JP7246827B2 - 自己診断機能を備える加工装置 - Google Patents
自己診断機能を備える加工装置 Download PDFInfo
- Publication number
- JP7246827B2 JP7246827B2 JP2018244899A JP2018244899A JP7246827B2 JP 7246827 B2 JP7246827 B2 JP 7246827B2 JP 2018244899 A JP2018244899 A JP 2018244899A JP 2018244899 A JP2018244899 A JP 2018244899A JP 7246827 B2 JP7246827 B2 JP 7246827B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- frequency
- unit
- component
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
- B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
- B23Q17/0957—Detection of tool breakage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
- B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
- B23Q17/0971—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining by measuring mechanical vibrations of parts of the machine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
- B23Q17/0995—Tool life management
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Prostheses (AREA)
- Curing Cements, Concrete, And Artificial Stone (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Description
3 フレーム
5 テープ
7 被加工物
2 切削装置
4 基台
4a,4b,4c 開口
6 カセット支持台
8 カセット
10 X軸移動テーブル
12 防塵防滴カバー
14 保持テーブル
14a 保持面
14b クランプ
16 制御ユニット
16a 固有振動数記録部
16b 周波数特性記憶部
16c 判定部
18 振動センサ
22,22a,22b 切削ユニット
24 支持構造
28 Y軸ガイドレール
30 Y軸移動プレート
32 Y軸ボールねじ
34 Y軸パルスモータ
36 Z軸ガイドレール
38 Z軸移動プレート
40 Z軸ボールねじ
42 Z軸パルスモータ
48 カメラユニット
50 洗浄ユニット
52 洗浄テーブル
54 洗浄ノズル
54a 洗浄液
56 ベース
58 X軸移動機構
60,70b サーボモータ
62 X軸ボールねじ
64 保持テーブルスライダ
66 テーブルベース
66a θ軸モータ
68a,68b,68c 振動
70a 回転軸
72a,72b 振動波形
74,78 固有振動数
76a,76b,80a,80b ピーク
82a,82b 差
Claims (4)
- 被加工物を保持する保持テーブルと、該保持テーブルに保持された被加工物を加工する加工ユニットと、を備える加工装置であって、
該加工装置の各構成要素を制御する制御ユニットと、
該加工ユニットによる加工が行われていない状態で該加工装置の状態を診断する自己診断ユニットと、を備え、
該自己診断ユニットは、
該加工装置に所定範囲の振動数の振動を付与する振動源と、
該振動源により発せられ該加工装置中を伝播した振動を観測し、振動波形を取得する振動センサと、を備え、
該自己診断ユニットは、さらに、該制御ユニット中に、
該加工装置の該各構成要素が正常な状態である際に、該加工装置中を伝播する振動が該振動センサで観測されることで取得された振動波形から該振動の周波数特性を算出し、該加工装置の該各構成要素に共振が生じる振動数を固有振動数として記録する固有振動数記録部と、
該振動センサが取得した振動波形から算出される該振動の周波数特性を蓄積する周波数特性記憶部と、
該振動の周波数特性に含まれる振動ピークの振動数と、該振動ピークが帰属する該構成要素の該固有振動数記録部が記録する該固有振動数と、の差が所定の範囲を超える場合、該振動ピークが帰属する該構成要素に変化があると判定する判定部と、を備え、
該制御ユニットには、該固有振動数記録部が該固有振動数を記録する際の該振動波形の取得時の該加工装置の該各構成要素の状態に関する情報が記憶され、
該制御ユニットは、該加工装置の稼働後に該周波数特性記憶部が該周波数特性を蓄積するとき該加工装置の該各構成要素の状態に関する該情報を基に該各構成要素を制御してから該振動源に振動を生じさせることを特徴とする自己診断機能を備える加工装置。 - 該振動源は、サーボモータを備えるアクチュエータであり、該サーボモータの回転の反転を繰り返して該所定範囲の振動数の振動を発生させることを特徴とする請求項1記載の自己診断機能を備える加工装置。
- 該サーボモータは、該保持テーブル又は該加工ユニットを移動させるボールねじ、又は、該保持テーブルを回転させることを特徴とする請求項2記載の自己診断機能を備える加工装置。
- 該振動センサは、加速度センサであることを特徴とする請求項1乃至3のいずれかに記載の自己診断機能を備える加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018244899A JP7246827B2 (ja) | 2018-12-27 | 2018-12-27 | 自己診断機能を備える加工装置 |
KR1020190158480A KR20200081239A (ko) | 2018-12-27 | 2019-12-02 | 자기 진단 기능을 구비하는 가공 장치 |
CN201911323381.6A CN111383959A (zh) | 2018-12-27 | 2019-12-20 | 具有自诊断功能的加工装置 |
TW108147480A TWI821491B (zh) | 2018-12-27 | 2019-12-24 | 具備自我診斷功能的加工裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018244899A JP7246827B2 (ja) | 2018-12-27 | 2018-12-27 | 自己診断機能を備える加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020106375A JP2020106375A (ja) | 2020-07-09 |
JP7246827B2 true JP7246827B2 (ja) | 2023-03-28 |
Family
ID=71221319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018244899A Active JP7246827B2 (ja) | 2018-12-27 | 2018-12-27 | 自己診断機能を備える加工装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7246827B2 (ja) |
KR (1) | KR20200081239A (ja) |
CN (1) | CN111383959A (ja) |
TW (1) | TWI821491B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022113966A1 (ja) * | 2020-11-27 | 2022-06-02 | ファナック株式会社 | 工作機械および診断方法 |
WO2022131184A1 (ja) * | 2020-12-18 | 2022-06-23 | ファナック株式会社 | 振動診断支援装置、振動診断支援方法および工作機械 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012161861A (ja) | 2011-02-04 | 2012-08-30 | Disco Corp | 加工装置 |
JP2013257253A (ja) | 2012-06-14 | 2013-12-26 | Nsk Ltd | ボールねじ装置の異常検出装置及び異常検出方法 |
JP2014130059A (ja) | 2012-12-28 | 2014-07-10 | Canon Inc | 接触式三次元形状測定装置及びプローブ制御方法 |
JP2018028512A (ja) | 2016-08-19 | 2018-02-22 | オークマ株式会社 | 回転軸を有する機械 |
JP2018194303A (ja) | 2017-05-03 | 2018-12-06 | 上銀科技股▲フン▼有限公司 | リニアガイドウェイの予圧変化を計測する方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62173147A (ja) | 1986-01-24 | 1987-07-30 | Disco Abrasive Sys Ltd | 温度変化に起因する誤差が低減された精密装置 |
JP2695366B2 (ja) * | 1993-05-14 | 1997-12-24 | 川崎製鉄株式会社 | 低速回転機械の異常診断方法 |
JPH07270228A (ja) * | 1994-03-29 | 1995-10-20 | Kawasaki Steel Corp | 低速回転機械の異常診断方法 |
US5518347A (en) * | 1995-05-23 | 1996-05-21 | Design And Manufacturing Solutions, Inc. | Tuned damping system for suppressing vibrations during machining |
TW286359B (en) * | 1996-02-27 | 1996-09-21 | China Steel Co Ltd | The vibration diagnosis method for crack & breakdown of roller |
JP5318666B2 (ja) * | 2009-05-29 | 2013-10-16 | 一般財団法人電力中央研究所 | 常時微動計測に基づく建物の健全性診断法、診断装置及び診断プログラム |
CN109073505A (zh) * | 2016-03-30 | 2018-12-21 | Ntn株式会社 | 齿轮装置的状态监视***以及状态监视方法 |
TWI609737B (zh) * | 2016-12-22 | 2018-01-01 | Hiwin Tech Corp | 偵測工具機的線性滑軌預壓值變化的方法 |
-
2018
- 2018-12-27 JP JP2018244899A patent/JP7246827B2/ja active Active
-
2019
- 2019-12-02 KR KR1020190158480A patent/KR20200081239A/ko not_active Application Discontinuation
- 2019-12-20 CN CN201911323381.6A patent/CN111383959A/zh active Pending
- 2019-12-24 TW TW108147480A patent/TWI821491B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012161861A (ja) | 2011-02-04 | 2012-08-30 | Disco Corp | 加工装置 |
JP2013257253A (ja) | 2012-06-14 | 2013-12-26 | Nsk Ltd | ボールねじ装置の異常検出装置及び異常検出方法 |
JP2014130059A (ja) | 2012-12-28 | 2014-07-10 | Canon Inc | 接触式三次元形状測定装置及びプローブ制御方法 |
JP2018028512A (ja) | 2016-08-19 | 2018-02-22 | オークマ株式会社 | 回転軸を有する機械 |
JP2018194303A (ja) | 2017-05-03 | 2018-12-06 | 上銀科技股▲フン▼有限公司 | リニアガイドウェイの予圧変化を計測する方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI821491B (zh) | 2023-11-11 |
JP2020106375A (ja) | 2020-07-09 |
CN111383959A (zh) | 2020-07-07 |
TW202023752A (zh) | 2020-07-01 |
KR20200081239A (ko) | 2020-07-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI690986B (zh) | 加工系統 | |
US10121672B2 (en) | Cutting method for cutting processing-target object and cutting apparatus that cuts processing-target object | |
TWI798421B (zh) | 加工裝置 | |
JP7246827B2 (ja) | 自己診断機能を備える加工装置 | |
US10643909B2 (en) | Inspecting method for inspecting influence of installation environment upon processing apparatus | |
JP2011101908A (ja) | 切削装置及び切削方法 | |
JP6866217B2 (ja) | 切削装置 | |
KR20160100844A (ko) | 가공 장치 | |
CN108858834B (zh) | 切削装置 | |
KR102631713B1 (ko) | 가공 방법 | |
JP2013058288A (ja) | 磁気ヘッド素子検査方法及びその装置 | |
US11342233B2 (en) | Wafer polishing method | |
JP2018091629A (ja) | 振動測定装置及びこれを備えた切削装置 | |
JP7286456B2 (ja) | 加工装置の制御方法 | |
JP7083579B2 (ja) | 加工装置 | |
JP7051502B2 (ja) | 切削装置の振動を抑制する振動抑制方法 | |
JP2018182178A (ja) | 加工装置の診断方法 | |
JP7166727B2 (ja) | 加工システム及び加工装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211008 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220907 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221011 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221209 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230314 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230314 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7246827 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |