JPH0323696U - - Google Patents
Info
- Publication number
- JPH0323696U JPH0323696U JP8419489U JP8419489U JPH0323696U JP H0323696 U JPH0323696 U JP H0323696U JP 8419489 U JP8419489 U JP 8419489U JP 8419489 U JP8419489 U JP 8419489U JP H0323696 U JPH0323696 U JP H0323696U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- exhaust port
- vacuum
- sub
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Reciprocating Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図ないし第６図は本考案による排気装置の
第１実施例を示す図であり、第１図は全体構成図
、第２図はターボ分子ポンプの縦断面図、第３図
はターボ分子ポンプのベースの底面図、第４図は
ネジ溝式真空ポンプの縦断面図、第５図はそのロ
ータの側面図、第６図はダイヤフラムポンプの部
分断面図である。第７図ないし第９図は本考案の
第２実施例を示す図であり、第７図は全体構成図
、第８図はネジ溝式真空ポンプの縦断面図、第９
図はダイヤフラムポンプの部分断面図である。第
１０図ないし第１３図は従来の排気装置に用いら
れるターボ分子ポンプを示す図であり、第１０図
はターボ分子ポンプの縦断面図、第１１図はター
ボ分子ポンプのベースの底面図、第１２図は全体
構成図、第１３図は第１０図のターボ分子ポンプ
の底面に連結される他のターボ分子ポンプの縦断
面図である。
１０……ターボ分子ポンプ（主真空ポンプ）、
１１……真空チヤンバ、１２ｄ……吸気口、１３
……ベース、１３ａ，４１ｂ……排気口、２０…
…ステータ翼、２３……ロータ翼、３１，４８…
…ロータ軸、４０……ネジ溝式真空ポンプ（副真
空ポンプ）、４５ａ……ネジ溝、５１……半径方
向電磁石、５２……軸方向電磁石、５７……ダイ
ヤフラムポンプ（粗引き真空ポンプ）、５７ａ…
…吸気口、５７ｂ……ポンプ室、５７ｃ……排気
口、６０……ダイヤフラム。
1 to 6 are diagrams showing a first embodiment of the exhaust system according to the present invention, in which FIG. 1 is an overall configuration diagram, FIG. 2 is a vertical cross-sectional view of a turbo-molecular pump, and FIG. 3 is a turbo-molecular pump. 4 is a longitudinal sectional view of the threaded vacuum pump, FIG. 5 is a side view of its rotor, and FIG. 6 is a partial sectional view of the diaphragm pump. 7 to 9 are diagrams showing a second embodiment of the present invention, in which FIG. 7 is an overall configuration diagram, FIG. 8 is a vertical cross-sectional view of a screw groove type vacuum pump, and FIG.
The figure is a partial sectional view of a diaphragm pump. 10 to 13 are diagrams showing a turbo-molecular pump used in a conventional exhaust system, in which FIG. 10 is a vertical sectional view of the turbo-molecular pump, FIG. 11 is a bottom view of the base of the turbo-molecular pump, and FIG. FIG. 12 is an overall configuration diagram, and FIG. 13 is a longitudinal sectional view of another turbo-molecular pump connected to the bottom of the turbo-molecular pump of FIG. 10. 10...turbo molecular pump (main vacuum pump),
11... Vacuum chamber, 12d... Intake port, 13
...Base, 13a, 41b...Exhaust port, 20...
...Stator blade, 23...Rotor blade, 31, 48...
... Rotor shaft, 40 ... Thread groove type vacuum pump (sub-vacuum pump), 45a ... Thread groove, 51 ... Radial direction electromagnet, 52 ... Axial direction electromagnet, 57 ... Diaphragm pump (roughing vacuum pump), 57a...
...Intake port, 57b...Pump chamber, 57c...Exhaust port, 60...Diaphragm.
Claims (1)
成され他端部に設けられたベースの底面には排気
口が形成され互いの相対回転により前記真空チヤ
ンバ内を超高真空にする複数の翼を有し回転部に
非油性の軸受を用いた主真空ポンプと、前記排気
口に連通される吸気口が形成された一端部が前記
主真空ポンプの他端部に同一軸線上に直接連結さ
れ回転により前記主真空ポンプの排気口部を中真
空にする回転部に非油性の軸受を用いた副真空ポ
ンプと、前記副真空ポンプの排気口に連結されこ
の排気口部を低真空にし通気経路に油性成分が存
在しない粗引き真空ポンプとを備えたことを特徴
とする排気装置。 An intake port communicating with the inside of the vacuum chamber is formed at one end, and an exhaust port is formed at the bottom of the base provided at the other end, and a plurality of blades are used to make the inside of the vacuum chamber an ultra-high vacuum by mutual relative rotation. The main vacuum pump has a rotating part that uses a non-oil bearing, and one end in which an intake port communicating with the exhaust port is formed is directly connected to the other end of the main vacuum pump on the same axis and rotates. A sub-vacuum pump is connected to the exhaust port of the sub-vacuum pump and is connected to the exhaust port of the sub-vacuum pump to make the exhaust port part a low vacuum and is used as a ventilation path. An exhaust device characterized by being equipped with a roughing vacuum pump that does not contain oily components.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8419489U JPH0323696U (en) | 1989-07-17 | 1989-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8419489U JPH0323696U (en) | 1989-07-17 | 1989-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323696U true JPH0323696U (en) | 1991-03-12 |
Family
ID=31632478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8419489U Pending JPH0323696U (en) | 1989-07-17 | 1989-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323696U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007019757A (en) * | 2005-07-06 | 2007-01-25 | Furukawa Co Ltd | Pedestal for camera |
| JP2008505826A (en) * | 2004-07-12 | 2008-02-28 | ニール、ジミー ロス | Devices and systems for surveillance, search and / or rescue |
| JP2009141831A (en) * | 2007-12-10 | 2009-06-25 | Sumitomo Mitsui Construction Co Ltd | Photographing apparatus |
-
1989
- 1989-07-17 JP JP8419489U patent/JPH0323696U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008505826A (en) * | 2004-07-12 | 2008-02-28 | ニール、ジミー ロス | Devices and systems for surveillance, search and / or rescue |
| JP2007019757A (en) * | 2005-07-06 | 2007-01-25 | Furukawa Co Ltd | Pedestal for camera |
| JP4583262B2 (en) * | 2005-07-06 | 2010-11-17 | 日本放送協会 | Camera pedestal |
| JP2009141831A (en) * | 2007-12-10 | 2009-06-25 | Sumitomo Mitsui Construction Co Ltd | Photographing apparatus |
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