JP7287181B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7287181B2 JP7287181B2 JP2019151436A JP2019151436A JP7287181B2 JP 7287181 B2 JP7287181 B2 JP 7287181B2 JP 2019151436 A JP2019151436 A JP 2019151436A JP 2019151436 A JP2019151436 A JP 2019151436A JP 7287181 B2 JP7287181 B2 JP 7287181B2
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Description
30 :半導体装置
32 :半導体基板
40 :保護膜
42 :空洞
44 :親水性膜
46 :層間絶縁膜
Claims (1)
- 半導体基板と、
前記半導体基板上に設けられている層間絶縁膜と、
前記層間絶縁膜上に設けられているとともに、前記半導体基板の外周縁に沿って枠状に延びているポリイミド樹脂の保護膜と、を備えており、
前記保護膜には、前記保護膜の面内に分散して配置されている複数の空洞が形成されている、半導体装置。
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JP2019151436A JP7287181B2 (ja) | 2019-08-21 | 2019-08-21 | 半導体装置 |
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JP2019151436A JP7287181B2 (ja) | 2019-08-21 | 2019-08-21 | 半導体装置 |
Publications (2)
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JP2021034485A JP2021034485A (ja) | 2021-03-01 |
JP7287181B2 true JP7287181B2 (ja) | 2023-06-06 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016134546A (ja) | 2015-01-21 | 2016-07-25 | トヨタ自動車株式会社 | 半導体装置と、その製造方法 |
JP2018019010A (ja) | 2016-07-29 | 2018-02-01 | トヨタ自動車株式会社 | 半導体装置 |
WO2018078799A1 (ja) | 2016-10-28 | 2018-05-03 | 三菱電機株式会社 | 半導体装置および電力変換装置 |
JP2018181962A (ja) | 2017-04-06 | 2018-11-15 | 株式会社デンソー | 半導体装置 |
JP2020068223A (ja) | 2018-10-22 | 2020-04-30 | 三菱電機株式会社 | 半導体装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH06283864A (ja) * | 1993-03-26 | 1994-10-07 | Oki Electric Ind Co Ltd | 多層配線構造の形成方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016134546A (ja) | 2015-01-21 | 2016-07-25 | トヨタ自動車株式会社 | 半導体装置と、その製造方法 |
JP2018019010A (ja) | 2016-07-29 | 2018-02-01 | トヨタ自動車株式会社 | 半導体装置 |
WO2018078799A1 (ja) | 2016-10-28 | 2018-05-03 | 三菱電機株式会社 | 半導体装置および電力変換装置 |
JP2018181962A (ja) | 2017-04-06 | 2018-11-15 | 株式会社デンソー | 半導体装置 |
JP2020068223A (ja) | 2018-10-22 | 2020-04-30 | 三菱電機株式会社 | 半導体装置 |
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