JP7031661B2 - 圧電組成物および圧電素子 - Google Patents
圧電組成物および圧電素子 Download PDFInfo
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Description
[1]一般式ABO3で表されるペロブスカイト構造を有する複合酸化物と、銅と、を含む圧電組成物であって、
ABO3におけるAサイト元素がカリウム、または、カリウムおよびナトリウムであり、Bサイト元素がニオブ、または、ニオブおよびタンタルであり、
複合酸化物1モルに対して、銅が、銅元素換算で、nモル%含有されており、
nが、0.100≦n≦1.000である関係を満足することを特徴とする圧電組成物である。
複合酸化物1モルに対して、マンガンが、マンガン元素換算で、zモル%含有されており、
zが、0.000≦z≦1.500である関係を満足することを特徴とする[1]から[5]のいずれかに記載の圧電組成物である。
1.圧電素子
1.1 圧電組成物
2.圧電素子の製造方法
3.本実施形態における効果
4.変形例
まず、本実施形態に係る圧電組成物が適用された圧電素子について説明する。圧電素子としては、本実施形態に係る圧電組成物が適用可能な素子であれば特に制限されない。本実施形態では、たとえば、圧電トランス、薄膜センサ、圧電超音波モータ等が例示される。
本実施形態に係る圧電組成物は、一般式ABO3で表されるペロブスカイト構造を有する複合酸化物を主成分として含有している。本実施形態では、主成分は、圧電組成物100mol%に対して、90mol%以上を占める成分である。
次に、圧電素子の製造方法の一例について以下に説明する。
本実施形態では、圧電組成物に主成分として含まれる複合酸化物として、ペロブスカイト構造を有するニオブ酸アルカリ金属系の化合物を採用し、さらに、圧電組成物に銅(Cu)を上記の範囲内で含有させている。上記の範囲内で含有されたCuは、複合酸化物に対して過剰に含まれないので、複合酸化物を構成する結晶粒子とは異なる異相が形成されにくい。すなわち、Cuは、複合酸化物を構成する結晶粒子の内部に固溶している、または、結晶粒子間に形成される粒界に存在している。Cuがこのような存在形態を有することにより、結晶粒子間の結合力が強くなり、その結果、圧電組成物としての機械的強度が向上する。
上述した実施形態では、圧電体部が単層である圧電素子について説明したが、圧電体部が積層された構成を有する圧電素子であってもよい。また、これらが組み合わされた構成を有する圧電素子であってもよい。
まず、圧電組成物の主成分である複合酸化物((KxNa1-x)m(TayNb1-y)O3)の出発原料として、炭酸水素カリウム(KHCO3)と炭酸水素ナトリウム(NaHCO3)と酸化タンタル(Ta2O5)と酸化ニオブ(Nb2O5)の粉末を準備した。また、圧電組成物に含まれる含有成分としての銅(Cu)およびマンガン(Mn)の出発原料として、酸化銅(CuO)および酸化マンガン(MnO2)の粉末を準備した。
焼成後の圧電組成物(焼結体)が表3に示す組成を有するように出発原料を秤量し、実験例1と同様にして、焼結体を製造し、圧電組成物の試料(試料番号25~39)を得た。
1… 圧電体部
2,3… 電極
50… 圧電素子
10… 積層体
11… 圧電層
12… 内部電極層
21,22… 端子電極
Claims (6)
- 一般式ABO3で表されるペロブスカイト構造を有する複合酸化物と、銅と、を含む圧電組成物であって、
前記ABO3におけるAサイト元素がカリウム、または、カリウムおよびナトリウムであり、Bサイト元素がニオブ、または、ニオブおよびタンタルであり、
前記ABO 3 における前記Bサイト元素の総原子数に対する前記Aサイト元素の総原子数をmとしたときに、前記mが、0.970≦m≦0.999である関係を満足し、
前記複合酸化物1モルに対して、前記銅が、銅元素換算で、nモル%含有されており、
前記nが、0.100≦n≦1.000である関係を満足することを特徴とする圧電組成物。 - 前記ABO3が、組成式(KxNa1-x)m(TayNb1-y)O3で表され、前記yが、0<y≦0.300である関係を満足することを特徴とする請求項1に記載の圧電組成物。
- 前記mが、0.991≦m≦0.999である関係を満足することを特徴とする請求項1または2に記載の圧電組成物。
- 前記ABO3が、組成式(KxNa1-x)m(TayNb1-y)O3で表され、前記xが、0.400≦x≦1.000である関係を満足することを特徴とする請求項1から3のいずれかに記載の圧電組成物。
- 前記圧電組成物がマンガンを含み、
前記複合酸化物1モルに対して、前記マンガンが、マンガン元素換算で、zモル%含有されており、
前記yが、0.000≦z≦1.500である関係を満足することを特徴とする請求項1から4のいずれかに記載の圧電組成物。 - 請求項1から5のいずれかに記載の圧電組成物を含む圧電素子。
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JP2000313664A (ja) | 1999-02-24 | 2000-11-14 | Toyota Central Res & Dev Lab Inc | アルカリ金属含有ニオブ酸化物系圧電材料組成物 |
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JP4398635B2 (ja) | 2002-09-24 | 2010-01-13 | 株式会社ノリタケカンパニーリミテド | 圧電セラミックス |
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DE102006015042B4 (de) | 2006-03-31 | 2009-09-24 | Siemens Ag | Bleifreier piezokeramischer Werkstoff mit Kupferdotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils mit dem Werkstoff und Verwendung des Bauteils |
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US9590168B2 (en) * | 2011-02-22 | 2017-03-07 | Fdk Corporation | Alkali niobate-based piezoelectric material and a method for making the same |
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JP2000313664A (ja) | 1999-02-24 | 2000-11-14 | Toyota Central Res & Dev Lab Inc | アルカリ金属含有ニオブ酸化物系圧電材料組成物 |
Non-Patent Citations (2)
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LIM, Jong Bong et al.,Effect of K/Na ratio on piezoelectric properties of modified-(K1-xNax)NbO3 "Hard" lead-free piezoele,CERAMICS INTERNATIONAL,2011年10月29日,Vol. 38,pp. 2605-2608,<DOI: 10.1016/j.ceramint.2011.10.065> |
MATSUBARA, Masato et al.,Synthesis and Characterization of (K0.5Na0.5)(Nb0.7Ta0.3)O3 Piezoelectric Ceramics Sintered with Sin,Japanese Journal of Applied Physics,2005年09月08日,Vol. 44, No. 9A,pp. 6618-6623,<DOI: 10.1143/JJAP.44.6618> |
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DE112018001758T5 (de) | 2019-12-19 |
US20200295252A1 (en) | 2020-09-17 |
JPWO2018180772A1 (ja) | 2020-03-12 |
CN110494999B (zh) | 2023-06-20 |
WO2018180772A1 (ja) | 2018-10-04 |
DE112018001758B4 (de) | 2022-03-17 |
US11239410B2 (en) | 2022-02-01 |
CN110494999A (zh) | 2019-11-22 |
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