JP6815770B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
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- JP6815770B2 JP6815770B2 JP2016138338A JP2016138338A JP6815770B2 JP 6815770 B2 JP6815770 B2 JP 6815770B2 JP 2016138338 A JP2016138338 A JP 2016138338A JP 2016138338 A JP2016138338 A JP 2016138338A JP 6815770 B2 JP6815770 B2 JP 6815770B2
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- Prior art keywords
- cutting
- load current
- current value
- nozzle
- cutting blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005520 cutting process Methods 0.000 title claims description 185
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 52
- 238000001816 cooling Methods 0.000 claims description 39
- 230000002159 abnormal effect Effects 0.000 claims description 9
- 238000003754 machining Methods 0.000 description 13
- 238000001514 detection method Methods 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/04—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs
- B28D1/044—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs the saw blade being movable on slide ways
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/04—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs
- B28D1/046—Sawing in a plane parallel to the work table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/005—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
- B26D1/46—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having an endless band-knife or the like
- B26D1/54—Guides for band-knives or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/24—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Laser Beam Processing (AREA)
Description
4 切削手段
41 切削ブレード
42 スピンドル
44 モータ
46 冷却ノズル(切削水供給ノズル)
47 シャワーノズル(切削水供給ノズル)
48 負荷電流値検出手段
9 制御手段
91 記憶部
92 判断部
W 被加工物
Claims (2)
- 回転可能に支持されたスピンドルと、該スピンドルを回転駆動するモータと、該スピンドルの先端部に装着された切削ブレードと、該切削ブレードに切削水を供給する切削水供給ノズルとを有する切削手段と、該モータの負荷電流値を検出する負荷電流値検出手段と、該切削手段及び該負荷電流値検出手段を制御する制御手段と、を備え、被加工物を切削加工する切削装置であって、
該切削水供給ノズルは、該切削ブレードを挟んで位置して切削水を供給する冷却ノズルと、該切削ブレードに噴射した切削水を巻き込ませるシャワーノズルとを備え、
該制御手段は、
該冷却ノズルが適正な位置に位置付けられた状態と、該シャワーノズルが適正な位置に位置付けられた状態とのそれぞれで、所定量の切削水を供給しつつ所定スピンドル回転数で切削ブレードを回転させた際の、該負荷電流値検出手段で検出した負荷電流値に基づく任意の値を閾値として予め記憶する記憶部と、
該冷却ノズルから該所定量の切削水を供給しつつ所定スピンドル回転数で該切削ブレードを回転させた際の該負荷電流値検出手段で検出した負荷電流値と該記憶部が記憶した該閾値との比較結果に応じ、該冷却ノズルの位置の正常又は異常を判断し、該シャワーノズルから該所定量の切削水を供給しつつ所定スピンドル回転数で該切削ブレードを回転させた際の該負荷電流値検出手段で検出した負荷電流値と該記憶部が記憶した該閾値との比較結果に応じ、該シャワーノズルの位置の正常又は異常を判断する判断部と、を備える切削装置。 - 該記憶部には、被加工物を加工するデバイスデータ毎に該閾値を記憶させることを特徴とする請求項1記載の切削装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016138338A JP6815770B2 (ja) | 2016-07-13 | 2016-07-13 | 切削装置 |
TW106119305A TWI739849B (zh) | 2016-07-13 | 2017-06-09 | 切削裝置 |
MYPI2017702337A MY183734A (en) | 2016-07-13 | 2017-06-22 | Cutting apparatus |
SG10201705191RA SG10201705191RA (en) | 2016-07-13 | 2017-06-22 | Cutting apparatus |
KR1020170084142A KR102251723B1 (ko) | 2016-07-13 | 2017-07-03 | 절삭 장치 |
CN201710560879.9A CN107618118B (zh) | 2016-07-13 | 2017-07-11 | 切削装置 |
US15/647,938 US10328606B2 (en) | 2016-07-13 | 2017-07-12 | Cutting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016138338A JP6815770B2 (ja) | 2016-07-13 | 2016-07-13 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018010952A JP2018010952A (ja) | 2018-01-18 |
JP6815770B2 true JP6815770B2 (ja) | 2021-01-20 |
Family
ID=60942443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016138338A Active JP6815770B2 (ja) | 2016-07-13 | 2016-07-13 | 切削装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10328606B2 (ja) |
JP (1) | JP6815770B2 (ja) |
KR (1) | KR102251723B1 (ja) |
CN (1) | CN107618118B (ja) |
MY (1) | MY183734A (ja) |
SG (1) | SG10201705191RA (ja) |
TW (1) | TWI739849B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7001493B2 (ja) * | 2018-02-26 | 2022-01-19 | 株式会社ディスコ | 撮像画像形成ユニット |
CN108415366B (zh) * | 2018-03-05 | 2021-01-29 | 高邑县云发专用机床厂 | 基于伺服技术的切削深度反馈方法及智能切削方法及*** |
JP7072986B2 (ja) * | 2018-05-29 | 2022-05-23 | 株式会社ディスコ | ウォータージェット加工装置 |
JP7206065B2 (ja) * | 2018-07-26 | 2023-01-17 | 株式会社ディスコ | 切削装置 |
JP7098239B2 (ja) * | 2018-08-13 | 2022-07-11 | 株式会社ディスコ | ノズル高さ検査方法及び切削装置 |
LU101065B1 (en) * | 2018-12-21 | 2020-06-24 | Univ Luxembourg | Machining system and monitoring method |
CN110281409B (zh) * | 2019-06-13 | 2021-06-11 | 菏泽城建工程发展集团有限公司 | 一种切割cf墙板用自动降尘装置 |
JP7461132B2 (ja) * | 2019-11-27 | 2024-04-03 | 株式会社ディスコ | 切削装置 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6043114B2 (ja) * | 1982-12-24 | 1985-09-26 | 日本たばこ産業株式会社 | 裁断装置 |
JP3792266B2 (ja) * | 1994-06-16 | 2006-07-05 | 森精機興産株式会社 | 工作機械の熱変位補正方法及びその装置 |
JP3071107B2 (ja) * | 1994-09-28 | 2000-07-31 | 株式会社日平トヤマ | ワイヤソーにおけるワイヤ洗浄装置 |
JPH10202496A (ja) * | 1997-01-13 | 1998-08-04 | Mitsubishi Materials Corp | ワイヤ式切断装置 |
JP2000176836A (ja) * | 1998-12-17 | 2000-06-27 | Mitsubishi Material Kenzai Corp | 研磨方法及び装置 |
JP4215228B2 (ja) * | 1999-10-26 | 2009-01-28 | 独立行政法人理化学研究所 | 卓上4軸鏡面加工装置 |
JP2001259961A (ja) * | 2000-03-15 | 2001-09-25 | Disco Abrasive Syst Ltd | 加工装置 |
JP3763734B2 (ja) * | 2000-10-27 | 2006-04-05 | 株式会社日立製作所 | パネル部材の加工方法 |
TWI256334B (en) * | 2002-10-22 | 2006-06-11 | Hitachi Koki Kk | Portable electric cutting device with blower mechanism |
JP4506126B2 (ja) * | 2003-08-27 | 2010-07-21 | 株式会社ジェイテクト | 研削装置 |
JP4192135B2 (ja) * | 2004-09-29 | 2008-12-03 | 株式会社東芝 | 加工装置及び加工方法 |
JP4694210B2 (ja) | 2005-01-07 | 2011-06-08 | 株式会社ディスコ | ブレードカバー装置 |
US7771249B2 (en) * | 2007-03-30 | 2010-08-10 | Park Industries, Inc. | Corner saw |
JP2009285769A (ja) * | 2008-05-28 | 2009-12-10 | Disco Abrasive Syst Ltd | 切削装置 |
JP2010228048A (ja) * | 2009-03-27 | 2010-10-14 | Disco Abrasive Syst Ltd | 切削装置 |
JP2011040511A (ja) * | 2009-08-10 | 2011-02-24 | Disco Abrasive Syst Ltd | ウエーハの研削方法 |
JP2011189411A (ja) * | 2010-03-11 | 2011-09-29 | Renesas Electronics Corp | ウェハ研削装置、ウェハ研削方法、ウェハ研削プログラム、及び、ウェハ研削制御装置 |
KR101297306B1 (ko) * | 2011-06-10 | 2013-08-14 | 손원호 | 물통이 구비된 탁상용 그라인더 |
JP5947605B2 (ja) * | 2012-04-17 | 2016-07-06 | 株式会社ディスコ | ノズル調整治具 |
KR102003997B1 (ko) * | 2012-11-22 | 2019-07-30 | 두산공작기계 주식회사 | 공작기계의 절삭유 분사 제어장치 및 제어방법 |
JP2014108463A (ja) * | 2012-11-30 | 2014-06-12 | Disco Abrasive Syst Ltd | 切削装置 |
JP2014108471A (ja) * | 2012-11-30 | 2014-06-12 | Takada Corp | 超音波振動切断機 |
CN103072084B (zh) * | 2013-02-04 | 2015-09-09 | 青岛理工大学 | 纳米流体静电雾化可控射流微量润滑磨削*** |
CN103147756B (zh) * | 2013-03-20 | 2017-03-29 | 中国矿业大学(北京) | 一种掘进机记忆截割控制***及其方法 |
CN203579423U (zh) * | 2013-12-02 | 2014-05-07 | 青岛理工大学 | 磁增强电场下纳米粒子射流可控输运微量润滑磨削装备 |
JP2015138950A (ja) * | 2014-01-24 | 2015-07-30 | 株式会社ディスコ | 切削装置 |
JP6223239B2 (ja) * | 2014-03-07 | 2017-11-01 | 株式会社ディスコ | 切削装置 |
JP6302732B2 (ja) * | 2014-04-22 | 2018-03-28 | 株式会社ディスコ | 切削方法 |
EP2960012A1 (de) * | 2014-06-25 | 2015-12-30 | HILTI Aktiengesellschaft | Automatische Regelung von Aggregaten einer Wasserversorgungsanlage |
US20160311127A1 (en) * | 2015-04-24 | 2016-10-27 | Disco Corporation | Cutting apparatus and cutting method |
JP6695102B2 (ja) * | 2015-05-26 | 2020-05-20 | 株式会社ディスコ | 加工システム |
CN105666254B (zh) * | 2016-03-15 | 2017-12-01 | 河南理工大学 | 一种可控化的多维超声elid复合内圆磨削试验装置 |
-
2016
- 2016-07-13 JP JP2016138338A patent/JP6815770B2/ja active Active
-
2017
- 2017-06-09 TW TW106119305A patent/TWI739849B/zh active
- 2017-06-22 MY MYPI2017702337A patent/MY183734A/en unknown
- 2017-06-22 SG SG10201705191RA patent/SG10201705191RA/en unknown
- 2017-07-03 KR KR1020170084142A patent/KR102251723B1/ko active IP Right Grant
- 2017-07-11 CN CN201710560879.9A patent/CN107618118B/zh active Active
- 2017-07-12 US US15/647,938 patent/US10328606B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN107618118B (zh) | 2021-03-26 |
TWI739849B (zh) | 2021-09-21 |
MY183734A (en) | 2021-03-10 |
JP2018010952A (ja) | 2018-01-18 |
CN107618118A (zh) | 2018-01-23 |
US20180015638A1 (en) | 2018-01-18 |
TW201808522A (zh) | 2018-03-16 |
KR102251723B1 (ko) | 2021-05-12 |
KR20180007671A (ko) | 2018-01-23 |
SG10201705191RA (en) | 2018-02-27 |
US10328606B2 (en) | 2019-06-25 |
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