JP6862167B2 - 垂直方向に有効な空気ばねを備えた防振装置 - Google Patents
垂直方向に有効な空気ばねを備えた防振装置 Download PDFInfo
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- JP6862167B2 JP6862167B2 JP2016240946A JP2016240946A JP6862167B2 JP 6862167 B2 JP6862167 B2 JP 6862167B2 JP 2016240946 A JP2016240946 A JP 2016240946A JP 2016240946 A JP2016240946 A JP 2016240946A JP 6862167 B2 JP6862167 B2 JP 6862167B2
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- 238000002955 isolation Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
- F16F15/0275—Control of stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
- F16F9/0209—Telescopic
- F16F9/0218—Mono-tubular units
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
- F16F9/0209—Telescopic
- F16F9/0281—Details
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Environmental & Geological Engineering (AREA)
- Public Health (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Vibration Prevention Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Fluid-Damping Devices (AREA)
Description
2 ベース部
3 ヘッド部
4 作動空間
5 膜
6 クランプリング
7 クランプリング
8 外側ハウジング
9 内側ハウジング
10 ねじ
11 ねじ
12 可撓性ロッド
13 板ばねアセンブリ
14 板ばね
15 コイル
16 磁石
17 間隙
18 防振システム
19 センサ
20 台
21 制御装置
22 上部
23 下部
24 半導体デバイスを処理する装置
25 アクチュエーター
Claims (13)
- 防振装置(1)であって、垂直方向においてのみ有効である空気ばねと、
設置空間を変更することなく垂直方向における更なる防振を可能とする、垂直方向において有効な少なくとも一つのアクチュエーターとを備え、
該空気ばねは作動空間(4)を有し、垂直方向において有効な前記少なくとも1つのアクチュエーターが前記空気ばねの前記作動空間(4)内に配置され、
防振装置(1)は、水平方向における防振のための可撓性ロッド(12)を備える、防振装置。 - 請求項1に記載の防振装置(1)であって、前記可撓性ロッド(12)は前記防振装置(1)の内側ハウジング(9)内に配置され、前記可撓性ロッド(12)は前記空気ばねの前記作動空間(4)内に突出する、防振装置。
- 請求項1又は2に記載の防振装置(1)であって、前記アクチュエーターはソレノイドアクチュエーターとして実施される、防振装置。
- 請求項1又は2に記載の防振装置(1)であって、該防振装置は内側ハウジング(9)及び外側ハウジング(8)を有し、該内側ハウジング(9)及び該外側ハウジング(8)の間に前記作動空間が配置される、防振装置。
- 請求項4に記載の防振装置(1)であって、少なくとも1つのコイル(15)が前記内側ハウジングの周囲に延びており、及び少なくとも1つの磁石が前記外側ハウジングに沿って延びている、防振装置。
- 請求項1〜5のいずれか1項に記載の防振装置(1)であって、重ね合わされる複数のアクチュエーター、特にソレノイドアクチュエーターを備える、防振装置。
- 請求項1〜6のいずれか1項に記載の防振装置(1)であって、前記アクチュエーターはソレノイドアクチュエーターとして実施され、及びコイル(15)と磁石(16)とを備え、該コイル(15)と該磁石(16)との間の間隙(17)は、5mm未満の幅、好ましくは1mm未満の幅、より好ましくは0.5mm未満の幅を有する、防振装置。
- 請求項4又は5に記載の防振装置(1)であって、前記空気ばねの前記作動空間(4)内に配置される少なくとも1つの板ばね(14)を備え、前記作動空間を囲む前記内側ハウジングと前記外側ハウジングとを相互接続するため、該少なくとも1つの板ばね(14)は前記空気ばねと平行に接続される、防振装置。
- 請求項8に記載の防振装置(1)であって、前記板ばね(14)は板ばねアセンブリの一部である、防振装置。
- 防振システム(18)であって、請求項1〜9のいずれか1項に記載の少なくとも1つの防振装置を備える、防振システム。
- 請求項10に記載の防振システム(18)であって、該防振システムは、半導体デバイスを処理する装置(24)、特にリソグラフィー装置、光学検査装置、又はウェハー処理装置を備える、防振システム。
- 請求項10又は11に記載の防振システム(18)であって、防振のために取り付けられる荷重又は該防振システムが配置される床面の振動を検出する少なくとも1つのセンサと、該少なくとも1つのセンサからの信号に基づいて前記空気ばね及び/又は前記アクチュエーターをアクティブに制御する制御装置(21)と、を備える、防振システム。
- 請求項10〜12のいずれか1項に記載の防振システム(18)であって、前記アクチュエーターの外側ハウジング(8)の外部に配置され、水平方向において有効である少なくとも1つの更なるアクチュエーター(25)を備える、防振システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15200391.9A EP3181944B1 (de) | 2015-12-16 | 2015-12-16 | Schwingungsisolator mit einer vertikal wirksamen pneumatischen feder |
EP15200391.9 | 2015-12-16 |
Publications (2)
Publication Number | Publication Date |
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JP2017110809A JP2017110809A (ja) | 2017-06-22 |
JP6862167B2 true JP6862167B2 (ja) | 2021-04-21 |
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JP2016240946A Active JP6862167B2 (ja) | 2015-12-16 | 2016-12-13 | 垂直方向に有効な空気ばねを備えた防振装置 |
Country Status (3)
Country | Link |
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US (1) | US10941833B2 (ja) |
EP (1) | EP3181944B1 (ja) |
JP (1) | JP6862167B2 (ja) |
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CN103047346B (zh) | 2012-12-19 | 2014-06-11 | 哈尔滨工业大学 | 滚动关节轴承角度解耦的磁浮零刚度隔振器与隔振*** |
CN103062283B (zh) | 2012-12-19 | 2014-10-29 | 哈尔滨工业大学 | 气浮球轴承角度解耦的零刚度隔振器与隔振*** |
EP2759735B1 (de) * | 2013-01-29 | 2016-06-15 | Integrated Dynamics Engineering GmbH | Stationäres Schwingungsisolationssystem sowie Verfahren zur Regelung eines Schwingungsisolationssystems |
EP2759736B1 (de) | 2013-01-29 | 2015-09-16 | Integrated Dynamics Engineering GmbH | Eine Schraubenfeder umfassender Schwingungsisolator |
EP2998611B1 (de) | 2014-09-18 | 2019-07-24 | Integrated Dynamics Engineering GmbH | Schwingungsisolator mit pneumatischer Feder |
EP3181944B1 (de) | 2015-12-16 | 2023-04-26 | Integrated Dynamics Engineering GmbH | Schwingungsisolator mit einer vertikal wirksamen pneumatischen feder |
EP3260733B1 (de) | 2016-06-23 | 2019-08-07 | Integrated Dynamics Engineering GmbH | Aktives stationäres schwingungsisolationssystem |
EP3260732B1 (de) | 2016-06-23 | 2019-03-27 | Integrated Dynamics Engineering GmbH | Pneumatischer aktor sowie verfahren zum betrieb eines aktiven schwingungsisolationssystem |
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2015
- 2015-12-16 EP EP15200391.9A patent/EP3181944B1/de active Active
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2016
- 2016-10-25 US US15/333,641 patent/US10941833B2/en active Active
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US20170175845A1 (en) | 2017-06-22 |
EP3181944A1 (de) | 2017-06-21 |
US10941833B2 (en) | 2021-03-09 |
JP2017110809A (ja) | 2017-06-22 |
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