JPH01251314A - Perpendicular magnetic recording medium - Google Patents

Perpendicular magnetic recording medium

Info

Publication number
JPH01251314A
JPH01251314A JP7835088A JP7835088A JPH01251314A JP H01251314 A JPH01251314 A JP H01251314A JP 7835088 A JP7835088 A JP 7835088A JP 7835088 A JP7835088 A JP 7835088A JP H01251314 A JPH01251314 A JP H01251314A
Authority
JP
Japan
Prior art keywords
perpendicular magnetic
metal
recording medium
magnetic layer
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7835088A
Other languages
Japanese (ja)
Inventor
Kazumasa Hashimoto
和昌 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP7835088A priority Critical patent/JPH01251314A/en
Publication of JPH01251314A publication Critical patent/JPH01251314A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To improve head touch and durability by providing a nonmagnetic intermediate layer having the hardness lower than the hardness of a magnetic layer consisting of a metal oxide or the partial oxide of the metal exhibiting the perpendicular magnetic anisotropy between a substrate consisting of a high- polymer film and the above-mentioned magnetic layer. CONSTITUTION:Any flexible high-polymer film substrates are usable for the substrate consisting of the high-polymer film. A material having the hardness lower than the hardness of the magnetic layer is used for the nonmagnetic intermediate layer. This nonmagnetic metal is formed on the substrate by a method such as vacuum vapor deposition method or sputtering method. The magnetic layer is formed on the intermediate layer by a method such as vacuum vapor deposition method or sputtering method using the metal oxide or the partial oxide of the metal exhibiting the perpendicular magnetic anisotropy. The recording medium which is improved in the head touch, is decreased in the coefft. of friction, stabilized in traveling and is highly durable is thereby obtd.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は垂直磁気記録媒体に関する。さらに詳しくは、
スパッタ法などにより作製された垂直磁気記録媒体に関
する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a perpendicular magnetic recording medium. For more details,
This invention relates to perpendicular magnetic recording media manufactured by sputtering or the like.

[従来の技術] 近年高密度磁気記録媒体として、スパッタ法や真空蒸着
法で高分子フィルムなどの非磁性基板上に金属薄膜を形
成した垂直磁気記録媒体の研究が盛んにおこなわれてい
る(たとえばニス・イワサキ(S、1vasaki) 
、IEEE、  トランサクション0オン会マグネテイ
ツクス(Transact tonon Magnet
ics) Vol、MAG−20、No5 、PPB5
7(1984)参照)。とくにCo−Cr系薄膜は、垂
直異方性にすぐれているため実用化に向けての研究が盛
んにおこなわれている。
[Prior Art] In recent years, as a high-density magnetic recording medium, research has been actively conducted on perpendicular magnetic recording media in which a thin metal film is formed on a non-magnetic substrate such as a polymer film by sputtering or vacuum deposition (for example, Nis Iwasaki (S, 1vasaki)
, IEEE, Transact tonon magnets
ics) Vol, MAG-20, No5, PPB5
7 (1984)). In particular, Co--Cr thin films have excellent perpendicular anisotropy and are therefore being actively researched for practical use.

しかしながらGo−Cr系薄膜は金属薄膜であるため、
表面エネルギーが高く、また動摩擦係数が高く、ヘッド
の摺動により磁性層表面がはげしく摩耗し、傷つき、剥
離などを生じる、いわゆるヘッドクラッシュを起こしや
すいという欠点を有している。そこで従来より高級脂肪
酸、またはフッ素系潤滑剤などを磁性層表面に塗布する
方法が計られているが、これだけでは充分な耐久性をう
ろことはできない。
However, since the Go-Cr thin film is a metal thin film,
It has a high surface energy and a high coefficient of dynamic friction, and has the drawback of being susceptible to so-called head crash, in which the surface of the magnetic layer is severely worn down by the sliding of the head, causing scratches, peeling, etc. Therefore, conventional methods have been used to coat the surface of the magnetic layer with higher fatty acids or fluorine-based lubricants, but this alone does not provide sufficient durability.

また、Sl、02などの無機硬質膜をスパッタ法などに
より金属薄膜のうえに形成させて媒体を保護する方法も
考えられてきたが、充分な耐久性をうるためには、高硬
度の膜を形成させたりまたは膜厚を厚くする必要がある
ので、ヘッドの摩耗やスペーシングの問題などがあり未
だ満足のいくものは完成されていない。
In addition, methods have been considered to protect the medium by forming an inorganic hard film such as Sl or 02 on a thin metal film by sputtering, but in order to obtain sufficient durability, it is necessary to use a highly hard film. Since it is necessary to form the film or increase the film thickness, there are problems such as wear of the head and spacing, and a satisfactory product has not yet been completed.

そこで磁性層を金属薄膜ではなく金属酸化物または金属
の部分酸化物薄膜として磁性層を硬くして耐久性を上げ
ることが考えられる。しかし高分子フィルム上に直接硬
い磁性層を設けたのでは、ヘッドの押し込みによりフィ
ルムが変形し、その影響が生じてしまうのでそれだけで
は充分に良好なヘッドタッチはえられず、実用に耐える
耐久性を示す媒体はえられない。
Therefore, it is conceivable to make the magnetic layer not a metal thin film but a metal oxide or metal partial oxide thin film to harden the magnetic layer and increase its durability. However, if a hard magnetic layer is provided directly on the polymer film, the film will be deformed when the head is pushed in, and this will have an effect, so it will not be possible to obtain a sufficiently good head touch, and the durability will be sufficient for practical use. I can't find a medium that shows this.

[発明が解決しようとする課rJB] 本発明は、ヘッドタッチが良好で、耐久性に優れた垂直
磁気記録媒体を提供することを目的とする。
[Problems to be Solved by the Invention] An object of the present invention is to provide a perpendicular magnetic recording medium with good head touch and excellent durability.

[課題を解決するための手段] 本発明は、高分子フィルムからなる基板と垂直磁気異方
性を示す金属酸化物または金属の部分酸化物からなる磁
性層とのあいだに磁性層に比べて硬度の低い非磁性の中
間層が設けられていることを特徴とする垂直磁気記録媒
体に関する。
[Means for Solving the Problems] The present invention provides a structure in which a substrate made of a polymer film and a magnetic layer made of a metal oxide or a metal partial oxide exhibiting perpendicular magnetic anisotropy have a hardness greater than that of the magnetic layer. The present invention relates to a perpendicular magnetic recording medium characterized by being provided with a non-magnetic intermediate layer having a low magnetic flux.

[作 用] 本発明の垂直磁気記録媒体においては磁性層が金属酸化
物または金属の部分酸化物であるので、Co−Cr系薄
膜などの金属薄膜に比べて表面エネルギーが小さく、ま
た高硬度であるために耐久性が向上する。そして磁性層
に比べて硬度の低い中間層として非磁性の層を設けるこ
とにより磁性層表面へのへラドタッチがなめらかになり
摩擦係数が低下し、走行が安定化するとともに媒体の耐
摩耗性が向上し耐久性に優れた媒体かえられる。
[Function] Since the magnetic layer in the perpendicular magnetic recording medium of the present invention is a metal oxide or a metal partial oxide, it has a lower surface energy and a higher hardness than a metal thin film such as a Co-Cr thin film. This improves durability. By providing a non-magnetic layer as an intermediate layer with lower hardness than the magnetic layer, the contact with the surface of the magnetic layer becomes smoother, lowering the coefficient of friction, stabilizing running, and improving the wear resistance of the medium. You can change the media with excellent durability.

[実施例] 前記高分子フィルムからなる基板としては・ポリイミド
フィルムまたはポリエチレンテレフタレートフィルムな
どの、たとえば厚さ10〜1001!m程度のフレキシ
ブルな高分子フィルム基板のいかなるものをも使用する
ことができる。
[Example] The substrate made of the polymer film is a polyimide film or a polyethylene terephthalate film, for example, with a thickness of 10 to 100 mm! Any flexible polymeric film substrate on the order of m can be used.

前記非磁性の中間層としては磁性層に比べて硬度の低い
材料が用いられる。たとえば金属を使用するばあい、用
いる金属の種類としては、チタン、クロム、スズ、鉛、
アルミニウム、銅などの非磁性の金属であればいかなる
ものをも用いることができるが、とくにチタンは薄膜形
成が容易である点、および適度の硬度を有している点で
好ましい。
As the non-magnetic intermediate layer, a material having lower hardness than that of the magnetic layer is used. For example, when using metals, the types of metals used include titanium, chromium, tin, lead,
Any non-magnetic metal such as aluminum or copper can be used, but titanium is particularly preferred because it is easy to form a thin film and has appropriate hardness.

前記非磁性の金属は真空蒸着法、スパッタリング法など
の方法によって前記基板上に形成される。金属の膜厚は
好ましくは50〜10000人であり、さらに好ましく
は500〜5000人である。
The nonmagnetic metal is formed on the substrate by a method such as a vacuum evaporation method or a sputtering method. The thickness of the metal film is preferably 50 to 10,000, more preferably 500 to 5,000.

前記磁性層は、垂直磁気異方性を示す金属酸化物または
金属の部分酸化物を用いて真空蒸着法、スパッタリング
法などの方法によフて前記中間層のうえに形成される。
The magnetic layer is formed on the intermediate layer by a method such as a vacuum evaporation method or a sputtering method using a metal oxide or a metal partial oxide exhibiting perpendicular magnetic anisotropy.

該金属酸化物または金属の部分酸化物としては、Co−
0xsCo−Or−Ox% Fe−015Co−re−
01などで表わされる部分酸化物、7− Fe20x 
、Fe3O4、Ba−フェライトなどの酸化物があげら
れ、たとえば厚さtooo〜aooo入の磁性層が形成
されるが、垂直異方性など磁気特性が垂直磁気記録に適
している点でCo−Fe−0xで表わされる部分酸化物
が好ましい。
As the metal oxide or metal partial oxide, Co-
0xsCo-Or-Ox% Fe-015Co-re-
Partial oxide represented by 01 etc., 7-Fe20x
, Fe3O4, Ba-ferrite, etc., for example, to form a magnetic layer with a thickness of too much to aooo, but Co-Fe has magnetic properties such as perpendicular anisotropy that are suitable for perpendicular magnetic recording. A partial oxide represented by -0x is preferred.

以上のように高分子フィルムからなる基板と垂直磁気異
方性を示す金属酸化物または金属の部分酸化物からなる
磁性層とのあいだに、チタンなどの非磁性金属などから
なり前記磁性層に比べ硬度の低い中間層を設けることに
より、ヘッドタッチが良好となり、摩擦係数が低下し、
安定な走行かえられる。高分子フィルム基板上に直接磁
性層を設けると、ヘッドが基板に接触するときに高分子
の柔らかさのためにヘッドの押し込みによる変形が生じ
て、いわゆる掘り起こしによる摩擦力が生じ摩擦係数が
増加し、走行が不安定となり、また傷つきや剥離が起こ
りやすくなる。前記中間層を設けることによりヘッドの
押し込みによる変形が中間層によって緩和されて、掘り
起こしによる摩擦力が減少して低摩擦になり、ヘッドタ
ッチが良好となり走行が安定化する。これにより磁性層
の耐摩耗性が向上し、耐久性に優れた媒体かえられる。
As described above, between the substrate made of a polymer film and the magnetic layer made of a metal oxide or metal partial oxide exhibiting perpendicular magnetic anisotropy, there is a magnetic layer made of a non-magnetic metal such as titanium. Providing an intermediate layer with low hardness improves head touch and reduces the coefficient of friction.
Stable running can be achieved. When a magnetic layer is provided directly on a polymer film substrate, when the head comes into contact with the substrate, the softness of the polymer causes deformation due to the pushing of the head, creating a frictional force due to so-called digging and increasing the coefficient of friction. , running becomes unstable, and scratches and peeling are more likely to occur. By providing the intermediate layer, the deformation caused by the pushing of the head is alleviated by the intermediate layer, and the frictional force caused by digging is reduced, resulting in low friction, resulting in good head touch and stable running. This improves the abrasion resistance of the magnetic layer, allowing media to be replaced with excellent durability.

なお、前記中間層を設けるかわりに、磁性層そのものの
膜厚を、たとえば3000人程度以上に厚くして耐久性
の向上を図る試みも考えられるが、そのばあいには記録
再生特性が低下し、耐久性と記録再生特性とがともにす
ぐれた媒体をうろことができない。
Note that instead of providing the intermediate layer, an attempt may be made to increase the thickness of the magnetic layer itself to, for example, 3,000 or more, in order to improve durability, but in that case, the recording and reproducing characteristics will deteriorate. , media with excellent durability and recording/reproducing characteristics cannot be used.

次に実施例に基づいて本発明の詳細な説明する。Next, the present invention will be explained in detail based on examples.

実施例1 厚さ50umのポリイミドフィルム上に直径6インチの
チタンのターゲットを使用してスパッタ法によりチタン
からな・る中間層を厚さ2000人となるように形成し
た。つぎにPeとCoの合金ターゲットを使用してスパ
ッタ時に酸素ガスを導入するいわゆる反応性高周波マグ
ネトロンスパッタリング法によってCo−Pa−01で
表わされる部分酸化物からなる磁性層を厚さ2000人
となるように形成し、実施例1の垂直磁気記録媒体を作
製した。このときのスパッタ条件としては、アルゴン圧
は3 X 1O−3Torrs酸素ガス圧は4.5×1
0’ Torrsパワーは2し、スパッタ時間は2分、
基板温度は室温であった。組成はX線光電子分光法(X
PS)およびX線マイクロアナリシス法(XMA)によ
り測定した。XMAにより測定された磁性層のCoとF
θとの総量に対するCoの割合は4゜原子%であり、さ
らにxPSにより測定された磁性層の酸素の割合は35
原子%であった。
Example 1 A titanium intermediate layer having a thickness of 2000 um was formed on a 50 um thick polyimide film by sputtering using a titanium target with a diameter of 6 inches. Next, a magnetic layer made of a partial oxide represented by Co-Pa-01 was formed to a thickness of 2000 nm using a so-called reactive high frequency magnetron sputtering method using an alloy target of Pe and Co and introducing oxygen gas during sputtering. The perpendicular magnetic recording medium of Example 1 was prepared. The sputtering conditions at this time are: argon pressure is 3 x 1O-3 Torrs, oxygen gas pressure is 4.5 x 1
0' Torrs power is 2, sputtering time is 2 minutes,
The substrate temperature was room temperature. The composition was determined by X-ray photoelectron spectroscopy (X
PS) and X-ray microanalysis method (XMA). Co and F of the magnetic layer measured by XMA
The ratio of Co to the total amount with θ is 4 atomic %, and the ratio of oxygen in the magnetic layer measured by xPS is 35
It was atomic%.

実施例2 チタンにかえてスズを使用した以外は実施例1と同様に
して実施例2の垂直磁気記録媒体を作製した。
Example 2 A perpendicular magnetic recording medium of Example 2 was produced in the same manner as Example 1 except that tin was used instead of titanium.

実施例3 チタンにかえてアルミニウムを使用した以外は実施例1
と同様にして実施例3の垂直磁気記録媒体を作製した。
Example 3 Example 1 except that aluminum was used instead of titanium
A perpendicular magnetic recording medium of Example 3 was produced in the same manner as described above.

実施例4 チタンの膜厚を500人とした以外は実施例1と同様に
して実施例4の垂直磁気記録媒体を作製した。
Example 4 A perpendicular magnetic recording medium of Example 4 was produced in the same manner as Example 1 except that the thickness of the titanium film was 500 mm.

実施例5 チタンの膜厚を5000人とした以外は実施例1と同様
にして実施例5の垂直磁気記録媒体を作製した。
Example 5 A perpendicular magnetic recording medium of Example 5 was produced in the same manner as Example 1 except that the thickness of the titanium film was 5000 mm.

比較例1 チタンからなる中間層を設けなかった以外は実施例1と
同様にして実施例1の垂直磁気記録媒体を作製した。
Comparative Example 1 A perpendicular magnetic recording medium of Example 1 was produced in the same manner as Example 1 except that the intermediate layer made of titanium was not provided.

これらの垂直磁気記録媒体の磁性層表面の動摩擦係数、
耐摩耗性および耐久性を測定した。
The coefficient of dynamic friction of the magnetic layer surface of these perpendicular magnetic recording media,
Abrasion resistance and durability were measured.

測定結果を第1表に示す。The measurement results are shown in Table 1.

動摩擦係数の測定は、ピン−ディスク型摩擦試験器(協
和界面科学■製 DFPM−RD型)を使用した。ビン
にはフロッピーディスク用フェライトヘッドを用いた。
The dynamic friction coefficient was measured using a pin-disc friction tester (model DFPM-RD, manufactured by Kyowa Interface Science). A ferrite head for floppy disks was used for the bottle.

荷量はtogrとし速度100cll/secで回転さ
せて動摩擦係数を測定した。動摩擦係数の変動、および
3000パス後の表面状態を観察することにより耐摩耗
性を評価した。−また耐久性の評価は潤滑剤としてパー
フルオロポリエーテルをディッピングにより厚さ約20
0人となるように塗布したのち、市販のフロッピーディ
スクドライブで走行させて、その出力の減衰を追跡する
ことにより行ない、出力が70%になるまでのバス数を
測定した。
The load was togr, and the dynamic friction coefficient was measured by rotating at a speed of 100 cll/sec. Wear resistance was evaluated by observing changes in the coefficient of dynamic friction and the surface condition after 3000 passes. - Also, durability was evaluated by dipping perfluoropolyether as a lubricant to a thickness of approximately 20 mm.
After applying the product so that there were no passengers, it was run using a commercially available floppy disk drive and the attenuation of the output was tracked, and the number of buses until the output reached 70% was measured.

[以下余白] 第1表に示すごとく、実施例1〜5の垂直磁気記録媒体
は、初期の動摩擦係数が低いのみならず、3000バス
後においてもほとんど変化なく、また傷つきなどもみら
れないことから良好な耐摩耗性を示していることがわか
る。
[Margin below] As shown in Table 1, the perpendicular magnetic recording media of Examples 1 to 5 not only had low initial coefficients of kinetic friction, but also showed almost no change after 3000 baths, and no scratches were observed. It can be seen that it shows good abrasion resistance.

また、とくに実施例1、実施例3および実施例5の垂直
磁気記録媒体はフロッピーディスクドライブによる耐久
試験において出力が70%になるまでのバス数として3
00万パスという良好な値を示していることがわかる。
In particular, in the perpendicular magnetic recording media of Examples 1, 3, and 5, the number of buses required until the output reached 70% was 3 in an endurance test using a floppy disk drive.
It can be seen that this shows a good value of 1,000,000 passes.

r発明の効果〕 本発明により、ヘッドタッチが良好となり摩擦係数が減
少し、走行が安定性し、耐久性に優れた垂直磁気記録媒
体かえられる。
Effects of the Invention] According to the present invention, a perpendicular magnetic recording medium with good head touch, reduced friction coefficient, stable running, and excellent durability can be obtained.

Claims (1)

【特許請求の範囲】 1 高分子フィルムからなる基板と垂直磁気異方性を示
す金属酸化物または金属の部分酸化物からなる磁性層と
のあいだに磁性層に比べて硬度の低い非磁性の中間層が
設けられていることを特徴とする垂直磁気記録媒体。 2 前記中間層が非磁性の金属からなる請求項1記載の
垂直磁気記録媒体。 3 前記中間層がチタンからなる請求項1記載の垂直磁
気記録媒体。 4 前記磁性層が鉄とコバルトの部分酸化物からなる請
求項1記載の垂直磁気記録媒体。
[Claims] 1. A non-magnetic intermediate layer having lower hardness than the magnetic layer is formed between a substrate made of a polymer film and a magnetic layer made of a metal oxide or metal partial oxide exhibiting perpendicular magnetic anisotropy. A perpendicular magnetic recording medium characterized by being provided with a layer. 2. The perpendicular magnetic recording medium according to claim 1, wherein the intermediate layer is made of a nonmagnetic metal. 3. The perpendicular magnetic recording medium according to claim 1, wherein the intermediate layer is made of titanium. 4. The perpendicular magnetic recording medium according to claim 1, wherein the magnetic layer is made of a partial oxide of iron and cobalt.
JP7835088A 1988-03-30 1988-03-30 Perpendicular magnetic recording medium Pending JPH01251314A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7835088A JPH01251314A (en) 1988-03-30 1988-03-30 Perpendicular magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7835088A JPH01251314A (en) 1988-03-30 1988-03-30 Perpendicular magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH01251314A true JPH01251314A (en) 1989-10-06

Family

ID=13659543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7835088A Pending JPH01251314A (en) 1988-03-30 1988-03-30 Perpendicular magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH01251314A (en)

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