JPH01315044A - Substrate for information recording medium and master disk for production thereof - Google Patents
Substrate for information recording medium and master disk for production thereofInfo
- Publication number
- JPH01315044A JPH01315044A JP63144661A JP14466188A JPH01315044A JP H01315044 A JPH01315044 A JP H01315044A JP 63144661 A JP63144661 A JP 63144661A JP 14466188 A JP14466188 A JP 14466188A JP H01315044 A JPH01315044 A JP H01315044A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- center
- information recording
- width
- pits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000011347 resin Substances 0.000 abstract description 17
- 229920005989 resin Polymers 0.000 abstract description 17
- 238000000465 moulding Methods 0.000 abstract description 8
- 238000007747 plating Methods 0.000 abstract description 6
- 239000007822 coupling agent Substances 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 4
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 4
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 239000002184 metal Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は情報記録媒体用基板（以下、基板と記す）およ
びそれを製造するための成形用スタンパ−を作成するた
めの原盤に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a substrate for an information recording medium (hereinafter referred to as a substrate) and a master disk for producing a molding stamper for manufacturing the same. .
［従来の技術］ 従来、情報記録媒体用基板製造用原盤（以下。[Conventional technology] Conventionally, master discs for manufacturing substrates for information recording media (hereinafter referred to as "master discs") were used.
原盤と記す）は各種のものが知られているが、その原盤
の製造方法の一例を下記に示す。Various types of master discs (hereinafter referred to as master discs) are known, and an example of a method for manufacturing the master discs is shown below.
第５図（ａ）〜（ｅ）は従来の原盤の製造方法を示す工
程図である。同図において、まずガラス板１にカップリ
ング剤２とフオレジスト３を順次塗布する（第５図（ａ
）参照）。FIGS. 5(a) to 5(e) are process diagrams showing a conventional method for manufacturing a master disc. In the figure, first, a coupling agent 2 and a photoresist 3 are sequentially applied to a glass plate 1 (see Fig. 5(a).
)reference).
次いて、マスクを通してレーザー光８で露光した後、現
像する事によりパターンを形成する（第５図（ｂ）参照
）０次に、パターン上にＮｉなとの金属１５ｉ４を設け
る（第５図（Ｃ）参照）、その後、金属膜４の上にＮｉ
メツキ層５を形成する（第５図（ｄ）参照）０次いで、
金属膜４と旧メツキ層５を原盤から剥離することよりス
タンパ−６を得ることができる（第５図（ｅ）参照）、
この製造工程で使用されるレーザー光８は、第７図（ａ
）に示す様なガウス分布を有するレーザー光が用いられ
る。Next, a pattern is formed by exposing the laser beam 8 through a mask and developing it (see FIG. 5(b)).Next, a metal 15i4 such as Ni is provided on the pattern (see FIG. 5(b)). (see C)), then Ni is deposited on the metal film 4.
Form the plating layer 5 (see FIG. 5(d)). Then,
A stamper 6 can be obtained by peeling off the metal film 4 and the old plating layer 5 from the master (see FIG. 5(e)).
The laser beam 8 used in this manufacturing process is shown in FIG.
A laser beam having a Gaussian distribution as shown in ) is used.
［発明が解決しようとする課題］
しかしながら、上記のような方法で得られた原盤のパタ
ーンの断面形状は、原盤に設けられたトラッキングガイ
ド用溝またはアドレスピットを転写する四部の形状が該
凹部の底辺の巾の中心を通る中心線の左右の断面形状か
対称に形成されている。したかって、その原盤から製造
したスタンパ−を用いて成形した基板は、第６図に示す
ように、トラッキングガイド用溝またはアドレスピット
ｌｌの形状か溝またはピットの上辺１２の巾（り。[Problems to be Solved by the Invention] However, in the cross-sectional shape of the pattern on the master obtained by the method described above, the shape of the four parts that transfer the tracking guide grooves or address pits provided on the master is different from that of the recess. The cross-sectional shape is symmetrical to the left and right of the center line passing through the center of the width of the base. Therefore, as shown in FIG. 6, a substrate molded using a stamper manufactured from the master disk has the shape of the tracking guide groove or address pit II or the width of the upper side 12 of the groove or pit.
＋ｆ！＋）の中心を通る中心線の左右の断面形状が対称
に形成され、前記溝またはピットの上辺１２の巾の中心
と底辺１３の巾（ｗ、＋ｗ、）の中心とか一致した形状
に形成されている。+f! The cross-sectional shapes on the left and right sides of the center line passing through the center of the groove or pit are formed symmetrically, and the center of the width of the top side 12 of the groove or pit matches the center of the width (w, +w, ) of the bottom side 13. ing.
そのために、前記原盤を使用してインジェクション成形
などにより、トラッキングガイド用溝またはアドレスピ
ットを有する樹脂基板を作成する場合に、樹脂がスタン
パ−表面を流れる抵抗は大きくなるために樹脂の流れが
悪くなり、樹脂基板の複屈折率を小さくすることが困難
となり、また樹脂の乱流による外観不良などの光学的特
性が悪くなる。For this reason, when a resin substrate with tracking guide grooves or address pits is created by injection molding or the like using the master disk, the resistance to the flow of the resin on the stamper surface increases, resulting in poor flow of the resin. , it becomes difficult to reduce the birefringence of the resin substrate, and optical properties such as poor appearance due to resin turbulence deteriorate.
さらに、樹脂基板の転写性も悪くなるため良好な信号が
得られない欠点かあった。Furthermore, the transferability of the resin substrate also deteriorates, resulting in a disadvantage that good signals cannot be obtained.
本発明は、上記の様な従来の欠点を改善するためになさ
れたものであり、基板の成形時に樹脂の流れがスムーズ
となり、成形不良の少ないしかも複屈折率が小さい等の
光学的特性の優れた基板を得ることがてきる原盤、およ
び該原盤を使用して得られた複屈折率が小さい等の光学
的特性の優れた基板を提供することを目的とするもので
ある。The present invention has been made to improve the above-mentioned conventional drawbacks, and has excellent optical properties such as smooth flow of resin during substrate molding, fewer molding defects, and low birefringence. The object of the present invention is to provide a master disk from which a substrate with a high temperature can be obtained, and a substrate having excellent optical properties such as a low birefringence index obtained using the master disk.
［課題を解決するための手段］
即ち、本発明の第一の発明は、トラッキングガイド用溝
またはアドレスピットを有する情報記録媒体用基板にお
いて、前記トラッキングガイド用溝またはアドレスピッ
トの形状が溝またはピットの上辺の巾の中心を通る中心
線の左右の断面形状が非対称に形成されていることを特
徴とする基板である。[Means for Solving the Problems] That is, the first aspect of the present invention is a substrate for an information recording medium having a tracking guide groove or an address pit, in which the shape of the tracking guide groove or address pit is a groove or a pit. This board is characterized in that the cross-sectional shape on the left and right sides of the center line passing through the center of the width of the upper side of the board is asymmetrically formed.
また、前記基板のトラッキングガイド用溝またはアドレ
スピットの断面形状が台形、Ｖ形またはＵ形で、かつ溝
またはピットの上辺の巾の中心が底辺の巾の中心よりも
内周に位置する形状に形成されていることが好ましい。Further, the cross-sectional shape of the tracking guide groove or address pit of the substrate is trapezoidal, V-shaped, or U-shaped, and the center of the width of the top side of the groove or pit is located inside the center of the width of the bottom side. It is preferable that it is formed.
また、第二の発明は、基板にトラッキングガイド用溝ま
たはアドレスピットを転写するためのスタンパ−を作成
する原盤であって、該原盤に設けられたトラッキングガ
イド用溝またはアドレスピットを転写する四部の形状か
該凹部の底辺の巾の中心を通る中心線の左右の断面形状
か非対称に形成されていることを特徴とする原盤である
。Further, a second invention is a master disk for creating a stamper for transferring tracking guide grooves or address pits onto a substrate, which includes four parts provided on the master disk for transferring tracking guide grooves or address pits. This master disc is characterized by being asymmetric in shape and cross-sectional shape on the left and right sides of a center line passing through the center of the width of the bottom side of the recess.
前記原盤に設けられた凹部の断面形状が台形で、かつ凹
部の底辺の巾の中心が上辺の巾の中心よりも外周に位置
する形状に形成されていることが好ましい。It is preferable that the recess provided in the master has a trapezoidal cross-sectional shape, and that the center of the width of the bottom of the recess is located on the outer circumference of the recess than the center of the width of the upper side.
［作用］
本発明の原盤は、基板にトラッキングガイド用溝または
アドレスピットを転写するために設けられた凹部の形状
が、該凹部の底辺の巾の中心を通る中心線の左右の断面
形状が非対称に形成されているので、基板の転写性かよ
くなり、樹脂基板を得る成形時に、樹脂が前記原盤によ
り作成されたスタンパ−表面を流れる抵抗は小さくなる
ために樹脂の流れがよく、得られる基板の複屈折率を小
さくすることができ、また樹脂の乱流による外観不良を
防止することができる。[Function] In the master disc of the present invention, the shape of the recess provided for transferring the tracking guide groove or address pit to the substrate is asymmetrical in cross-sectional shape on the left and right sides of the center line passing through the center of the width of the bottom of the recess. This improves the transferability of the substrate, and during molding to obtain a resin substrate, the resistance that the resin flows on the stamper surface created by the master is small, so the resin flows well and the resulting substrate is The birefringence of the resin can be reduced, and poor appearance due to resin turbulence can be prevented.
［実施例］
次に、図面に示す実施例に基づき本発明をさらに具体的
に説明する。[Example] Next, the present invention will be described in more detail based on an example shown in the drawings.
実施例１
第１図は本発明の基板の一例を示す部分説明図、第２図
は本発明の原盤の一例を示す部分説明図、第４図（ａ）
〜（ｅ）はスタンパ−の製造方法を示す工程図である。Example 1 FIG. 1 is a partial explanatory diagram showing an example of the substrate of the present invention, FIG. 2 is a partial explanatory diagram showing an example of the master disc of the present invention, and FIG. 4(a)
-(e) are process diagrams showing a method for manufacturing a stamper.
第４図において、先ず、厚さ３〜１０ｍ５のガラス板ｌ
上に、ＨＭＤＳ（ヘキスト■製）のようなカップリング
剤（密着剤）２をコートした後、その上にフォトレジス
ト（ヘキストＡＺ−１：１５０、ヘキスト■製）を０．
１〜０．２μ■の厚さに塗布する（第４図（ａ）参照）
。In Fig. 4, first, a glass plate l with a thickness of 3 to 10 m5 is shown.
After coating a coupling agent (adhesive agent) 2 such as HMDS (manufactured by Hoechst ■) on top, a photoresist (Hoechst AZ-1:150, manufactured by Hoechst ■) was coated on top.
Apply to a thickness of 1 to 0.2μ (see Figure 4 (a))
.
次いて、マスクを通して第７図（ｂ）に示すようなエネ
ルギー分布をもったレーザー光８で露光した後、現像す
る事によりパターンを形成する（第４図（ｂ）参照）０
次に、パターン上にＮｉなどの金属膜４を設ける（第４
図（Ｃ）参照）、その後、金属膜４の１にＮｉメツキ層
５を形成する（第４図（ｄ）参照）９次いで、金属膜４
とＮｉメツキ層５を原盤１０から剥離することよりスタ
ンパ−６を得ることができる（第４図（ｅ）参照）。Next, a pattern is formed by exposing the laser beam 8 through a mask with an energy distribution as shown in FIG. 7(b) and developing it (see FIG. 4(b)).
Next, a metal film 4 such as Ni is provided on the pattern (fourth
(see FIG. 4(C)), then a Ni plating layer 5 is formed on the metal film 4 (see FIG. 4(d)).
By peeling off the Ni plating layer 5 from the master 10, a stamper 6 can be obtained (see FIG. 4(e)).
上記の様にして得られた原ｆｉｌＧの形状は、第２図に
示す様に、原盤ｌＯに設けられた凹部１４の断面形状が
台形で、かつ該凹部１４の底辺１コの巾（ｗ。As shown in FIG. 2, the shape of the original filG obtained as described above is such that the cross-sectional shape of the recess 14 provided in the original disc 10 is trapezoidal, and the width (w) of one bottom side of the recess 14 is trapezoidal.
＋ｗ３）の中心と上辺１２の巾ＣＩ！ｓ＋Ｒｘ）の中心
とが不一致の形状からなるなる。+w3) center and width CI of top side 12! s+Rx) is made of a shape that is mismatched with the center.
前記原盤を用いて作成したスタンパを使用して、射出成
形法、射出圧縮成形法などの成形法で基板を多量生産す
る事ができる。この様にして得られた基板７の形状は、
第１図に示す様に、トラッキングガイド用溝またはアド
レスピット１１の断面形状か台形で、かつ溝またはピッ
トの上辺１２の巾（ρ２＋β２）の中心が底辺１３の巾
（ｗ２＋ｗ、）の中心よりも内周１５に位置する形状か
らなる。Using a stamper created using the master, substrates can be mass-produced by a molding method such as an injection molding method or an injection compression molding method. The shape of the substrate 7 obtained in this way is
As shown in FIG. 1, the cross-sectional shape of the tracking guide groove or address pit 11 is trapezoidal, and the center of the width (ρ2+β2) of the top side 12 of the groove or pit is wider than the center of the width (w2+w,) of the bottom side 13. It has a shape located on the inner periphery 15.
［実施例２］
第３図は本発明の基板の他の例を示す部分説明図である
。[Example 2] FIG. 3 is a partial explanatory diagram showing another example of the substrate of the present invention.
同図に示す様に、露光時のレーザー光のエネルギー分布
の変化や現像条件を変えることに応じて、トラッキング
ガイド用溝またはアドレスピット１１を多数の変曲点を
もつような曲線となるような形状にも形成できる。As shown in the figure, the tracking guide groove or address pit 11 can be shaped into a curve with many inflection points depending on changes in the energy distribution of the laser beam during exposure or changes in the development conditions. It can also be formed into any shape.
［発明の効果］
以上のように、本発明によれば１Ｍ光用レーザ光のエネ
ルギー分布をコントロールする事により、トラッキング
ガイド用溝またはアドレスピットを転写する凹部の中心
線の左右の断面形状が非対称で異なる原盤を得る事がで
きるために、該原盤から得られるスタンパ−を使用して
基板を成形する時に樹脂の流れがスムーズとなり、成形
不良の少ない、しかも複屈折率が小さいなどの光学的特
性の優れた基板が得られる。[Effects of the Invention] As described above, according to the present invention, by controlling the energy distribution of the 1M laser beam, the cross-sectional shape of the left and right sides of the center line of the recess for transferring the tracking guide groove or address pit is asymmetrical. Because it is possible to obtain different master discs, when molding a substrate using a stamper obtained from the master disc, the resin flows smoothly, there are fewer molding defects, and optical properties such as low birefringence are achieved. An excellent substrate can be obtained.
第１図は本発明の基板の一例を示す部分説明図、第２図
は本発明のｙＸ盤の一例を示す部分説明図、第３図は基
板の他の例を示す部分説明図、第４図（ａ）〜（ｅ）は
スタンパ−の製造方法を示す工程図、第５図（ａ）〜（
ｅ）は従来のスタンパ−の製造方法を示す工程図、第６
図は従来の基板の一例を示す部分説明図および第７図（
ａ）、（ｂ）は各々従来例９本発明に用いられるガウス
分布を有するレーザー光の説明図である。
ｌ・・・ガラス板 ２・・・カップリング剤３
・・・フオレジスト ４・・・金属膜５・＝Ｎｉメ
ツキ層 ６・・・スタンパ−７・・・基板
８・・・レーザー光９・・・マスク
１０−・・原盤１１・・・溝またはアドレスピット
１２・・・上辺 １３・・・底辺１４−・
・凹部 １５−・・内周１６・・・外周FIG. 1 is a partial explanatory diagram showing an example of the board of the present invention, FIG. 2 is a partial explanatory diagram showing an example of the yX board of the present invention, FIG. 3 is a partial explanatory diagram showing another example of the board, and FIG. Figures (a) to (e) are process diagrams showing the stamper manufacturing method, and Figures 5 (a) to (e)
e) is a process diagram showing the conventional stamper manufacturing method, No. 6
The figures are a partial explanatory diagram showing an example of a conventional board and Fig. 7 (
a) and (b) are explanatory diagrams of a laser beam having a Gaussian distribution used in the conventional example 9 and the present invention, respectively. l...Glass plate 2...Coupling agent 3
... Photoresist 4 ... Metal film 5 = Ni plating layer 6 ... Stamper 7 ... Substrate
8... Laser light 9... Mask
10-...Master disc 11...Groove or address pit 12...Top side 13...Bottom side 14-...
・Concave part 15-...Inner circumference 16...Outer circumference
Claims (4)
有する情報記録媒体用基板において、前記トラッキング
ガイド用溝またはアドレスピットの形状が溝またはピッ
トの上辺の巾の中心を通る中心線の左右の断面形状が非
対称に形成されていることを特徴とする情報記録媒体用
基板。(1) In an information recording medium substrate having a tracking guide groove or an address pit, the shape of the tracking guide groove or address pit is asymmetrical in cross-sectional shape on the left and right of a center line passing through the center of the width of the upper side of the groove or pit. A substrate for an information recording medium, characterized in that the substrate is formed with.
断面形状が台形、Ｖ形またはＵ形で、かつ溝またはピッ
トの上辺の巾の中心が底辺の巾の中心よりも内周に位置
する形状からなる請求項１記載の情報記録媒体用基板。(2) A claim in which the cross-sectional shape of the tracking guide groove or address pit is trapezoidal, V-shaped, or U-shaped, and the center of the width of the top side of the groove or pit is located inside the center of the width of the bottom side. Item 1. The information recording medium substrate according to item 1.
たはアドレスピットを転写するためのスタンパーを作成
する情報記録媒体用基板製造用原盤であって、該原盤に
設けられたトラッキングガイド用溝またはアドレスピッ
トを転写する凹部の形状が該凹部の底辺の巾の中心を通
る中心線の左右の断面形状が非対称に形成されているこ
とを特徴とする情報記録媒体用基板製造用原盤。(3) A master disk for manufacturing a substrate for information recording media, which creates a stamper for transferring tracking guide grooves or address pits to a substrate for information recording media, the tracking guide grooves or address pits provided on the master disk. 1. A master disk for producing a substrate for an information recording medium, characterized in that the shape of a recessed portion onto which is transferred is formed so that cross-sectional shapes on the left and right sides of a center line passing through the center of the width of the bottom side of the recessed portion are asymmetrical.
凹部の底辺の巾の中心が上辺の巾の中心よりも外周に位
置する形状からなる請求項３記載の情報記録媒体用基板
製造用原盤。(4) The production of a substrate for an information recording medium according to claim 3, wherein the recess provided in the master has a trapezoidal cross-sectional shape, and the center of the width of the bottom side of the recess is located on the outer periphery of the center of the width of the upper side. Original disc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63144661A JPH01315044A (en) | 1988-06-14 | 1988-06-14 | Substrate for information recording medium and master disk for production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63144661A JPH01315044A (en) | 1988-06-14 | 1988-06-14 | Substrate for information recording medium and master disk for production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01315044A true JPH01315044A (en) | 1989-12-20 |
Family
ID=15367283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63144661A Pending JPH01315044A (en) | 1988-06-14 | 1988-06-14 | Substrate for information recording medium and master disk for production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01315044A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005015555A1 (en) * | 2003-08-07 | 2005-02-17 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium and manufacturing method thereof |
-
1988
- 1988-06-14 JP JP63144661A patent/JPH01315044A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005015555A1 (en) * | 2003-08-07 | 2005-02-17 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium and manufacturing method thereof |
| US7540006B2 (en) | 2003-08-07 | 2009-05-26 | Panasonic Corporation | Optical information recording medium and manufacture method thereof |
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