JP7095498B2 - 垂直共振型面発光レーザ、垂直共振型面発光レーザを作製する方法 - Google Patents
垂直共振型面発光レーザ、垂直共振型面発光レーザを作製する方法 Download PDFInfo
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Description
基板13:微傾斜のオフGaAs基板。
基板13の主面13aは、GaAsの(001)面を基準にして<110>方向に傾斜する。
下部積層領域33の第1下部積層体35及び第2下部積層体37。
第1下部層37a/第2下部層37b:アンドープのAl(x)Ga(1-x)As/Al(y)Ga(1-y)Asの交互積層、(組成:0.8<x≦1、0.1≦y<0.3)。
下部コンタクト層39:Siドープn型AlGaAs。
第1下部層35a/第2下部層35b:SiドープのAl(x)Ga(1-x)As/Al(y)Ga(1-y)Asの交互積層、(組成:0.8<x≦1、0.1≦y<0.3)。
第1下部積層体35及び第2下部積層体37の積層数:合計で25周期。
下部スペーサ層17:アンドープとして成長されるAl(z)Ga(1-z)As層(0.1<z<0.4)、厚さ5~25nm。
活性層19の量子井戸構造MQW。
井戸層19a/障壁層19b:アンドープのAlGaInAs井戸層/AlGaAsバリア層。
井戸層19a:Al組成0.01~0.08、In組成0.08~0.18、膜厚2~7nm。
障壁層19b:Al組成0.1~0.4、膜厚5~9nm。
活性層19において2×1016cm-3以下の炭素濃度は、良好な品質を提供できる。活性層19の炭素濃度は、二次イオン質量分析(SIMS)法による深さ方向の分析により測定される。炭素濃度は、SIMSの炭素濃度プロファイルを活性層19にわたって平均する。
上部スペーサ層21:アンドープとして成長されるAl(z)Ga(1-z)As層(組成:0.1<z<0.4)、厚さ5~25nm。
電流狭窄構造25。
導電領域25a:AlAs又はAlGaAs(0.98のAl組成)。
絶縁領域25b:アルミニウム酸化物、ガリウム酸化物。
上部積層領域23の第1上部積層体27及び第2上部積層体29。
炭素ドーパント濃度:5×1017~5×1019cm-3。
第1上部層27a/第2上部層27b:CドープのAl(u)Ga(1-u)As/CドープのAl(v)Ga(1-v)Asの交互積層、(組成:0.8<u≦1、0.1≦v<0.3)
第1上部層29a/第2上部層29b:CドープのAl(u)Ga(1-u)As/CドープのAl(v)Ga(1-v)Asの交互積層、(組成:0.8<u≦1、0.1≦v<0.3)
第1上部積層体27及び第2上部積層体29の積層数:合計で23周期。
上部コンタクト層31:Cドープp型AlGaAs。
p-電極(49a):Ti/Pt。
n-電極(49b):例えばAu/Ge/Ni。
成長条件の例示。
半導体結晶成長のための基板温度:摂氏670~750度。
V族原料とIII族原料の供給量比:V/III比=100~160。
インジウム原料を供給しない。
成長速度:0.4~0.7nm/秒。
これに従った基板温度で、下部分布ブラッグ反射器のための半導体層を含む下部積層53を基板51の主面51a上に成長する。
雰囲気ガス:V族原料のアルシン。
温度変更率:10~30度/分。
成長中断の時間:3~20分。
この成長中断P3RDの期間では、成長温度より低い温度のヒ素雰囲気に、下部積層53の表面(例えばAl(y)Ga(1-y)As(組成:0.1≦y<0.3)が曝される。
半導体層(57c)の成長条件の例示。
成長に用いる原料:TMAl、TMGa、AsH3、ドーパントを供給しない。
成長のための基板温度:摂氏570~620度。
V族原料とIII族原料の供給量比:V/III比=100~160。
成長速度:0.4~0.7nm/秒。
半導体層(57c)は、下地の下部積層53と界面(41b)を形成する。下部積層53は、成長中断中に、成長温度より低い温度のヒ素雰囲気に曝されている。半導体層(57c)は、本実施例では全体にわたる平均で2×1016cm-3以下の炭素濃度を含む。
半導体積層(57b)の成長条件の例示。
成長に用いる原料:TMAl、TMGa、TMIn、AsH3、ドーパントを供給しない。
成長のための基板温度:摂氏570~620度。
V族原料とIII族原料の供給量比:V/III比=100~160。
成長速度:0.4~0.7nm/秒。
井戸層19aのための半導体層:Al組成0.01~0.08、In組成0.08~0.18、膜厚2~7nm。
障壁層19bのための半導体層:Al組成0.1~0.4、膜厚5~9nm。
半導体積層(57b)は、下地の半導体層(57c)と界面を形成する。良好な発光強度を得るために、半導体積層(57)は、本実施例では、井戸層及び障壁層の全体にわたる平均で2×1016cm-3以下の炭素濃度を含むことがよい。
半導体層(57a)の成長条件の例示。
成長に用いる原料:TMAl、TMGa、AsH3、ドーパントを供給しない。
成長のための基板温度:摂氏570~620度。
V族原料とIII族原料の供給量比:V/III比=100~160。
成長速度:0.4~0.7nm/秒。
雰囲気ガス:V族原料のアルシン。
温度変更率:10~30度/分。
成長中断の時間:3~20分。
成長条件の例示。
半導体結晶成長のための基板温度:摂氏670~750度。
成長に用いる原料:TMAl、TMGa、AsH3、炭素ドーパントガスのCBr4。
V族原料とIII族原料の供給量比:V/III比=100~160。
成長速度:0.4~0.7nm/秒。
これに従って、上部分布ブラッグ反射器のための半導体層を含む上部積層59を中間積層57上に成長する。
図7の(a)部及び(b)部は、実施例1に係る垂直共振型面発光レーザのエピ構造におけるインジウムのSIMSプロファイルPFを示す図面である。理解を容易にするために、図7の(a)部及び(b)部には、図1に付された参照符合を付してエピ構造を垂直共振型面発光レーザ11に対応付ける。
活性層及び上部スペーサ層の結晶成長における第1成長温度、上部積層体の第2成長温度、並びに成長中断の時間のエピ成長条件に関して、異なる成長中断時間の4種類のデバイス構造D1~D4を作製する。例えば「3E+16」の表示は、3×10+16を示す。
構造:第1成長温度、第2成長温度、成長中断、ピークIn組成、炭素濃度。
D1:摂氏620度、摂氏720度、 0分間、0.01%未満、3E+16。
D2:摂氏620度、摂氏720度、 3分間、約0.01%、2E+16。
D3:摂氏620度、摂氏720度、 9分間、0.03%、1E+16未満。
D4:摂氏620度、摂氏720度、15分間、0.09%、1E+16未満。
活性層及び上部スペーサ層の結晶成長における第1成長温度、上部積層体の第2成長温度、並びに成長中断の時間のエピ成長条件に関して、異なる第2成長温度の3種類のデバイス構造D5~D7を作製する。
構造:第1成長温度、第2成長温度、成長中断、ピークIn組成、炭素濃度。
D5:摂氏620度、摂氏670度、15分間、0.10%、1E+16未満。
D6:摂氏620度、摂氏720度、15分間、0.09%、1E+16未満。
D7:摂氏620度、摂氏770度、15分間、0.01%未満、5E+16。
Claims (7)
- 垂直共振型面発光レーザであって、
一又は複数のAlGaInAs井戸層及び一又は複数のAlGaAs障壁層を有する量子井戸構造を備える活性層と、
炭素ドーパントを含む上部積層領域と、
前記活性層及び前記上部積層領域を含むポストを搭載する基板と、
を備え、
前記活性層は、前記上部積層領域と前記基板との間に設けられ、
前記量子井戸構造は、2×1016cm-3以下の炭素濃度を有し、
前記上部積層領域は、前記活性層から離れた位置にインジウムのパイルアップ層を含む、垂直共振型面発光レーザ。 - 前記基板上に設けられた下部積層領域を更に備え、
前記下部積層領域は、分布ブラッグ反射器のための下部積層体と、前記下部積層体と前記活性層との間に設けられた下部スペーサ層とを含み、
前記下部積層領域は、III族構成元素としてアルミニウム及びガリウムの少なくともいずれかを含みインジウムを含まないIII-V化合物半導体を備え、
前記上部積層領域は、分布ブラッグ反射器のための上部積層体と、前記上部積層体と前記活性層との間に設けられた上部スペーサ層とを含む、請求項1に記載された垂直共振型面発光レーザ。 - 垂直共振型面発光レーザを作製する方法であって、
構成元素としてGa及びAsを含むIII-V化合物半導体を備える基板を成長炉に配置する工程と、
III族原料及びV族原料を前記成長炉に供給して、第1半導体を成長する工程と、
前記第1半導体を成長した後に前記III族原料を前記成長炉に供給することなく半導体の成長を中断する工程と、
前記半導体の成長を中断した後に、炭素ドーパント、III族原料及びV族原料を前記成長炉に供給して、第2半導体を成長する工程と、
を備え、
第1半導体を成長する前記工程は、前記III族原料からのインジウムをIII族構成元素として含む第1化合物半導体層を有する活性層を前記基板上に成長し、
第2半導体を成長する前記工程は、炭素ドーパントを含む第2化合物半導体層を有する上部半導体積層を前記基板上に形成し、
前記活性層は、2×10 16 cm -3 以下の炭素濃度を有し、
前記活性層は、一又は複数のAlGaInAs井戸層及び一又は複数のAlGaAs障壁層を有する量子井戸構造を備え、
前記上部半導体積層は、前記活性層から離れた位置にインジウムのパイルアップ層を含む、垂直共振型面発光レーザを作製する方法。 - 前記第1半導体は、第1基板温度で成長され、
前記第2半導体は、第2基板温度で成長され、
前記第2基板温度は、前記第1基板温度より高く、
半導体の成長を中断する前記工程は、前記第1基板温度から前記第2基板温度へ温度の変更を行う、請求項3に記載された垂直共振型面発光レーザを作製する方法。 - 第1半導体を成長する前記工程では、ドーパントを供給しない、請求項3又は請求項4に記載された垂直共振型面発光レーザを作製する方法。
- 第1半導体を成長する前記工程では、前記III族原料がトリメチルインジウムを含む、請求項3から請求項5のいずれか一項に記載された垂直共振型面発光レーザを作製する方法。
- 前記第1半導体は、摂氏570~620度の基板温度で成長される、請求項3から請求項6のいずれか一項に記載された垂直共振型面発光レーザを作製する方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001267550A (ja) | 2000-01-07 | 2001-09-28 | Lucent Technol Inc | Iii−v族半導体構造に対する拡散障壁スパイク |
JP2003332251A (ja) | 2002-03-25 | 2003-11-21 | Agilent Technol Inc | 高品質InGaAsN半導体の製造方法 |
JP2005354061A (ja) | 2004-06-07 | 2005-12-22 | Agilent Technol Inc | 熱伝導率の高い垂直共振器型面発光レーザ |
JP2006120760A (ja) | 2004-10-20 | 2006-05-11 | Sony Corp | 半導体レーザ素子の製造方法 |
JP2008108964A (ja) | 2006-10-26 | 2008-05-08 | Stanley Electric Co Ltd | 半導体発光装置およびその製造方法 |
JP2011119374A (ja) | 2009-12-02 | 2011-06-16 | Sharp Corp | 窒化物半導体素子及びその製造方法、並びに、半導体装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5493577A (en) * | 1994-12-21 | 1996-02-20 | Sandia Corporation | Efficient semiconductor light-emitting device and method |
US5923696A (en) * | 1996-12-27 | 1999-07-13 | Motorola, Inc. | Visible light emitting vertical cavity surface emitting laser with gallium phosphide contact layer and method of fabrication |
US7542499B2 (en) * | 2003-11-27 | 2009-06-02 | Ricoh Company, Ltd. | Surface-emission laser diode and surface-emission laser array, optical interconnection system, optical communication system, electrophotographic system, and optical disk system |
US7881358B2 (en) * | 2006-12-27 | 2011-02-01 | Nec Corporation | Surface emitting laser |
JP4539752B2 (ja) * | 2008-04-09 | 2010-09-08 | 住友電気工業株式会社 | 量子井戸構造の形成方法および半導体発光素子の製造方法 |
JP5169564B2 (ja) * | 2008-07-15 | 2013-03-27 | 住友電気工業株式会社 | 面発光半導体レーザ |
JP6136284B2 (ja) * | 2012-03-13 | 2017-05-31 | 株式会社リコー | 半導体積層体及び面発光レーザ素子 |
JP5721246B1 (ja) * | 2014-08-08 | 2015-05-20 | 国立大学法人東京工業大学 | 光変調機能付き面発光レーザ |
JP5812175B1 (ja) * | 2014-10-03 | 2015-11-11 | 富士ゼロックス株式会社 | 面発光型半導体レーザ素子および面発光型半導体レーザ素子の製造方法 |
CN105337166B (zh) * | 2015-11-30 | 2019-01-11 | 武汉电信器件有限公司 | 一种高速垂直腔面发射激光器的分子束外延生长方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001267550A (ja) | 2000-01-07 | 2001-09-28 | Lucent Technol Inc | Iii−v族半導体構造に対する拡散障壁スパイク |
JP2003332251A (ja) | 2002-03-25 | 2003-11-21 | Agilent Technol Inc | 高品質InGaAsN半導体の製造方法 |
JP2005354061A (ja) | 2004-06-07 | 2005-12-22 | Agilent Technol Inc | 熱伝導率の高い垂直共振器型面発光レーザ |
JP2006120760A (ja) | 2004-10-20 | 2006-05-11 | Sony Corp | 半導体レーザ素子の製造方法 |
JP2008108964A (ja) | 2006-10-26 | 2008-05-08 | Stanley Electric Co Ltd | 半導体発光装置およびその製造方法 |
JP2011119374A (ja) | 2009-12-02 | 2011-06-16 | Sharp Corp | 窒化物半導体素子及びその製造方法、並びに、半導体装置 |
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