JP7100980B2 - Ledパッケージ - Google Patents
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- JP7100980B2 JP7100980B2 JP2018007883A JP2018007883A JP7100980B2 JP 7100980 B2 JP7100980 B2 JP 7100980B2 JP 2018007883 A JP2018007883 A JP 2018007883A JP 2018007883 A JP2018007883 A JP 2018007883A JP 7100980 B2 JP7100980 B2 JP 7100980B2
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- 239000000758 substrate Substances 0.000 claims description 80
- 230000002093 peripheral effect Effects 0.000 claims description 50
- 229920005989 resin Polymers 0.000 claims description 41
- 239000011347 resin Substances 0.000 claims description 41
- 239000000203 mixture Substances 0.000 claims description 40
- 238000007789 sealing Methods 0.000 claims description 40
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 6
- 239000003822 epoxy resin Substances 0.000 claims description 5
- 229910052738 indium Inorganic materials 0.000 claims description 5
- 229920000647 polyepoxide Polymers 0.000 claims description 5
- 229920003002 synthetic resin Polymers 0.000 claims description 5
- 239000000057 synthetic resin Substances 0.000 claims description 5
- 230000005496 eutectics Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 53
- 239000004065 semiconductor Substances 0.000 description 44
- 238000004519 manufacturing process Methods 0.000 description 22
- 239000010931 gold Substances 0.000 description 18
- 238000007747 plating Methods 0.000 description 14
- 230000008018 melting Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000008646 thermal stress Effects 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000004954 Polyphthalamide Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920006375 polyphtalamide Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/641—Heat extraction or cooling elements characterized by the materials
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/642—Heat extraction or cooling elements characterized by the shape
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0618—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/06181—On opposite sides of the body
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Led Device Packages (AREA)
Description
図1~図11に基づき、本発明の第1実施形態にかかるLEDパッケージA10について説明する。LEDパッケージA10は、基板10、第1端子201、第2端子202、LEDチップ30、第1接合層311、ワイヤ40、封止樹脂50および被覆材51を備える。ここで、図1および図2は、理解の便宜上、封止樹脂50を透過して示している。これらの図において、透過した封止樹脂50の外形を想像線(二点鎖線)で示している。図9は、理解の便宜上、LEDチップ30のうち、第1裏面電極302A(詳細は後述)以外の構成を透過している。図10および図11の断面位置は、図8と同一である。
図26~図32に基づき、本発明の第2実施形態にかかるLEDパッケージA20について説明する。これらの図において、先述したLEDパッケージA10と同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図26は、理解の便宜上、封止樹脂50を透過して示しており、透過した封止樹脂50の外形を想像線で示している。図30および図32は、理解の便宜上、LEDチップ30のうち、第1裏面電極302Aおよび第2裏面電極302B以外の構成を透過している。
図33~図40に基づき、本発明の第3実施形態にかかるLEDパッケージA30について説明する。これらの図において、先述したLEDパッケージA10と同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図33および図34は、理解の便宜上、封止樹脂50を透過して示している。図40は、理解の便宜上、LEDチップ30のうち、第1裏面電極302A以外の構成を透過している。
10:基板
11:基板主面
12:基板裏面
13:基板側面
131:第1面
132:第2面
14:凹溝
141:第1領域
142:第2領域
201:第1端子
202:第2端子
21:主面部
21A:第1主面部
21B:第2主面部
211:基部領域
211A:第1基部領域
211B:第2基部領域
212:接続領域
212A:第1接続領域
212B:第2接続領域
213:連結領域
213A:第1連結領域
213B:第2連結領域
24A:第1接続部
24B:第2接続部
25A:第1実装部
25B:第2実装部
26A:第1連結部
26B:第2連結部
28:内部導電層
29:外部導電層
30:LEDチップ
30A:表面
30B:裏面
30C:側面
30D:切欠面
301:表面電極
302A:第1裏面電極
302B:第2裏面電極
303:基材
304:p型半導体層
305:n型半導体層
306:活性層
307:反射層
311:第1接合層
311A:第1湾曲部
311B:境界
312:第2接合層
312A:第2湾曲部
312B:境界
40:ワイヤ
50:封止樹脂
51:被覆材
60:ケース
61:頂面
62:凹部
621:底面
622:内周面
81:基材
81A:表面
811:第1基材
811A:表面
812:第2基材
812A:表面
821:n型半導体層
822:活性層
823:p型半導体層
83:反射層
831:第1反射層
832:第2反射層
84:溝
89:シート
z:厚さ方向
x:第1方向
y:第2方向
Claims (16)
- 厚さ方向において互いに反対側を向く表面および裏面と、前記裏面に設けられた第1裏面電極と、を有するLEDチップと、
前記第1裏面電極に導通する第1端子と、
前記第1裏面電極と前記第1端子とを接合する第1接合層と、を備え、
前記第1接合層の組成は、Auを含む金属共晶であり、
前記厚さ方向に視て、前記第1接合層には、前記第1裏面電極の周縁の内側に向けて陥入する第1湾曲部が形成されており、
前記第1端子と前記第1裏面電極との間に位置し、かつ前記第1湾曲部を通るとともに、前記厚さ方向を法線方向とする境界面を設定すると、
前記第1接合層は、前記第1端子と前記境界面との間に位置する第1層と、前記境界面と前記第1裏面電極との間に位置する第2層と、を含み、
前記厚さ方向に視て、前記第1層は、前記LEDチップよりもはみ出した部分を含み、
前記第2層は、前記第1裏面電極の周縁に接している、LEDパッケージ。 - 前記第1接合層の組成は、SnおよびInの少なくともいずれかを含む、請求項1に記載のLEDパッケージ。
- 前記厚さ方向に視て、前記第1裏面電極の周縁は、前記裏面の周縁よりも内側に位置する、請求項1または2に記載のLEDパッケージ。
- 前記LEDチップは、前記裏面に交差する切欠面を有し、
前記切欠面は、前記裏面に対して傾斜している、請求項1ないし3のいずれかに記載のLEDパッケージ。 - 前記LEDチップを覆い、かつ透光性を有する封止樹脂をさらに備え、
前記封止樹脂は、前記第1湾曲部に接している、請求項1ないし4のいずれかに記載のLEDパッケージ。 - 前記封止樹脂は、エポキシ樹脂を含む、請求項5に記載のLEDパッケージ。
- 前記第1端子から前記厚さ方向に対して直交する方向に離れた第2端子をさらに備え、
前記LEDチップは、前記表面に設けられた表面電極を有し、
前記表面電極は、前記第2端子に導通している、請求項5または6に記載のLEDパッケージ。 - 前記表面電極と前記第2端子とを接続するワイヤをさらに備える、請求項7に記載のLEDパッケージ。
- 前記LEDチップは、前記裏面に設けられ、かつ前記第1裏面電極から離れた第2裏面電極を有し、
前記第1端子から前記厚さ方向に対して直交する方向に離れるとともに、前記第2裏面電極に導通する第2端子と、
前記第2裏面電極と前記第2端子とを接合する第2接合層と、をさらに備え、
前記第2接合層の組成は、前記第1接合層の組成と同一であり、
前記厚さ方向に視て、前記第2接合層には、前記第2裏面電極の周縁の内側に向けて陥入する第2湾曲部が形成されている、請求項5または6に記載のLEDパッケージ。 - 前記厚さ方向に視て、前記第2端子と前記第2接合層との境界は、前記第2裏面電極の周縁よりも外側に位置する区間を含む、請求項9に記載のLEDパッケージ。
- 前記封止樹脂は、前記第2湾曲部に接している、請求項9または10に記載のLEDパッケージ。
- 前記厚さ方向において前記表面と同じ側を向く基板主面と、前記基板主面とは反対側を向く基板裏面と、を有するとともに、前記第1端子および前記第2端子を支持する基板をさらに備え、
前記第1端子および前記第2端子の各々は、前記基板主面に配置された主面部と、前記基板裏面に配置された裏面部と、前記主面部と前記裏面部とを連結する中間部と、を有する、請求項7ないし11のいずれかに記載のLEDパッケージ。 - 前記基板は、前記基板主面および前記基板裏面につながり、かつ前記第1端子および前記第2端子が離れる方向と同じ方向に離れた一対の基板側面を有し、
前記基板には、前記一対の基板側面の各々から凹み、かつ前記基板主面から前記基板裏面に至る凹溝が形成されており、
前記中間部は、前記凹溝に配置されている、請求項12に記載のLEDパッケージ。 - 前記厚さ方向において前記表面と同じ側を向く頂面と、前記頂面から凹む凹部と、を有するとともに、前記第1端子および前記第2端子を支持する合成樹脂製のケースをさらに備え、
前記LEDチップおよび前記封止樹脂は、前記凹部に収容されている、請求項7ないし11のいずれかに記載のLEDパッケージ。 - 前記凹部は、前記頂面に対して平行に配置された底面と、前記頂面と前記底面とを連結し、かつ前記LEDチップを囲む内周面と、を有し、
前記内周面は、前記底面に対して傾斜している、請求項14に記載のLEDパッケージ。 - 前記底面から、前記第1端子および前記第2端子の各々の一部が露出している、請求項15に記載のLEDパッケージ。
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