JP6917315B2 - プリコート方法及び成膜方法 - Google Patents
プリコート方法及び成膜方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 191
- 239000007789 gas Substances 0.000 claims description 612
- 229910052751 metal Inorganic materials 0.000 claims description 224
- 239000002184 metal Substances 0.000 claims description 224
- 239000002994 raw material Substances 0.000 claims description 126
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 109
- 239000001257 hydrogen Substances 0.000 claims description 79
- 229910052739 hydrogen Inorganic materials 0.000 claims description 79
- 239000000758 substrate Substances 0.000 claims description 78
- 238000012545 processing Methods 0.000 claims description 32
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 30
- 229910052719 titanium Inorganic materials 0.000 claims description 30
- 239000010936 titanium Substances 0.000 claims description 30
- 239000011261 inert gas Substances 0.000 claims description 24
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims description 24
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 230000008569 process Effects 0.000 description 93
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 20
- 239000002245 particle Substances 0.000 description 19
- 238000002474 experimental method Methods 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 229910052756 noble gas Inorganic materials 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 229910001507 metal halide Inorganic materials 0.000 description 4
- 150000005309 metal halides Chemical class 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 2
- KPGXUAIFQMJJFB-UHFFFAOYSA-H tungsten hexachloride Chemical compound Cl[W](Cl)(Cl)(Cl)(Cl)Cl KPGXUAIFQMJJFB-UHFFFAOYSA-H 0.000 description 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 2
- -1 tungsten nitride Chemical class 0.000 description 2
- WIDQNNDDTXUPAN-UHFFFAOYSA-I tungsten(v) chloride Chemical compound Cl[W](Cl)(Cl)(Cl)Cl WIDQNNDDTXUPAN-UHFFFAOYSA-I 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Description
(工程STCの処理条件)
TiCl4ガス:1sccm〜50sccm
Arガス:100sccm〜5000sccm
H2ガス:1sccm〜500sccm
高周波:450kHz、100W〜3000W
内部空間ISの中の圧力:50Pa〜800Pa
支持台26の温度:320℃〜700℃
Claims (20)
- チャンバ内の表面のためのプリコート方法であって、該表面は前記チャンバ内の内部空間の中に設けられた基板用の支持台の表面を含み、該プリコート方法は、
前記内部空間に金属原料ガス及び水素含有ガスを含む第1のガスを供給することにより、前記表面上に第1の膜を形成する工程と、
前記内部空間に前記金属原料ガス及び水素含有ガスを含む第2のガスを供給することにより、前記第1の膜上に第2の膜を形成する工程と、
前記内部空間に前記金属原料ガス及び水素含有ガスを含む第3のガスを供給することにより、前記第2の膜上に第3の膜を形成する工程と、
を含み、
前記第1のガス中の前記金属原料ガスの流量に対する前記水素含有ガスの流量の比率である第1の比率は、前記第2のガス中の前記金属原料ガスの流量に対する前記水素含有ガスの流量の比率である第2の比率及び前記第3のガス中の前記金属原料ガスの流量に対する前記水素含有ガスの流量の比率である第3の比率よりも高く、
前記第1のガス中の前記金属原料ガスの前記流量は、前記第2のガス中の前記金属原料ガスの前記流量及び前記第3のガス中の前記金属原料ガスの前記流量よりも少ない、
プリコート方法。 - 前記第3の比率は、前記第2の比率よりも低く、
前記第3のガス中の前記金属原料ガスの前記流量は、前記第2のガス中の前記金属原料ガスの前記流量以上である、
請求項1に記載のプリコート方法。 - 前記第3の比率は、前記第2の比率よりも低く、
前記第3のガス中の前記金属原料ガスの前記流量は、前記第2のガス中の前記金属原料ガスの前記流量よりも少ない、
請求項1に記載のプリコート方法。 - 第1の膜を形成する前記工程の実行中の前記内部空間の中の圧力は、第2の膜を形成する前記工程の実行中の前記内部空間の中の圧力よりも低く、
第2の膜を形成する前記工程の実行中の前記内部空間の中の前記圧力は、第3の膜を形成する前記工程の実行中の前記内部空間の中の圧力以上である、
請求項1〜3の何れか一項に記載のプリコート方法。 - 第1の膜を形成する前記工程の実行中の前記内部空間の中の圧力は、第2の膜を形成する前記工程の実行中の前記内部空間の中の圧力よりも低く、
第2の膜を形成する前記工程の実行中の前記内部空間の中の前記圧力は、第3の膜を形成する前記工程の実行中の前記内部空間の中の圧力よりも低い、
請求項1〜3の何れか一項に記載のプリコート方法。 - 前記第1のガス、前記第2のガス、及び前記第3のガスの各々に含まれる前記金属原料ガスは、四塩化チタンガスであり、
前記第1のガス、前記第2のガス、及び前記第3のガスのうち一以上のガスの各々に含まれる前記水素含有ガスは、水素ガスであり、
前記四塩化チタンガスと前記水素ガスからチタン膜が形成される、
請求項1〜5の何れか一項に記載のプリコート方法。 - 前記第1のガス、前記第2のガス、及び前記第3のガスの各々に含まれる前記金属原料ガスは、四塩化チタンガスであり、
前記第1のガス、前記第2のガス、及び、前記第3のガスのうち一以上のガスの各々は前記水素含有ガスとしてアンモニアガスを含むか、前記水素含有ガスとして水素ガスを含み且つ窒素ガスを含む、
請求項1〜5の何れか一項に記載のプリコート方法。 - 前記第1のガスは不活性ガスを更に含み、第1の膜を形成する前記工程では前記内部空間の中で前記第1のガスのプラズマが生成され、
前記第2のガスは不活性ガスを更に含み、第2の膜を形成する前記工程では前記内部空間の中で前記第2のガスのプラズマが生成され、
前記第3のガスは不活性ガスを更に含み、第3の膜を形成する前記工程では前記内部空間の中で前記第3のガスのプラズマが生成される、
請求項1〜7の何れか一項に記載のプリコート方法。 - 前記内部空間に前記金属原料ガス及び水素含有ガスを含む第4のガスを供給することにより、前記第3の膜上に第4の膜を形成する工程と、
前記内部空間に前記金属原料ガス及び水素含有ガスを含む第5のガスを供給することにより、前記第4の膜上に第5の膜を形成する工程と、
を更に含み、
前記第1の比率は、前記第4のガス中の前記金属原料ガスの流量に対する前記水素含有ガスの流量の比率である第4の比率及び前記第5のガス中の前記金属原料ガスの流量に対する前記水素含有ガスの流量の比率である第5の比率よりも高く、前記第1のガス中の前記金属原料ガスの前記流量は、前記第4のガス中の前記金属原料ガスの前記流量及び前記第5のガス中の前記金属原料ガスの前記流量よりも少ない、
請求項1〜8の何れか一項に記載のプリコート方法。 - 第3の膜を形成する前記工程の実行中の前記内部空間の中の圧力は、第4の膜を形成する前記工程の実行中の前記内部空間の中の圧力以下であり、
第4の膜を形成する前記工程の実行中の前記内部空間の中の前記圧力は、第5の膜を形成する前記工程の実行中の前記内部空間の中の圧力よりも高い、
請求項9に記載のプリコート方法。 - 第3の膜を形成する前記工程の実行中の前記内部空間の中の圧力は、第4の膜を形成する前記工程の実行中の前記内部空間の中の圧力よりも高く、
第4の膜を形成する前記工程の実行中の前記内部空間の中の前記圧力は、第5の膜を形成する前記工程の実行中の前記内部空間の中の圧力よりも高い、
請求項9に記載のプリコート方法。 - 前記第4のガスは不活性ガスを更に含み、第4の膜を形成する前記工程では前記内部空間の中で前記第4のガスのプラズマが生成され、
前記第5のガスは不活性ガスを更に含み、第5の膜を形成する前記工程では前記内部空間の中で前記第5のガスのプラズマが生成される、
請求項9〜11の何れか一項に記載のプリコート方法。 - 第1の膜を形成する前記工程における前記支持台の温度、第2の膜を形成する前記工程における前記支持台の温度、及び第3の膜を形成する前記工程における前記支持台の温度は、第4の膜を形成する前記工程における前記支持台の温度及び第5の膜を形成する前記工程における前記支持台の温度よりも高い、請求項9〜12の何れか一項に記載のプリコート方法。
- 前記第1の膜を形成する前記工程における前記支持台の温度及び第2の膜を形成する前記工程における前記支持台の温度は、第3の膜を形成する前記工程における前記支持台の温度よりも高い、請求項9〜13の何れか一項に記載のプリコート方法。
- 前記第1のガス、前記第2のガス、前記第3のガス、前記第4のガス、及び前記第5のガスの各々に含まれる前記金属原料ガスは、四塩化チタンガスであり、
前記第1のガス、前記第2のガス、前記第3のガス、前記第4のガス、及び前記第5のガスのうち一以上のガスの各々に含まれる前記水素含有ガスは、水素ガスであり、
前記四塩化チタンガスと前記水素ガスからチタン膜が形成される、
請求項9〜14の何れか一項に記載のプリコート方法。 - 前記第1のガス、前記第2のガス、前記第3のガス、前記第4のガス、及び前記第5のガスの各々に含まれる前記金属原料ガスは、四塩化チタンガスであり、
前記第1のガス、前記第2のガス、前記第3のガス、前記第4のガス、及び前記第5のガスのうちのうち一以上のガスの各々は前記水素含有ガスとしてアンモニアガスを含むか、前記水素含有ガスとして水素ガスを含み且つ窒素ガスを含む、
請求項9〜14の何れか一項に記載のプリコート方法。 - 前記第1のガス、前記第2のガス、前記第3のガス、前記第4のガス、及び前記第5のガスの各々に含まれる前記金属原料ガスは、四塩化チタンガスであり、
前記第1のガス、前記第2のガス、前記第3のガス、及び前記第5のガスの各々に含まれる前記水素含有ガスは、水素ガスであり、
前記第1の膜、前記第2の膜、前記第3の膜、及び前記第5の膜の各々はチタン膜であり、
前記第4のガスは前記水素含有ガスとしてアンモニアガスを含むか、前記水素含有ガスとして水素ガスを含み且つ窒素ガスを含む、
請求項9〜14の何れか一項に記載のプリコート方法。 - 請求項1〜17の何れか一項に記載のプリコート方法を実行することにより、前記チャンバ内の前記表面をプリコートする工程と、
プリコートする前記工程の実行後に、前記支持台上に基板を載置する工程と、
前記内部空間に前記金属原料ガス及び水素含有ガスを含む処理ガスを供給することにより、前記基板上に金属含有膜を形成する工程と、
を含む成膜方法。 - 請求項9〜17の何れか一項に記載のプリコート方法を実行することにより、前記チャンバ内の前記表面をプリコートする工程と、
プリコートする前記工程の実行後に、前記支持台上に基板を載置する工程と、
前記内部空間に前記金属原料ガス及び水素含有ガスを含む処理ガスを供給することにより、前記基板上に金属含有膜を形成する工程と、
を含み、
第5の膜を形成する前記工程の実行中の前記支持台の温度は、前記金属含有膜を形成する前記工程の実行中の前記支持台の温度と同一である、
成膜方法。 - 前記処理ガスは不活性ガスを更に含み、金属含有膜を形成する前記工程では、前記内部空間の中で前記処理ガスのプラズマが生成される、請求項18又は19に記載の成膜方法。
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