JP7480887B2 - Transport vehicle - Google Patents

Transport vehicle Download PDF

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JP7480887B2
JP7480887B2 JP2023080903A JP2023080903A JP7480887B2 JP 7480887 B2 JP7480887 B2 JP 7480887B2 JP 2023080903 A JP2023080903 A JP 2023080903A JP 2023080903 A JP2023080903 A JP 2023080903A JP 7480887 B2 JP7480887 B2 JP 7480887B2
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holding
item
angle
article
transport vehicle
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JP2023107777A (en
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健史 安部
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Daifuku Co Ltd
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Daifuku Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Handcart (AREA)
  • Load-Engaging Elements For Cranes (AREA)

Description

本発明は、物品を搬送する搬送車に関する。 The present invention relates to a transport vehicle for transporting goods.

上記のような搬送車の一例が、特開２０１２－６４７９９号公報（特許文献１）に開示されている。以下、背景技術の説明において括弧内に示す符号は特許文献１のものである。特許文献１には、物品を搬送する搬送車として、収納容器（４）を搬送する天井搬送車（Ａ）が開示されている。この天井搬送車（Ａ）は、走行経路（３）に沿って走行する走行部（１１）と、収納容器（４）を保持する保持部（１０）と、保持部（１０）を走行部（１１）に対して昇降させる昇降装置と、を備えている。 One example of such a transport vehicle is disclosed in Japanese Patent Laid-Open Publication No. 2012-64799 (Patent Document 1). In the following description of the background art, the reference numerals in parentheses refer to those in Patent Document 1. Patent Document 1 discloses an overhead transport vehicle (A) that transports a storage container (4) as a transport vehicle for transporting items. This overhead transport vehicle (A) is equipped with a running section (11) that runs along a travel path (3), a holding section (10) that holds the storage container (4), and a lifting device that raises and lowers the holding section (10) relative to the running section (11).

特許文献１では、収納容器（４）は、基板（５）を出し入れするための開口（６）が側面に形成されたオープンカセットである。保持部（１０）に保持されている収納容器（４）の開口（６）から、基板（５）が飛び出すことを防止するために、特許文献１の天井搬送車（Ａ）には、基板（５）の側面に接触する接触位置と基板（５）の側面から離間する離間位置とに移動可能な接触体（２６）を備えた飛び出し防止機構（９）が設けられている。 In Patent Document 1, the storage container (4) is an open cassette with an opening (6) formed on the side for inserting and removing the substrate (5). In order to prevent the substrate (5) from jumping out of the opening (6) of the storage container (4) held by the holding part (10), the ceiling transport vehicle (A) in Patent Document 1 is provided with a jump-out prevention mechanism (9) having a contact body (26) that can move between a contact position that contacts the side of the substrate (5) and a separated position that is separated from the side of the substrate (5).

特開２０１２－６４７９９号公報JP 2012-64799 A

搬送車の走行時には保持部に保持されている物品に振動が伝わりやすいため、特許文献１の飛び出し防止機構のような機構の有無にかかわらず、搬送車の走行時には、振動に対する許容度を高く確保しやすい姿勢で物品が保持部に保持されることが望ましい。このように、搬送車の走行時には、搬送車の走行時に適した姿勢で物品が保持部に保持されることが望ましいが、搬送車の走行時に適した物品の姿勢が、移載対象箇所（保持部との間で物品が移載される箇所）において要求される物品の姿勢と異なる場合がある。例えば、特許文献１では、物品が、側面に開口が形成された収納容器であり、移載対象箇所が、収納容器から取り出された基板に対して処理を行う処理装置のロードポートである。そのため、移載対象箇所において要求される収納容器の姿勢が、特許文献１の図５に示されるように、収納容器に対して基板を出し入れしやすい姿勢（具体的には、開口が水平方向を向く水平姿勢）となるのに対して、搬送車の走行時に適した収納容器の姿勢は、基板が開口から収納容器の外部に移動し難い姿勢（例えば、開口が斜め上方を向く傾斜姿勢）となる。 When the transport vehicle is moving, vibrations are easily transmitted to the object held in the holding part, so regardless of the presence or absence of a mechanism such as the anti-jump mechanism of Patent Document 1, it is desirable that the object be held in the holding part in a position that can easily ensure high tolerance to vibrations when the transport vehicle is moving. In this way, when the transport vehicle is moving, it is desirable that the object be held in the holding part in a position suitable for the transport vehicle, but the position of the object suitable for the transport vehicle when it is moving may differ from the position of the object required at the transfer target location (the location where the object is transferred between the holding part and the object). For example, in Patent Document 1, the object is a storage container with an opening formed on the side, and the transfer target location is a load port of a processing device that processes the substrate removed from the storage container. Therefore, the position of the storage container required at the transfer target location is a position that makes it easy to insert and remove the substrate from the storage container (specifically, a horizontal position with the opening facing horizontally), as shown in Figure 5 of Patent Document 1, while the position of the storage container suitable for the transport vehicle when it is moving is a position that makes it difficult for the substrate to move from the opening to the outside of the storage container (for example, an inclined position with the opening facing diagonally upward).

搬送車の走行時に適した物品の姿勢が、移載対象箇所において要求される物品の姿勢と異なる場合、単に搬送車の走行時に適した姿勢で物品が保持部に保持される構成とすると、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢も、搬送車の走行時に適した姿勢となる。そのため、搬送車の走行時に適した姿勢と移載対象箇所において要求される姿勢との間で物品の姿勢を変更する機構を移載対象箇所に設けて、保持部と移載対象箇所との間での物品の移載動作とは別に、移載対象箇所において物品の姿勢変更動作を行う必要が生じ、物品の処理効率が低下するおそれがある。 If the posture of the item suitable for when the transport vehicle is traveling differs from the posture of the item required at the target transfer location, simply holding the item in the holding section in a posture suitable for when the transport vehicle is traveling will result in the posture of the item placed at the target transfer location when the item is transferred between the holding section and the target transfer location being suitable for when the transport vehicle is traveling. Therefore, it becomes necessary to provide a mechanism at the target transfer location that changes the posture of the item between the posture suitable for when the transport vehicle is traveling and the posture required at the target transfer location, and to perform a posture change operation for the item at the target transfer location in addition to the transfer operation of the item between the holding section and the target transfer location, which may reduce the efficiency of processing the items.

そこで、搬送車の走行時に適した物品の姿勢が移載対象箇所において要求される物品の姿勢と異なる場合に、搬送車の走行時には搬送車の走行時に適した姿勢で物品を保持部に
より保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能な技術の実現が望まれる。 Therefore, when the posture of the item suitable for when the transport vehicle is moving differs from the posture of the item required at the target transfer location, it is desirable to realize a technology that can hold the item by the holding unit in a posture suitable for when the transport vehicle is moving while the transport vehicle is moving, and can change the posture of the item placed at the target transfer location when the item is transferred between the holding unit and the target transfer location to the posture required at the target transfer location.

本開示に係る搬送車は、物品を搬送する搬送車であって、移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、前記保持部は、前記昇降装置に連結された第１部分と、前記第１部分を介して前記昇降装置に連結されると共に前記物品に接触する第２部分と、前記第１部分と前記第２部分との間に設けられ、前記第１部分に対する前記第２部分の傾斜角度を変更する角度調整機構と、を備えている。 The transport vehicle according to the present disclosure is a transport vehicle for transporting an item, and includes a main body that moves along a travel path, a holding part that holds the item, and a lifting device that raises and lowers the holding part in a lifting direction relative to the main body, and the holding part includes a first part connected to the lifting device, a second part that is connected to the lifting device via the first part and contacts the item, and an angle adjustment mechanism that is provided between the first part and the second part and changes the inclination angle of the second part relative to the first part.

本構成によれば、保持部が角度調整機構を備えるため、保持部の姿勢を変更するための機構を昇降装置に設けなくても、角度調整機構により第１部分に対する第２部分の傾斜角度を変更することで、第２部分が接触する物品（すなわち、保持部に保持されている物品）の姿勢を所望の姿勢とすることができる。よって、搬送車の走行時における物品の姿勢を、搬送車の走行時に適した姿勢としつつ、保持部と移載対象箇所との間での物品の移載時における物品の姿勢を、当該移載対象箇所において要求される姿勢とすることができる。よって、搬送車の走行時には搬送車の走行時に適した姿勢で物品を保持部により保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能となっている。なお、本構成では、保持部の姿勢を変更するための機構を昇降装置に設ける必要がないため、昇降装置の複雑化を抑制しつつ本開示の搬送車を実現することができる。 According to this configuration, since the holding part has an angle adjustment mechanism, even if a mechanism for changing the attitude of the holding part is not provided in the lifting device, the angle of inclination of the second part relative to the first part can be changed by the angle adjustment mechanism to set the attitude of the item with which the second part comes into contact (i.e., the item held by the holding part) to a desired attitude. Therefore, the attitude of the item when the transport vehicle is traveling can be set to an appropriate attitude for the transport vehicle, while the attitude of the item when the item is transferred between the holding part and the transfer target location can be set to the attitude required at the transfer target location. Therefore, while the item is held by the holding part in an appropriate attitude for the transport vehicle when the transport vehicle is traveling, the attitude of the item placed at the transfer target location when the item is transferred between the holding part and the transfer target location can be set to the attitude required at the transfer target location. In addition, in this configuration, since it is not necessary to provide a mechanism for changing the attitude of the holding part in the lifting device, the transport vehicle of the present disclosure can be realized while suppressing the complication of the lifting device.

搬送車の更なる特徴と利点は、図面を参照して説明する実施形態についての以下の記載から明確となる。 Further features and advantages of the transport vehicle will become apparent from the following description of the embodiments, which are illustrated in the drawings.

搬送車の斜視図Perspective view of a transport vehicle 搬送車の正面図Front view of the transport vehicle 保持部と移載対象箇所との間で物品が移載される状況を示す図FIG. 13 is a diagram showing a situation in which an article is transferred between a holding unit and a transfer target location. 傾斜角度が第２角度に調整されている状態での保持部の斜視図FIG. 13 is a perspective view of the holding portion when the inclination angle is adjusted to a second angle; 傾斜角度が第１角度に調整されている状態での保持部の斜視図FIG. 4 is a perspective view of a holding portion when the inclination angle is adjusted to a first angle; 移載対象箇所からの物品の搬出動作の説明図An explanatory diagram of the removal of goods from the transfer target location 移載対象箇所からの物品の搬出動作の説明図An explanatory diagram of the removal of goods from the transfer target location 移載対象箇所からの物品の搬出動作の説明図An explanatory diagram of the removal of goods from the transfer target location 移載対象箇所への物品の搬入動作の説明図An explanatory diagram of the operation of carrying items into the transfer location 移載対象箇所への物品の搬入動作の説明図An explanatory diagram of the operation of carrying items into the transfer location 移載対象箇所への物品の搬入動作の説明図An explanatory diagram of the operation of carrying items into the transfer location 移載対象箇所への物品の搬入動作の説明図An explanatory diagram of the operation of carrying items into the transfer location 移載対象箇所への物品の搬入動作の説明図An explanatory diagram of the operation of carrying items into the transfer location 制御ブロック図Control Block Diagram

搬送車の実施形態について、図面を参照して説明する。 An embodiment of the transport vehicle will be described with reference to the drawings.

搬送車１は、図３に例示するような物品搬送設備１００において、移動経路２に沿って走行して物品９０を搬送する。図１～図３に示すように、搬送車１は、移動経路２に沿って移動する本体部１０と、物品９０を保持する保持部２０と、保持部２０を本体部１０に対して鉛直方向Ｖに昇降させる昇降装置５０と、を備えている。ここで、移動経路２の長
手方向（移動経路２が延びる方向）を経路長手方向Ｌとし、移動経路２の幅方向を経路幅方向Ｗとする。経路幅方向Ｗは、経路長手方向Ｌ及び鉛直方向Ｖの双方に直交する方向である。また、搬送車１を基準として定義される方向（すなわち、搬送車１の姿勢に応じて変化する方向）であって、移動経路２に配置された状態で経路長手方向Ｌに沿う方向を車体前後方向Ｘとし、搬送車１を基準として定義される方向であって、移動経路２に配置された状態で経路幅方向Ｗに沿う方向を車体左右方向Ｙとする。本実施形態では、鉛直方向Ｖが「昇降方向」に相当する。 The transport vehicle 1 transports an article 90 by traveling along a moving path 2 in an article transport facility 100 as illustrated in FIG. 3. As illustrated in FIGS. 1 to 3, the transport vehicle 1 includes a main body 10 that moves along the moving path 2, a holding unit 20 that holds the article 90, and a lifting device 50 that raises and lowers the holding unit 20 in a vertical direction V relative to the main body 10. Here, the longitudinal direction of the moving path 2 (the direction in which the moving path 2 extends) is the path longitudinal direction L, and the width direction of the moving path 2 is the path width direction W. The path width direction W is a direction perpendicular to both the path longitudinal direction L and the vertical direction V. In addition, the direction defined with respect to the transport vehicle 1 (i.e., the direction that changes depending on the attitude of the transport vehicle 1) and along the path longitudinal direction L when the transport vehicle 1 is placed on the moving path 2 is the vehicle body front-rear direction X, and the direction defined with respect to the transport vehicle 1 and along the path width direction W when the transport vehicle 1 is placed on the moving path 2 is the vehicle body left-right direction Y. In this embodiment, the vertical direction V corresponds to the "lifting direction".

移動経路２は、物理的に形成されても仮想的に設定されてもよい。本実施形態では、移動経路２は、レール３を用いて物理的に形成されている。具体的には、物品搬送設備１００は、移動経路２に沿って配置されたレール３（ここでは、経路幅方向Ｗに間隔を空けて配置された一対のレール３）を備えており、本体部１０は、レール３に沿って移動する。また、本実施形態では、レール３は、天井４から吊り下げ支持されており、移動経路２は、天井４に沿って形成されている。すなわち、本実施形態では、搬送車１は、天井４に沿って形成された移動経路２に沿って走行する天井搬送車である。なお、搬送車１は、天井搬送車以外の搬送車であってもよい。 The moving path 2 may be formed physically or virtually. In this embodiment, the moving path 2 is formed physically using rails 3. Specifically, the article transport equipment 100 includes rails 3 (here, a pair of rails 3 spaced apart in the path width direction W) arranged along the moving path 2, and the main body 10 moves along the rails 3. In this embodiment, the rails 3 are suspended from the ceiling 4, and the moving path 2 is formed along the ceiling 4. That is, in this embodiment, the transport vehicle 1 is a ceiling transport vehicle that travels along the moving path 2 formed along the ceiling 4. Note that the transport vehicle 1 may be a transport vehicle other than a ceiling transport vehicle.

図１及び図２に示すように、本体部１０は、レール３（ここでは、一対のレール３）の走行面を転動する車輪１２を備えた走行部１１と、走行部１１に連結されたカバー部１４と、を備えている。レール３の走行面は、鉛直方向Ｖの上方Ｖ１を向く面であり、車輪１２は、鉛直方向Ｖに直交する軸心周りに回転する。走行部１１は、車輪１２を回転させる走行駆動部７０（例えば、サーボモータ等の電動モータ、図１４参照）を備えており、車輪１２が走行駆動部７０により回転駆動されることで、走行部１１がレール３に沿って走行する。図２に示すように、本実施形態では、走行部１１は、レール３の案内面を転動する案内輪１３を備えており、走行部１１は、案内輪１３がレール３の案内面に接触案内された状態で、レール３に沿って走行する。レール３の案内面は、経路幅方向Ｗの内側（一対のレール３の間の経路幅方向Ｗの中心位置に向かう側）を向く面であり、案内輪１３は、鉛直方向Ｖに沿う軸心周りに回転する（本例では、遊転する）。図１に示す例では、本体部１０は、走行部１１を、車体前後方向Ｘに並ぶように一対備えている。 1 and 2, the main body 10 includes a running section 11 having wheels 12 that roll on the running surface of the rail 3 (here, a pair of rails 3), and a cover section 14 connected to the running section 11. The running surface of the rail 3 is a surface facing upward V1 in the vertical direction V, and the wheels 12 rotate around an axis perpendicular to the vertical direction V. The running section 11 includes a running drive section 70 (e.g., an electric motor such as a servo motor, see FIG. 14) that rotates the wheels 12, and the running section 11 runs along the rail 3 as the wheels 12 are driven to rotate by the running drive section 70. As shown in FIG. 2, in this embodiment, the running section 11 includes guide wheels 13 that roll on the guide surface of the rail 3, and the running section 11 runs along the rail 3 with the guide wheels 13 in contact with and guided by the guide surface of the rail 3. The guide surface of the rail 3 faces inward in the path width direction W (the side toward the center position in the path width direction W between the pair of rails 3), and the guide wheel 13 rotates (in this example, rotates freely) around an axis along the vertical direction V. In the example shown in FIG. 1, the main body 10 has a pair of running parts 11 aligned in the vehicle body fore-and-aft direction X.

図１に示すように、本実施形態では、カバー部１４は、走行部１１に対して鉛直方向Ｖの下方Ｖ２に配置された状態で、走行部１１に支持されている。搬送車１の走行時には、保持部２０に保持された状態の物品９０は、カバー部１４の内部空間に配置される。図１に示すように、本実施形態では、カバー部１４の内部空間は、車体前後方向Ｘの両側が閉じられていると共に、車体左右方向Ｙの少なくとも一方側が開放されている。よって、カバー部１４の内部空間に配置された物品９０は、カバー部１４の壁部によって少なくとも車体前後方向Ｘの両側から覆われる。 As shown in FIG. 1, in this embodiment, the cover section 14 is supported by the running section 11 while being positioned below V2 in the vertical direction V with respect to the running section 11. When the transport vehicle 1 is traveling, the item 90 held by the holding section 20 is placed in the internal space of the cover section 14. As shown in FIG. 1, in this embodiment, the internal space of the cover section 14 is closed on both sides in the vehicle body's fore-aft direction X, and is open on at least one side in the vehicle body's left-right direction Y. Therefore, the item 90 placed in the internal space of the cover section 14 is covered by the wall of the cover section 14 from at least both sides in the vehicle body's fore-aft direction X.

図４に示すように、保持部２０は、物品９０に形成された被保持部９１（図２参照）を支持する支持部２３を備えており、支持部２３を用いて物品９０を保持する。図２に示す例では、保持部２０は、物品９０を上方Ｖ１から保持する。具体的には、被保持部９１は、物品９０の上面９０ａを構成する上面部（例えば、板状の天板部）に形成されたフランジ部であり、支持部２３は、当該支持部２３の支持部分が被保持部９１と上面部との間の空間（以下、「支持用空間」という）に挿入された状態で、被保持部９１を下方Ｖ２から支持する。支持部２３は、上方Ｖ１を向く支持面２３ａ（図４参照）を備えており、支持面２３ａを被保持部９１の下面に接触させて被保持部９１を下方Ｖ２から支持する。なお、被保持部９１は、物品９０の上部に形成されるフランジ部に限られず、例えば、物品９０の上面部（具体的には、上面部の外周部分）が被保持部９１として用いられる構成、物品９０の側面９０ｂを構成する側面部に被保持部９１が形成される構成、或いは、物品９０の底面９０ｃを構成する底面部（例えば、板状の底板部）が被保持部９１として用いら
れる構成とすることができる。 As shown in FIG. 4, the holding unit 20 includes a support portion 23 that supports a held portion 91 (see FIG. 2) formed on the article 90, and holds the article 90 using the support portion 23. In the example shown in FIG. 2, the holding unit 20 holds the article 90 from above V1. Specifically, the held portion 91 is a flange portion formed on an upper surface portion (e.g., a plate-shaped top plate portion) that constitutes the upper surface 90a of the article 90, and the support portion 23 supports the held portion 91 from below V2 in a state in which a support portion of the support portion 23 is inserted into a space between the held portion 91 and the upper surface portion (hereinafter referred to as a "support space"). The support portion 23 includes a support surface 23a (see FIG. 4) facing the upper side V1, and the support surface 23a is brought into contact with the lower surface of the held portion 91 to support the held portion 91 from below V2. In addition, the held portion 91 is not limited to a flange portion formed on the upper part of the article 90, and can be, for example, a configuration in which the upper surface portion of the article 90 (specifically, the outer peripheral portion of the upper surface portion) is used as the held portion 91, a configuration in which the held portion 91 is formed on a side surface portion that constitutes the side surface 90b of the article 90, or a configuration in which the bottom surface portion (for example, a plate-shaped bottom plate portion) that constitutes the bottom surface 90c of the article 90 is used as the held portion 91.

保持部２０は、保持部２０による物品９０の保持及び保持解除を行うための保持駆動部７２（例えば、ソレノイドや電動モータ、図１４参照）を備えており、保持駆動部７２の駆動により、保持部２０による物品９０の保持及び保持解除が行われる。本実施形態では、図４に示すように、保持部２０は、一対の支持部２３を備えており、保持駆動部７２は、一対の支持部２３（具体的には、一対の支持部２３の一方の支持部分と他方の支持部分）を互いに接近及び離間させるように構成されている。なお、支持部分は、支持面２３ａが形成された部分である。 The holding unit 20 includes a holding drive unit 72 (e.g., a solenoid or an electric motor, see FIG. 14) for holding and releasing the item 90 by the holding unit 20, and the holding drive unit 72 drives the holding unit 20 to hold and release the item 90. In this embodiment, as shown in FIG. 4, the holding unit 20 includes a pair of support parts 23, and the holding drive unit 72 is configured to move the pair of support parts 23 (specifically, one support part and the other support part of the pair of support parts 23) toward and away from each other. The support parts are the parts on which the support surface 23a is formed.

一対の支持部２３が互いに接近及び離間する方向（言い換えれば、一対の支持部２３の並び方向）を対象方向とすると、保持部２０による物品９０の保持を行う場合、保持駆動部７２は、一対の支持部２３を互いに接近させて、一対の支持部２３の姿勢を、一対の支持部２３の間隔が被保持部９１の対象方向の幅よりも小さくなる保持姿勢に切り替える。また、保持部２０による物品９０の保持解除を行う場合、保持駆動部７２は、一対の支持部２３を互いに離間させて、一対の支持部２３の姿勢を、一対の支持部２３の間隔が被保持部９１の対象方向の幅よりも大きくなる保持解除姿勢に切り替える。ここで、姿勢は、位置及び向きの少なくとも一方を含む概念として用いている。図４及び図５に示す例では、車体前後方向Ｘが対象方向である。 If the direction in which the pair of support parts 23 approach and move away from each other (in other words, the direction in which the pair of support parts 23 are arranged) is the target direction, when the holding part 20 holds the article 90, the holding drive part 72 brings the pair of support parts 23 closer to each other and switches the posture of the pair of support parts 23 to a holding posture in which the distance between the pair of support parts 23 is smaller than the width of the held part 91 in the target direction. When the holding part 20 releases the article 90, the holding drive part 72 moves the pair of support parts 23 away from each other and switches the posture of the pair of support parts 23 to a holding release posture in which the distance between the pair of support parts 23 is larger than the width of the held part 91 in the target direction. Here, the posture is used as a concept including at least one of the position and the orientation. In the example shown in Figures 4 and 5, the vehicle body fore-and-aft direction X is the target direction.

保持部２０が後述する第２位置Ｐ２（図３、図６、図１１参照）に配置されている状態で、一対の支持部２３の姿勢を保持解除姿勢から保持姿勢に切り替えることで、一対の支持部２３のそれぞれの支持部分が、移載対象箇所６に配置されている物品９０の支持用空間に挿入される。この状態で保持部２０を上昇させることで、物品９０が保持部２０と共に上昇する。また、保持部２０が第２位置Ｐ２に配置されている状態で、一対の支持部２３の姿勢を保持姿勢から保持解除姿勢に切り替えることで、一対の支持部２３のそれぞれの支持部分が、保持部２０に保持されていた物品９０の支持用空間から抜き出される。この状態で保持部２０を上昇させることで、物品９０を移載対象箇所６に残した状態で保持部２０のみが上昇する。 When the holding unit 20 is disposed at the second position P2 (see Figures 3, 6, and 11) described below, the posture of the pair of support parts 23 is switched from the holding release posture to the holding posture, so that each support part of the pair of support parts 23 is inserted into the support space of the item 90 disposed at the transfer target location 6. When the holding unit 20 is raised in this state, the item 90 rises together with the holding unit 20. Also, when the holding unit 20 is disposed at the second position P2, the posture of the pair of support parts 23 is switched from the holding posture to the holding release posture, so that each support part of the pair of support parts 23 is extracted from the support space of the item 90 held by the holding unit 20. When the holding unit 20 is raised in this state, only the holding unit 20 rises while the item 90 remains at the transfer target location 6.

物品９０の種類はこれに限定されないが、図２に示すように、本実施形態では、物品９０は、側面９０ｂに開口部９２を有する容器である。開口部９２は、物品９０に対して収容物を出し入れするために設けられており、開口部９２を介して物品９０に対する収容物の出し入れが行われる。開口部９２とは別の開口（例えば、軽量化や洗浄のための開口、或いは物品９０の構造上形成される開口）が、物品９０の側面９０ｂに形成されていてもよいが、物品９０に収容されている収容物は、開口部９２を通らなければ物品９０の外部に移動できないように、物品９０が構成されている。本実施形態では、ガラス基板や半導体ウェハ等の基板９３（収容物の一例）が、物品９０に収容される。また、本実施形態では、物品９０は、複数枚の基板９３を上下方向（底面９０ｃが水平に配置された状態で鉛直方向Ｖに沿う方向）に並べて収容可能に構成されている。 Although the type of the article 90 is not limited to this, in this embodiment, as shown in FIG. 2, the article 90 is a container having an opening 92 on a side surface 90b. The opening 92 is provided for inserting and removing contents into and from the article 90, and the contents are inserted and removed from the article 90 through the opening 92. An opening other than the opening 92 (for example, an opening for weight reduction or cleaning, or an opening formed due to the structure of the article 90) may be formed on the side surface 90b of the article 90, but the article 90 is configured so that the contents contained in the article 90 cannot move to the outside of the article 90 unless they pass through the opening 92. In this embodiment, a substrate 93 (an example of a contained object) such as a glass substrate or a semiconductor wafer is contained in the article 90. In addition, in this embodiment, the article 90 is configured to be able to contain multiple substrates 93 arranged in the vertical direction (a direction along the vertical direction V with the bottom surface 90c horizontally arranged).

本実施形態では、物品９０は、開口部９２を閉じる蓋を備えていない。例えば、オープンカセットを物品９０として用いることができる。物品９０が、開口部９２を閉じする蓋を備える構成とすることもできる。この場合、例えば、ＦＯＵＰ（Front Opening Unified Pod）を物品９０として用いることができる。 In this embodiment, the item 90 does not have a lid that closes the opening 92. For example, an open cassette can be used as the item 90. The item 90 can also be configured to have a lid that closes the opening 92. In this case, for example, a FOUP (Front Opening Unified Pod) can be used as the item 90.

図４及び図５では、一対の支持部２３が車体前後方向Ｘに互いに接近及び離間する向きで、保持部２０が配置される場合を例示しているが、一対の支持部２３が車体左右方向Ｙに互いに接近及び離間する向きで、保持部２０が配置されてもよい。また、図１～図３では、開口部９２が車体左右方向Ｙの一方側を向く向きで、物品９０が保持部２０に保持さ
れる場合を例示しているが、開口部９２が車体前後方向Ｘの一方側を向く向きで、物品９０が保持部２０に保持されてもよい。なお、搬送車１が、保持部２０を本体部１０に対して鉛直方向Ｖに沿う軸心周りに回転させる機構を備える構成とすることもできる。物品９０に収容されている基板９３が、搬送車１の走行時に開口部９２から物品９０の外部に移動することをより確実に防止するという観点から、開口部９２がカバー部１４の壁部を向く向きで、物品９０が保持部２０に保持される構成とすると好適である。 4 and 5, the holding unit 20 is arranged such that the pair of support parts 23 approach and move away from each other in the vehicle body longitudinal direction X, but the holding unit 20 may be arranged such that the pair of support parts 23 approach and move away from each other in the vehicle body transverse direction Y. Also, in FIGS. 1 to 3, the holding unit 20 holds the article 90 with the opening 92 facing one side in the vehicle body transverse direction Y, but the article 90 may be held with the opening 92 facing one side in the vehicle body transverse direction X. The transport vehicle 1 may be configured to include a mechanism for rotating the holding unit 20 around an axis along the vertical direction V with respect to the main body 10. From the viewpoint of more reliably preventing the substrate 93 contained in the article 90 from moving from the opening 92 to the outside of the article 90 when the transport vehicle 1 is traveling, it is preferable to hold the article 90 in the holding unit 20 with the opening 92 facing the wall of the cover unit 14.

昇降装置５０は、保持部２０を昇降させるための昇降駆動部７１（例えば、サーボモータ等の電動モータ、図１４参照）を備えており、昇降駆動部７１の駆動により、保持部２０が昇降される。昇降装置５０は、第１位置Ｐ１（図２及び図３参照）と、第１位置Ｐ１よりも下方Ｖ２の第２位置Ｐ２（図３参照）との間で、保持部２０を昇降させる。第１位置Ｐ１は、昇降方向（鉛直方向Ｖ）の上端の位置である。第１位置Ｐ１は、本体部１０が移動する場合の保持部２０の鉛直方向Ｖの位置である。すなわち、第１位置Ｐ１は、搬送車１の走行時における保持部２０の位置である。本実施形態では、第１位置Ｐ１は、保持部２０に保持された状態の物品９０がカバー部１４の内部空間に配置されるような保持部２０の位置である。また、第２位置Ｐ２は、保持部２０による物品９０の保持及び保持解除を行う場合の保持部２０の鉛直方向Ｖの位置である。すなわち、第２位置Ｐ２は、保持部２０による物品９０の保持及び保持解除を行う位置であり、言い換えれば、保持部２０と移載対象箇所６との間での物品９０の移載時における保持部２０の位置である。第２位置Ｐ２は、各移載対象箇所６の高さ（鉛直方向Ｖの位置）に応じて設定される。本実施形態では、第２位置Ｐ２は、一対の支持部２３の姿勢を保持姿勢と保持解除姿勢とに切り替えることで、移載対象箇所６に配置されている物品９０の支持用空間に、一対の支持部２３のそれぞれの支持部分を挿脱可能な高さに設定される。 The lifting device 50 is equipped with a lifting drive unit 71 (for example, an electric motor such as a servo motor, see FIG. 14) for lifting and lowering the holding unit 20, and the holding unit 20 is lifted and lowered by driving the lifting drive unit 71. The lifting device 50 lifts and lowers the holding unit 20 between a first position P1 (see FIGS. 2 and 3) and a second position P2 (see FIG. 3) that is lower than the first position P1 at V2. The first position P1 is the upper end position in the lifting direction (vertical direction V). The first position P1 is the position of the holding unit 20 in the vertical direction V when the main body 10 moves. In other words, the first position P1 is the position of the holding unit 20 when the transport vehicle 1 is traveling. In this embodiment, the first position P1 is a position of the holding unit 20 such that the item 90 held by the holding unit 20 is placed in the internal space of the cover unit 14. The second position P2 is the position of the holding unit 20 in the vertical direction V when the holding unit 20 holds and releases the item 90. That is, the second position P2 is the position where the holding unit 20 holds and releases the item 90, in other words, the position of the holding unit 20 when the item 90 is transferred between the holding unit 20 and the transfer target location 6. The second position P2 is set according to the height (position in the vertical direction V) of each transfer target location 6. In this embodiment, the second position P2 is set to a height at which the support portions of the pair of support parts 23 can be inserted and removed from the support space for the item 90 placed at the transfer target location 6 by switching the posture of the pair of support parts 23 between a holding posture and a holding release posture.

図３では、移載対象箇所６の一例として、処理装置５に隣接して配置されるロードポートを示している。処理装置５は、物品９０を処理対象とする装置であり、本実施形態では、物品９０から取り出された基板９３に対して処理を行う。図３に示すように、物品９０は、開口部９２が処理装置５側を向くように移載対象箇所６に配置される。 In FIG. 3, a load port arranged adjacent to a processing device 5 is shown as an example of a transfer target location 6. The processing device 5 is a device that processes an item 90, and in this embodiment, processes a substrate 93 removed from the item 90. As shown in FIG. 3, the item 90 is arranged at the transfer target location 6 so that the opening 92 faces the processing device 5.

図２に簡略化して模式的に示すように、昇降装置５０は、回転駆動される回転体５１と、回転体５１に巻き取り及び繰り出し自在に巻回された伝動部材５２と、を備えている。昇降装置５０は、更に、回転体５１を回転駆動する上述した昇降駆動部７１（図１４参照）を備えている。回転体５１及び昇降駆動部７１は、本体部１０に支持されており、本実施形態では、カバー部１４の内部空間における上方Ｖ１の部分に配置されている。例えば、伝動部材５２がベルトであり、回転体５１がベルトを巻き取る巻取プーリである構成とし、或いは、伝動部材５２がワイヤであり、回転体５１がワイヤを巻き取る巻取ドラムである構成とすることができる。伝動部材５２は、保持部２０に連結されている。具体的には、図３に示すように、伝動部材５２における回転体５１から繰り出される先端側に設けられた連結部５２ａが、保持部２０に連結されている。昇降装置５０は、回転体５１を昇降駆動部７１の駆動により回転させて、伝動部材５２を巻き取り又は繰り出すことで、保持部２０を上昇又は下降させる（すなわち、昇降させる）。このように、昇降装置５０は、保持部２０を吊り下げ支持した状態で、保持部２０を昇降させる。 As shown in a simplified schematic diagram in FIG. 2, the lifting device 50 includes a rotating body 51 that is driven to rotate, and a transmission member 52 that is wound around the rotating body 51 so as to be freely wound and unwound. The lifting device 50 further includes the above-mentioned lifting drive unit 71 (see FIG. 14) that drives the rotating body 51 to rotate. The rotating body 51 and the lifting drive unit 71 are supported by the main body 10, and in this embodiment, are disposed in the upper V1 portion of the internal space of the cover 14. For example, the transmission member 52 may be a belt, and the rotating body 51 may be a winding pulley that winds up the belt, or the transmission member 52 may be a wire, and the rotating body 51 may be a winding drum that winds up the wire. The transmission member 52 is connected to the holding unit 20. Specifically, as shown in FIG. 3, a connecting portion 52a provided on the tip side of the transmission member 52 that is unwound from the rotating body 51 is connected to the holding unit 20. The lifting device 50 raises or lowers (i.e., lifts) the holding part 20 by rotating the rotating body 51 through the drive of the lifting drive part 71 and winding or unwinding the transmission member 52. In this way, the lifting device 50 raises and lowers the holding part 20 while supporting it in a suspended state.

図２及び図３に示すように、本実施形態では、昇降装置５０は、複数の回転体５１を備えており、複数の回転体５１のそれぞれに伝動部材５２が巻回されている。図２及び図３に示す例では、昇降装置５０は、３つの回転体５１を備えている。そして、複数の伝動部材５２（本例では、３つの伝動部材５２）のそれぞれの連結部５２ａが、保持部２０に連結されている。図４に示すように、複数の連結部５２ａは、保持部２０における互いに異なる部分に連結されている。なお、図２及び図３では、昇降装置５０が複数の回転体５１を備えていることを示すために、複数の回転体５１をそれぞれ別軸に配置しているが、複
数の回転体５１は、同軸に並べて配置されてもよい。また、図３では、伝動部材５２の連結部５２ａが、当該伝動部材５２が巻回された回転体５１の直下に配置されているが、伝動部材５２における回転体５１から繰り出された部分が、案内用回転体（案内用プーリ等）に巻き掛けられ、伝動部材５２の連結部５２ａが、当該案内用回転体の直下に配置される構成としてもよい。 As shown in Fig. 2 and Fig. 3, in this embodiment, the lifting device 50 includes a plurality of rotating bodies 51, and a transmission member 52 is wound around each of the plurality of rotating bodies 51. In the example shown in Fig. 2 and Fig. 3, the lifting device 50 includes three rotating bodies 51. The connecting portions 52a of the plurality of transmission members 52 (three transmission members 52 in this example) are connected to the holding portion 20. As shown in Fig. 4, the connecting portions 52a are connected to different portions of the holding portion 20. In Fig. 2 and Fig. 3, the plurality of rotating bodies 51 are arranged on different axes to show that the lifting device 50 includes a plurality of rotating bodies 51, but the plurality of rotating bodies 51 may be arranged coaxially. In addition, in Figure 3, the connecting portion 52a of the transmission member 52 is arranged directly below the rotating body 51 around which the transmission member 52 is wound, but the portion of the transmission member 52 that is unwound from the rotating body 51 may be wound around a guide rotating body (such as a guide pulley) and the connecting portion 52a of the transmission member 52 may be arranged directly below the guide rotating body.

本実施形態では、物品９０は、側面９０ｂに形成された開口部９２を介して基板９３が出し入れされる容器である。そのため、搬送車１の走行時には、図２に示すように、物品９０の姿勢を開口部９２が斜め上方を向く傾斜姿勢Ｓ１とすることで、物品９０に収容された基板９３が開口部９２から物品９０の外部に移動し難いようにすることができる。一方、図３に示す例のように、移載対象箇所６において物品９０に対する基板９３の出し入れが行われる場合には、物品９０の姿勢を開口部９２が水平方向を向く水平姿勢Ｓ２とすることで、開口部９２を介した基板９３の物品９０に対する出し入れを行いやすくなる。すなわち、図３に示す例では、移載対象箇所６において要求される物品９０の姿勢が、水平姿勢Ｓ２となる。本実施形態では、保持部２０が以下に説明する角度調整機構４０を備えており、これにより、搬送車１の走行時には傾斜姿勢Ｓ１で物品９０を保持部２０により保持しつつ、移載対象箇所６に配置される物品９０の姿勢を水平姿勢Ｓ２とすることが可能となっている。 In this embodiment, the item 90 is a container into which the substrate 93 is inserted and removed through an opening 92 formed in the side surface 90b. Therefore, when the transport vehicle 1 is traveling, as shown in FIG. 2, the posture of the item 90 is set to an inclined posture S1 in which the opening 92 faces diagonally upward, so that the substrate 93 contained in the item 90 is less likely to move from the opening 92 to the outside of the item 90. On the other hand, as shown in the example in FIG. 3, when the substrate 93 is inserted and removed from the item 90 at the transfer target location 6, the posture of the item 90 is set to a horizontal posture S2 in which the opening 92 faces horizontally, so that the substrate 93 can be easily inserted and removed from the item 90 through the opening 92. That is, in the example shown in FIG. 3, the posture of the item 90 required at the transfer target location 6 is the horizontal posture S2. In this embodiment, the holding unit 20 is provided with an angle adjustment mechanism 40 described below, and as a result, while the object 90 is held by the holding unit 20 in the inclined posture S1 during the travel of the transport vehicle 1, the posture of the object 90 placed at the transfer target location 6 can be set to the horizontal posture S2.

図２～図５に示すように、保持部２０は、昇降装置５０に連結された第１部分２１と、第１部分２１を介して昇降装置５０に連結されると共に物品９０に接触する第２部分２２と、角度調整機構４０と、を備えている。保持部２０は、更に、角度調整機構４０を駆動する揺動駆動部７３（例えば、電動モータやソレノイド、図１４参照）を備えている。本実施形態では、揺動駆動部７３が「駆動部」に相当する。 As shown in Figures 2 to 5, the holding unit 20 includes a first portion 21 connected to the lifting device 50, a second portion 22 connected to the lifting device 50 via the first portion 21 and in contact with the article 90, and an angle adjustment mechanism 40. The holding unit 20 further includes a swing drive unit 73 (e.g., an electric motor or a solenoid, see Figure 14) that drives the angle adjustment mechanism 40. In this embodiment, the swing drive unit 73 corresponds to the "drive unit."

本実施形態では、第１部分２１は、伝動部材５２に連結されている。第１部分２１は、複数の伝動部材５２のそれぞれに（具体的には、複数の伝動部材５２のそれぞれの連結部５２ａに）連結されている。そのため、第１部分２１の姿勢は、複数の連結部５２ａ（ここでは、３つの連結部５２ａ）の間の高低差に応じて定まる。本実施形態では、複数の回転体５１を回転駆動する共通の昇降駆動部７１が設けられており、第１部分２１は、姿勢が特定の姿勢（ここでは、全ての連結部５２ａが同じ高さに配置される姿勢）に維持されるように昇降装置５０により昇降される。そのため、図３に示すように、保持部２０が第１位置Ｐ１に位置する状態、保持部２０が第２位置Ｐ２に位置する状態、及び、保持部２０が第１位置Ｐ１と第２位置Ｐ２との間の第３位置Ｐ３に位置する状態のいずれにおいても、第１部分２１は上記特定の姿勢で配置される。 In this embodiment, the first portion 21 is connected to the transmission member 52. The first portion 21 is connected to each of the multiple transmission members 52 (specifically, to each of the connecting portions 52a of the multiple transmission members 52). Therefore, the posture of the first portion 21 is determined according to the height difference between the multiple connecting portions 52a (here, three connecting portions 52a). In this embodiment, a common lifting drive unit 71 that rotates the multiple rotating bodies 51 is provided, and the first portion 21 is lifted and lowered by the lifting device 50 so that the posture is maintained in a specific posture (here, a posture in which all connecting portions 52a are disposed at the same height). Therefore, as shown in FIG. 3, in any of the states in which the holding portion 20 is located at the first position P1, the holding portion 20 is located at the second position P2, and the holding portion 20 is located at the third position P3 between the first position P1 and the second position P2, the first portion 21 is disposed in the above-mentioned specific posture.

第２部分２２は、保持部２０における物品９０に接触する部分である。そのため、保持部２０に保持されている物品９０の姿勢は、第２部分２２の姿勢に応じて定まる。第２部分２２は支持部２３（本実施形態では、一対の支持部２３）を備えており、第２部分２２を構成する支持部２３が、物品９０（具体的には、被保持部９１）に接触する。 The second portion 22 is the portion of the holding portion 20 that contacts the item 90. Therefore, the posture of the item 90 held by the holding portion 20 is determined according to the posture of the second portion 22. The second portion 22 has a support portion 23 (in this embodiment, a pair of support portions 23), and the support portions 23 constituting the second portion 22 contact the item 90 (specifically, the held portion 91).

角度調整機構４０は、第１部分２１と第２部分２２との間に設けられ、第１部分２１に対する第２部分２２の傾斜角度Ａ（図２、図５参照）を変更する。図４及び図５に示すように、本実施形態では、角度調整機構４０は、水平方向に沿う軸心Ｒ周りに第２部分２２を揺動させる（第１部分２１に対して揺動させる）ことで傾斜角度Ａを変更する。ここでは、保持部２０（具体的には、第２部分２２）に保持されている物品９０が水平姿勢Ｓ２で配置される場合を０度とするように、傾斜角度Ａを定義する。図４は、傾斜角度Ａが０度である状態の保持部２０を示している。また、保持部２０に保持されている物品９０が、開口部９２が斜め上方を向く傾斜姿勢Ｓ１で配置される場合（図２参照）に正の鋭角となるように、傾斜角度Ａを定義する。ここでは、開口部９２を介した収容物（本実施形態
では、基板９３）の出し入れが行われる際の収容物の移動方向に沿って、物品９０の外部に向かう方向を、開口部９２の向きとしており、本実施形態では、物品９０の底面９０ｃが水平面に沿う姿勢が、開口部９２が水平方向を向く水平姿勢Ｓ２である。 The angle adjustment mechanism 40 is provided between the first part 21 and the second part 22, and changes the inclination angle A (see FIG. 2 and FIG. 5) of the second part 22 relative to the first part 21. As shown in FIG. 4 and FIG. 5, in this embodiment, the angle adjustment mechanism 40 changes the inclination angle A by swinging the second part 22 around an axis R along the horizontal direction (swinging it relative to the first part 21). Here, the inclination angle A is defined so that the inclination angle A is 0 degrees when the article 90 held by the holding part 20 (specifically, the second part 22) is arranged in a horizontal position S2. FIG. 4 shows the holding part 20 in a state where the inclination angle A is 0 degrees. In addition, the inclination angle A is defined so that the inclination angle A is a positive acute angle when the article 90 held by the holding part 20 is arranged in an inclined position S1 in which the opening 92 faces diagonally upward (see FIG. 2). Here, the orientation of opening 92 is the direction toward the outside of item 90 along the direction of movement of the contained item (in this embodiment, substrate 93) when the contained item is inserted or removed through opening 92, and in this embodiment, the orientation in which bottom surface 90c of item 90 is aligned with the horizontal plane is the horizontal orientation S2 in which opening 92 faces horizontally.

本実施形態では、軸心Ｒは、車体前後方向Ｘに沿うように配置されており、図５に示すように、第２部分２２が第１部分２１に対して傾斜している場合（具体的には、傾斜角度Ａが正の鋭角である場合）には、第２部分２２は、車体左右方向Ｙの一方側が他方側よりも高くなる。そのため、本実施形態では、物品９０は、開口部９２が平面視（鉛直方向Ｖに沿う方向視）で車体左右方向Ｙの当該一方側を向く向きで、保持部２０に保持される。 In this embodiment, the axis R is disposed along the vehicle body longitudinal direction X, and as shown in FIG. 5, when the second portion 22 is inclined relative to the first portion 21 (specifically, when the inclination angle A is a positive acute angle), the second portion 22 is higher on one side in the vehicle body transverse direction Y than on the other side. Therefore, in this embodiment, the article 90 is held in the holding portion 20 with the opening 92 facing toward that side in the vehicle body transverse direction Y in a plan view (viewed in a direction along the vertical direction V).

図４及び図５に一例を示すように、本実施形態では、角度調整機構４０は、第２部分２２に固定された揺動部材４１と、第１部分２１に固定された支持部材４２と、を備えており、支持部材４２は、揺動部材４１を軸心Ｒ周りに回転可能に支持している。そして、揺動駆動部７３は、揺動部材４１を軸心Ｒ周りに揺動させるように構成されている。揺動部材４１は第２部分２２に固定されているため、このように揺動部材４１を軸心Ｒ周りに揺動させることで、第２部分２２を軸心Ｒ周りに揺動させて、傾斜角度Ａを変更することができる。なお、揺動駆動部７３は、第１部分２１に固定されている。 As shown in an example in FIG. 4 and FIG. 5, in this embodiment, the angle adjustment mechanism 40 includes a swinging member 41 fixed to the second portion 22 and a support member 42 fixed to the first portion 21, and the support member 42 supports the swinging member 41 so that the swinging member 41 can rotate around the axis R. The swing drive unit 73 is configured to swing the swinging member 41 around the axis R. Since the swinging member 41 is fixed to the second portion 22, swinging the swinging member 41 around the axis R in this manner can swing the second portion 22 around the axis R to change the inclination angle A. The swing drive unit 73 is fixed to the first portion 21.

図４及び図５に示す例では、揺動部材４１は、軸心Ｒ上に配置される軸部材であり、固定部材４３を介して第２部分２２に固定されている。本例では、軸心Ｒに沿う方向（ここでは、車体前後方向Ｘ）の２箇所で、揺動部材４１が固定部材４３を介して第２部分２２（具体的には、第２部分２２が備える本体部）に固定されている。一対の支持部２３は、案内機構４６によって、互いに接近及び離間する方向（ここでは、軸心Ｒに沿う方向）の移動を案内される。本例では、案内機構４６は、軸心Ｒに沿う方向に延びる案内レールと、案内レールに係合する案内ブロックとを備えた直動機構であり、案内レールが第２部分２２の上記本体部に固定され、案内ブロックが一対の支持部２３のそれぞれに固定されている。 4 and 5, the rocking member 41 is an axial member disposed on the axis R, and is fixed to the second part 22 via the fixing member 43. In this example, the rocking member 41 is fixed to the second part 22 (specifically, the main body of the second part 22) via the fixing member 43 at two points in the direction along the axis R (here, the vehicle body front-rear direction X). The pair of support parts 23 are guided in the movement in the direction approaching and separating from each other (here, the direction along the axis R) by the guide mechanism 46. In this example, the guide mechanism 46 is a linear motion mechanism including a guide rail extending in the direction along the axis R and a guide block that engages with the guide rail, and the guide rail is fixed to the main body of the second part 22, and the guide block is fixed to each of the pair of support parts 23.

一対の支持部２３を駆動する保持駆動部７２は、第２部分２２の上記本体部に固定されている。本例では、保持駆動部７２は、運動変換機構４５を介して一対の支持部２３を駆動する。ここでは、運動変換機構４５は、ボールねじ機構であり、保持駆動部７２としての電動モータによって回転駆動される回転軸の回転運動が、一対の支持部２３のそれぞれの直線運動に変換される。なお、一対の支持部２３が、軸心Ｒに沿う方向に互いに接近及び離間する構成ではなく、一対の支持部２３が、平面視で軸心Ｒに直交する方向（本例では、車体左右方向Ｙ）に互いに接近及び離間する構成としてもよい。 The holding drive unit 72 that drives the pair of support parts 23 is fixed to the main body part of the second part 22. In this example, the holding drive unit 72 drives the pair of support parts 23 via the motion conversion mechanism 45. Here, the motion conversion mechanism 45 is a ball screw mechanism, and the rotational motion of a rotating shaft that is rotated and driven by an electric motor as the holding drive unit 72 is converted into linear motion of each of the pair of support parts 23. Note that the pair of support parts 23 may be configured to approach and move away from each other in a direction perpendicular to the axis R in a plan view (in this example, the left-right direction Y of the vehicle body), rather than being configured to approach and move away from each other in a direction along the axis R.

図４及び図５に示す例では、揺動部材４１は、軸心Ｒに沿う方向の２箇所で、軸心Ｒ周りに回転可能に支持部材４２に支持されている。具体的には、一対の固定部材４３に対して軸心Ｒに沿う方向の両側のそれぞれに支持部材４２が設けられており、支持部材４２のそれぞれは、揺動部材４１を第１部分２１に対して回転可能に支持している。そして、本例では、第１部分２１に固定されている揺動駆動部７３が、ギヤ機構４４（例えば、減速機構）を介して揺動部材４１に連結されており、揺動駆動部７３としての電動モータの回転がギヤ機構４４を介して揺動部材４１に伝達されて、揺動部材４１が揺動される。なお、図４及び図５における各部の寸法や形状は概念的なものであり、実際の寸法や形状はこれに限定されない。 4 and 5, the oscillating member 41 is supported by the support members 42 at two points along the axis R so as to be rotatable around the axis R. Specifically, a support member 42 is provided on each of the pair of fixed members 43 on both sides in the direction along the axis R, and each of the support members 42 supports the oscillating member 41 so as to be rotatable relative to the first part 21. In this example, the oscillating drive unit 73 fixed to the first part 21 is connected to the oscillating member 41 via a gear mechanism 44 (e.g., a reduction mechanism), and the rotation of the electric motor as the oscillating drive unit 73 is transmitted to the oscillating member 41 via the gear mechanism 44 to oscillate the oscillating member 41. Note that the dimensions and shapes of each part in FIG. 4 and FIG. 5 are conceptual, and the actual dimensions and shapes are not limited thereto.

図１４に示すように、物品搬送設備１００は、搬送車１の動作を制御する制御部８０を備えている。制御部８０は、ＣＰＵ等の演算処理装置を備えると共にメモリ等の周辺回路を備え、これらのハードウェアと、演算処理装置等のハードウェア上で実行されるプログラムとの協働により、制御部８０の各機能が実現される。制御部８０は、搬送車１に設け
られても、搬送車１とは独立に設けられてもよい。また、制御部８０が互いに通信可能に分離された複数のハードウェアを備える場合、一部のハードウェアが搬送車１に設けられ、残りのハードウェアが搬送車１とは独立に設けられてもよい。 As shown in Fig. 14, the article conveying equipment 100 includes a control unit 80 that controls the operation of the conveying vehicle 1. The control unit 80 includes a processor such as a CPU and peripheral circuits such as a memory, and each function of the control unit 80 is realized by cooperation between these pieces of hardware and a program executed on the processor or other hardware. The control unit 80 may be provided in the conveying vehicle 1 or may be provided independently of the conveying vehicle 1. In addition, when the control unit 80 includes multiple pieces of hardware separated so as to be able to communicate with each other, some of the hardware may be provided in the conveying vehicle 1 and the remaining hardware may be provided independently of the conveying vehicle 1.

制御部８０は、走行駆動部７０の駆動を制御することで、移動経路２に沿って移動する移動動作を本体部１０に行わせる。具体的には、制御部８０は、走行駆動部７０の駆動を制御することで、レール３に沿って走行する走行動作を走行部１１に行わせる。本実施形態では、走行部１１の走行動作によって本体部１０の移動動作が実現される。制御部８０は、保持部２０が保持している物品９０を移載対象箇所６に搬送する場合に、保持部２０が物品９０を保持した状態で走行部１１に走行動作を行わせる。また、制御部８０は、昇降駆動部７１の駆動を制御することで、保持部２０を昇降させる昇降動作を昇降装置５０に行わせる。また、制御部８０は、保持駆動部７２の駆動を制御することで、物品９０を保持する保持動作や物品９０の保持を解除する保持解除動作を保持部２０に行わせる。本実施形態では、物品９０の保持動作は、一対の支持部２３を互いに接近させる動作（言い換えれば、一対の支持部２３の姿勢を保持姿勢に切り替える動作）であり、物品９０の保持解除動作は、一対の支持部２３を互いに離間させる動作（言い換えれば、一対の支持部２３の姿勢を保持解除姿勢に切り替える動作）である。また、制御部８０は、揺動駆動部７３の駆動を制御することで、第１部分２１に対する第２部分２２の傾斜角度Ａを変更する傾斜角度変更動作を保持部２０に行わせる。 The control unit 80 controls the driving of the travel drive unit 70 to cause the main body unit 10 to perform a moving operation to move along the moving path 2. Specifically, the control unit 80 controls the driving of the travel drive unit 70 to cause the travel unit 11 to perform a running operation to run along the rail 3. In this embodiment, the moving operation of the main body unit 10 is realized by the running operation of the running unit 11. When transporting the item 90 held by the holding unit 20 to the transfer target location 6, the control unit 80 causes the running unit 11 to perform a running operation with the holding unit 20 holding the item 90. In addition, the control unit 80 controls the driving of the lifting drive unit 71 to cause the lifting device 50 to perform a lifting operation to lift the holding unit 20. In addition, the control unit 80 controls the driving of the holding drive unit 72 to cause the holding unit 20 to perform a holding operation to hold the item 90 and a holding release operation to release the holding of the item 90. In this embodiment, the holding operation of the article 90 is an operation of moving the pair of support parts 23 closer to each other (in other words, an operation of switching the posture of the pair of support parts 23 to the holding posture), and the holding release operation of the article 90 is an operation of moving the pair of support parts 23 away from each other (in other words, an operation of switching the posture of the pair of support parts 23 to the holding release posture). In addition, the control unit 80 controls the driving of the swing drive unit 73 to cause the holding unit 20 to perform an inclination angle change operation that changes the inclination angle A of the second part 22 relative to the first part 21.

移載対象箇所６から保持部２０に物品９０を移載する場合（すなわち、移載対象箇所６から物品９０を搬出する場合）、制御部８０は、移載対象箇所６に対応する位置（ここでは、移載対象箇所６より上方Ｖ１であって、平面視で移載対象箇所６と重複する位置）まで搬送車１を走行させる走行動作を走行部１１に行わせた後、物品９０を保持していない保持部２０を第１位置Ｐ１から第２位置Ｐ２まで下降させる昇降動作を、昇降装置５０に行わせる（図６参照）。本実施形態では、揺動駆動部７３は、物品９０を保持していない保持部２０が第２位置Ｐ２へ向かって下降している間、傾斜角度Ａを後述する第２角度とする。具体的には、物品９０を保持していない保持部２０は、傾斜角度Ａが第２角度とされた状態で第１位置Ｐ１に配置されており、保持部２０が第１位置Ｐ１から第２位置Ｐ２まで下降する間、傾斜角度Ａが第２角度に維持される。保持部２０が第２位置Ｐ２に到達すると、制御部８０は、物品９０の保持動作を保持部２０に行わせ、その後、保持部２０を第２位置Ｐ２から第１位置Ｐ１まで上昇させる昇降動作を昇降装置５０に行わせる（図７、図８参照）。これにより、物品９０を保持している保持部２０が第１位置Ｐ１まで上昇する。 When transferring the item 90 from the transfer target location 6 to the holding unit 20 (i.e., when transporting the item 90 from the transfer target location 6), the control unit 80 causes the running unit 11 to perform a running operation to run the transport vehicle 1 to a position corresponding to the transfer target location 6 (here, a position V1 above the transfer target location 6 and overlapping with the transfer target location 6 in a plan view), and then causes the lifting device 50 to perform a lifting operation to lower the holding unit 20 not holding the item 90 from the first position P1 to the second position P2 (see FIG. 6). In this embodiment, the swing drive unit 73 sets the inclination angle A to a second angle described later while the holding unit 20 not holding the item 90 is lowering toward the second position P2. Specifically, the holding unit 20 not holding the item 90 is disposed at the first position P1 with the inclination angle A set to the second angle, and while the holding unit 20 is lowering from the first position P1 to the second position P2, the inclination angle A is maintained at the second angle. When the holding unit 20 reaches the second position P2, the control unit 80 causes the holding unit 20 to hold the item 90, and then causes the lifting device 50 to perform a lifting operation to lift the holding unit 20 from the second position P2 to the first position P1 (see Figures 7 and 8). As a result, the holding unit 20 holding the item 90 is lifted to the first position P1.

一方、保持部２０から移載対象箇所６に物品９０を移載する場合（すなわち、移載対象箇所６に物品９０を搬入する場合）、制御部８０は、移載対象箇所６に対応する位置まで搬送車１を走行させる走行動作を走行部１１に行わせた後、物品９０を保持している保持部２０を第１位置Ｐ１から第２位置Ｐ２まで下降させる昇降動作を、昇降装置５０に行わせる（図９～図１１参照）。保持部２０が第２位置Ｐ２に到達すると、制御部８０は、物品９０の保持解除動作を保持部２０に行わせ、その後、保持部２０を第２位置Ｐ２から第１位置Ｐ１まで上昇させる昇降動作を昇降装置５０に行わせる（図１１参照）。これにより、物品９０を移載対象箇所６に残した状態で、物品９０を保持していない保持部２０が第１位置Ｐ１まで上昇する。本実施形態では、揺動駆動部７３は、物品９０を保持していない保持部２０が第２位置Ｐ２から上昇している間、傾斜角度Ａを第２角度とする。 On the other hand, when transferring the item 90 from the holding unit 20 to the transfer target location 6 (i.e., when carrying the item 90 into the transfer target location 6), the control unit 80 causes the running unit 11 to perform a running operation to run the transport vehicle 1 to a position corresponding to the transfer target location 6, and then causes the lifting device 50 to perform a lifting operation to lower the holding unit 20 holding the item 90 from the first position P1 to the second position P2 (see Figures 9 to 11). When the holding unit 20 reaches the second position P2, the control unit 80 causes the holding unit 20 to perform a release operation of the item 90, and then causes the lifting device 50 to perform a lifting operation to raise the holding unit 20 from the second position P2 to the first position P1 (see Figure 11). As a result, the holding unit 20 not holding the item 90 rises to the first position P1 while leaving the item 90 at the transfer target location 6. In this embodiment, the swing drive unit 73 sets the inclination angle A to the second angle while the holder 20, which is not holding the item 90, is rising from the second position P2.

本実施形態では、揺動駆動部７３が、保持部２０が物品９０を保持している場合に、傾斜角度調整制御を実行するように構成されている。揺動駆動部７３は、制御部８０による制御を受けて、傾斜角度調整制御を実行する。鉛直方向Ｖにおける第２位置Ｐ２を含む領域を規定領域ΔＶ２として（図６、図１１参照）、傾斜角度調整制御は、保持部２０が規
定領域ΔＶ２の外部に配置されている状態では、傾斜角度Ａを第１角度とし、保持部２０が第２位置Ｐ２に配置されている状態では、傾斜角度Ａを第２角度とする制御である。ここで、第１角度は、物品９０（保持部２０に保持されてる物品９０、以下同様）の姿勢が傾斜姿勢Ｓ１（開口部９２が斜め上方を向く物品９０の姿勢）となる角度であり、例えば５度とされる。また、第２角度は、物品９０の姿勢が水平姿勢Ｓ２（開口部９２が水平方向を向く物品９０の姿勢）となる角度であり、本実施形態では０度である。なお、図６～図１３では、鉛直方向Ｖにおける規定領域ΔＶ２の外部の領域を外部領域ΔＶ１としている。 In this embodiment, the swing drive unit 73 is configured to execute the tilt angle adjustment control when the holding unit 20 holds the article 90. The swing drive unit 73 executes the tilt angle adjustment control under the control of the control unit 80. The region including the second position P2 in the vertical direction V is defined as a specified region ΔV2 (see FIG. 6 and FIG. 11), and the tilt angle adjustment control is a control in which the tilt angle A is a first angle when the holding unit 20 is disposed outside the specified region ΔV2, and the tilt angle A is a second angle when the holding unit 20 is disposed at the second position P2. Here, the first angle is an angle at which the posture of the article 90 (the article 90 held by the holding unit 20, the same below) becomes a tilt posture S1 (the posture of the article 90 with the opening 92 facing diagonally upward), and is set to, for example, 5 degrees. The second angle is an angle at which the posture of the article 90 becomes a horizontal posture S2 (the posture of the article 90 with the opening 92 facing horizontally), and is set to 0 degrees in this embodiment. 6 to 13, the area outside the specified area ΔV2 in the vertical direction V is defined as an outer area ΔV1.

規定領域ΔＶ２は第１位置Ｐ１を含まないように設定される。すなわち、第１位置Ｐ１は、規定領域ΔＶ２の上限よりも上方Ｖ１に配置され、外部領域ΔＶ１に含まれる。そのため、揺動駆動部７３が傾斜角度調整制御を実行することで、保持部２０が第１位置Ｐ１に配置される搬送車１の走行時や、保持部２０が外部領域ΔＶ１に配置されている状態での保持部２０の昇降時には、物品９０の姿勢を、物品９０に収容された収容物（本実施形態では、基板９３）が開口部９２から物品９０の外部に移動し難い傾斜姿勢Ｓ１とすることができる。また、保持部２０が第２位置Ｐ２に配置される物品９０の移載時には、物品９０の姿勢を、移載対象箇所６において要求される水平姿勢Ｓ２とすることができる。 The specified area ΔV2 is set so as not to include the first position P1. That is, the first position P1 is located above the upper limit V1 of the specified area ΔV2 and is included in the external area ΔV1. Therefore, by the swing drive unit 73 executing the tilt angle adjustment control, when the transport vehicle 1 is traveling with the holding unit 20 located at the first position P1, or when the holding unit 20 is raised and lowered while it is located in the external area ΔV1, the posture of the item 90 can be set to the tilt posture S1 in which the contents contained in the item 90 (in this embodiment, the substrate 93) are unlikely to move from the opening 92 to the outside of the item 90. In addition, when the holding unit 20 is transferred to the second position P2, the posture of the item 90 can be set to the horizontal posture S2 required at the transfer target location 6.

保持部２０が物品９０を保持している場合に揺動駆動部７３が傾斜角度調整制御を実行するため、移載対象箇所６から保持部２０に物品９０を移載する場合には、物品９０の保持動作後の、保持部２０が第２位置Ｐ２に配置されている状態では、図６に示すように、傾斜角度Ａが第２角度とされることで、物品９０の姿勢が水平姿勢Ｓ２とされる。その後、保持部２０を第２位置Ｐ２から第１位置Ｐ１まで上昇させる昇降動作が開始されると、保持部２０が外部領域ΔＶ１に進入するまでの間に、傾斜角度Ａを第２角度から第１角度に変更する傾斜角度変更動作が行われる。これにより、保持部２０が外部領域ΔＶ１において上昇している間、図８に示すように、傾斜角度Ａが第１角度とされることで、物品９０の姿勢が傾斜姿勢Ｓ１とされる。 When the holding unit 20 holds the item 90, the swing drive unit 73 executes the tilt angle adjustment control. Therefore, when the item 90 is transferred from the transfer target location 6 to the holding unit 20, in the state where the holding unit 20 is disposed at the second position P2 after the holding operation of the item 90, the tilt angle A is set to the second angle, as shown in FIG. 6, so that the posture of the item 90 is set to the horizontal posture S2. After that, when the lifting operation for raising the holding unit 20 from the second position P2 to the first position P1 is started, a tilt angle changing operation is performed to change the tilt angle A from the second angle to the first angle before the holding unit 20 enters the external area ΔV1. As a result, while the holding unit 20 is rising in the external area ΔV1, the tilt angle A is set to the first angle, as shown in FIG. 8, so that the posture of the item 90 is set to the tilt posture S1.

図７及び図８では、保持部２０が規定領域ΔＶ２の上限（規定領域ΔＶ２よりも上方Ｖ１の外部領域ΔＶ１と規定領域ΔＶ２との境界）に到達するのに合わせて傾斜角度変更動作が行われて、物品９０の姿勢が図７に示す水平姿勢Ｓ２から図８において二点鎖線で示す傾斜姿勢Ｓ１に変更される場合を例示している。この場合、規定領域ΔＶ２の上限において保持部２０の上昇速度をそれ以前の速度からゼロ或いはゼロより大きな値まで低下させる構成としてもよい。保持部２０を上昇させながら姿勢変更動作を行う場合には、例えば、保持部２０が規定領域ΔＶ２の上限に到達する前に傾斜角度変更動作が開始され、保持部２０が規定領域ΔＶ２の上限に到達した時点で傾斜角度変更動作が終了するように、傾斜角度変更動作が行われる。物品９０が傾斜姿勢Ｓ１で昇降される昇降範囲をできるだけ大きく確保するために、規定領域ΔＶ２の上限は、傾斜角度変更動作に伴う物品９０の姿勢変化によって物品９０が移載対象箇所６に接触しない範囲で、できるだけ第２位置Ｐ２に近い位置に設定すると好適である。 7 and 8 show an example in which the tilt angle change operation is performed in accordance with the holding unit 20 reaching the upper limit of the specified area ΔV2 (the boundary between the external area ΔV1 above the specified area ΔV2 and the specified area ΔV2) and the posture of the article 90 is changed from the horizontal posture S2 shown in FIG. 7 to the tilted posture S1 shown by the two-dot chain line in FIG. 8. In this case, the lifting speed of the holding unit 20 may be reduced from the previous speed to zero or a value greater than zero at the upper limit of the specified area ΔV2. When the posture change operation is performed while the holding unit 20 is being lifted, for example, the tilt angle change operation is started before the holding unit 20 reaches the upper limit of the specified area ΔV2, and the tilt angle change operation is terminated when the holding unit 20 reaches the upper limit of the specified area ΔV2. In order to ensure that the lifting range in which the item 90 is lifted and lowered in the inclined position S1 is as large as possible, it is preferable to set the upper limit of the specified area ΔV2 as close as possible to the second position P2 within a range in which the item 90 does not come into contact with the target transfer location 6 due to the change in the position of the item 90 accompanying the tilt angle change operation.

また、保持部２０から移載対象箇所６に物品９０を移載する場合には、保持部２０を第１位置Ｐ１から第２位置Ｐ２まで下降させる昇降動作が開始されると、保持部２０が外部領域ΔＶ１において下降している間、図９に示すように、傾斜角度Ａが第１角度とされることで、物品９０の姿勢が傾斜姿勢Ｓ１とされる。保持部２０が規定領域ΔＶ２に進入すると、保持部２０が第２位置Ｐ２に到達するまでの間に、傾斜角度Ａを第１角度から第２角度に変更する傾斜角度変更動作が行われる。これにより、図１１に示すように、保持部２０の姿勢が傾斜姿勢Ｓ１から水平姿勢Ｓ２に変更された後、保持部２０が第２位置Ｐ２に到達する。 When transferring the item 90 from the holding unit 20 to the transfer target location 6, when the lifting operation of lowering the holding unit 20 from the first position P1 to the second position P2 is started, while the holding unit 20 is descending in the external area ΔV1, the inclination angle A is set to the first angle, as shown in FIG. 9, so that the posture of the item 90 is set to the inclined posture S1. When the holding unit 20 enters the specified area ΔV2, a tilt angle changing operation is performed to change the inclination angle A from the first angle to the second angle before the holding unit 20 reaches the second position P2. As a result, as shown in FIG. 11, the posture of the holding unit 20 is changed from the inclined posture S1 to the horizontal posture S2, and then the holding unit 20 reaches the second position P2.

図９及び図１０では、保持部２０が規定領域ΔＶ２の上限に到達するのに合わせて傾斜角度変更動作が行われて、物品９０の姿勢が図９において実線で示す傾斜姿勢Ｓ１から図１０に示す水平姿勢Ｓ２に変更される場合を例示している。この場合、規定領域ΔＶ２の上限において保持部２０の下降速度をそれ以前の速度からゼロ或いはゼロより大きな値まで低下させる構成としてもよい。保持部２０を下降させながら姿勢変更動作を行う場合には、例えば、保持部２０が規定領域ΔＶ２の上限に到達した時点で傾斜角度変更動作が開始され、保持部２０が第２位置Ｐ２に到達する前に傾斜角度変更動作が終了するように、傾斜角度変更動作が行われる。 9 and 10 show an example in which the tilt angle change operation is performed as the holding unit 20 reaches the upper limit of the specified area ΔV2, and the posture of the article 90 is changed from the tilted posture S1 shown by the solid line in FIG. 9 to the horizontal posture S2 shown in FIG. 10. In this case, the descent speed of the holding unit 20 may be reduced from the previous speed to zero or a value greater than zero at the upper limit of the specified area ΔV2. When the posture change operation is performed while the holding unit 20 is being lowered, for example, the tilt angle change operation is started when the holding unit 20 reaches the upper limit of the specified area ΔV2, and the tilt angle change operation is performed so that it ends before the holding unit 20 reaches the second position P2.

ところで、図１２及び図１３に一例を示すように、移載対象箇所６が複数の高さに分かれて配置される場合がある。この場合、移載対象箇所６が配置される複数の高さのそれぞれに応じて第２位置Ｐ２が設定されるため、第２位置Ｐ２は、第１位置Ｐ１よりも下方Ｖ２の複数の位置を含む。図１２及び図１３に示す例では、第２位置Ｐ２は、実線で示す移載対象箇所６に対応する第２位置Ｐ２と、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２（図１２及び図１３では図示を省略）とを含む。 As shown in an example in Figures 12 and 13, the transfer target locations 6 may be arranged at multiple heights. In this case, the second positions P2 are set according to the multiple heights at which the transfer target locations 6 are arranged, and the second positions P2 include multiple positions V2 below the first position P1. In the example shown in Figures 12 and 13, the second positions P2 include the second positions P2 corresponding to the transfer target locations 6 shown in solid lines and the second positions P2 corresponding to the transfer target locations 6 shown in dashed double-dashed lines (not shown in Figures 12 and 13).

このように第２位置Ｐ２が複数の位置を含む場合、複数の第２位置Ｐ２のうちの、保持部２０の昇降動作の始点又は終点となる第２位置Ｐ２を対象第２位置Ｐ２ａとして（図１３参照）、本実施形態では、揺動駆動部７３が、対象第２位置Ｐ２ａを含む領域を規定領域ΔＶ２に設定して傾斜角度調整制御を実行するように構成されている。なお、規定領域ΔＶ２は、基本的には対象第２位置Ｐ２ａのみを含むように設定されるが、対象第２位置Ｐ２ａに近い高さに存在する別の第２位置Ｐ２が規定領域ΔＶ２に含まれる場合もある。図１２及び図１３に示す例では、実線で示す移載対象箇所６に物品９０を搬入する場合を想定しており、実線で示す移載対象箇所６に対応する第２位置Ｐ２が対象第２位置Ｐ２ａとされている。そして、本例では、対象第２位置Ｐ２ａのみを含むように（すなわち、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２を含まないように）規定領域ΔＶ２が設定されており、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２は、外部領域ΔＶ１に含まれている。これにより、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２を含む比較的大きい昇降範囲において、傾斜姿勢Ｓ１で物品９０を保持することが可能となっている。 In this way, when the second position P2 includes a plurality of positions, the second position P2 that is the start or end point of the lifting operation of the holding unit 20 among the plurality of second positions P2 is set as the target second position P2a (see FIG. 13), and in this embodiment, the swing drive unit 73 is configured to set an area including the target second position P2a as the specified area ΔV2 to execute the tilt angle adjustment control. Note that the specified area ΔV2 is basically set to include only the target second position P2a, but there are also cases where another second position P2 that exists at a height close to the target second position P2a is included in the specified area ΔV2. In the example shown in FIG. 12 and FIG. 13, it is assumed that the item 90 is delivered to the transfer target location 6 shown by the solid line, and the second position P2 corresponding to the transfer target location 6 shown by the solid line is set as the target second position P2a. In this example, the specified area ΔV2 is set to include only the target second position P2a (i.e., not to include the second position P2 corresponding to the target location 6 shown by the two-dot chain line), and the second position P2 corresponding to the target location 6 shown by the two-dot chain line is included in the external area ΔV1. This makes it possible to hold the item 90 in the inclined position S1 in a relatively large lifting range that includes the second position P2 corresponding to the target location 6 shown by the two-dot chain line.

〔その他の実施形態〕
次に、搬送車のその他の実施形態について説明する。 Other embodiments
Next, other embodiments of the transport vehicle will be described.

（１）上記の実施形態では、角度調整機構４０を駆動する駆動部（揺動駆動部７３）が、第２部分２２に固定された揺動部材４１を軸心Ｒ周りに揺動させることで、第１部分２１に対する第２部分２２の傾斜角度Ａを変更する構成を例として説明した。しかし、本開示はそのような構成に限定されず、例えば、第２部分２２がリンク機構を介して第１部分２１に連結され、角度調整機構４０を駆動する駆動部が、当該リンク機構を駆動して傾斜角度Ａを変更する構成とすることもできる。また、上記の実施形態では、角度調整機構４０を駆動する駆動部が、第１部分２１に固定される構成を例として説明したが、角度調整機構４０の構成によっては、角度調整機構４０を駆動する駆動部が第２部分２２に固定されてもよい。 (1) In the above embodiment, a configuration has been described in which the drive unit (oscillating drive unit 73) that drives the angle adjustment mechanism 40 changes the inclination angle A of the second part 22 relative to the first part 21 by oscillating the oscillating member 41 fixed to the second part 22 around the axis R. However, the present disclosure is not limited to such a configuration, and for example, the second part 22 can be connected to the first part 21 via a link mechanism, and the drive unit that drives the angle adjustment mechanism 40 can drive the link mechanism to change the inclination angle A. In addition, in the above embodiment, a configuration has been described in which the drive unit that drives the angle adjustment mechanism 40 is fixed to the first part 21, but depending on the configuration of the angle adjustment mechanism 40, the drive unit that drives the angle adjustment mechanism 40 may be fixed to the second part 22.

（２）上記の実施形態では、軸心Ｒが車体前後方向Ｘに沿うように配置される構成を例として説明した。しかし、本開示はそのような構成に限定されず、軸心Ｒが車体左右方向Ｙに沿うように配置される構成とすることもできる。この場合、第２部分２２が第１部分２１に対して傾斜している場合（具体的には、傾斜角度Ａが正の鋭角である場合）には、第２部分２２は、車体前後方向Ｘの一方側が他方側よりも高くなり、物品９０は、開口部９２が平面視で車体前後方向Ｘの当該一方側を向く向きで、保持部２０に保持される。 (2) In the above embodiment, a configuration in which the axis R is arranged along the vehicle body's fore-and-aft direction X has been described as an example. However, the present disclosure is not limited to such a configuration, and the axis R may be arranged along the vehicle body's left-right direction Y. In this case, when the second portion 22 is inclined relative to the first portion 21 (specifically, when the inclination angle A is a positive acute angle), one side of the second portion 22 in the vehicle body's fore-and-aft direction X is higher than the other side, and the item 90 is held in the holding portion 20 with the opening 92 facing the one side in the vehicle body's fore-and-aft direction X in a plan view.

（３）上記の実施形態では、第２位置Ｐ２が複数の位置を含む場合に、揺動駆動部７３が、対象第２位置Ｐ２ａを含む領域を規定領域ΔＶ２に設定して傾斜角度調整制御を実行する構成を例として説明した。しかし、本開示はそのような構成に限定されず、例えば第２位置Ｐ２に含まれる複数の位置の間の高低差が小さい場合等に、全ての第２位置Ｐ２を含む領域が規定領域ΔＶ２に設定される構成としてもよい。 (3) In the above embodiment, an example has been described in which, when the second position P2 includes multiple positions, the swing drive unit 73 sets an area including the target second position P2a as the specified area ΔV2 and executes tilt angle adjustment control. However, the present disclosure is not limited to such a configuration, and may be configured such that, for example, when the difference in elevation between the multiple positions included in the second position P2 is small, the area including all of the second positions P2 is set as the specified area ΔV2.

（４）上記の実施形態では、第２角度が、物品９０の姿勢が水平姿勢Ｓ２となる角度とされる構成を例として説明した。しかし、本開示はそのような構成に限定されず、第２角度を、物品９０の姿勢が傾斜姿勢Ｓ１となる角度であって第１角度とは異なる角度（例えば、第１角度よりも小さい角度）とすることもできる。 (4) In the above embodiment, a configuration has been described in which the second angle is an angle at which the attitude of the article 90 becomes a horizontal attitude S2. However, the present disclosure is not limited to such a configuration, and the second angle can also be an angle at which the attitude of the article 90 becomes an inclined attitude S1 and that is different from the first angle (e.g., an angle smaller than the first angle).

（５）なお、上述した各実施形態で開示された構成は、矛盾が生じない限り、他の実施形態で開示された構成と組み合わせて適用すること（その他の実施形態として説明した実施形態同士の組み合わせを含む）も可能である。その他の構成に関しても、本明細書において開示された実施形態は全ての点で単なる例示に過ぎない。従って、本開示の趣旨を逸脱しない範囲内で、適宜、種々の改変を行うことが可能である。 (5) Note that the configurations disclosed in each of the above-described embodiments can be applied in combination with configurations disclosed in other embodiments (including combinations of the embodiments described as other embodiments) as long as no contradictions arise. With regard to other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications can be made as appropriate within the scope of the spirit of this disclosure.

〔上記実施形態の概要〕
以下、上記において説明した搬送車の概要について説明する。 [Summary of the above embodiment]
The above-described transport vehicle will now be outlined.

物品を搬送する搬送車であって、移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、前記保持部は、前記昇降装置に連結された第１部分と、前記第１部分を介して前記昇降装置に連結されると共に前記物品に接触する第２部分と、前記第１部分と前記第２部分との間に設けられ、前記第１部分に対する前記第２部分の傾斜角度を変更する角度調整機構と、を備えている。 A transport vehicle for transporting an item, comprising a main body moving along a travel path, a holding part for holding the item, and a lifting device for raising and lowering the holding part in a lifting direction relative to the main body, the holding part comprising a first part connected to the lifting device, a second part connected to the lifting device via the first part and in contact with the item, and an angle adjustment mechanism provided between the first part and the second part for changing the inclination angle of the second part relative to the first part.

本構成によれば、保持部が角度調整機構を備えるため、保持部の姿勢を変更するための機構を昇降装置に設けなくても、角度調整機構により第１部分に対する第２部分の傾斜角度を変更することで、第２部分が接触する物品（すなわち、保持部に保持されている物品）の姿勢を所望の姿勢とすることができる。よって、搬送車の走行時における物品の姿勢を、搬送車の走行時に適した姿勢としつつ、保持部と移載対象箇所との間での物品の移載時における物品の姿勢を、当該移載対象箇所において要求される姿勢とすることができる。よって、搬送車の走行時には搬送車の走行時に適した姿勢で物品を保持部により保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能となっている。なお、本構成では、保持部の姿勢を変更するための機構を昇降装置に設ける必要がないため、昇降装置の複雑化を抑制しつつ本開示の搬送車を実現することができる。 According to this configuration, since the holding part has an angle adjustment mechanism, even if a mechanism for changing the attitude of the holding part is not provided in the lifting device, the angle of inclination of the second part relative to the first part can be changed by the angle adjustment mechanism to set the attitude of the item with which the second part comes into contact (i.e., the item held by the holding part) to a desired attitude. Therefore, the attitude of the item when the transport vehicle is traveling can be set to an appropriate attitude for the transport vehicle, while the attitude of the item when the item is transferred between the holding part and the transfer target location can be set to the attitude required at the transfer target location. Therefore, while the item is held by the holding part in an appropriate attitude for the transport vehicle when the transport vehicle is traveling, the attitude of the item placed at the transfer target location when the item is transferred between the holding part and the transfer target location can be set to the attitude required at the transfer target location. In addition, in this configuration, since it is not necessary to provide a mechanism for changing the attitude of the holding part in the lifting device, the transport vehicle of the present disclosure can be realized while suppressing the complication of the lifting device.

ここで、前記昇降装置は、回転駆動される複数の回転体と、複数の前記回転体のそれぞれに巻き取り及び繰り出し自在に巻回された伝動部材と、を備え、前記第１部分は、前記伝動部材に連結されていると好適である。 Here, the lifting device preferably includes a plurality of rotating bodies that are driven to rotate, and a transmission member that is wound around each of the plurality of rotating bodies so as to be freely wound up and unwound, and the first portion is preferably connected to the transmission member.

本構成によれば、複数の回転体を回転させて伝動部材を巻き取り又は繰り出すことで、保持部を吊り下げ支持した状態で保持部を昇降させることができる。本開示の搬送車では、上述したように、保持部の姿勢を変更するための機構を昇降装置に設ける必要がない。そのため、本構成のように昇降装置が構成される場合に、吊り下げ支持される保持部の姿勢を変更可能に各部（回転体、伝動部材、回転体を回転駆動する駆動部等）を構成する必要はなく、昇降装置の簡素化を図ることができる。 According to this configuration, the holding part can be raised and lowered while being supported in a suspended state by rotating the multiple rotating bodies and winding or unwinding the transmission member. In the transport vehicle disclosed herein, as described above, there is no need to provide the lifting device with a mechanism for changing the attitude of the holding part. Therefore, when the lifting device is configured as in this configuration, there is no need to configure each part (rotating bodies, transmission members, drive part that rotates the rotating bodies, etc.) so that the attitude of the holding part supported in a suspended state can be changed, and the lifting device can be simplified.

また、前記角度調整機構は、前記第２部分に固定された揺動部材と、前記第１部分に固定されていると共に前記揺動部材を水平方向に沿う軸心周りに回転可能に支持する支持部材と、を備え、前記角度調整機構を駆動する駆動部が、前記揺動部材を前記軸心周りに揺動させるように構成されていると好適である。 It is also preferable that the angle adjustment mechanism includes a swinging member fixed to the second portion and a support member fixed to the first portion and supporting the swinging member rotatably around an axis along the horizontal direction, and that a drive unit that drives the angle adjustment mechanism is configured to swing the swinging member around the axis.

本構成によれば、駆動部により揺動部材を軸心周りに揺動させることで、第１部分に対する第２部分の傾斜角度を大きくなるように変化させたり小さくなるように変化させたりすることができ、当該傾斜角度を変更する角度調整機構を適切に設けることができる。 According to this configuration, the tilt angle of the second part relative to the first part can be increased or decreased by using the drive unit to oscillate the oscillating member around the axis, and an angle adjustment mechanism for changing the tilt angle can be appropriately provided.

また、前記物品は、側面に開口部を有する容器であり、前記昇降装置は、第１位置と、前記保持部による前記物品の保持及び保持解除を行う位置であって前記第１位置よりも下方の第２位置との間で、前記保持部を昇降させ、前記昇降方向における前記第２位置を含む領域を規定領域とし、前記開口部が斜め上方を向く前記物品の姿勢を傾斜姿勢とし、前記開口部が水平方向を向く前記物品の姿勢を水平姿勢として、前記角度調整機構を駆動する駆動部は、前記保持部が前記物品を保持している場合に、傾斜角度調整制御を実行し、前記傾斜角度調整制御は、前記保持部が前記規定領域の外部に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記傾斜姿勢となる角度である第１角度とし、前記保持部が前記第２位置に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記水平姿勢となる角度である第２角度とする制御であると好適である。 The article is a container having an opening on the side, and the lifting device lifts and lowers the holding part between a first position and a second position, which is a position where the holding part holds and releases the article and is lower than the first position, and a region including the second position in the lifting direction is defined as a specified region, a posture of the article in which the opening faces diagonally upward is defined as an inclined posture, and a posture of the article in which the opening faces horizontally is defined as a horizontal posture, and a drive part that drives the angle adjustment mechanism executes an inclination angle adjustment control when the holding part holds the article, and the inclination angle adjustment control is preferably a control that sets the inclination angle to a first angle at which the posture of the article becomes the inclined posture when the holding part is located outside the specified region, and sets the inclination angle to a second angle at which the posture of the article becomes the horizontal posture when the holding part is located at the second position.

本構成のように、物品が側面に開口部を有する容器である場合、物品の姿勢を傾斜姿勢とすることで、物品の姿勢が水平姿勢である場合に比べて、物品に収容された収容物が開口部から物品の外部に移動し難くすることができる。また、物品の姿勢を水平姿勢とすることで、開口部を介した収容物の物品に対する出し入れを行いやすくなる。本構成によれば、保持部が物品を保持している場合に傾斜角度調整制御が実行されるため、搬送車の走行時における保持部の位置を規定領域の外部の位置（例えば、第１位置）とすることで、搬送車の走行時や規定領域の外部での保持部の昇降時には、物品の姿勢を傾斜姿勢としつつ、保持部による物品の保持又は保持解除を行う物品の移載時には、物品の姿勢を水平姿勢とすることができる。 In the case where the item is a container having an opening on the side as in this configuration, by setting the attitude of the item to an inclined attitude, it is possible to make it more difficult for the contents contained in the item to move out of the item through the opening compared to when the attitude of the item is horizontal. Also, by setting the attitude of the item to a horizontal attitude, it is easier to insert and remove the contents from the item through the opening. According to this configuration, since the inclination angle adjustment control is executed when the holding unit is holding an item, by setting the position of the holding unit to a position outside the specified area (e.g., the first position) when the transport vehicle is traveling, the attitude of the item can be set to an inclined attitude when the transport vehicle is traveling or when the holding unit is raised and lowered outside the specified area, and the attitude of the item can be set to a horizontal attitude when the item is transferred to hold or release the item from the holding unit.

上記のように前記駆動部が前記傾斜角度調整制御を実行する構成において、前記第２位置は、前記第１位置よりも下方の複数の位置を含み、複数の前記第２位置のうちの、前記保持部の昇降動作の始点又は終点となる前記第２位置を対象第２位置として、前記駆動部は、前記対象第２位置を含む領域を前記規定領域に設定して前記傾斜角度調整制御を実行すると好適である。 In the configuration in which the drive unit executes the tilt angle adjustment control as described above, the second position includes a plurality of positions lower than the first position, and among the plurality of second positions, the second position that is the start point or end point of the lifting and lowering operation of the holding unit is set as a target second position, and the drive unit preferably executes the tilt angle adjustment control by setting an area including the target second position as the specified area.

本構成によれば、第２位置が複数の位置を含む場合に、規定領域よりも上方の領域と規定領域との境界を、その時点で昇降動作の始点又は終点となっている対象第２位置に比較的近い近接位置に設定することができる。よって、保持部が第１位置と近接位置との間の比較的大きい昇降範囲内に配置されている間、傾斜姿勢で物品を保持することができ、保持部に保持された物品を適切に昇降させやすくなる。 According to this configuration, when the second position includes multiple positions, the boundary between the area above the specified area and the specified area can be set to a proximity position that is relatively close to the target second position that is the start or end point of the lifting/lowering operation at that time. Therefore, while the holding part is positioned within a relatively large lifting range between the first position and the proximity position, the article can be held in an inclined position, making it easier to appropriately lift and lower the article held by the holding part.

また、前記駆動部は、前記物品を保持していない前記保持部が前記第２位置へ向かって下降している間、前記傾斜角度を前記第２角度とすると好適である。 It is also preferable that the drive unit sets the inclination angle to the second angle while the holding unit, which is not holding the item, is descending toward the second position.

本構成によれば、物品を保持していない保持部を第２位置へ向かって下降させる場合にも、物品を保持している保持部を第２位置へ向かって下降させる場合と同様に、保持部が規定領域の外部に配置されている状態では傾斜角度を第１角度とする場合に比べて、傾斜角度を第１角度から第２角度に変更する制御を保持部が規定領域に進入してから行う必要
がない分、制御の簡素化や処理の高速化を図ることができる。 According to this configuration, when a holding portion not holding an item is lowered toward the second position, just as when a holding portion holding an item is lowered toward the second position, it is possible to simplify control and speed up processing, since there is no need to control the change in inclination angle from the first angle to the second angle after the holding portion enters the specified area, compared to when the inclination angle is set to the first angle when the holding portion is positioned outside the specified area.

本開示に係る搬送車は、上述した各効果のうち、少なくとも１つを奏することができればよい。 The transport vehicle according to the present disclosure may achieve at least one of the above-mentioned effects.

１：搬送車
２：移動経路
１０：本体部
２０：保持部
２１：第１部分
２２：第２部分
４０：角度調整機構
４１：揺動部材
４２：支持部材
５０：昇降装置
５１：回転体
５２：伝動部材
７３：揺動駆動部（駆動部）
９０：物品
９０ｂ：側面
９２：開口部
Ａ：傾斜角度
Ｐ１：第１位置
Ｐ２：第２位置
Ｐ２ａ：対象第２位置
Ｒ：軸心
Ｓ１：傾斜姿勢
Ｓ２：水平姿勢
Ｖ：鉛直方向（昇降方向）
Ｖ２：下方
ΔＶ２：規定領域 1: Transport vehicle 2: Travel path 10: Main body 20: Holding part 21: First part 22: Second part 40: Angle adjustment mechanism 41: Swing member 42: Support member 50: Lifting device 51: Rotating body 52: Transmission member 73: Swing drive part (drive part)
90: Article 90b: Side surface 92: Opening A: Tilt angle P1: First position P2: Second position P2a: Target second position R: Axis center S1: Tilt position S2: Horizontal position V: Vertical direction (lift direction)
V2: Downward ΔV2: Specified area

Claims (6)

物品を搬送する搬送車であって、
移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、
前記保持部は、前記昇降装置に連結された第１部分と、前記第１部分を介して前記昇降装置に連結されると共に前記物品に接触する第２部分と、前記第１部分と前記第２部分との間に設けられ、前記第１部分に対する前記第２部分の傾斜角度を変更する角度調整機構と、を備えている、搬送車。 A transport vehicle for transporting an item,
The present invention includes a main body portion that moves along a moving path, a holding portion that holds the article, and a lifting device that lifts and lowers the holding portion in a lifting direction relative to the main body portion,
The holding portion of the transport vehicle comprises a first part connected to the lifting device, a second part connected to the lifting device via the first part and contacting the item, and an angle adjustment mechanism provided between the first part and the second part for changing the inclination angle of the second part relative to the first part. 前記物品は、側面に開口部を有する容器であり、
前記昇降装置は、第１位置と、前記保持部による前記物品の保持及び保持解除を行う位置であって前記第１位置よりも下方の第２位置との間で、前記保持部を昇降させ、
前記昇降方向における前記第２位置を含む領域を規定領域とし、前記開口部が斜め上方を向く前記物品の姿勢を傾斜姿勢とし、前記開口部が水平方向を向く前記物品の姿勢を水平姿勢として、
前記角度調整機構を駆動する駆動部は、前記保持部が前記物品を保持している場合に、傾斜角度調整制御を実行し、
前記傾斜角度調整制御は、前記保持部が前記規定領域の外部に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記傾斜姿勢となる角度である第１角度とし、前記保持部が前記第２位置に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記水平姿勢となる角度である第２角度とする制御である、請求項１に記載の搬送車。 The article is a container having an opening on a side,
the lifting device lifts and lowers the holding unit between a first position and a second position, the second position being a position where the holding unit holds and releases the article, the second position being lower than the first position;
A region including the second position in the lifting direction is defined as a specified region, a posture of the article in which the opening faces diagonally upward is defined as an inclined posture, and a posture of the article in which the opening faces horizontally is defined as a horizontal posture,
a drive unit that drives the angle adjustment mechanism executes tilt angle adjustment control when the holding unit holds the article,
The transport vehicle of claim 1, wherein the inclination angle adjustment control is a control that sets the inclination angle to a first angle, which is an angle at which the article assumes the inclined posture, when the holding portion is positioned outside the specified area, and sets the inclination angle to a second angle, which is an angle at which the article assumes the horizontal posture, when the holding portion is positioned at the second position. 前記昇降装置が前記物品を保持している前記保持部を前記第２位置から前記第１位置まで上昇させる昇降動作を開始した後、前記駆動部は前記保持部が前記規定領域から出るまでに、前記傾斜角度を前記第２角度から前記第１角度に変更する傾斜角度変更動作が終了するように前記角度調整機構を駆動する、請求項２に記載の搬送車。The transport vehicle of claim 2, wherein after the lifting device starts a lifting operation to raise the holding part holding the item from the second position to the first position, the drive part drives the angle adjustment mechanism so that an inclination angle change operation to change the inclination angle from the second angle to the first angle is completed before the holding part leaves the specified area. 前記昇降装置が前記物品を保持している前記保持部を前記第１位置から前記第２位置まで下降させる昇降動作を開始した後、前記駆動部は前記保持部が前記規定領域に進入後であって前記第２位置に到達するまでの間に、前記傾斜角度を前記第１角度から前記第２角度に変更する傾斜角度変更動作が終了するように前記角度調整機構を駆動する、請求項２に記載の搬送車。The transport vehicle of claim 2, wherein after the lifting device starts a lifting operation to lower the holding part holding the item from the first position to the second position, the drive part drives the angle adjustment mechanism so as to complete an inclination angle change operation to change the inclination angle from the first angle to the second angle after the holding part enters the specified area and before it reaches the second position. 前記物品は、側面に開口部を有する容器であり、The article is a container having an opening on a side,
前記保持部が前記物品を保持している場合に、前記角度調整機構を駆動する駆動部が前記傾斜角度を変更する傾斜角度変更動作を行う、請求項１に記載の搬送車。The transport vehicle according to claim 1 , wherein a drive unit that drives the angle adjustment mechanism performs an inclination angle changing operation to change the inclination angle when the holding unit is holding the article. 前記物品は、ガラス基板又は半導体ウェハの基板を収容する容器である、請求項１から５のいずれか一項に記載の搬送車。The transport vehicle according to claim 1 , wherein the article is a container for housing a glass substrate or a semiconductor wafer.
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JP2008214074A (en) 2007-03-07 2008-09-18 Daifuku Co Ltd Article treatment apparatus
JP2017095261A (en) 2015-11-26 2017-06-01 株式会社ダイフク Article conveyance equipment

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JP2004345756A (en) 2003-05-20 2004-12-09 Daifuku Co Ltd Conveyance apparatus
JP2006213216A (en) 2005-02-04 2006-08-17 Daifuku Co Ltd Carrier
JP2008214074A (en) 2007-03-07 2008-09-18 Daifuku Co Ltd Article treatment apparatus
JP2017095261A (en) 2015-11-26 2017-06-01 株式会社ダイフク Article conveyance equipment

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