JP7201342B2 - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
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- JP7201342B2 JP7201342B2 JP2018108902A JP2018108902A JP7201342B2 JP 7201342 B2 JP7201342 B2 JP 7201342B2 JP 2018108902 A JP2018108902 A JP 2018108902A JP 2018108902 A JP2018108902 A JP 2018108902A JP 7201342 B2 JP7201342 B2 JP 7201342B2
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Description
ウエーハ10を用意したならば、図1(a)に示すように、サブストレート30の上面30aにシート20を敷設し、シート20の上面20aに、ウエーハ10の裏面10bを上方に、すなわち、表面10aを下方に向けて配設する。シート20は、円盤形状のウエーハ10と略同形状であり、ポリオレフィン系シート、又はポリエステル系シートによって構成されるが、本実施形態では、シート20としてポリオレフィン系のポリエチレン(PE)シートを選択した場合について説明する。サブストレート30は、ポリエチレンテレフタレート(PET)により構成され、ウエーハ10、及びシート20よりも一回り大きい寸法で、且つ、ウエーハ10、及びシート20よりも高い剛性になる厚みに設定されることが好ましい。なお、本実施形態では、ウエーハ配設工程を実施する際に、サブストレート30を、矩形状の基台50の上面中央に配設された円盤形状のヒータテーブル40の上面40aの中央に載置する(図1(b)を参照。)。ヒータテーブル40の内部には、図示しない温度センサー、及び電気ヒータが内蔵されており、図示しない制御装置、及び電源に接続され、ヒータテーブル40を所望の温度に調整することが可能になっている。
上記したウエーハ配設工程が実施されたならば、図2に示すシート熱圧着工程を実施する。シート熱圧着工程は、シート20を介してサブストレート30に配設されたウエーハ10を密閉環境内で減圧してシート20を加熱すると共にウエーハ10を押圧してシート20を介してウエーハ10をサブストレート30に熱圧着する工程であり、以下に具体的に説明する。
上記したシート熱圧着工程を実施したならば、一体化ユニットWとされたウエーハ10の裏面10bに研削加工を施す裏面加工工程を実施する。以下に、裏面加工工程について具体的に説明する。
上記した裏面加工工程が完了したならば、ウエーハ10をシート20から剥離する剥離工程を実施する。剥離工程の実施手順について、以下に説明する。
12:デバイス
14:分割予定ライン
16:バンプ
20:シート
22:盛り上がり縁部
30:サブストレート
40:ヒータテーブル
50:基台
52:吸引孔
60:熱圧着装置
62:密閉カバー部材
64:押圧部材
64a:押圧プレート
70:研削装置
71:保持手段
72:研削手段
74:回転スピンドル
78:研削ホイール
80:剥離用保持手段
100:フィルム状部材
110:ローラ
Claims (4)
- 複数のデバイスが、分割予定ラインによって区画され表面に形成されたウエーハの裏面を加工するウエーハの加工方法であって、
ウエーハを支持するサブストレートの上面にポリオレフィン系シート、又はポリエステル系シートのいずれかのシートを敷設し、該シートの上面にウエーハの表面を位置付けて配設するウエーハ配設工程と、
該シートを介して該サブストレートに配設されたウエーハを密閉環境内で減圧して該シートを加熱すると共にウエーハを押圧して該シートを介してウエーハを該サブストレートに熱圧着するシート熱圧着工程と、
該シート熱圧着工程により該シートを介して該サブストレートに熱圧着されたウエーハの裏面に加工を施す裏面加工工程と、
該裏面加工工程により裏面が加工されたウエーハを該シートから剥離する剥離工程と、
から少なくとも構成され、
該ポリオレフィン系のシートは、ポリエチレンシート、ポリプロピレンシート、ポリスチレンシートのいずれかで構成され、該シートとしてポリオレフィン系のシートが選択された場合の該シート熱圧着工程における該シートの加熱温度は、該シートがポリエチレンシートで構成される場合は120~140℃であり、該シートがポリプロピレンシートで構成される場合は160~180℃であり、該シートがポリスチレンシートで構成される場合は220~240℃であり、
該ポリエステル系のシートは、ポリエチレンテレフタレートシート、ポリエチレンナフタレートシート、のいずれかで構成され、該シートとしてポリエステル系のシートが選択された場合の該シート熱圧着工程における該シートの加熱温度は、該シートがポリエチレンテレフタレートシートで構成される場合は250~270℃であり、該シートがポリエチレンナフタレートシートで構成される場合は160~180℃であるウエーハの加工方法。 - 該裏面加工工程において、ウエーハの裏面を研削する研削工程が実施される請求項1に記載のウエーハの加工方法。
- 複数のデバイスが、分割予定ラインによって区画され表面に形成されたウエーハの裏面を加工するウエーハの加工方法であって、
ウエーハを支持するサブストレートの上面にポリオレフィン系シート、又はポリエステル系シートのいずれかのシートを敷設し、該シートの上面にウエーハの表面を位置付けて配設するウエーハ配設工程と、
該シートを介して該サブストレートに配設されたウエーハを密閉環境内で減圧して該シートを加熱すると共にウエーハを押圧して該シートを介してウエーハを該サブストレートに熱圧着するシート熱圧着工程と、
該シート熱圧着工程により該シートを介して該サブストレートに熱圧着されたウエーハの裏面に加工を施す裏面加工工程と、
該裏面加工工程により裏面が加工されたウエーハを該シートから剥離する剥離工程と、
から少なくとも構成され、
該ポリオレフィン系のシートは、ポリエチレンシート、ポリプロピレンシート、ポリスチレンシートのいずれかで構成され、該シートとしてポリオレフィン系のシートが選択された場合の該シート熱圧着工程における該シートの加熱温度は、該シートがポリエチレンシートで構成される場合は120~140℃であり、該シートがポリプロピレンシートで構成される場合は160~180℃であり、該シートがポリスチレンシートで構成される場合は220~240℃であり、
該ポリエステル系のシートは、ポリエチレンテレフタレートシート、ポリエチレンナフタレートシート、のいずれかで構成され、該シートとしてポリエステル系のシートが選択された場合の該シート熱圧着工程における該シートの加熱温度は、該シートがポリエチレンテレフタレートシートで構成される場合は250~270℃であり、該シートがポリエチレンナフタレートシートで構成される場合は160~180℃であり、
該シート熱圧着工程において、該シートがウエーハを囲繞して盛り上がるようにウエーハを押圧するウエーハの加工方法。 - 該サブストレートは、該ウエーハ及び該シートよりも大きい径で形成されている請求項3に記載のウエーハの加工方法。
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