JP7325727B2 - 光学システム及び空間位相変調器 - Google Patents
光学システム及び空間位相変調器 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133734—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by obliquely evaporated films, e.g. Si or SiO2 films
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K19/00—Liquid crystal materials
- C09K19/04—Liquid crystal materials characterised by the chemical structure of the liquid crystal components, e.g. by a specific unit
- C09K19/06—Non-steroidal liquid crystal compounds
- C09K19/08—Non-steroidal liquid crystal compounds containing at least two non-condensed rings
- C09K19/10—Non-steroidal liquid crystal compounds containing at least two non-condensed rings containing at least two benzene rings
- C09K19/14—Non-steroidal liquid crystal compounds containing at least two non-condensed rings containing at least two benzene rings linked by a carbon chain
- C09K19/18—Non-steroidal liquid crystal compounds containing at least two non-condensed rings containing at least two benzene rings linked by a carbon chain the chain containing carbon-to-carbon triple bonds, e.g. tolans
- C09K2019/181—Ph-C≡C-Ph
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
- G02F1/133331—Cover glasses
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/50—Phase-only modulation
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- Crystallography & Structural Chemistry (AREA)
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- Liquid Crystal (AREA)
Description
Claims (13)
- レーザ加工用の光学システムであって、
光源と、
コントローラと、
前記コントローラにより制御されて、加工対象面に形成すべき画像に対応する位相変調光を生成するように、前記光源から入力されるパルス光としてのレーザ光を位相変調し、前記位相変調したパルス光を前記位相変調光として出力する空間位相変調器と、
を備え、
前記光学システムは、前記加工対象面に対する前記位相変調光の照射により前記加工対象面を加工するように構成され、
前記空間位相変調器は、
液晶層と、
前記液晶層に電界を形成するように構成される電極層と、
を備え、
前記液晶層が、液晶性混合物に光作用により生じる重合反応を抑制する性質を有する有機化合物が重合抑制剤として添加された液晶組成物により構成され、
前記液晶組成物が、3重量%以上であって20重量%までの範囲の前記重合抑制剤を含む
液晶デバイスである光学システム。 - 前記重合抑制剤は、ラジカル重合を抑制する性質を有する請求項1記載の光学システム。
- 前記液晶性混合物がトラン骨格を有する液晶性化合物を含み、
前記重合抑制剤が、前記トラン骨格に対する光作用によって生じるラジカル重合を抑制する請求項1又は請求項2記載の光学システム。 - 前記液晶組成物は、3重量%以上であって10重量%までの範囲の前記重合抑制剤を含む請求項1~請求項3のいずれか一項記載の光学システム。
- 前記重合抑制剤は、芳香環構造と炭素数3以上のアルキル基構造とを有する有機化合物である請求項1~請求項4のいずれか一項記載の光学システム。
- 前記電極層は、
前記液晶層の上に位置する透明電極層と、
前記液晶層の下に位置する下部電極層と、
を備え、
前記液晶層と前記透明電極層との間、及び、前記液晶層と前記下部電極層との間には、前記液晶層における液晶分子の初期配向を垂直方向又は水平方向に制御するための配向膜が設けられており、
前記液晶層は、垂直配向(VA)液晶層又は水平配向(HA)液晶層として構成される請求項1~請求項5のいずれか一項記載の光学システム。 - 前記空間位相変調器が、LCOSデバイスとして構成される請求項1~請求項6のいずれか一項記載の光学システム。
- 前記液晶性混合物は、ネマティック液晶性を示す請求項1~請求項7のいずれか一項記載の光学システム。
- 前記空間位相変調器は、
前記パルス光が入力される透明な固体材料層と、
前記電極層のうちの第一の層としての前記固体材料層の下に位置する透明電極層と、
前記透明電極層の下に位置する第一の配向膜層と、
前記液晶層としての前記第一の配向膜層の下に位置する液晶層と、
前記液晶層の下に位置する第二の配向膜層と、
前記電極層のうちの第二の層としての前記第二の配向膜層の下に位置する下部電極層と、
前記下部電極層の下に位置するシリコン基板と、
を備え、
前記第一及び第二の配向膜層が、ケイ素酸化物(SiOx)の無機配向膜層である
請求項1~請求項8のいずれか一項記載の光学システム。 - 前記透明電極層が、酸化インジウムスズ(ITO)透明電極層である請求項9記載の光学システム。
- 請求項1~請求項10のいずれか一項記載の光学システムに用いられる空間位相変調器であって、
パルス光が入力される透明な固体材料層と、
前記固体材料層の下に位置する透明電極層と、
前記透明電極層の下に位置する第一の配向膜層と、
前記第一の配向膜層の下に位置する液晶層と、
前記液晶層の下に位置する第二の配向膜層と、
前記第二の配向膜層の下に位置する下部電極層と、
前記下部電極層の下に位置するシリコン基板と、
を備え、
前記液晶層は、液晶性混合物に光作用による重合反応を抑制する性質を有する有機化合物が重合抑制剤として添加された液晶組成物により構成され、
前記液晶組成物が、3重量%以上であって20重量%までの範囲の前記重合抑制剤を含む空間位相変調器。 - 前記第一及び第二の配向膜層は、ケイ素酸化物(SiOx)の無機配向膜層である請求項11記載の空間位相変調器。
- 前記透明電極層は、酸化インジウムスズ(ITO)透明電極層である請求項12記載の空間位相変調器。
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005100609A (ja) | 2003-09-01 | 2005-04-14 | Asahi Glass Co Ltd | 光ヘッド装置 |
JP2006169472A (ja) | 2004-12-20 | 2006-06-29 | Chisso Corp | 液晶組成物および液晶表示素子 |
JP2014012836A (ja) | 2012-06-29 | 2014-01-23 | Merck Patent Gmbh | 液晶媒体 |
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JPH09291282A (ja) | 1996-04-26 | 1997-11-11 | Sumitomo Chem Co Ltd | 安定化した液晶材料およびこれを用いた液晶素子 |
JPH1036847A (ja) * | 1996-07-25 | 1998-02-10 | Seiko Epson Corp | 液晶表示素子およびその製造方法 |
EP2265691B1 (de) | 2008-04-22 | 2012-08-29 | Merck Patent GmbH | Flüssigkristallines medium |
JP2010197450A (ja) | 2009-02-23 | 2010-09-09 | Citizen Holdings Co Ltd | 液晶光学素子および光ピックアップ装置 |
KR102277883B1 (ko) | 2014-10-10 | 2021-07-15 | 삼성디스플레이 주식회사 | 액정표시패널 |
GB2568021B (en) * | 2017-09-08 | 2021-12-01 | Dualitas Ltd | Holographic projector |
JP7294325B2 (ja) * | 2018-04-16 | 2023-06-20 | ソニーグループ株式会社 | 液晶表示装置および電子機器 |
GB2573787B (en) * | 2018-05-17 | 2022-02-23 | Envisics Ltd | Image projector |
JP2020076826A (ja) | 2018-11-06 | 2020-05-21 | Dic株式会社 | 液晶表示素子 |
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- 2019-10-10 JP JP2021551064A patent/JP7325727B2/ja active Active
- 2019-10-10 US US17/766,419 patent/US11993741B2/en active Active
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005100609A (ja) | 2003-09-01 | 2005-04-14 | Asahi Glass Co Ltd | 光ヘッド装置 |
JP2006169472A (ja) | 2004-12-20 | 2006-06-29 | Chisso Corp | 液晶組成物および液晶表示素子 |
JP2014012836A (ja) | 2012-06-29 | 2014-01-23 | Merck Patent Gmbh | 液晶媒体 |
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US11993741B2 (en) | 2024-05-28 |
WO2021070351A1 (ja) | 2021-04-15 |
US20230140510A1 (en) | 2023-05-04 |
JPWO2021070351A1 (ja) | 2021-04-15 |
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