JP7340787B2 - 撮像装置 - Google Patents
撮像装置 Download PDFInfo
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- JP7340787B2 JP7340787B2 JP2019034996A JP2019034996A JP7340787B2 JP 7340787 B2 JP7340787 B2 JP 7340787B2 JP 2019034996 A JP2019034996 A JP 2019034996A JP 2019034996 A JP2019034996 A JP 2019034996A JP 7340787 B2 JP7340787 B2 JP 7340787B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14605—Structural or functional details relating to the position of the pixel elements, e.g. smaller pixel elements in the center of the imager compared to pixel elements at the periphery
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14607—Geometry of the photosensitive area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14641—Electronic components shared by two or more pixel-elements, e.g. one amplifier shared by two pixel elements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
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- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
まず、本開示の実施の形態を詳細に説明する前に、本開示の一態様の概要を説明する。本開示の一態様の概要は、以下の通りである。
[構成]
まず、本実施の形態に係る撮像装置の構成について図1を用いて説明する。図1は、本実施の形態に係る撮像装置10の平面構造を模式的に示す平面図である。
以下では、実施の形態の第1変形例について、図7を用いて説明する。図7は、本変形例に係る撮像装置の容量素子110及びその近傍を拡大して示す要部拡大断面図である。
以上、1つ又は複数の態様に係る撮像装置について、実施の形態に基づいて説明したが、本開示は、これらの実施の形態に限定されるものではない。本開示の主旨を逸脱しない限り、当業者が思いつく各種変形を本実施の形態に施したもの、及び、異なる実施の形態における構成要素を組み合わせて構築される形態も、本開示の範囲内に含まれる。
20 画素部
30 垂直走査回路
40 水平走査回路
50 垂直信号線
60 電源線
100 単位セル
101 低感度画素
102 高感度画素
103 スイッチトランジスタ
104 リセットトランジスタ
105 増幅トランジスタ
106 第1のFD部
107 第2のFD部
110、310 容量素子
111、311 下部電極
112、312 上部電極
113、313 誘電体層
114 トレンチ
115 電荷蓄積領域
120 半導体基板
130 配線層
131a、131b、131c、131d、131e 層間絶縁層
132a、132b、132c 配線
140、240 コンタクトプラグ
141 拡散領域
150 平坦化膜
160 マイクロレンズ
410、420 フォトダイオード
500、510、520 転送トランジスタ
610 ゲート
620 ゲート絶縁膜
Claims (9)
- 第1主面、及び前記第1主面と反対側の第2主面を有する半導体基板と、
前記半導体基板内に配置され、入射した第1の光を変換することにより第1の信号電荷を生成する第1の光電変換部と、
前記半導体基板内に配置され、入射した第2の光を変換することにより第2の信号電荷を生成する前記第1の光電変換部とは異なる第2の光電変換部と、
前記第1主面の上方に配置された配線層と、
前記配線層内に配置され、平面視において、前記第1の光電変換部を囲み、かつ前記配線層内に複数のトレンチ構造を有する容量素子と、を備え、
前記容量素子は、第1の電極、第2の電極、及び前記第1の電極と前記第2の電極との間に配置された誘電体層を含み、
前記第1の電極は、前記第1の光電変換部又は前記第2の光電変換部に接続されている
撮像装置。 - 前記第1の光電変換部及び前記第2の光電変換部のうち、前記第1の電極と接続されている一方によって生成される信号電荷を蓄積する電荷蓄積領域をさらに備え、
前記第1の電極は、前記半導体基板と前記第2の電極との間に配置され、
前記第2の電極は、前記電荷蓄積領域を覆っている、
請求項1に記載の撮像装置。 - 平面視において、前記第1の光電変換部の面積は前記第2の光電変換部の面積と異なり、
前記第1の電極は、前記第1の光電変換部及び前記第2の光電変換部のうち前記面積が小さい方に接続されている、
請求項1又は2に記載の撮像装置。 - 前記第1の光電変換部の前記面積は、前記第2の光電変換部の前記面積よりも大きい、
請求項3に記載の撮像装置。 - 前記半導体基板は、前記第1の光及び前記第2の光が前記第2主面から前記半導体基板に入射するように構成されている、
請求項1から4のいずれかに記載の撮像装置。 - 前記第2の電極に一定の電位を印加するための配線をさらに備える、
請求項1から5のいずれかに記載の撮像装置。 - さらに、トランジスタを備え、
前記第1の電極は、前記トランジスタを介して前記第1の光電変換部又は前記第2の光電変換部に接続されている
請求項1から6のいずれかに記載の撮像装置。 - 前記第2の電極は、前記第1の光電変換部を連続的に囲む、
請求項1から7のいずれかに記載の撮像装置。 - 前記トレンチ構造の底部に接続されたコンタクトプラグを介して前記半導体基板に設けられた拡散領域に接続される、
請求項1から8のいずれかに記載の撮像装置。
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JP2018050135 | 2018-03-16 | ||
JP2018050135 | 2018-03-16 |
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JP2019165212A JP2019165212A (ja) | 2019-09-26 |
JP7340787B2 true JP7340787B2 (ja) | 2023-09-08 |
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US (2) | US10840280B2 (ja) |
JP (1) | JP7340787B2 (ja) |
CN (1) | CN110278396B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017163010A (ja) * | 2016-03-10 | 2017-09-14 | ソニー株式会社 | 撮像装置、電子機器 |
CN110278396B (zh) * | 2018-03-16 | 2024-07-12 | 松下知识产权经营株式会社 | 摄像装置 |
CN114730779A (zh) * | 2019-12-17 | 2022-07-08 | 索尼半导体解决方案公司 | 摄像元件、摄像元件驱动方法和电子装置 |
US11362121B2 (en) * | 2020-01-28 | 2022-06-14 | Omnivision Technologies, Inc. | Light attenuation layer fabrication method and structure for image sensor |
JP2021150837A (ja) * | 2020-03-19 | 2021-09-27 | 株式会社リコー | 固体撮像素子、画像読取装置、及び画像形成装置 |
CN112563299B (zh) * | 2020-12-10 | 2023-03-24 | 成都微光集电科技有限公司 | Cmos图像传感器及其制备方法 |
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JP4497366B2 (ja) * | 2005-02-04 | 2010-07-07 | 国立大学法人東北大学 | 光センサおよび固体撮像装置 |
JP2008235334A (ja) * | 2007-03-16 | 2008-10-02 | Sony Corp | 固体撮像装置の製造方法、固体撮像装置、および、カメラ |
JP2013140914A (ja) | 2012-01-06 | 2013-07-18 | Toshiba Corp | 固体撮像素子 |
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JP2016149381A (ja) * | 2013-06-17 | 2016-08-18 | パナソニックIpマネジメント株式会社 | 固体撮像装置およびその駆動方法 |
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US11527560B2 (en) | 2022-12-13 |
US10840280B2 (en) | 2020-11-17 |
US20210028207A1 (en) | 2021-01-28 |
CN110278396A (zh) | 2019-09-24 |
JP2019165212A (ja) | 2019-09-26 |
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US20190288018A1 (en) | 2019-09-19 |
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