JPH02114796U - - Google Patents
Info
- Publication number
- JPH02114796U JPH02114796U JP2246889U JP2246889U JPH02114796U JP H02114796 U JPH02114796 U JP H02114796U JP 2246889 U JP2246889 U JP 2246889U JP 2246889 U JP2246889 U JP 2246889U JP H02114796 U JPH02114796 U JP H02114796U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- casing
- screw
- wall surface
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わる第１の実施例のポンプ
の一部切欠正面図、第２図ａはそのロータの一部
断面斜視図、第２図ｂは本考案に係る第２の実施
例のロータの一部断面図、第３図は従来例の一部
切欠正面図及び第４図はそのロータの一部断面斜
視図である。
１…ケーシング、２…ステータ翼、３…ロータ
、３ａ…外壁面、４…ロータ翼、５…ネジ、ａ…
吸気口、ｂ…排気口。
Fig. 1 is a partially cutaway front view of a pump according to the first embodiment of the present invention, Fig. 2a is a partially sectional perspective view of its rotor, and Fig. 2b is a second embodiment of the pump according to the present invention FIG. 3 is a partially cutaway front view of a conventional example, and FIG. 4 is a partially cutaway perspective view of the rotor. DESCRIPTION OF SYMBOLS 1...Casing, 2...Stator blade, 3...Rotor, 3a...Outer wall surface, 4...Rotor blade, 5...Screw, a...
Intake port, b...exhaust port.
Claims (1)
翼と、上記ケーシングの内部に配置されたロータ
の外壁面に取付けられたロータ翼とをロータの軸
方向に交互に配置し、上記ロータ翼を回転させて
ロータ軸の一方向から吸気し他方向へ排気すると
ともに、上記ロータの外壁面もしくはケーシング
内の固定側にネジを設け、ロータの回転によつて
排気するターボ分子ポンプにおいて、 上記ネジの突状部の断面形状は台形状に形成さ
れていることを特徴とするターボ分子ポンプ。 ２ 請求項１記載のターボ分子ポンプにおいて、 上記ネジの突状部の縦断面形状は正弦波状に形
成されていることを特徴とするターボ分子ポンプ
。[Claims for Utility Model Registration] 1. Stator blades attached to the inner wall surface of the casing and rotor blades attached to the outer wall surface of the rotor arranged inside the casing are arranged alternately in the axial direction of the rotor. , a turbo-molecular pump that rotates the rotor blades to take in air from one direction of the rotor shaft and exhaust air to the other direction, and a screw is provided on the outer wall surface of the rotor or the fixed side in the casing, and exhaust is exhausted by the rotation of the rotor. In the turbo molecular pump, the cross-sectional shape of the protruding portion of the screw is formed into a trapezoidal shape. 2. The turbo-molecular pump according to claim 1, wherein the longitudinal cross-sectional shape of the protruding portion of the screw is formed in a sinusoidal shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2246889U JPH02114796U (en) | 1989-02-28 | 1989-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2246889U JPH02114796U (en) | 1989-02-28 | 1989-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02114796U true JPH02114796U (en) | 1990-09-13 |
Family
ID=31240620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2246889U Pending JPH02114796U (en) | 1989-02-28 | 1989-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02114796U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000011555A (en) * | 1998-07-07 | 2000-02-25 | 다카키도시요시 | Vacuum pump and vacuum apparatus |
| JP2016166594A (en) * | 2015-03-10 | 2016-09-15 | 株式会社島津製作所 | Vacuum pump |
| JP2021080917A (en) * | 2019-11-19 | 2021-05-27 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump and method of manufacturing the same |
-
1989
- 1989-02-28 JP JP2246889U patent/JPH02114796U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000011555A (en) * | 1998-07-07 | 2000-02-25 | 다카키도시요시 | Vacuum pump and vacuum apparatus |
| JP2016166594A (en) * | 2015-03-10 | 2016-09-15 | 株式会社島津製作所 | Vacuum pump |
| CN105971905A (en) * | 2015-03-10 | 2016-09-28 | 株式会社岛津制作所 | Vacuum pump |
| JP2021080917A (en) * | 2019-11-19 | 2021-05-27 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump and method of manufacturing the same |