JP6830481B2 - 試験室又は被検査物の真空引き時における漏れ検知 - Google Patents
試験室又は被検査物の真空引き時における漏れ検知 Download PDFInfo
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- JP6830481B2 JP6830481B2 JP2018513863A JP2018513863A JP6830481B2 JP 6830481 B2 JP6830481 B2 JP 6830481B2 JP 2018513863 A JP2018513863 A JP 2018513863A JP 2018513863 A JP2018513863 A JP 2018513863A JP 6830481 B2 JP6830481 B2 JP 6830481B2
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- 238000012360 testing method Methods 0.000 title claims description 44
- 238000001514 detection method Methods 0.000 title description 5
- 238000005259 measurement Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 3
- 230000008030 elimination Effects 0.000 claims 2
- 238000003379 elimination reaction Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 19
- 239000003570 air Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Description
Claims (10)
- 試験室内に含まれる被検査物の漏れを検知する方法であって、
前記試験室内に前記被検査物を配置する工程と、
前記試験室を真空引きする工程と、
前記試験室を真空引きする間に、計測信号Mとして前記試験室内のガスの分圧を計測する工程と、
時間tにおける前記計測信号M(t)の前記推移及びnは正の有理数である前記項t−nを含み、試験室又は被検査物の壁からの拡散物及び/又は脱離物から生じるガスの、前記計測信号M(t)内における割合を表す近似関数F(t)から差分信号Dを形成する工程と、
前記差分信号Dに基づいて前記被検査物の漏れの有無を判断する工程と、を備える方法。
- 被検査物の漏れを検知する方法であって、
前記被検査物を真空引きする工程と、
前記被検査物を真空引きする間に、計測信号Mとして前記被検査物内の分圧を計測する工程と、
時間tにおける前記計測信号M(t)の前記推移及びnは正の有理数である前記項t−nを含み、試験室又は被検査物の壁からの拡散物及び/又は脱離物から生じるガスの、前記計測信号M(t)内における割合を表す近似関数F(t)から差分信号Dを形成する工程と、
前記差分信号Dに基づいて前記被検査物の漏れの有無を判断する工程と、を備える方法。
- nは1以上で、好ましくは整数であることを特徴とする、請求項1に記載の方法。
- 前記近似関数F(t)が前記項1/t2を含むように、n=2であることを特徴とする、請求項3に記載の方法。
-
- 前記近似関数F(t)が、前記計測中に所定の期間、算出されることを特徴とする、請求項1〜5の何れかに記載の方法。
- 前記期間は約1乃至5秒間、好ましくは約2秒間の範囲であることを特徴とする、請求項6に記載の方法。
- 前記近似関数は、D(t)<M(t)/1000である限り、新しい計測値のために算出され、
前記新しい計測値は、t 2 >t 1 としたときの、測定信号M(t 1 )の後の時点t 2 での測定信号M(t 2 )であることを特徴とする、請求項1〜7の何れかに記載の方法。
- 前記試験室内の前記圧力が1mbar未満、好ましくは0.1mbar未満である場合、前記差分信号Dに基づいて前記被検査物の漏れの有無を判断することを特徴とする、請求項1〜8の何れかに記載の方法。
- 前記被検査物の漏れは、前記差分信号DがM(t)/100よりも大きくなると、すぐに検知されるとみなされることを特徴とする、請求項1〜9の何れかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015217598.7A DE102015217598A1 (de) | 2015-09-15 | 2015-09-15 | Leckdetektion beim Evakuieren einer Prüfkammer oder eines Prüflings |
DE102015217598.7 | 2015-09-15 | ||
PCT/EP2016/071416 WO2017046027A1 (de) | 2015-09-15 | 2016-09-12 | Leckdetektion beim evakuieren einer prüfkammer oder eines prüflings |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018527580A JP2018527580A (ja) | 2018-09-20 |
JP6830481B2 true JP6830481B2 (ja) | 2021-02-17 |
Family
ID=56893995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018513863A Active JP6830481B2 (ja) | 2015-09-15 | 2016-09-12 | 試験室又は被検査物の真空引き時における漏れ検知 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20180252613A1 (ja) |
EP (1) | EP3350561B1 (ja) |
JP (1) | JP6830481B2 (ja) |
KR (1) | KR20180051549A (ja) |
CN (1) | CN108139292B (ja) |
DE (1) | DE102015217598A1 (ja) |
TW (1) | TWI708049B (ja) |
WO (1) | WO2017046027A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019121462B4 (de) * | 2019-08-08 | 2021-12-09 | Inficon Gmbh | Verfahren zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6315133A (ja) * | 1986-07-08 | 1988-01-22 | Toshiba Corp | 真空リ−クチエツク方法 |
US4715214A (en) * | 1986-10-03 | 1987-12-29 | S. Himmelstein And Company | Leak tester |
DE4228149A1 (de) * | 1992-08-25 | 1994-03-03 | Leybold Ag | Vakuum-Meßgerät für die integrale Dichtigkeitskontrolle mit leichten Gasen |
EP0791814A3 (en) * | 1997-05-26 | 1997-11-26 | Martin Lehmann | Method for leak testing and leak testing apparatus |
US6526809B2 (en) * | 2000-03-30 | 2003-03-04 | Cincinnati Test Systems, Inc. | Method for identifying leaks in a sealed package having a liquid therein |
EP2333290B1 (en) * | 2009-12-14 | 2013-05-15 | Volvo Car Corporation | Method and system to detect a leak in a vehicle fuel tank |
DE102011086486B4 (de) * | 2011-11-16 | 2023-01-19 | Inficon Gmbh | Vorrichtung und Verfahren zur schnellen Lecksuche an formsteifen/schlaffen Verpackungen ohne Zusatz von Prüfgas |
US20140334946A1 (en) * | 2013-05-08 | 2014-11-13 | Volvo Car Corporation | Leakage detection system and method for fuel tank systems |
-
2015
- 2015-09-15 DE DE102015217598.7A patent/DE102015217598A1/de not_active Withdrawn
-
2016
- 2016-09-12 CN CN201680054533.5A patent/CN108139292B/zh active Active
- 2016-09-12 US US15/760,014 patent/US20180252613A1/en not_active Abandoned
- 2016-09-12 JP JP2018513863A patent/JP6830481B2/ja active Active
- 2016-09-12 WO PCT/EP2016/071416 patent/WO2017046027A1/de active Application Filing
- 2016-09-12 KR KR1020187009114A patent/KR20180051549A/ko not_active Application Discontinuation
- 2016-09-12 EP EP16763283.5A patent/EP3350561B1/de active Active
- 2016-09-14 TW TW105130062A patent/TWI708049B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI708049B (zh) | 2020-10-21 |
US20180252613A1 (en) | 2018-09-06 |
EP3350561B1 (de) | 2020-04-29 |
WO2017046027A1 (de) | 2017-03-23 |
CN108139292B (zh) | 2020-11-03 |
EP3350561A1 (de) | 2018-07-25 |
DE102015217598A1 (de) | 2017-03-16 |
CN108139292A (zh) | 2018-06-08 |
JP2018527580A (ja) | 2018-09-20 |
TW201719133A (zh) | 2017-06-01 |
KR20180051549A (ko) | 2018-05-16 |
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