JP2018168970A - メタルダイヤフラムバルブ - Google Patents
メタルダイヤフラムバルブ Download PDFInfo
- Publication number
- JP2018168970A JP2018168970A JP2017067325A JP2017067325A JP2018168970A JP 2018168970 A JP2018168970 A JP 2018168970A JP 2017067325 A JP2017067325 A JP 2017067325A JP 2017067325 A JP2017067325 A JP 2017067325A JP 2018168970 A JP2018168970 A JP 2018168970A
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- Prior art keywords
- valve
- metal diaphragm
- value
- flow path
- valve seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002184 metal Substances 0.000 title claims abstract description 79
- 239000012530 fluid Substances 0.000 claims abstract description 28
- 238000004891 communication Methods 0.000 claims description 4
- 239000011347 resin Substances 0.000 abstract description 8
- 229920005989 resin Polymers 0.000 abstract description 8
- 238000012545 processing Methods 0.000 abstract description 2
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- 230000008859 change Effects 0.000 description 19
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- 239000007789 gas Substances 0.000 description 12
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- 239000010409 thin film Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
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- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000036962 time dependent Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 206010052804 Drug tolerance Diseases 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000026781 habituation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000002243 precursor Substances 0.000 description 1
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/52—Means for additional adjustment of the rate of flow
- F16K1/523—Means for additional adjustment of the rate of flow for limiting the maximum flow rate, using a stop
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K47/00—Means in valves for absorbing fluid energy
- F16K47/08—Means in valves for absorbing fluid energy for decreasing pressure or noise level and having a throttling member separate from the closure member, e.g. screens, slots, labyrinths
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Lift Valve (AREA)
Abstract
Description
2 2次側流路
2a 出口側流路
3 弁室
4 弁座
5 ボデー
6 流路絞り部
7 メタルダイヤフラム
8 ロッド(ステム)
10 アクチュエータ本体
11 スプリング
12 ピストン
13 調整ネジ(ストローク調整手段)
Claims (8)
- 1次側流路及び2次側流路に連通する弁室に弁座を設けたボデーと、前記弁室の上方に配設された中央部が上下動して弁座へ当接するメタルダイヤフラムと、このメタルダイヤフラムの上方に昇降動自在に設けられ、当該メタルダイヤフラムの中央部を下方へ下降させるステムとを有するメタルダイヤフラムバルブであって、前記2次側流路の一部に流路絞り部を設けたことを特徴とするメタルダイヤフラムバルブ。
- 請求項1に記載のメタルダイヤフラムバルブにおいて、当該バルブの必要CV値に調整可能なCV値調整手段を備えたメタルダイヤフラムバルブ。
- 前記CV値調整手段におけるCV値調整は、前記メタルダイヤフラムの弁開度を調整することにより行うようにした請求項2に記載のメタルダイヤフラムバルブ。
- 前記CV値調整手段は、前記メタルダイヤフラムのストローク調整を行うストローク調整手段である請求項3に記載のメタルダイヤフラムバルブ。
- 前記ボデーには、アクチュエータが搭載され、このアクチュエータは、前記ステムを下降させるスプリングと、圧縮空気の供給により上昇されるピストンとが内蔵され、このピストンの上昇量を調整ネジのねじ込みにより調整可能に設けて前記ストローク調整手段とした請求項4に記載のメタルダイヤフラムバルブ。
- 前記流路絞り部は、前記2次側流路と前記ボデーに設けられた出口側流路との連通位置に設けられた請求項1乃至5の何れか1項に記載のメタルダイヤフラムバルブ。
- 高温流体が流れている間であって、前記バルブの使用開始時と1000万回開閉後とのCV値の変動は、10%以下となるように前記流路絞り部を設けた請求項1乃至6の何れか1項に記載のメタルダイヤフラムバルブ。
- 前記流路絞り部は、前記2次側流路に対する流路径の絞り比率を0.58以上1未満の範囲とした請求項1乃至7の何れか1項に記載のメタルダイヤフラムバルブ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017067325A JP6929098B2 (ja) | 2017-03-30 | 2017-03-30 | メタルダイヤフラムバルブ |
TW107108024A TWI749185B (zh) | 2017-03-30 | 2018-03-09 | 金屬膜片閥 |
KR1020180033722A KR102468504B1 (ko) | 2017-03-30 | 2018-03-23 | 메탈 다이어프램 밸브 |
US15/938,414 US10883615B2 (en) | 2017-03-30 | 2018-03-28 | Metal diaphragm valve |
CN201810272832.7A CN108692062B (zh) | 2017-03-30 | 2018-03-29 | 金属隔膜阀 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017067325A JP6929098B2 (ja) | 2017-03-30 | 2017-03-30 | メタルダイヤフラムバルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018168970A true JP2018168970A (ja) | 2018-11-01 |
JP6929098B2 JP6929098B2 (ja) | 2021-09-01 |
Family
ID=63672292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017067325A Active JP6929098B2 (ja) | 2017-03-30 | 2017-03-30 | メタルダイヤフラムバルブ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10883615B2 (ja) |
JP (1) | JP6929098B2 (ja) |
KR (1) | KR102468504B1 (ja) |
CN (1) | CN108692062B (ja) |
TW (1) | TWI749185B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020122533A (ja) * | 2019-01-31 | 2020-08-13 | 株式会社フジキン | ダイヤフラムバルブの製造方法 |
KR20200115229A (ko) | 2019-03-26 | 2020-10-07 | 가부시키가이샤 깃츠 에스시티 | 다이어프램 밸브 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7202597B2 (ja) * | 2018-07-31 | 2023-01-12 | 株式会社フジキン | アクチュエータおよびこれを用いたバルブ装置 |
US11598430B2 (en) | 2019-01-31 | 2023-03-07 | Fujikin Incorporated | Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device |
US11421795B2 (en) * | 2020-03-11 | 2022-08-23 | Watts Regulator Co. | Relief valve |
US11703140B2 (en) | 2020-03-11 | 2023-07-18 | Watts Regulator Co. | Relief valve with testing lockout |
CN114060580B (zh) * | 2021-11-22 | 2023-10-27 | 中冶南方工程技术有限公司 | 一种大小调节阀分程调节方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000213667A (ja) * | 1999-01-28 | 2000-08-02 | Tadahiro Omi | オリフィス内蔵弁 |
JP2002147623A (ja) * | 2000-11-16 | 2002-05-22 | Fujikin Inc | メタルダイヤフラム弁 |
JP2016011744A (ja) * | 2014-06-30 | 2016-01-21 | 株式会社フジキン | ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法 |
JP2016121776A (ja) * | 2014-12-25 | 2016-07-07 | 株式会社フジキン | 流体制御器 |
JP2017223318A (ja) * | 2016-06-17 | 2017-12-21 | Ckd株式会社 | 流体制御弁 |
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JPS522544B2 (ja) | 1972-07-14 | 1977-01-22 | ||
JPS5243513B2 (ja) | 1973-09-29 | 1977-10-31 | ||
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-
2017
- 2017-03-30 JP JP2017067325A patent/JP6929098B2/ja active Active
-
2018
- 2018-03-09 TW TW107108024A patent/TWI749185B/zh active
- 2018-03-23 KR KR1020180033722A patent/KR102468504B1/ko active IP Right Grant
- 2018-03-28 US US15/938,414 patent/US10883615B2/en active Active
- 2018-03-29 CN CN201810272832.7A patent/CN108692062B/zh active Active
Patent Citations (5)
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JP2000213667A (ja) * | 1999-01-28 | 2000-08-02 | Tadahiro Omi | オリフィス内蔵弁 |
JP2002147623A (ja) * | 2000-11-16 | 2002-05-22 | Fujikin Inc | メタルダイヤフラム弁 |
JP2016011744A (ja) * | 2014-06-30 | 2016-01-21 | 株式会社フジキン | ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法 |
JP2016121776A (ja) * | 2014-12-25 | 2016-07-07 | 株式会社フジキン | 流体制御器 |
JP2017223318A (ja) * | 2016-06-17 | 2017-12-21 | Ckd株式会社 | 流体制御弁 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020122533A (ja) * | 2019-01-31 | 2020-08-13 | 株式会社フジキン | ダイヤフラムバルブの製造方法 |
KR20200115229A (ko) | 2019-03-26 | 2020-10-07 | 가부시키가이샤 깃츠 에스시티 | 다이어프램 밸브 |
Also Published As
Publication number | Publication date |
---|---|
US20180283563A1 (en) | 2018-10-04 |
TWI749185B (zh) | 2021-12-11 |
CN108692062A (zh) | 2018-10-23 |
KR102468504B1 (ko) | 2022-11-18 |
CN108692062B (zh) | 2021-06-25 |
JP6929098B2 (ja) | 2021-09-01 |
US10883615B2 (en) | 2021-01-05 |
KR20180111549A (ko) | 2018-10-11 |
TW201843404A (zh) | 2018-12-16 |
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