JP7419806B2 - 光導波路素子および光変調器 - Google Patents
光導波路素子および光変調器 Download PDFInfo
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Description
また、この構成により、第1バッファ層および第2バッファ層の厚さをコントロールすることで適切なDCドリフト特性を得ることができ、光導波路における光の伝搬を効率良く行うことができる。具体的には、厚さが2.0μm以下の基板において、第1バッファ層および第2バッファ層の厚さを0.3μm以上および2.0μm以下の範囲とすることで、適切なDCドリフト量を安定して得ることができる。
また、この構成により、第2バッファ層と補強基板とを適切かつ確実に接合することができる。
また、この構成により、第2バッファ層と補強基板とを接着層を介して適切かつ確実に接合することができる。
2a~2c 分岐部
3a~3c 合成部
5、102 基板
6 リブ部
7、101 補強基板
9a 上面バッファ層(第1バッファ層)
9b 下面バッファ層(第2バッファ層)
10、206 光導波路
20 接着層
103 バッファ層
200 光変調器
204 筐体
208 入力光ファイバ
210 出力光ファイバ
212a、212b、212c、212d 電極
218 中継基板
228 偏波合成部
240a、240b、240c、240d リードピン
250 終端基板
G 接地電極
S 信号電極
Claims (10)
- 電気光学効果を有する基板と、
前記基板に形成された光導波路と、
前記基板上に設けられた第1バッファ層と、
前記基板下に設けられた第2バッファ層と、
前記第2バッファ層の下に配置される補強基板と、を備える光導波路素子であって、
前記第1バッファ層および前記第2バッファ層が略同一の材料からなるとともに略同一の厚さを有し、前記第1バッファ層および前記第2バッファ層がそれぞれ前記基板の上面および下面に接触するように形成されており、
前記基板の厚さが、2.0μm以下であり、
前記第1バッファ層および前記第2バッファ層のそれぞれの厚さが、0.3μm以上であり2.0μm以下であり、
前記第2バッファ層の下面と前記補強基板の上面とが界面層または接着層により直接接合されていることを特徴とする光導波路素子。 - 前記第1バッファ層および前記第2バッファ層はそれぞれ、酸化シリコンと周期律表の三~八族、一b族および二b族の金属元素およびシリコンを除く半導体元素から選ばれる1種またはそれ以上の元素の酸化物の少なくとも1種との混合物、またはシリコンと前記金属元素および半導体元素から選ばれる1種またはそれ以上の元素との酸化物の透明絶縁膜からなることを特徴とする請求項1に記載の光導波路素子。
- 前記第1バッファ層および前記第2バッファ層の材料は、電気光学効果を有する前記基板の材料よりも屈折率が低いことを特徴とする請求項1または2に記載の光導波路素子。
- 前記第1バッファ層および前記第2バッファ層の材料は、電気抵抗率が108Ωcm以上であり、1016Ωcm以下であることを特徴とする請求項1から3のいずれか一項に記載の光導波路素子。
- 前記界面層が、前記第2バッファ層の下面と前記補強基板の上面のそれぞれの面の分子鎖が互いに絡み相溶した状態となっている層であることを特徴とする請求項1から4のいずれか一項に記載の光導波路素子。
- 前記接着層の厚さが10~500nmであることを特徴とする請求項1から4のいずれか一項に記載の光導波路素子。
- 前記第1バッファ層により前記基板の上面に生じる応力と同程度の応力を前記第2バッファ層により前記基板の下面に生じさせることを特徴とする請求項1から6のいずれか一項に記載の光導波路素子。
- 前記基板上に突設されたリブ部が前記光導波路として用いられることを特徴とする請求項1から7のいずれか一項に記載の光導波路素子。
- 複数のマッハツェンダー部により前記光導波路が形成されていることを特徴とする請求項1から8のいずれか一項に記載の光導波路素子。
- 請求項1から9のいずれか一項に記載の光導波路素子を構成する光導波路を少なくとも一部に用いたことを特徴とする光変調器。
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JP2019236029A JP7419806B2 (ja) | 2019-12-26 | 2019-12-26 | 光導波路素子および光変調器 |
US17/757,951 US20230026594A1 (en) | 2019-12-26 | 2020-10-20 | Optical waveguide element and optical modulator |
PCT/JP2020/039347 WO2021131273A1 (ja) | 2019-12-26 | 2020-10-20 | 光導波路素子および光変調器 |
CN202080089292.4A CN114846392A (zh) | 2019-12-26 | 2020-10-20 | 光波导元件及光调制器 |
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JP (1) | JP7419806B2 (ja) |
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WO (1) | WO2021131273A1 (ja) |
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US11693290B2 (en) * | 2020-04-21 | 2023-07-04 | Fujitsu Optical Components Limited | Optical waveguide device |
CN111522154A (zh) * | 2020-05-14 | 2020-08-11 | 上海徕刻科技有限公司 | 一种弱相位漂移的铌酸锂波导 |
US20240241396A1 (en) * | 2021-09-30 | 2024-07-18 | Sumitomo Osaka Cement Co., Ltd. | Optical waveguide device, and optical transmission apparatus and optical modulation device using same |
CN117337408A (zh) | 2022-03-30 | 2024-01-02 | 住友大阪水泥股份有限公司 | 光波导元件及使用了该光波导元件的光调制器件、以及光发送装置 |
WO2023188361A1 (ja) * | 2022-03-31 | 2023-10-05 | 住友大阪セメント株式会社 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
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JPH0756036A (ja) * | 1993-08-13 | 1995-03-03 | Fujitsu Ltd | 光導波路デバイス及びその製造方法 |
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- 2020-10-20 US US17/757,951 patent/US20230026594A1/en active Pending
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JP2006267224A (ja) | 2005-03-22 | 2006-10-05 | Sumitomo Osaka Cement Co Ltd | 光変調器の製造方法及び光変調器 |
JP2007122038A (ja) | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | 光制御デバイス |
JP2007101641A (ja) | 2005-09-30 | 2007-04-19 | Sumitomo Osaka Cement Co Ltd | 光変調器及びその製造方法 |
JP2008089936A (ja) | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
JP2009258687A (ja) | 2008-03-28 | 2009-11-05 | Ngk Insulators Ltd | 光変調器 |
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WO2021131273A1 (ja) | 2021-07-01 |
CN114846392A (zh) | 2022-08-02 |
JP2021105650A (ja) | 2021-07-26 |
US20230026594A1 (en) | 2023-01-26 |
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