JP6913879B2 - ダイシング装置 - Google Patents
ダイシング装置 Download PDFInfo
- Publication number
- JP6913879B2 JP6913879B2 JP2019234760A JP2019234760A JP6913879B2 JP 6913879 B2 JP6913879 B2 JP 6913879B2 JP 2019234760 A JP2019234760 A JP 2019234760A JP 2019234760 A JP2019234760 A JP 2019234760A JP 6913879 B2 JP6913879 B2 JP 6913879B2
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- Prior art keywords
- blade
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- dicing
- protrusion amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000012545 processing Methods 0.000 claims description 30
- 238000005520 cutting process Methods 0.000 claims description 16
- 101100480513 Caenorhabditis elegans tag-52 gene Proteins 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 13
- 238000001514 detection method Methods 0.000 description 7
- 239000006061 abrasive grain Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- ZLHLYESIHSHXGM-UHFFFAOYSA-N 4,6-dimethyl-1h-imidazo[1,2-a]purin-9-one Chemical compound N=1C(C)=CN(C2=O)C=1N(C)C1=C2NC=N1 ZLHLYESIHSHXGM-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
Description
Claims (2)
- ワークとブレードとを相対的に移動させながら前記ワークを前記ブレードによって切削加工する加工部と、
前記ブレードに備えられたRFIDタグに前記ブレードの刃部の突出量を読み書き可能なリードライト手段と、
前記リードライト手段によって読み取られた前記突出量に基づいて前記加工部を制御するとともに、前記加工部による切削加工の終了時又は途中時に最新の前記突出量を前記リードライト手段を介して前記RFIDタグに書き込む制御手段と、
を備えるダイシング装置。 - 前記リードライト手段によって読み取られた前記突出量に基づいて、前記ブレードが使用可能であるか否かを判定する判定手段を更に備える、
請求項1に記載のダイシング装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019234760A JP6913879B2 (ja) | 2016-03-29 | 2019-12-25 | ダイシング装置 |
JP2021113525A JP7368424B2 (ja) | 2019-12-25 | 2021-07-08 | ダイシング装置 |
JP2023027476A JP2023063325A (ja) | 2019-12-25 | 2023-02-24 | ダイシング装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016065417A JP6643664B2 (ja) | 2016-03-29 | 2016-03-29 | ダイシング装置 |
JP2019234760A JP6913879B2 (ja) | 2016-03-29 | 2019-12-25 | ダイシング装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016065417A Division JP6643664B2 (ja) | 2016-03-29 | 2016-03-29 | ダイシング装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021113525A Division JP7368424B2 (ja) | 2019-12-25 | 2021-07-08 | ダイシング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020074413A JP2020074413A (ja) | 2020-05-14 |
JP6913879B2 true JP6913879B2 (ja) | 2021-08-04 |
Family
ID=70610249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019234760A Active JP6913879B2 (ja) | 2016-03-29 | 2019-12-25 | ダイシング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6913879B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3247501B2 (ja) * | 1993-07-26 | 2002-01-15 | 三菱自動車工業株式会社 | 刃付けされる工具の使用方法 |
JP4387010B2 (ja) * | 1999-11-10 | 2009-12-16 | 株式会社ディスコ | 切削装置 |
JP2006051596A (ja) * | 2004-07-15 | 2006-02-23 | Disco Abrasive Syst Ltd | 砥石工具 |
-
2019
- 2019-12-25 JP JP2019234760A patent/JP6913879B2/ja active Active
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Publication number | Publication date |
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JP2020074413A (ja) | 2020-05-14 |
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