JP6842689B2 - 搬送装置およびスクライブシステム - Google Patents
搬送装置およびスクライブシステム Download PDFInfo
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- JP6842689B2 JP6842689B2 JP2016235604A JP2016235604A JP6842689B2 JP 6842689 B2 JP6842689 B2 JP 6842689B2 JP 2016235604 A JP2016235604 A JP 2016235604A JP 2016235604 A JP2016235604 A JP 2016235604A JP 6842689 B2 JP6842689 B2 JP 6842689B2
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- 238000004140 cleaning Methods 0.000 claims description 168
- 239000000758 substrate Substances 0.000 claims description 132
- 230000032258 transport Effects 0.000 claims description 71
- 230000007246 mechanism Effects 0.000 description 27
- 239000006063 cullet Substances 0.000 description 18
- 230000003028 elevating effect Effects 0.000 description 7
- 230000002452 interceptive effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000001174 ascending effect Effects 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 210000004209 hair Anatomy 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G45/00—Lubricating, cleaning, or clearing devices
- B65G45/10—Cleaning devices
- B65G45/18—Cleaning devices comprising brushes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
- C03B35/202—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H7/00—Marking-out or setting-out work
- B25H7/04—Devices, e.g. scribers, for marking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Description
本実施形態によれば、以下の効果が奏される。
以上、本発明の実施形態について説明したが、本発明は上記実施形態に何ら制限されるものではなく、また、本発明の実施形態も上記以外に種々の変更が可能である。
10 基板
100 スクライブ装置
110 テーブル(第1テーブル)
140 スクライブヘッド
200 搬送装置
201 搬送部
240 清掃ユニット(第1清掃ユニット、第2清掃ユニット)
250 清掃ユニット(第3清掃ユニット)
300 搬送体
410 テーブル(第2テーブル)
Claims (5)
- 基板を保持して第1テーブルから第2テーブルへと搬送する搬送装置であって、
前記基板の搬送方向後方に配置され、前記基板を前記第1テーブルから前記第2テーブルへと搬送する工程において前記第1テーブルの上面に接触し、前記第1テーブルの上面を清掃する第1清掃ユニットと、
前記基板の搬送方向前方に配置され、前記基板を前記第1テーブルから前記第2テーブルへと搬送する工程において前記第2テーブルの上面に接触し、前記第2テーブルの上面を清掃する第2清掃ユニットと、
前記第1テーブルと前記第2テーブルとの間の搬送経路に配置され、前記基板を前記第1テーブルから前記第2テーブルへと搬送する工程において前記基板の下面に接触し、前記基板の下面を清掃する第3清掃ユニットと、
を備え、
前記第3清掃ユニットによる前記基板の下面の清掃は、前記第1清掃ユニットによる前記第1テーブルの上面の清掃と、前記第2清掃ユニットによる前記第2テーブルの上面の清掃とのうちの少なくとも1つと同時に行う、
ことを特徴とする搬送装置。 - 前記第1清掃ユニットは、第1清掃具と、前記第1清掃具を前記第1テーブルの上面に対して接触および離間させる第1駆動部と、を備える、請求項1に記載の搬送装置。
- 前記第2清掃ユニットは、第2清掃具と、前記第2清掃具を前記第2テーブルの上面に対して接触および離間させる第2駆動部と、を備える、請求項1に記載の搬送装置。
- 前記第3清掃ユニットは、第3清掃具と、前記第3清掃具を前記基板の下面に対して接触および離間させる第3駆動部と、を備える、請求項1に記載の搬送装置。
- 請求項1ないし4の何れか一項に記載の搬送装置と、
前記第1テーブルに載置された前記基板にスクライブラインを形成するスクライブ装置と、を備えるスクライブシステム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016235604A JP6842689B2 (ja) | 2016-12-05 | 2016-12-05 | 搬送装置およびスクライブシステム |
TW106126025A TWI746609B (zh) | 2016-12-05 | 2017-08-02 | 搬送裝置及劃線系統 |
KR1020170110440A KR102422164B1 (ko) | 2016-12-05 | 2017-08-30 | 반송체, 반송 장치 및 스크라이브 시스템 |
CN201710800226.3A CN108147062B (zh) | 2016-12-05 | 2017-09-06 | 输送体、输送装置以及划线*** |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016235604A JP6842689B2 (ja) | 2016-12-05 | 2016-12-05 | 搬送装置およびスクライブシステム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018093071A JP2018093071A (ja) | 2018-06-14 |
JP6842689B2 true JP6842689B2 (ja) | 2021-03-17 |
Family
ID=62468730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016235604A Active JP6842689B2 (ja) | 2016-12-05 | 2016-12-05 | 搬送装置およびスクライブシステム |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6842689B2 (ja) |
KR (1) | KR102422164B1 (ja) |
CN (1) | CN108147062B (ja) |
TW (1) | TWI746609B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109129386A (zh) * | 2018-07-10 | 2019-01-04 | 伯恩光学(惠州)有限公司 | 划线机 |
TWI758826B (zh) * | 2020-08-19 | 2022-03-21 | 萬潤科技股份有限公司 | 裁切方法、裁切設備及使用於該裁切方法之輔助元件 |
CN113333416B (zh) * | 2021-06-16 | 2023-04-18 | 昆明欧迈科技有限公司 | 一种烟丝箱清扫装置 |
CN113695308B (zh) * | 2021-07-20 | 2023-01-13 | 山东力冠微电子装备有限公司 | 一种半导体晶圆前处理*** |
CN114472266B (zh) * | 2022-01-14 | 2023-07-28 | 南京尚科得科技发展有限公司 | 一种医用隔离箱亚克力板处理设备 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2539911Y2 (ja) * | 1992-01-13 | 1997-07-02 | 三星ダイヤモンド工業株式会社 | 自動基板裁断装置における清掃兼用搬送機 |
JP2578845Y2 (ja) * | 1992-07-29 | 1998-08-20 | 三星ダイヤモンド工業株式会社 | 自動基板裁断装置における位置決め機能を有する搬送機 |
JP2004026539A (ja) | 2002-06-24 | 2004-01-29 | Nakamura Tome Precision Ind Co Ltd | ガラス基板の割断加工方法及びその装置 |
JP4243990B2 (ja) * | 2003-07-11 | 2009-03-25 | 日東電工株式会社 | 半導体ウエハ搬送方法および搬送装置 |
JP2009157247A (ja) * | 2007-12-27 | 2009-07-16 | Orc Mfg Co Ltd | 露光装置 |
TWI406326B (zh) * | 2008-10-24 | 2013-08-21 | Macronix Int Co Ltd | 集塵裝置、自動清潔裝置及自動清潔方法 |
CN201357414Y (zh) * | 2009-02-19 | 2009-12-09 | 北京京东方光电科技有限公司 | 机械手臂 |
JP2011041444A (ja) * | 2009-08-18 | 2011-02-24 | Yokogawa Electric Corp | 平面モータ |
JP5983412B2 (ja) * | 2011-11-16 | 2016-08-31 | 日本電気硝子株式会社 | 板ガラス割断装置、板ガラス割断方法、板ガラス作製方法、および、板ガラス割断システム |
JP2014091652A (ja) * | 2012-11-05 | 2014-05-19 | Mitsuboshi Diamond Industrial Co Ltd | 基板分断装置 |
CN203700180U (zh) * | 2014-01-17 | 2014-07-09 | 宫庆长 | 一种玻璃屑清扫装置 |
CN204325131U (zh) * | 2014-12-26 | 2015-05-13 | 芜湖东旭光电装备技术有限公司 | 玻璃碎屑清除装置 |
KR102569618B1 (ko) * | 2015-03-30 | 2023-08-22 | 가부시키가이샤 니콘 | 물체 반송 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 물체 반송 방법, 및 노광 방법 |
CN104889979B (zh) * | 2015-05-20 | 2016-08-24 | 洛阳中冶重工机械有限公司 | 一种真空吸盘式码垛机械手 |
CN204779332U (zh) * | 2015-06-10 | 2015-11-18 | 江西赣悦光伏玻璃有限公司 | 一种光伏玻璃智能化切割设备 |
CN205011631U (zh) * | 2015-09-25 | 2016-02-03 | 嵊州市寰鼎玻璃科技有限公司 | 一种用于玻璃制造的自动裁片机 |
CN205387544U (zh) * | 2016-03-17 | 2016-07-20 | 日本电气硝子株式会社 | 板玻璃割断装置 |
CN105922113B (zh) | 2016-06-20 | 2019-02-22 | 广东华技达精密机械有限公司 | 主板清洗机和主板清洗方法 |
-
2016
- 2016-12-05 JP JP2016235604A patent/JP6842689B2/ja active Active
-
2017
- 2017-08-02 TW TW106126025A patent/TWI746609B/zh active
- 2017-08-30 KR KR1020170110440A patent/KR102422164B1/ko active IP Right Grant
- 2017-09-06 CN CN201710800226.3A patent/CN108147062B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TW201821343A (zh) | 2018-06-16 |
JP2018093071A (ja) | 2018-06-14 |
KR102422164B1 (ko) | 2022-07-18 |
TWI746609B (zh) | 2021-11-21 |
CN108147062A (zh) | 2018-06-12 |
CN108147062B (zh) | 2021-11-30 |
KR20180064270A (ko) | 2018-06-14 |
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