JP7039160B2 - 光検出装置 - Google Patents
光検出装置 Download PDFInfo
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- JP7039160B2 JP7039160B2 JP2016045513A JP2016045513A JP7039160B2 JP 7039160 B2 JP7039160 B2 JP 7039160B2 JP 2016045513 A JP2016045513 A JP 2016045513A JP 2016045513 A JP2016045513 A JP 2016045513A JP 7039160 B2 JP7039160 B2 JP 7039160B2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
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- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02325—Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/024—Arrangements for cooling, heating, ventilating or temperature compensation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/213—Fabry-Perot type
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
- Radiation Pyrometers (AREA)
Description
[第1実施形態]
[光検出装置の構成]
[ファブリペロー干渉フィルタの構成]
[作用及び効果]
[第2実施形態]
[光検出装置の構成]
[作用及び効果]
[変形例]
Claims (5)
- 互いの距離が可変とされた第1ミラー及び第2ミラーを有し、前記第1ミラーと前記第2ミラーとの距離に応じた光を透過させる光透過領域が、前記第1ミラー及び前記第2ミラーが対向する方向に平行な所定のライン上に設けられたファブリペロー干渉フィルタと、
前記ライン上において前記ファブリペロー干渉フィルタに対して一方の側に配置され、前記光透過領域を透過した光を検出する光検出器と、
前記ライン上において前記光検出器に対して一方の側に配置された基板と、
前記ライン上において前記ファブリペロー干渉フィルタに対して他方の側に位置する開口を有し、前記ファブリペロー干渉フィルタ及び前記光検出器を収容するパッケージと、
前記開口を塞ぐように前記パッケージに設けられた光透過部材と、
前記基板を介して前記ファブリペロー干渉フィルタ及び前記光検出器と熱的に接続されて吸熱領域及び発熱領域の一方として機能する第1領域を有する温度調節素子と、を備え、
前記第1領域は、少なくとも前記ライン上において前記基板に対して前記一方の側に位置しており、
前記ラインに平行な方向から見た場合に、前記開口の外縁は、前記ファブリペロー干渉フィルタの外縁よりも内側に位置しており、
前記ラインに平行な方向から見た場合に、前記光透過部材の外縁は、前記ファブリペロー干渉フィルタの外縁よりも外側に位置しており、
前記温度調節素子は、前記パッケージと熱的に接続されて前記吸熱領域及び前記発熱領域の他方として機能する第2領域を有する、光検出装置。 - 前記温度調節素子は、前記パッケージ内に配置されており、
前記光検出器は、前記基板を介して前記温度調節素子上に配置されており、
前記ファブリペロー干渉フィルタは、前記光検出器が前記基板と前記ファブリペロー干渉フィルタとの間に位置するように前記基板を介して前記温度調節素子上に配置されている、請求項1記載の光検出装置。 - 前記ファブリペロー干渉フィルタの底面のうち前記光透過領域の外側の部分を支持する支持部材と、
前記ファブリペロー干渉フィルタの側面、及び前記支持部材と接触する熱伝導部材と、を更に備える、請求項1又は2記載の光検出装置。 - 前記熱伝導部材は、前記ファブリペロー干渉フィルタと前記支持部材とを接着する接着部材である、請求項3記載の光検出装置。
- 前記支持部材は、前記ファブリペロー干渉フィルタの前記底面のうち前記光透過領域の外側の前記部分が載置された載置面を有し、
前記ファブリペロー干渉フィルタの前記側面の少なくとも一部は、前記載置面の一部が前記側面の外側に配置されるように、前記載置面上に位置しており、
前記熱伝導部材は、前記側面、及び前記載置面の前記一部によって形成された隅部に配置され、前記側面、及び前記載置面の前記一部のそれぞれと接触している、請求項3又は4記載の光検出装置。
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016045513A JP7039160B2 (ja) | 2016-03-09 | 2016-03-09 | 光検出装置 |
PCT/JP2017/008483 WO2017154773A1 (ja) | 2016-03-09 | 2017-03-03 | 光検出装置 |
EP17763113.2A EP3428589B1 (en) | 2016-03-09 | 2017-03-03 | Light detection device |
FIEP17763113.2T FI3428589T3 (fi) | 2016-03-09 | 2017-03-03 | Valonilmaisulaite |
EP24159648.5A EP4350430A3 (en) | 2016-03-09 | 2017-03-03 | Light detection device |
US16/082,616 US11448553B2 (en) | 2016-03-09 | 2017-03-03 | Light detection device |
CN202210293509.4A CN114659632A (zh) | 2016-03-09 | 2017-03-03 | 光检测装置 |
KR1020187026622A KR102487457B1 (ko) | 2016-03-09 | 2017-03-03 | 광 검출 장치 |
CN201780015575.2A CN108780007B (zh) | 2016-03-09 | 2017-03-03 | 光检测装置 |
TW106107695A TWI747887B (zh) | 2016-03-09 | 2017-03-09 | 光檢測裝置 |
US17/847,881 US20220333988A1 (en) | 2016-03-09 | 2022-06-23 | Light detection device |
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JP2016045513A JP7039160B2 (ja) | 2016-03-09 | 2016-03-09 | 光検出装置 |
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JP2020199631A Division JP7139401B2 (ja) | 2020-12-01 | 2020-12-01 | 光検出装置 |
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JP2017161336A JP2017161336A (ja) | 2017-09-14 |
JP7039160B2 true JP7039160B2 (ja) | 2022-03-22 |
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US (2) | US11448553B2 (ja) |
EP (2) | EP4350430A3 (ja) |
JP (1) | JP7039160B2 (ja) |
KR (1) | KR102487457B1 (ja) |
CN (2) | CN108780007B (ja) |
FI (1) | FI3428589T3 (ja) |
TW (1) | TWI747887B (ja) |
WO (1) | WO2017154773A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7039160B2 (ja) * | 2016-03-09 | 2022-03-22 | 浜松ホトニクス株式会社 | 光検出装置 |
JP6871043B2 (ja) * | 2017-03-31 | 2021-05-12 | 浜松ホトニクス株式会社 | 光検出装置 |
JP6899314B2 (ja) * | 2017-11-17 | 2021-07-07 | 浜松ホトニクス株式会社 | 吸着方法 |
US10295482B1 (en) * | 2017-12-22 | 2019-05-21 | Visera Technologies Company Limited | Spectrum-inspection device and method for forming the same |
JP7202160B2 (ja) * | 2018-12-05 | 2023-01-11 | 浜松ホトニクス株式会社 | 光学フィルタ装置、及び光学フィルタ装置の制御方法 |
DE102019213285A1 (de) * | 2019-09-03 | 2021-03-04 | Robert Bosch Gmbh | Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung |
DE102019213286A1 (de) * | 2019-09-03 | 2021-03-04 | Robert Bosch Gmbh | Spektrometer-Package mit MEMS Fabry-Pérot-Interferometer |
DE102019213284A1 (de) * | 2019-09-03 | 2021-03-04 | Robert Bosch Gmbh | Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung |
DE102019213270A1 (de) * | 2019-09-03 | 2021-03-04 | Robert Bosch Gmbh | Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung |
JP7402313B2 (ja) * | 2020-03-27 | 2023-12-20 | ギガフォトン株式会社 | センサ劣化判定方法 |
JP2022170447A (ja) * | 2021-04-28 | 2022-11-10 | 株式会社ジャパンディスプレイ | 検出装置 |
JP2024080068A (ja) * | 2022-12-01 | 2024-06-13 | 浜松ホトニクス株式会社 | フィルタユニット |
Citations (2)
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JP2006250707A (ja) | 2005-03-10 | 2006-09-21 | Mitsubishi Electric Corp | 赤外線検出器および赤外線検出器のガス吸着手段活性化方法 |
WO2015064758A1 (ja) | 2013-10-31 | 2015-05-07 | 浜松ホトニクス株式会社 | 光検出装置 |
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CN108780007A (zh) | 2018-11-09 |
EP4350430A3 (en) | 2024-06-12 |
FI3428589T3 (fi) | 2024-05-07 |
WO2017154773A1 (ja) | 2017-09-14 |
KR102487457B1 (ko) | 2023-01-12 |
EP3428589A1 (en) | 2019-01-16 |
EP3428589B1 (en) | 2024-04-10 |
CN114659632A (zh) | 2022-06-24 |
US20220333988A1 (en) | 2022-10-20 |
US11448553B2 (en) | 2022-09-20 |
TW201735330A (zh) | 2017-10-01 |
KR20180122353A (ko) | 2018-11-12 |
CN108780007B (zh) | 2022-04-12 |
TWI747887B (zh) | 2021-12-01 |
EP3428589A4 (en) | 2019-11-13 |
EP4350430A2 (en) | 2024-04-10 |
US20190072431A1 (en) | 2019-03-07 |
JP2017161336A (ja) | 2017-09-14 |
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