane direction of the resin base material, resulting in excellent flatness. By forming a film and exposing from the non-coated surface, only the selectively coated areas are exposed following the already formed light-shielding areas, producing high-precision color filters without protrusions. It is possible.
実施例 以下、本発明の実施例を添付図面に基づいて説明する。Example Embodiments of the present invention will be described below with reference to the accompanying drawings.
第１図〜第６図は本発明の製造方法の工程図であり、第
７図は本発明によるカラーフィルタの断面構造図である
。1 to 6 are process diagrams of the manufacturing method of the present invention, and FIG. 7 is a cross-sectional structural diagram of a color filter according to the present invention.
第１図（ａ、 ）は塗布工程Ａであり、インキつけロー
ラ（図示せず）または、インキつけ台（図示せず）によ
り黒色遮光パターン形成用の光硬化性樹脂ｌを、版胴２
に装着した印刷版３上に着肉した後、この印刷版３をガ
ラス等の透明な材料よりなる基材４に押し付け、光硬化
性樹脂１を基材４の上に転移させることにより、第１図
（ｂ）に示すように光硬化性樹脂１を塗布する。樹脂は
、印刷版から基材に転移する際、***現象により樹脂表
面が乱れるが、樹脂のレベリング作用により平滑性が保
たれる。一方、従来のスピンナー塗布では、回転中に樹
脂の溶剤が蒸発し、樹脂の粘度が上昇しレヘリングでき
ない。また、スピンナー塗布では、滴下り、た樹脂の大
部分（約９５％）が飛散して無効になるのに比して、本
性では飛散することなく、かつパターン形成部のみ塗布
することが可能であり、樹脂の利用率は約１０倍に向上
できる。FIG. 1(a,) shows the coating process A, in which a photocurable resin l for forming a black light-shielding pattern is applied to the plate cylinder 2 using an inking roller (not shown) or an inking table (not shown).
After ink is deposited on the printing plate 3 mounted on the plate, the printing plate 3 is pressed onto a base material 4 made of a transparent material such as glass, and the photocurable resin 1 is transferred onto the base material 4. 1. A photocurable resin 1 is applied as shown in FIG. 1(b). When the resin is transferred from the printing plate to the substrate, the surface of the resin is disturbed due to a splitting phenomenon, but smoothness is maintained due to the leveling effect of the resin. On the other hand, in conventional spinner coating, the solvent in the resin evaporates during rotation, increasing the viscosity of the resin and preventing leveling. In addition, with spinner coating, most of the dripping resin (approximately 95%) scatters and becomes ineffective, but in contrast, it is possible to coat only the pattern forming area without scattering. Yes, the resin utilization rate can be improved about 10 times.
塗布後、プリベーク工程Ｂでポットプレート等により試
料５を加熱して溶剤を蒸発させ乾燥させ、第２図（ａ）
の露光工程Ｃで所望のパターンが描画されたマスク６を
介して、高圧水銀ランプより出射され光学系により均一
露光パワーで平行化された紫外光線で照射しマスクのパ
ターンを光硬化性樹脂ｌに焼きつける。ついで、現像工
程りで、非照射部の樹脂をエツチングして剥離させ、続
いて硬化工程Ｅで残っている光照射部の樹脂を熱的に硬
化させ、第２図（ｂ）に示すように１番目のパターンで
ある黒色遮光パターンを形成した試料７を作成する。After coating, sample 5 is heated in a pre-bake step B using a pot plate or the like to evaporate the solvent and dry it, as shown in Fig. 2(a).
In the exposure step C, the mask 6 on which the desired pattern has been drawn is irradiated with ultraviolet light emitted from a high-pressure mercury lamp and collimated by an optical system with uniform exposure power, thereby converting the pattern of the mask into the photocurable resin l. Burn it. Next, in a developing step, the resin in the non-irradiated areas is etched and peeled off, and then in a curing step E, the remaining resin in the light-irradiated areas is thermally cured, as shown in FIG. 2(b). Sample 7 is prepared in which a black light-shielding pattern, which is the first pattern, is formed.
ここで、第３図〜第４図に示すように遮光パターンを形
成してもよい。すなわち、第３図（ａ）の塗布工程Ａ′
で、版胴８に装着された印刷版９の転写部すなわち樹脂
受容部パターンを、カラーフィルタパターンに従って配
列し、かつ基準パターンの大きさ（遮光線幅、または画
素寸法）に見合って受容部の大きさを決めれば、印刷版
上の光硬化性樹脂１０は受容部パターンに従って着肉し
、基材４上にカラーフィルタパターンに従って転写され
、第３図（１））に示すように光硬化性樹脂１０が塗布
された試料１１が作成できる。従って、必要な箇所のみ
樹脂を着肉させればよいので、この使用率は先の実施例
よりさらに向上する。ここで、試料１１上の転写された
樹脂の大きさ（例えば、幅）は、カラーフィルタ基準パ
ターンの大きさに比して、約１０μｍ転写時の流動によ
り広がり、また平担な表面（例えば、平均膜厚±０．１
μｍ以内）は転写エツジよりさらに約１５μｍ入った領
域である。従って、平坦なパターンを得るためには印刷
版９の樹脂受容部の大きさをカラーフィルタのパターン
の大きさより大きくすることが必要である。次いで、プ
リベーク工程Ｂを経て、第４図（ａ）に示すように、こ
の試料１１をマスク６を介して露光し、先と同様に現像
工程り、硬化工程Ｅを経て、第４図（ｂ）の黒色遮光パ
ターンを有した試料１２を作成する。Here, a light shielding pattern may be formed as shown in FIGS. 3 and 4. That is, the coating step A' in FIG. 3(a)
Then, the transfer portions, that is, the resin receiving portion patterns of the printing plate 9 mounted on the plate cylinder 8 are arranged according to the color filter pattern, and the receiving portions are arranged according to the size of the reference pattern (shading line width or pixel size). Once the size is determined, the photocurable resin 10 on the printing plate is inked according to the receptor pattern, transferred onto the base material 4 according to the color filter pattern, and the photocurable resin 10 is deposited on the printing plate according to the color filter pattern, as shown in FIG. 3 (1)). A sample 11 coated with resin 10 can be created. Therefore, since it is only necessary to apply the resin to the necessary locations, the usage rate is further improved compared to the previous embodiment. Here, the size (e.g., width) of the transferred resin on the sample 11 spreads by about 10 μm compared to the size of the color filter reference pattern due to the flow during transfer, and the flat surface (e.g., Average film thickness ±0.1
(within .mu.m) is a region extending approximately 15 .mu.m further from the transfer edge. Therefore, in order to obtain a flat pattern, it is necessary to make the size of the resin receiving portion of the printing plate 9 larger than the size of the color filter pattern. Next, through a pre-baking process B, this sample 11 is exposed through a mask 6 as shown in FIG. ) A sample 12 having a black light-shielding pattern is prepared.
ここで、遮光パターンをクロム蒸着膜をレジストを使用
してフォトリソグラフィーによりバターニングし、エツ
チングして形成してもよい。Here, the light-shielding pattern may be formed by patterning a chromium-deposited film by photolithography using a resist and then etching it.
第２以降のパターン形成は、第５図（ａ）の塗布工程へ
“において、版胴１３に装着された印刷版１４の転写部
すなわち樹脂受容部パターンを、カラーフィルタパター
ンに従って配列し、かつ樹脂受容部の大きさを、転移後
の樹脂のエツジを第１のパターンである遮光線パターン
１５が形成された試料１６の遮光線幅ａの２倍に画素幅
すを加えた領域に流動しないようにし、隣接する非パタ
ーン透明領域に滲ませずに、第５図（ｂ）に示すように
樹脂１７を塗布した試料１８を作成する。次いでプリベ
ーク工程Ｂを経て、第６図（ａ）の露光工程Ｃ′でマス
クを介さず、紫外光線で非塗布面より照射する。この時
、パターン形成領域には、基材４を透過して感光性樹脂
に照射されるので、この部位は光硬化し、遮光線上の樹
脂は感光波長域での遮光パターン部位の吸収のため、こ
の上の樹脂に照射される露光量は小さく光硬化されず、
その他の部位は、樹脂が流動付着していないので、以降
の現像工程り、硬化工程Ｅを経て、第６図（ｂ）に示す
ように、精密なアライメントを必要とせず、かつ露光時
に起こる回折による重なりのない試料１９を作成できる
。第３、第４のパターン形成も前記同様の工程を繰り返
して第７図に示すように、パターン間の重なりの無いカ
ラーフィルタ２０を作成できる。In the second and subsequent pattern formations, in the coating process shown in FIG. The size of the receiving area is adjusted so that the edge of the resin after transfer does not flow into an area that is twice the shading line width a of the sample 16 on which the shading line pattern 15, which is the first pattern, is formed, plus the pixel width. A sample 18 is prepared by coating the resin 17 as shown in FIG. 5(b) without bleeding into the adjacent non-patterned transparent area.Then, the sample 18 is coated with the resin 17 as shown in FIG. In step C', the non-coated surface is irradiated with ultraviolet light without using a mask.At this time, the pattern forming area is irradiated onto the photosensitive resin through the base material 4, so this area is not photocured. , because the resin on the light-shielding line absorbs the light-shielding pattern part in the sensitive wavelength range, the amount of exposure irradiated to the resin on this line is small and it is not photocured.
Since the resin does not flow and adhere to other parts, the resin can be processed through the subsequent development process and curing process E without requiring precise alignment and due to the diffraction that occurs during exposure, as shown in Figure 6(b). A sample 19 without overlapping can be created. By repeating the same steps as described above for forming the third and fourth patterns, it is possible to create a color filter 20 with no overlap between patterns, as shown in FIG.
上述した光硬化性樹脂としては、感光性樹脂に顔料を分
散させたものが、パターン形成後染色工程が不要である
点で望ましく、アクリロイド系感光樹脂より成る、例え
ば富士ハントエレクトロニクステクノロジー社製の顔料
充填レジスト（ｆｌＩｉ標名カラーモザイク）を使用す
る。唯、透明のフォトレジスト（例えば、ゼラチンに光
開始剤として、重クロム酸）を使用して露光後、染料に
よって着色する、いわゆる染色法によるカラーフィルタ
に対しても、本発明が有効な手段であることは同様であ
る。As the above-mentioned photocurable resin, it is preferable to use a photosensitive resin in which a pigment is dispersed since a dyeing process is not required after pattern formation. A filled resist (flIi color mosaic) is used. However, the present invention is also an effective means for color filters produced by the so-called dyeing method, in which a transparent photoresist (e.g. gelatin with dichromic acid as a photoinitiator) is exposed and colored with a dye. Some things are the same.
発明の効果
以上述べたところから明らかなように、本発明は、印刷
版を使用して、転移に基づく光硬化性樹脂の塗布を行な
い、樹脂流動によりレヘリングさせるので、塗布膜厚が
平坦な被膜を形成でき、かつ印刷版により樹脂を選択的
に塗布し塗布領域を制御するので、既形成パターンを露
光マスクの代わりに使用でき、解像度の高い、突起のな
い安定なカラーフィルタを提供できる。また、樹脂材料
の使用率が高くなり、安価なカラーフィルタを提供でき
る。Effects of the Invention As is clear from the above description, the present invention uses a printing plate to apply a photocurable resin based on transfer, and leveling is achieved by resin flow, so that a film with a flat coating thickness can be obtained. Since the resin is selectively applied using a printing plate and the application area is controlled, a pre-formed pattern can be used in place of an exposure mask, and a stable color filter with high resolution and no protrusions can be provided. Moreover, the usage rate of resin material is increased, and an inexpensive color filter can be provided.
第１図〜第６図は本発明の一実施例のカラーフ１．１０
．１７・・・光硬化性樹脂、２．９．１３・・・印刷版
、４・・・基材、６・・・マスク、２ｏ・・・カラーフ
ィルタ。
代理人の氏名 弁理士 粟野重孝 はか１名第
図
（ａ）
（ｂ）
第
図
（ａ）
（ｂ）
第
図
（ａ）
（ｂ）
第
図
（ａ）
紫 タト光線
（ｂ）
第
図
（ａ）
（ｂ）
第
図
（ａ）
紫 シト光 線
（ｂ）
第
図Figures 1 to 6 show a collar 1.10 of an embodiment of the present invention.
．． 17... Photocurable resin, 2.9.13... Printing plate, 4... Base material, 6... Mask, 2o... Color filter. Name of agent Patent attorney Shigetaka Awano (1 person) Figure (a) (b) Figure (a) (b) Figure (a) (b) Figure (a) Purple Tato Ray (b) Figure ( a) (b) Diagram (a) Violet light ray (b) Diagram
Claims (2)
料に赤色、緑色、青色のうち一種の顔料を分散させた光
硬化性樹脂を印刷版を用いて他色の画素パターン形成部
に前記樹脂を付着させることなく転写し、乾燥した後、
非塗布面より露光し、現像、硬化させて、画素パターン
を形成することを特徴とするカラーフィルタの製造方法
。(1) Form a light-shielding pattern on a transparent substrate, and use a printing plate to form pixel patterns in other colors using a photocurable resin in which one of red, green, and blue pigments is dispersed in the same sample. After transferring the resin without adhering to the part and drying,
A method for manufacturing a color filter, which comprises exposing the non-coated surface to light, developing and curing it to form a pixel pattern.
用いて、透明な基材の上に転写し、乾燥した後、フォト
マスクを用いて露光し、現像、硬化して、遮光パターン
を形成することを特徴とする請求項１記載のカラーフィ
ルタの製造方法。(2) Using a printing plate, transfer the photocurable resin in which black pigment is dispersed onto a transparent base material, dry it, expose it to light using a photomask, develop it, harden it, and block it from light. 2. The method of manufacturing a color filter according to claim 1, further comprising forming a pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63273492A JPH02118602A (en) | 1988-10-28 | 1988-10-28 | Production of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63273492A JPH02118602A (en) | 1988-10-28 | 1988-10-28 | Production of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118602A true JPH02118602A (en) | 1990-05-02 |
Family
ID=17528658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63273492A Pending JPH02118602A (en) | 1988-10-28 | 1988-10-28 | Production of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118602A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05341114A (en) * | 1992-06-09 | 1993-12-24 | Fuji Photo Film Co Ltd | Manufacture of color filter |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59226305A (en) * | 1983-06-07 | 1984-12-19 | Matsushita Electric Ind Co Ltd | Production of optical filter |
| JPS62106407A (en) * | 1985-11-01 | 1987-05-16 | Matsushita Electric Ind Co Ltd | Production of color filter for liquid crystal display |
| JPS63249802A (en) * | 1987-04-07 | 1988-10-17 | Toshiba Corp | Production of color filter |
-
1988
- 1988-10-28 JP JP63273492A patent/JPH02118602A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59226305A (en) * | 1983-06-07 | 1984-12-19 | Matsushita Electric Ind Co Ltd | Production of optical filter |
| JPS62106407A (en) * | 1985-11-01 | 1987-05-16 | Matsushita Electric Ind Co Ltd | Production of color filter for liquid crystal display |
| JPS63249802A (en) * | 1987-04-07 | 1988-10-17 | Toshiba Corp | Production of color filter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05341114A (en) * | 1992-06-09 | 1993-12-24 | Fuji Photo Film Co Ltd | Manufacture of color filter |
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