JP6793026B2 - バルブ装置及びバルブ制御装置 - Google Patents
バルブ装置及びバルブ制御装置 Download PDFInfo
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- JP6793026B2 JP6793026B2 JP2016241086A JP2016241086A JP6793026B2 JP 6793026 B2 JP6793026 B2 JP 6793026B2 JP 2016241086 A JP2016241086 A JP 2016241086A JP 2016241086 A JP2016241086 A JP 2016241086A JP 6793026 B2 JP6793026 B2 JP 6793026B2
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- temperature
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- valve
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- Prior art date
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- 239000011347 resin Substances 0.000 claims description 38
- 229920005989 resin Polymers 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 33
- 230000008859 change Effects 0.000 claims description 13
- 230000007423 decrease Effects 0.000 claims description 12
- 239000012530 fluid Substances 0.000 description 8
- 230000004043 responsiveness Effects 0.000 description 5
- 230000009467 reduction Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/54—Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/005—Electrical or magnetic means for measuring fluid parameters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D15/00—Control of mechanical force or stress; Control of mechanical pressure
- G05D15/01—Control of mechanical force or stress; Control of mechanical pressure characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Magnetically Actuated Valves (AREA)
- Fluid-Driven Valves (AREA)
Description
なお、アクチュエータであるピエゾ素子への印加電圧は100Vであり、バルブへの流体の供給ゲージ圧は50kPaである。この図5から分かるように、25℃環境下と同じ駆動電圧を印加しても60℃環境下では流量が低下してしまうという現象が見られた。
また、本発明に係るバルブ制御装置は、着座面が樹脂部材により形成された弁体を駆動するアクチュエータの駆動電圧を制御するバルブ制御装置であって、前記弁体の位置を示す位置情報を取得する位置情報取得部と、前記位置センサの検出位置に基づいて前記駆動電圧を調整する電圧調整部と、前記弁体又は前記弁体周辺の温度を示す温度情報を取得する温度情報取得部とを備え、前記電圧調整部は、前記温度情報取得部が取得した温度情報に応じて前記駆動電圧の設定値を変更することを特徴とする。
例えば、前記実施形態では、バルブ装置100が取り付けられるブロック体10に弁座20が設けられる構成を説明したが、バルブ装置100が弁座を有する構成であっても良い。具体的にはバルブ装置100が、前記実施形態の構成に加えて内部流路及び弁座が形成された流路形成部材(前記実施形態のブロック体に相当)を有している。
2 ・・・弁体
2X ・・・着座面
21 ・・・樹脂部材
3 ・・・アクチュエータ
4 ・・・バルブ制御装置(制御機器)
41 ・・・温度情報取得部
42 ・・・位置情報取得部
43 ・・・膨張関連情報格納部
44 ・・・電圧調整部
7 ・・・位置センサ
8 ・・・温度センサ
Claims (3)
- アクチュエータに駆動電圧を印加して、着座面が樹脂部材により形成された弁体を変位させるバルブ装置であって、
前記弁体の位置を検出する位置センサと、
前記位置センサの検出位置に基づいて前記駆動電圧を調整する電圧調整部と、
前記弁体又は前記弁体周辺の温度を検出する温度センサと
各温度における前記樹脂部材の膨張量又はそれに伴う開度低下量を示す膨張関連情報を格納する膨張関連情報格納部とを備え、
前記電圧調整部は、前記駆動電圧を所定の操作範囲内で調整するものであり、前記温度センサの検出温度に応じて前記操作範囲の上限値を変更するように構成されており、
前記電圧調整部は、前記検出温度及び前記膨張関連情報から求まる前記樹脂部材の膨張量又は前記開度低下量に基づいて、前記操作範囲の上限値を変更する、バルブ装置。 - 前記電圧調整部は、前記検出温度及び前記膨張関連情報から求まる前記樹脂部材の膨張量又は前記開度低下量と前記位置センサの検出位置とに基づいて、前記駆動電圧を調整する、請求項1記載のバルブ装置。
- 着座面が樹脂部材により形成された弁体を駆動するアクチュエータの駆動電圧を制御するバルブ制御装置であって、
前記弁体の位置を示す位置情報を取得する位置情報取得部と、
前記弁体の位置を検出する位置センサの検出位置に基づいて前記駆動電圧を調整する電圧調整部と、
前記弁体又は前記弁体周辺の温度を示す温度情報を取得する温度情報取得部と
各温度における前記樹脂部材の膨張量又はそれに伴う開度低下量を示す膨張関連情報を格納する膨張関連情報格納部とを備え、
前記電圧調整部は、前記駆動電圧を所定の操作範囲内で調整するものであり、前記温度情報取得部の取得する温度情報に応じて前記操作範囲の上限値を変更するように構成されており、
前記電圧調整部は、前記温度情報及び前記膨張関連情報から求まる前記樹脂部材の膨張量又は前記開度低下量に基づいて、前記操作範囲の上限値を変更する、バルブ制御装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016241086A JP6793026B2 (ja) | 2016-12-13 | 2016-12-13 | バルブ装置及びバルブ制御装置 |
KR1020170161966A KR102352030B1 (ko) | 2016-12-13 | 2017-11-29 | 밸브 장치 및 밸브 제어 장치 |
US15/827,423 US10480669B2 (en) | 2016-12-13 | 2017-11-30 | Valve device and valve control device |
CN201711235819.6A CN108223897B (zh) | 2016-12-13 | 2017-11-30 | 阀装置和阀控制装置 |
TW106143732A TWI780091B (zh) | 2016-12-13 | 2017-12-13 | 閥裝置和閥控制裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016241086A JP6793026B2 (ja) | 2016-12-13 | 2016-12-13 | バルブ装置及びバルブ制御装置 |
Publications (2)
Publication Number | Publication Date |
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JP2018096443A JP2018096443A (ja) | 2018-06-21 |
JP6793026B2 true JP6793026B2 (ja) | 2020-12-02 |
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Family Applications (1)
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JP2016241086A Active JP6793026B2 (ja) | 2016-12-13 | 2016-12-13 | バルブ装置及びバルブ制御装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10480669B2 (ja) |
JP (1) | JP6793026B2 (ja) |
KR (1) | KR102352030B1 (ja) |
CN (1) | CN108223897B (ja) |
TW (1) | TWI780091B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2020158573A1 (ja) * | 2019-01-31 | 2020-08-06 | 株式会社フジキン | バルブ装置、流量制御方法、流体制御装置、半導体製造方法、および半導体製造装置 |
KR102073789B1 (ko) * | 2019-07-05 | 2020-02-05 | 김태화 | 반도체 제조 장비용 펌프 백 스트림 방지 구조 |
TWI774227B (zh) * | 2020-02-21 | 2022-08-11 | 日商富士金股份有限公司 | 流量控制裝置、流量控制裝置的控制方法、流量控制裝置的控制程式 |
US20230129479A1 (en) * | 2020-03-05 | 2023-04-27 | Fujikin Incorporated | Flow rate control device and flow rate control method |
JP2022047691A (ja) * | 2020-09-14 | 2022-03-25 | 株式会社堀場エステック | 流体制御弁及び流体制御装置 |
JP7384860B2 (ja) | 2021-06-28 | 2023-11-21 | 本田技研工業株式会社 | 減圧システム及び減圧方法 |
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-
2016
- 2016-12-13 JP JP2016241086A patent/JP6793026B2/ja active Active
-
2017
- 2017-11-29 KR KR1020170161966A patent/KR102352030B1/ko active IP Right Grant
- 2017-11-30 US US15/827,423 patent/US10480669B2/en active Active
- 2017-11-30 CN CN201711235819.6A patent/CN108223897B/zh active Active
- 2017-12-13 TW TW106143732A patent/TWI780091B/zh active
Also Published As
Publication number | Publication date |
---|---|
US10480669B2 (en) | 2019-11-19 |
US20180163883A1 (en) | 2018-06-14 |
TW201821725A (zh) | 2018-06-16 |
KR102352030B1 (ko) | 2022-01-18 |
KR20180068287A (ko) | 2018-06-21 |
CN108223897B (zh) | 2021-02-12 |
CN108223897A (zh) | 2018-06-29 |
JP2018096443A (ja) | 2018-06-21 |
TWI780091B (zh) | 2022-10-11 |
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