JP7446314B2 - Euv光学系用硼素ベースキャッピング層 - Google Patents
Euv光学系用硼素ベースキャッピング層 Download PDFInfo
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- JP7446314B2 JP7446314B2 JP2021538808A JP2021538808A JP7446314B2 JP 7446314 B2 JP7446314 B2 JP 7446314B2 JP 2021538808 A JP2021538808 A JP 2021538808A JP 2021538808 A JP2021538808 A JP 2021538808A JP 7446314 B2 JP7446314 B2 JP 7446314B2
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims description 43
- 229910052796 boron Inorganic materials 0.000 title claims description 43
- 230000003287 optical effect Effects 0.000 claims description 117
- 238000000151 deposition Methods 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 57
- 238000009792 diffusion process Methods 0.000 claims description 47
- 230000004888 barrier function Effects 0.000 claims description 46
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 21
- 238000007740 vapor deposition Methods 0.000 claims description 21
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052580 B4C Inorganic materials 0.000 claims description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 16
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 15
- 229910052582 BN Inorganic materials 0.000 claims description 13
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 13
- 229910052707 ruthenium Inorganic materials 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 7
- 239000004408 titanium dioxide Substances 0.000 claims description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 5
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 384
- 230000008021 deposition Effects 0.000 description 44
- 238000001514 detection method Methods 0.000 description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000005286 illumination Methods 0.000 description 14
- 230000003647 oxidation Effects 0.000 description 13
- 238000007254 oxidation reaction Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 230000001681 protective effect Effects 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- 238000013500 data storage Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 239000011733 molybdenum Substances 0.000 description 6
- BFRGSJVXBIWTCF-UHFFFAOYSA-N niobium monoxide Chemical compound [Nb]=O BFRGSJVXBIWTCF-UHFFFAOYSA-N 0.000 description 6
- 210000002381 plasma Anatomy 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 150000002926 oxygen Chemical class 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- HFLAMWCKUFHSAZ-UHFFFAOYSA-N niobium dioxide Chemical compound O=[Nb]=O HFLAMWCKUFHSAZ-UHFFFAOYSA-N 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910039444 MoC Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003121 nonmonotonic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- General Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Description
本願では、2019年1月4日付米国仮特許出願第62/788330号に基づき優先権を主張するので、その開示内容全体を参照により本願に繰り入れることとする。
Claims (19)
- 基板上に配置された第1層と、
第1層上に配置された第2層と、
第2層上に配置された終端層と、
終端層上に配置されたキャッピング層と、
を備え、前記キャッピング層が炭化硼素キャッピング層、硼素キャッピング層及び窒化硼素キャッピング層を構成する光学素子。 - 請求項1に記載の光学素子であって、更に、その光学素子を有する極端紫外リソシステム又はその光学素子を有する検査システムが構成される光学素子。
- 請求項1に記載の光学素子であって、前記キャッピング層が5nm~30nm以内の厚みを有する光学素子。
- 請求項1に記載の光学素子であって、前記キャッピング層が2nm~10nm以内の厚みを有する光学素子。
- 請求項1に記載の光学素子であって、前記キャッピング層が2nm~25nm以内の厚みを有する光学素子。
- 請求項1に記載の光学素子であって、更に、前記終端層上に配置された拡散障壁を備え、その拡散障壁上に前記キャッピング層が配置されている光学素子。
- 請求項6に記載の光学素子であって、前記拡散障壁に炭素が含まれる光学素子。
- 請求項1に記載の光学素子であって、更に、前記キャッピング層上に配置された終端キャッピング層を備える光学素子。
- 請求項8に記載の光学素子であって、前記終端キャッピング層にルテニウム、二酸化チタン、二酸化ジルコニウム又は酸化ニオブが含まれる光学素子。
- 光学素子を作成する方法であって、
第1層が基板上に配置されるよう気相堆積を用い第1層を堆積させ、
第2層が第1層上に配置されるよう気相堆積を用い第2層を堆積させ、
終端層が第2層上に配置されるよう気相堆積を用い終端層を堆積させ、
キャッピング層が終端層上に配置されるよう、気相堆積を用い前記キャッピング層を堆積させ、前記キャッピング層が炭化硼素キャッピング層、硼素キャッピング層及び窒化硼素キャッピング層を構成する方法。 - 請求項10に記載の方法であって、前記キャッピング層が5nm~30nm以内の厚みまで堆積される方法。
- 請求項10に記載の方法であって、前記キャッピング層が2nm~10nm以内の厚みまで堆積される方法。
- 請求項10に記載の方法であって、前記キャッピング層が2nm~25nm以内の厚みまで堆積される方法。
- 請求項10に記載の方法であって、前記キャッピング層を、マグネトロンスパッタリングを用い堆積させる方法。
- 請求項10に記載の方法であって、更に、その拡散障壁が前記終端層上に配置され且つ前記キャッピング層がその拡散障壁上に配置されるよう、気相堆積を用い拡散障壁を堆積させる方法。
- 請求項15に記載の方法であって、前記拡散障壁に炭素が含まれる方法。
- 請求項10に記載の方法であって、更に、その終端キャッピング層が前記キャッピング層上に配置されるよう、気相堆積を用い終端キャッピング層を堆積させる方法。
- 請求項17に記載の方法であって、前記終端キャッピング層にルテニウム、二酸化チタン、二酸化ジルコニウム又は酸化ニオブが含まれる方法。
- 請求項1に記載の光学素子であって、前記終端層と反対側の前記キャッピング層の外表面は、前記基板から最も遠い点である、光学素子。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962788330P | 2019-01-04 | 2019-01-04 | |
US62/788,330 | 2019-01-04 | ||
US16/413,740 US11268911B2 (en) | 2019-01-04 | 2019-05-16 | Boron-based capping layers for EUV optics |
US16/413,740 | 2019-05-16 | ||
PCT/US2019/068220 WO2020142302A1 (en) | 2019-01-04 | 2019-12-23 | Boron-based capping layers for euv optics |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2022516292A JP2022516292A (ja) | 2022-02-25 |
JPWO2020142302A5 JPWO2020142302A5 (ja) | 2022-12-23 |
JP7446314B2 true JP7446314B2 (ja) | 2024-03-08 |
Family
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Family Applications (1)
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JP2021538808A Active JP7446314B2 (ja) | 2019-01-04 | 2019-12-23 | Euv光学系用硼素ベースキャッピング層 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11268911B2 (ja) |
EP (1) | EP3906434A4 (ja) |
JP (1) | JP7446314B2 (ja) |
KR (1) | KR20210100203A (ja) |
WO (1) | WO2020142302A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11848350B2 (en) * | 2020-04-08 | 2023-12-19 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001059901A (ja) | 1999-07-02 | 2001-03-06 | Asm Lithography Bv | 極端紫外光学素子用のキャッピング層 |
JP2005516182A (ja) | 2001-07-03 | 2005-06-02 | ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア | 不動態化保護膜二重層 |
JP2009109193A (ja) | 2007-10-26 | 2009-05-21 | Canon Inc | 軟x線光学素子の製造方法 |
JP2016514279A (ja) | 2013-02-15 | 2016-05-19 | エーエスエムエル ネザーランズ ビー.ブイ. | 放射源コレクタ及び製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6396900B1 (en) | 2001-05-01 | 2002-05-28 | The Regents Of The University Of California | Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application |
US7300724B2 (en) | 2004-06-09 | 2007-11-27 | Intel Corporation | Interference multilayer capping design for multilayer reflective mask blanks |
KR20070096922A (ko) | 2006-03-24 | 2007-10-02 | 주식회사 에스앤에스텍 | 하프톤형 위상반전 블랭크 마스크 및 이를 이용한 포토마스크 |
EP2210147B1 (en) * | 2007-10-02 | 2013-05-22 | Universita Degli Studi Di Padova | Aperiodic multilayer structures |
NL2008391A (en) | 2011-04-04 | 2012-10-08 | Asml Netherlands Bv | Radiation source-collector and lithographic apparatus. |
US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
US9739913B2 (en) * | 2014-07-11 | 2017-08-22 | Applied Materials, Inc. | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof |
US11320731B2 (en) * | 2015-12-14 | 2022-05-03 | Asml Netherlands B.V. | Membrane for EUV lithography |
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2019
- 2019-05-16 US US16/413,740 patent/US11268911B2/en active Active
- 2019-12-23 KR KR1020217024473A patent/KR20210100203A/ko not_active Application Discontinuation
- 2019-12-23 WO PCT/US2019/068220 patent/WO2020142302A1/en unknown
- 2019-12-23 JP JP2021538808A patent/JP7446314B2/ja active Active
- 2019-12-23 EP EP19906782.8A patent/EP3906434A4/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001059901A (ja) | 1999-07-02 | 2001-03-06 | Asm Lithography Bv | 極端紫外光学素子用のキャッピング層 |
JP2005516182A (ja) | 2001-07-03 | 2005-06-02 | ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア | 不動態化保護膜二重層 |
JP2009109193A (ja) | 2007-10-26 | 2009-05-21 | Canon Inc | 軟x線光学素子の製造方法 |
JP2016514279A (ja) | 2013-02-15 | 2016-05-19 | エーエスエムエル ネザーランズ ビー.ブイ. | 放射源コレクタ及び製造方法 |
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JP2022516292A (ja) | 2022-02-25 |
US20200217804A1 (en) | 2020-07-09 |
EP3906434A1 (en) | 2021-11-10 |
KR20210100203A (ko) | 2021-08-13 |
EP3906434A4 (en) | 2023-04-05 |
US11268911B2 (en) | 2022-03-08 |
WO2020142302A1 (en) | 2020-07-09 |
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