JP7080478B2 - ガス置換用ドライルーム - Google Patents

ガス置換用ドライルーム Download PDF

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Publication number
JP7080478B2
JP7080478B2 JP2018132005A JP2018132005A JP7080478B2 JP 7080478 B2 JP7080478 B2 JP 7080478B2 JP 2018132005 A JP2018132005 A JP 2018132005A JP 2018132005 A JP2018132005 A JP 2018132005A JP 7080478 B2 JP7080478 B2 JP 7080478B2
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JP
Japan
Prior art keywords
air
airtight container
dew point
supply device
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2018132005A
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English (en)
Japanese (ja)
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JP2019052835A (ja
Inventor
仁美 西國原
和彦 河口
寛明 江島
麻由 岩崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seibu Giken Co Ltd
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Seibu Giken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seibu Giken Co Ltd filed Critical Seibu Giken Co Ltd
Priority to TW107128138A priority Critical patent/TWI763906B/zh
Priority to KR1020180098381A priority patent/KR102539338B1/ko
Priority to US16/123,562 priority patent/US10850232B2/en
Publication of JP2019052835A publication Critical patent/JP2019052835A/ja
Application granted granted Critical
Publication of JP7080478B2 publication Critical patent/JP7080478B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Drying Of Gases (AREA)
  • Electroluminescent Light Sources (AREA)
  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP2018132005A 2017-09-14 2018-07-12 ガス置換用ドライルーム Active JP7080478B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW107128138A TWI763906B (zh) 2017-09-14 2018-08-13 氣體置換用乾燥房
KR1020180098381A KR102539338B1 (ko) 2017-09-14 2018-08-23 가스 치환용 드라이룸
US16/123,562 US10850232B2 (en) 2017-09-14 2018-09-06 Dry room for gas substitution

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017176261 2017-09-14
JP2017176261 2017-09-14

Publications (2)

Publication Number Publication Date
JP2019052835A JP2019052835A (ja) 2019-04-04
JP7080478B2 true JP7080478B2 (ja) 2022-06-06

Family

ID=65745614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018132005A Active JP7080478B2 (ja) 2017-09-14 2018-07-12 ガス置換用ドライルーム

Country Status (3)

Country Link
JP (1) JP7080478B2 (zh)
CN (1) CN109499274B (zh)
TW (1) TWI763906B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7306683B2 (ja) * 2019-05-29 2023-07-11 株式会社西部技研 ガス置換用ドライルーム
TWI769463B (zh) * 2020-06-05 2022-07-01 日月光半導體製造股份有限公司 除濕系統及降低空間濕度的方法
JP2023158373A (ja) 2022-04-18 2023-10-30 株式会社西部技研 酸素除去装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149961A (ja) 2004-04-06 2011-08-04 Transmolecular Inc 骨髄およびリンパ系細胞癌の診断および処置
JP2012052718A (ja) 2010-08-31 2012-03-15 Shin Nippon Air Technol Co Ltd 局所低露点室の露点温度の制御方法及びその制御システム
JP2014181882A (ja) 2013-03-21 2014-09-29 Ngk Insulators Ltd 熱処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4378711B2 (ja) * 2006-03-29 2009-12-09 株式会社日立プラントテクノロジー 有機ｅｌパネルの製造設備における湿度管理方法および湿度管理システム
JP5631011B2 (ja) * 2010-01-25 2014-11-26 高砂熱学工業株式会社 クリーンルームシステム及びその運転方法
EP2476475B1 (en) * 2011-01-14 2015-04-22 Alstom Technology Ltd A method of cleaning a carbon dioxide containing gas, and a carbon dioxide purification system
JP6138457B2 (ja) * 2012-11-13 2017-05-31 株式会社西部技研 グローブボックス用乾燥室
US8940263B2 (en) * 2013-04-10 2015-01-27 Air Products And Chemicals, Inc. Removal of hydrogen and carbon monoxide impurities from gas streams
KR101376551B1 (ko) * 2013-10-28 2014-04-01 (주)지비아이 글로브 박스용 가스 정제기
CN105169897A (zh) * 2014-06-17 2015-12-23 株式会社西部技研 吸附式除湿装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149961A (ja) 2004-04-06 2011-08-04 Transmolecular Inc 骨髄およびリンパ系細胞癌の診断および処置
JP2012052718A (ja) 2010-08-31 2012-03-15 Shin Nippon Air Technol Co Ltd 局所低露点室の露点温度の制御方法及びその制御システム
JP2014181882A (ja) 2013-03-21 2014-09-29 Ngk Insulators Ltd 熱処理装置

Also Published As

Publication number Publication date
TWI763906B (zh) 2022-05-11
TW201916427A (zh) 2019-04-16
JP2019052835A (ja) 2019-04-04
CN109499274B (zh) 2022-08-09
CN109499274A (zh) 2019-03-22

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