JP7446317B2 - 熱電変換材料、熱電変換素子、熱電変換モジュールおよび光センサ - Google Patents
熱電変換材料、熱電変換素子、熱電変換モジュールおよび光センサ Download PDFInfo
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- JP7446317B2 JP7446317B2 JP2021542697A JP2021542697A JP7446317B2 JP 7446317 B2 JP7446317 B2 JP 7446317B2 JP 2021542697 A JP2021542697 A JP 2021542697A JP 2021542697 A JP2021542697 A JP 2021542697A JP 7446317 B2 JP7446317 B2 JP 7446317B2
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- 239000000463 material Substances 0.000 title claims description 505
- 238000006243 chemical reaction Methods 0.000 title claims description 314
- 230000003287 optical effect Effects 0.000 title claims description 10
- 239000006096 absorbing agent Substances 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 4
- 229910052946 acanthite Inorganic materials 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- FSJWWSXPIWGYKC-UHFFFAOYSA-M silver;silver;sulfanide Chemical compound [SH-].[Ag].[Ag+] FSJWWSXPIWGYKC-UHFFFAOYSA-M 0.000 claims 1
- 239000011669 selenium Substances 0.000 description 22
- 239000012212 insulator Substances 0.000 description 20
- 239000000758 substrate Substances 0.000 description 20
- 238000010248 power generation Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 239000010408 film Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 7
- 239000000969 carrier Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 229910052711 selenium Inorganic materials 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000007731 hot pressing Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 229910001179 chromel Inorganic materials 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- LIXXICXIKUPJBX-UHFFFAOYSA-N [Pt].[Rh].[Pt] Chemical compound [Pt].[Rh].[Pt] LIXXICXIKUPJBX-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910003138 α-Ag2S Inorganic materials 0.000 description 1
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/852—Thermoelectric active materials comprising inorganic compositions comprising tellurium, selenium or sulfur
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B19/00—Selenium; Tellurium; Compounds thereof
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- C01B19/04—Binary compounds including binary selenium-tellurium compounds
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/547—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on sulfides or selenides or tellurides
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- G—PHYSICS
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
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- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
- H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
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- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
熱電変換においては、熱が電気へと直接変換されるため、変換の際に余分な廃棄物が排出されない。熱電変換を利用した発電装置においては、モータなどの駆動部を必要としないため、装置のメンテナンスが容易であるなどの特長がある。
上記熱電変換材料によれば、可撓性を有すると共に高い熱電変換効率を実現することができる。
最初に本開示の実施態様を列記して説明する。本開示に係る熱電変換材料は、組成式Ag2S(1-x)Sexで表され、xの値は、0.01よりも大きく、0.6よりも小さい。
次に、本開示の熱電変換材料の一実施形態を、図面を参照しつつ説明する。以下の図面において同一または相当する部分には同一の参照符号を付しその説明は繰り返さない。
本開示の実施の形態1に係る熱電変換材料の構成について説明する。本開示の実施の形態1に係る熱電変換材料は、組成式Ag2S(1-x)Sexで表され、xの値は、0.01よりも大きく、0.6よりも小さい。
次に、本開示に係る熱電変換材料を用いた熱電変換素子の一実施形態として、発電素子について説明する。
ことが好ましい。具体的には上記したように、zの値を0.3とした熱電変換材料において、350Kから380Kまでの温度域で使用されることが好ましい。このようにすることにより、ZTの値が大きい状態での使用となるため、より高い熱電変換効率を実現することができる。
π型熱電変換素子21を複数個電気的に接続することにより、熱電変換モジュールとしての発電モジュールを得ることができる。本実施の形態の熱電変換モジュールである発電モジュール41は、π型熱電変換素子21が直列に複数個接続された構造を有する。
次に、本開示に係る熱電変換材料を用いた熱電変換素子の他の実施の形態として、光センサである赤外線センサについて説明する。
次に、さらに他の実施の形態である実施の形態5について説明する。図11は、実施の形態5における熱電変換素子を示す概略斜視図である。図12は、図11に示す熱電変換素子を線分XII-XIIで切断した場合の概略断面図である。実施の形態5は、熱電変換材料部の形状および配置の状態において実施の形態2の場合とは異なっている。
12 領域
13a,14a,14b,14c,14d,14e,14f,14g,14h データ
21 π型熱電変換素子
22,52 p型熱電変換材料部
23,53 n型熱電変換材料部
24 高温側電極
25 第1低温側電極(低温側電極)
26 第2低温側電極(低温側電極)
27,42,43 配線
28 低温側絶縁体基板
29 高温側絶縁体基板
31,32,33,34,71c,71d,72c,72d,73c,73d,73e,74c,74d,75d,76c,76d,77c,77d,77e,78c,78d,79c 端部
41 熱電変換モジュール
51 赤外線センサ
54 基板
55 エッチングストップ層
56 n型熱電変換材料層
57 n+型オーミックコンタクト層
58 絶縁体層
59 p型熱電変換材料層
61 n側オーミックコンタクト電極
62 p側オーミックコンタクト電極
63 熱吸収用パッド
64 吸収体
65 保護膜
66 凹部
71 第1材料部
71a,71b,72a,72b,73a,73b,73f,74a,74b,75a,75b,76a,76b,77a,77b,77f,78a,78b,79a,79b 面
72 第2材料部
73 第3材料部
74 第4材料部
75 第5材料部
76 第6材料部
77 第7材料部
78 第8材料部
79 第9材料部
S1,S2,I 矢印
Claims (9)
- 組成式Ag2S(1-x)Sexで表され、
xの値は、0.01よりも大きく、0.6よりも小さい、熱電変換材料。 - xの値は、0.2よりも大きい、請求項1に記載の熱電変換材料。
- xの値は、0.5よりも小さい、請求項1または請求項2に記載の熱電変換材料。
- 熱電変換材料部と、
前記熱電変換材料部に接触して配置される第1電極と、
前記熱電変換材料部に接触し、前記第1電極と離れて配置される第2電極と、を備え、
前記熱電変換材料部を構成する材料は、請求項1から請求項3のいずれか1項に記載の熱電変換材料である、熱電変換素子。 - 前記熱電変換素子は、前記熱電変換材料内に単斜晶および直方晶のうちの少なくともいずれか一方の結晶構造と、立方晶の結晶構造と、が混在する温度域で使用される、請求項4に記載の熱電変換素子。
- 請求項4または請求項5に記載の熱電変換素子を含む、熱電変換モジュール。
- 光エネルギーを吸収し、温度が上昇する吸収体と、
前記吸収体に接続され、前記吸収体により温度差が形成される熱電変換材料部と、を備え、
温度差が形成された前記熱電変換材料部により流れる電流を取り出すことにより光を検出する光センサであって、
前記熱電変換材料部を構成する材料は、請求項1から請求項3のいずれか1項に記載の熱電変換材料である、光センサ。 - 板状であって、請求項1から請求項3のいずれか1項に記載の熱電変換材料から構成され、n型の導電型を有する第1材料部と、
板状であって、前記第1材料部上に配置され、可撓性を有する絶縁性の第2材料部と、
前記第1材料部上であって前記第2材料部と異なる位置に配置され、導電性を有する第3材料部と、
可撓性を有し、前記第2材料部上であって前記第3材料部と接触するように配置され、金属材料およびp型の導電型を有する熱電変換材料のうちの少なくともいずれか一方から構成される第4材料部と、を備える、熱電変換素子。 - 前記第2材料部を構成する材料は、Ag2Sである、請求項8に記載の熱電変換素子。
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PCT/JP2020/030154 WO2021039342A1 (ja) | 2019-08-30 | 2020-08-06 | 熱電変換材料、熱電変換素子、熱電変換モジュールおよび光センサ |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015079796A (ja) | 2013-10-15 | 2015-04-23 | 住友電気工業株式会社 | 熱電素子および熱電素子の製造方法 |
JP2015170766A (ja) | 2014-03-07 | 2015-09-28 | 学校法人東京理科大学 | 熱電変換材料含有樹脂組成物、及び熱電変換材料含有樹脂組成物からなるフィルム |
WO2018043478A1 (ja) | 2016-08-31 | 2018-03-08 | 住友電気工業株式会社 | 熱電変換材料、熱電変換素子および熱電変換モジュール |
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