JP7463872B2 - 電気光学装置および電子機器 - Google Patents
電気光学装置および電子機器 Download PDFInfo
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- 230000005684 electric field Effects 0.000 claims description 12
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- 229910052721 tungsten Inorganic materials 0.000 claims description 9
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- -1 tungsten (W) Chemical class 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134345—Subdivided pixels, e.g. for grey scale or redundancy
- G02F1/134354—Subdivided pixels, e.g. for grey scale or redundancy the sub-pixels being capacitively coupled
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134318—Electrodes characterised by their geometrical arrangement having a patterned common electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Geometry (AREA)
- Liquid Crystal (AREA)
- Power Engineering (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
1A.第1実施形態
1Aa.基本構成
図1は、第1実施形態に係る電気光学装置100の平面図である。図2は、図1に示す電気光学装置100のA-A線における断面図である。なお、図1では、対向基板3の図示を省略する。また、以下では、説明の便宜上、互いに直交するX軸、Y軸およびZ軸を適宜用いて説明する。また、X軸に沿う一方向をX1方向と表記し、X1方向とは反対の方向をX2方向と表記する。同様に、Y軸に沿う一方向をY1方向と表記し、Y1方向とは反対の方向をY2方向と表記する。Z軸に沿う一方向をZ1方向と表記し、Z1方向とは反対の方向をZ2方向と表記する。また、以下では、Z1方向またはZ2方向に見ることを「平面視」とし、Z軸を含む断面に対して垂直方向から見ることを「断面視」とする。
図3は、図1の素子基板2の電気的な構成を示す等価回路図である。素子基板2の第1基体21には、図3に示す複数のトランジスター23とn本の走査線241とm本のデータ線242とn本の定電位線243とが設けられる。nおよびmはそれぞれ2以上の整数である。n本の走査線241とm本のデータ線242との各交差に対応してトランジスター23が配置される。各トランジスター23は、例えばスイッチング素子として機能するTFTである。各トランジスター23は、ゲート、ソースおよびドレインを含む。
図4は、図2の素子基板2の一部を模式的に示す図である。図4に示す積層体22は、透光性および絶縁性を有する。積層体22は、複数の絶縁層221、222、223、224、225および226を有する。絶縁層221、222、223、224、225および226は、第1基体21から複数の画素電極25に向けてこの順に積層される。積層体22の各層の材料は、例えば、酸窒化ケイ素および酸化ケイ素等の無機材料である。
電極用コンタクト275およびそれに接続される配線等の製造方法について説明する。具体的には、容量素子240、第2中継電極247および電極用コンタクト275の製造方法について説明する。
第2実施形態を説明する。なお、以下の各例示において機能が第1実施形態と同様である要素については、第1実施形態の説明で使用した符号を流用して各々の詳細な説明を適宜に省略する。
2.変形例
以上に例示した実施形態は多様に変形され得る。前述の実施形態に適用され得る具体的な変形の態様を以下に例示する。以下の例示から任意に選択された2以上の態様は、相互に矛盾しない範囲で適宜に併合され得る。
電気光学装置100は、各種電子機器に用いることができる。
Claims (6)
- 電界に応じて光学的特性が変化する電気光学層を有する電気光学装置であって、
前記電気光学層に前記電界を印加する電極と、
ドレイン領域を含む半導体層を有するトランジスターと、
第1容量電極および第2容量電極を有する容量素子と、
前記電極に接続される電極用コンタクトと、
前記ドレイン領域に電気的に接続されるドレイン中継電極と、を備え、
前記電極用コンタクトは、前記第2容量電極および前記ドレイン中継電極に接続され、
前記第1容量電極および前記ドレイン中継電極は、同層に位置し、
前記第1容量電極、前記第2容量電極、および前記電極は、この順に前記電気光学層に向かって並び、前記電極が前記電気光学層の最も近くに配置され、
前記電極用コンタクトは、柱状のプラグであり、
前記第1容量電極は、第1方向に延在し、
前記ドレイン中継電極は、前記電極の厚さ方向に見て、前記第1方向とは交差する第2方向に延在し、
前記電極用コンタクトは、前記厚さ方向に見て、前記第1容量電極とは重ならず、かつ前記第2方向に延在する、
ことを特徴とする電気光学装置。 - 前記電極用コンタクトは、前記電極の厚さ方向に見て、前記電極の縁に沿って延在する長尺な形状である請求項1に記載の電気光学装置。
- 前記トランジスターは、ゲート電極をさらに有し、
前記ゲート電極に電気的に接続される走査線をさらに備え、
前記電極用コンタクトは、前記電極の厚さ方向に見て、前記走査線の延在方向に沿った長尺な形状である請求項1または2に記載の電気光学装置。 - 前記電極用コンタクトは、前記電極の材料と同一の材料を含む請求項1から3のいずれか1項に記載の電気光学装置。
- 前記電極用コンタクトは、タングステンを含む請求項1から3のいずれか1項に記載の
電気光学装置。 - 請求項1から5のいずれか1項に記載の電気光学装置と、
前記電気光学装置の動作を制御する制御部と、を有することを特徴とする電子機器。
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Citations (6)
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JP2000111901A (ja) | 1998-10-08 | 2000-04-21 | Seiko Epson Corp | 電気光学装置用基板、電気光学装置及び電気光学装置の製造方法、ならびに電気光学装置を用いた電子機器 |
JP2000275680A (ja) | 1999-03-19 | 2000-10-06 | Fujitsu Ltd | 反射型液晶表示装置及びそれを用いた表示パネル |
JP2013025070A (ja) | 2011-07-21 | 2013-02-04 | Seiko Epson Corp | 電気光学装置、電気光学装置の製造方法、および投射型表示装置 |
JP2014056212A (ja) | 2012-09-14 | 2014-03-27 | Seiko Epson Corp | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
US20140327851A1 (en) | 2013-05-01 | 2014-11-06 | Apple Inc. | Display Pixels with Improved Storage Capacitance |
JP2019117264A (ja) | 2017-12-27 | 2019-07-18 | セイコーエプソン株式会社 | 電気光学装置および電子機器 |
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