JP7177412B2 - 無アルカリガラス基板 - Google Patents
無アルカリガラス基板 Download PDFInfo
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- JP7177412B2 JP7177412B2 JP2021158968A JP2021158968A JP7177412B2 JP 7177412 B2 JP7177412 B2 JP 7177412B2 JP 2021158968 A JP2021158968 A JP 2021158968A JP 2021158968 A JP2021158968 A JP 2021158968A JP 7177412 B2 JP7177412 B2 JP 7177412B2
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- 239000011521 glass Substances 0.000 title claims description 122
- 239000000758 substrate Substances 0.000 title claims description 70
- 238000010438 heat treatment Methods 0.000 claims description 27
- 239000006060 molten glass Substances 0.000 claims description 25
- 239000000203 mixture Substances 0.000 claims description 23
- 238000002844 melting Methods 0.000 claims description 14
- 230000008018 melting Effects 0.000 claims description 14
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 13
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 13
- 238000005485 electric heating Methods 0.000 claims description 12
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- 238000007500 overflow downdraw method Methods 0.000 claims description 9
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 8
- 229910052785 arsenic Inorganic materials 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- GOLCXWYRSKYTSP-UHFFFAOYSA-N Arsenious Acid Chemical compound O1[As]2O[As]1O2 GOLCXWYRSKYTSP-UHFFFAOYSA-N 0.000 claims 4
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 claims 2
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 description 25
- 238000004031 devitrification Methods 0.000 description 21
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
- 238000002485 combustion reaction Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000465 moulding Methods 0.000 description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000006066 glass batch Substances 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000002274 desiccant Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005191 phase separation Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 2
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 2
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000011449 brick Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 2
- 239000006025 fining agent Substances 0.000 description 2
- 239000002803 fossil fuel Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- NOTVAPJNGZMVSD-UHFFFAOYSA-N potassium monoxide Inorganic materials [K]O[K] NOTVAPJNGZMVSD-UHFFFAOYSA-N 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000011819 refractory material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910018967 Pt—Rh Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052661 anorthite Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- GWWPLLOVYSCJIO-UHFFFAOYSA-N dialuminum;calcium;disilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] GWWPLLOVYSCJIO-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910001631 strontium chloride Inorganic materials 0.000 description 1
- AHBGXTDRMVNFER-UHFFFAOYSA-L strontium dichloride Chemical compound [Cl-].[Cl-].[Sr+2] AHBGXTDRMVNFER-UHFFFAOYSA-L 0.000 description 1
- 229910052917 strontium silicate Inorganic materials 0.000 description 1
- QSQXISIULMTHLV-UHFFFAOYSA-N strontium;dioxido(oxo)silane Chemical compound [Sr+2].[O-][Si]([O-])=O QSQXISIULMTHLV-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
- C03B5/027—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by passing an electric current between electrodes immersed in the glass bath, i.e. by direct resistance heating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/42—Details of construction of furnace walls, e.g. to prevent corrosion; Use of materials for furnace walls
- C03B5/43—Use of materials for furnace walls, e.g. fire-bricks
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Glass Compositions (AREA)
- Electroluminescent Light Sources (AREA)
Description
(1)薄型のガラス基板の生産性を高めるために、成形時に失透し難いこと、つまり耐失透性が高いこと。
(2)p-Si・TFT、特に高温p-Si等の製造工程において、ガラス基板の熱収縮を低減するために、耐熱性が高いこと。
β-OH値 = (1/X)log(T1/T2)
X:板厚(mm)
T1:参照波長3846cm-1における透過率(%)
T2:水酸基吸収波長3600cm-1付近における最小透過率(%)
し易くなる。
Claims (12)
- ガラス組成として、モル%で、SiO2 60~80%、Al2O3 8~25%、B2O3 0~3%未満、Li2O+Na2O+K2O 0.01~1%未満、MgO 0~10%、CaO 1~15%、SrO 0~12%、BaO 2~12%、ZnO 0~5%、As2O3 0~0.05%未満、Sb2O3 0~0.05%未満を含有し、板厚が0.05~0.7mmであり、歪点が700℃以上であり、且つβ-OH値が0.20/mm未満であることを特徴とする無アルカリガラス基板。
- ガラス組成として、モル%で、SiO2 65~78%、Al2O3 8~20%、B2O3 0~1%未満、Li2O+Na2O+K2O 0.01~0.5%未満、MgO 0~8%、CaO 1~8%、SrO 0~8%、BaO 2~8%、ZnO 0~5%、As2O3 0~0.01%未満、Sb2O3 0~0.01%未満を含有し、板厚が0.1~0.5mmであり、歪点が730℃以上であり、且つβ-OH値が0.15/mm未満であることを特徴とする請求項1に記載の無アルカリガラス基板。
- Na2Oの含有量が0.01~1モル%未満であることを特徴とする請求項1に記載の無アルカリガラス基板。
- B2O3の含有量が0.1モル%未満であることを特徴とする請求項1~3の何れかに記載の無アルカリガラス基板。
- B2O3の含有量が0.1~1モル%未満であることを特徴とする請求項1~3の何れかに記載の無アルカリガラス基板。
- ガラス組成として、更にSnO2を0.001~1モル%含むことを特徴とする請求項1~5の何れかに記載の無アルカリガラス基板。
- ガラス組成として、更にClを0.001~1モル%、SO3を0.0001~1モル%含むことを特徴とする請求項1~6の何れかに記載の無アルカリガラス基板。
- 液相温度が1300℃以下であることを特徴とする請求項1~7の何れかに記載の無アルカリガラス基板。
- 102.5dPa・sの粘度における温度が1750℃以下であることを特徴とする請求項1~8の何れかに記載の無アルカリガラス基板。
- 常温から5℃/分の昇温速度で500℃まで昇温し、500℃で1時間保持した後、5℃/分の降温速度で常温まで冷却した時の熱収縮値が20ppm以下になることを特徴とする請求項1~9の何れかに記載の無アルカリガラス基板。
- 有機ELデバイスの基板に用いることを特徴とする請求項1~10の何れかに記載の無アルカリガラス基板。
- ガラス組成として、モル%で、SiO2 60~80%、Al2O3 8~25%、B2O3 0~3%未満、Li2O+Na2O+K2O 0.01~1%未満、MgO 0~10%、CaO 1~15%、SrO 0~12%、BaO 2~12%、ZnO 0~5%、As2O3 0~0.05%未満、Sb2O3 0~0.05%未満を含有し、歪点が700℃以上であり、且つβ-OH値が0.20/mm未満である無アルカリガラスが得られるように、調合されたガラスバッチに対してバーナーの燃焼炎による加熱を行わず、加熱電極による通電加熱を行うことにより、溶融ガラスを得る溶融工程と、
得られた溶融ガラスをオーバーフローダウンドロー法により板厚0.1~0.7mmの平板形状に成形する成形工程と、を有することを特徴とする無アルカリガラス基板の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015100754 | 2015-05-18 | ||
JP2015100754 | 2015-05-18 | ||
JP2020137475A JP7036168B2 (ja) | 2015-05-18 | 2020-08-17 | 無アルカリガラス基板 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2020137475A Division JP7036168B2 (ja) | 2015-05-18 | 2020-08-17 | 無アルカリガラス基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022008627A JP2022008627A (ja) | 2022-01-13 |
JP7177412B2 true JP7177412B2 (ja) | 2022-11-24 |
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JP2017519153A Active JP6758608B2 (ja) | 2015-05-18 | 2016-05-11 | 無アルカリガラス基板 |
JP2020137475A Active JP7036168B2 (ja) | 2015-05-18 | 2020-08-17 | 無アルカリガラス基板 |
JP2021158968A Active JP7177412B2 (ja) | 2015-05-18 | 2021-09-29 | 無アルカリガラス基板 |
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JP2017519153A Active JP6758608B2 (ja) | 2015-05-18 | 2016-05-11 | 無アルカリガラス基板 |
JP2020137475A Active JP7036168B2 (ja) | 2015-05-18 | 2020-08-17 | 無アルカリガラス基板 |
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KR (1) | KR20180008386A (ja) |
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Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102651767B1 (ko) | 2015-05-28 | 2024-03-28 | 에이지씨 가부시키가이샤 | 유리 기판 및 적층 기판 |
CN109715572B (zh) * | 2016-09-16 | 2022-06-14 | Agc株式会社 | 玻璃基板及层叠基板 |
US11066326B2 (en) * | 2016-12-20 | 2021-07-20 | Nippon Electric Glass Co., Ltd. | Glass |
JP7333159B2 (ja) * | 2016-12-26 | 2023-08-24 | 日本電気硝子株式会社 | 無アルカリガラス基板の製造方法 |
WO2018123505A1 (ja) * | 2016-12-26 | 2018-07-05 | 日本電気硝子株式会社 | 無アルカリガラス基板の製造方法 |
US11161770B2 (en) * | 2016-12-28 | 2021-11-02 | Nippon Electric Glass Co., Ltd. | Glass |
JP6972598B2 (ja) * | 2017-03-22 | 2021-11-24 | 日本電気硝子株式会社 | ガラス板及びその製造方法 |
JP7001987B2 (ja) | 2017-04-27 | 2022-01-20 | 日本電気硝子株式会社 | ガラス基板 |
JP7174360B2 (ja) * | 2017-06-30 | 2022-11-17 | 日本電気硝子株式会社 | ガラス物品の製造方法、溶解炉及びガラス物品の製造装置 |
JP7153241B2 (ja) * | 2017-09-05 | 2022-10-14 | 日本電気硝子株式会社 | 無アルカリガラス基板の製造方法及び無アルカリガラス基板 |
US10974986B2 (en) * | 2017-09-20 | 2021-04-13 | AGC Inc. | Alkali-free glass substrate |
WO2019093129A1 (ja) * | 2017-11-08 | 2019-05-16 | 日本電気硝子株式会社 | 無アルカリガラス基板の製造方法及び無アルカリガラス基板 |
US20200325060A1 (en) * | 2017-12-20 | 2020-10-15 | Nippon Electric Glass Co., Ltd. | Method for producing glass plate |
JP7025720B2 (ja) * | 2017-12-22 | 2022-02-25 | 日本電気硝子株式会社 | ガラス物品の製造方法及びガラス溶融炉 |
CN111630010A (zh) * | 2018-01-23 | 2020-09-04 | 日本电气硝子株式会社 | 玻璃基板及其制造方法 |
JP7418947B2 (ja) * | 2018-01-31 | 2024-01-22 | 日本電気硝子株式会社 | ガラス |
CN112384484A (zh) * | 2018-06-19 | 2021-02-19 | 康宁公司 | 高应变点且高杨氏模量玻璃 |
WO2020004138A1 (ja) * | 2018-06-27 | 2020-01-02 | 日本電気硝子株式会社 | ガラス物品の製造方法 |
CN108675633A (zh) * | 2018-07-24 | 2018-10-19 | 彩虹显示器件股份有限公司 | 一种低收缩率的电子玻璃及其收缩率测试方法 |
KR20220021903A (ko) * | 2019-06-18 | 2022-02-22 | 니폰 덴키 가라스 가부시키가이샤 | 유리 기판의 제조 방법 |
JP2022539144A (ja) * | 2019-06-26 | 2022-09-07 | コーニング インコーポレイテッド | 熱履歴の影響を受けにくい無アルカリガラス |
CN112441743A (zh) * | 2020-11-26 | 2021-03-05 | 河南旭阳光电科技有限公司 | 一种无碱玻璃组合物、无碱玻璃及制备方法和应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013129368A1 (ja) | 2012-02-27 | 2013-09-06 | 旭硝子株式会社 | 無アルカリガラスの製造方法 |
WO2015056645A1 (ja) | 2013-10-17 | 2015-04-23 | 日本電気硝子株式会社 | 無アルカリガラス |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4737709B2 (ja) * | 2004-03-22 | 2011-08-03 | 日本電気硝子株式会社 | ディスプレイ基板用ガラスの製造方法 |
TWI677479B (zh) | 2011-07-01 | 2019-11-21 | 日商安瀚視特股份有限公司 | 顯示器用玻璃基板 |
EP2789587A1 (en) * | 2011-12-06 | 2014-10-15 | Asahi Glass Company, Limited | Method for manufacturing alkali-free glass |
KR101601754B1 (ko) * | 2011-12-29 | 2016-03-09 | 니폰 덴키 가라스 가부시키가이샤 | 무알칼리 유리 |
US9162919B2 (en) * | 2012-02-28 | 2015-10-20 | Corning Incorporated | High strain point aluminosilicate glasses |
WO2013161903A1 (ja) * | 2012-04-27 | 2013-10-31 | 旭硝子株式会社 | 無アルカリガラスおよびその製造方法 |
WO2013183625A1 (ja) * | 2012-06-05 | 2013-12-12 | 旭硝子株式会社 | 無アルカリガラスおよびその製造方法 |
JP5642832B2 (ja) * | 2012-06-28 | 2014-12-17 | AvanStrate株式会社 | ガラス板の製造方法 |
US9778193B2 (en) * | 2013-08-22 | 2017-10-03 | Kinetic River Corp. | Methods and apparatuses for label-free particle analysis |
JP2016188147A (ja) * | 2013-08-26 | 2016-11-04 | 旭硝子株式会社 | 無アルカリガラスの製造方法 |
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JP7036168B2 (ja) | 2022-03-15 |
CN113929298A (zh) | 2022-01-14 |
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JPWO2016185976A1 (ja) | 2018-03-08 |
US10590026B2 (en) | 2020-03-17 |
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