JP6760406B2 - ストッカ - Google Patents
ストッカ Download PDFInfo
- Publication number
- JP6760406B2 JP6760406B2 JP2018566801A JP2018566801A JP6760406B2 JP 6760406 B2 JP6760406 B2 JP 6760406B2 JP 2018566801 A JP2018566801 A JP 2018566801A JP 2018566801 A JP2018566801 A JP 2018566801A JP 6760406 B2 JP6760406 B2 JP 6760406B2
- Authority
- JP
- Japan
- Prior art keywords
- control panel
- duct
- fan
- stocker
- storage area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Cold Air Circulating Systems And Constructional Details In Refrigerators (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Description
本発明の態様のストッカは、ストッカ内外を区画する壁部と、壁部の内側に配置され、物品が保管される保管領域と、壁部に配置され、外部の空気を吸引して内部に導入するファンと、壁部の内側であって保管領域の側方に配置され、制御盤を格納する制御盤格納部と、制御盤格納部の壁部側に配置された第1断熱層と、制御盤格納部の保管領域側に配置された第2断熱層と、を備える。
CR・・・制御盤
11・・・壁部
15a、60a、60b、70a・・・壁部
12・・・保管領域
13、60、70・・・ダクト
13c、13d・・・噴出口
14・・・ファン
15・・・制御盤格納部
16・・・第1断熱層
17・・・第2断熱層
20・・・棚部
61・・・第1通気口
62・・・第2通気口
63・・・第2ファン
100,100A・・・ストッカ
Claims (6)
- ストッカ内外を区画する壁部と、
前記壁部の内側に配置され、物品が保管される保管領域と、
前記壁部に配置され、外部の空気を吸引して内部に導入するファンと、
前記壁部の内側であって前記保管領域の側方に配置され、制御盤を格納する制御盤格納部と、
前記制御盤格納部の前記壁部側に配置された第1断熱層と、
前記制御盤格納部の前記保管領域側に配置された第2断熱層と、を備え、
前記壁部は、上方から見た場合に矩形状に形成され、
前記ファンは、第1方向に沿う前記壁部に配置され、
前記制御盤格納部は、前記保管領域に対して前記第1方向の一方の端部側に配置され、
前記第1断熱層は、前記第1方向と直交する第2方向において、前記制御盤格納部と、前記ファンが配置された前記壁部との間に配置され、
前記第2断熱層は、前記制御盤格納部と前記保管領域との間に配置される、ストッカ。 - 前記第1断熱層は、空気を流通可能な通気層である、請求項1に記載のストッカ。
- 前記通気層は、上下方向に延在するダクトであり、
前記ダクトは、
上部及び下部の一方に配置され、壁部の外部と前記ダクトの内部とを連通する第1通気口と、
上部及び下部の他方に配置され、前記ダクトの内部と前記制御盤格納部の内部とを連通する第2通気口と、
前記制御盤格納部の前記保管領域とは反対側の側方に配置され、前記制御盤格納部の内部の空気を吸引してストッカ外部に噴出する第2ファンと、を有する、請求項2に記載のストッカ。 - 前記第2ファンは、前記ファンより上方に配置される、請求項3に記載のストッカ。
- 前記制御盤格納部は、上下に複数階層設けられ、
前記第2ファンは、階層ごとに配置される、請求項3または請求項4に記載のストッカ。 - 前記第2断熱層は、空気を流通可能な通気層である、請求項1から請求項5のいずれか一項に記載のストッカ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017020225 | 2017-02-07 | ||
JP2017020225 | 2017-02-07 | ||
PCT/JP2018/000435 WO2018146986A1 (ja) | 2017-02-07 | 2018-01-11 | ストッカ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018146986A1 JPWO2018146986A1 (ja) | 2019-12-12 |
JP6760406B2 true JP6760406B2 (ja) | 2020-09-23 |
Family
ID=63107380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018566801A Active JP6760406B2 (ja) | 2017-02-07 | 2018-01-11 | ストッカ |
Country Status (9)
Country | Link |
---|---|
US (1) | US11222803B2 (ja) |
EP (1) | EP3581521B1 (ja) |
JP (1) | JP6760406B2 (ja) |
KR (1) | KR102227859B1 (ja) |
CN (1) | CN110225868B (ja) |
IL (1) | IL268311A (ja) |
SG (1) | SG11201906971VA (ja) |
TW (1) | TWI729266B (ja) |
WO (1) | WO2018146986A1 (ja) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5059974A (ja) * | 1973-10-02 | 1975-05-23 | ||
JPH03122004U (ja) * | 1990-03-28 | 1991-12-12 | ||
JP2007027780A (ja) * | 1999-10-19 | 2007-02-01 | Tokyo Electron Ltd | 基板処理装置 |
JP2003192106A (ja) * | 2001-12-28 | 2003-07-09 | Itoki Crebio Corp | 自動倉庫及びこれに使用する移載装置 |
KR101269384B1 (ko) * | 2004-12-28 | 2013-05-29 | 엘지디스플레이 주식회사 | 스토커 장치 |
JP2009140421A (ja) * | 2007-12-10 | 2009-06-25 | Toyo Netsu Kogyo Kk | サーバラック及びこれを備えたデータセンター |
JP4437561B2 (ja) * | 2008-04-01 | 2010-03-24 | 村田機械株式会社 | 気流の測定ユニット |
JP4706938B2 (ja) * | 2008-11-21 | 2011-06-22 | 村田機械株式会社 | クリーンルーム用の自動倉庫と自動倉庫での物品の保管方法 |
JP4884486B2 (ja) * | 2009-02-03 | 2012-02-29 | 東京エレクトロン株式会社 | 基板バッファユニット |
CN201781195U (zh) * | 2010-06-30 | 2011-03-30 | 比亚迪股份有限公司 | 一种户外电源柜 |
JP5874691B2 (ja) * | 2013-06-26 | 2016-03-02 | 株式会社ダイフク | 不活性気体供給設備 |
CN203491553U (zh) | 2013-09-04 | 2014-03-19 | 常熟开关制造有限公司(原常熟开关厂) | 一种光伏直流配电柜 |
JP6279379B2 (ja) * | 2014-03-28 | 2018-02-14 | 三機工業株式会社 | 立体倉庫の空調システム |
JP2016021429A (ja) * | 2014-07-11 | 2016-02-04 | 村田機械株式会社 | パージストッカ |
JP6608200B2 (ja) | 2015-07-09 | 2019-11-20 | 大和ハウス工業株式会社 | 水切具 |
-
2018
- 2018-01-11 JP JP2018566801A patent/JP6760406B2/ja active Active
- 2018-01-11 CN CN201880008789.1A patent/CN110225868B/zh active Active
- 2018-01-11 EP EP18751500.2A patent/EP3581521B1/en active Active
- 2018-01-11 US US16/483,460 patent/US11222803B2/en active Active
- 2018-01-11 SG SG11201906971VA patent/SG11201906971VA/en unknown
- 2018-01-11 KR KR1020197022459A patent/KR102227859B1/ko active IP Right Grant
- 2018-01-11 WO PCT/JP2018/000435 patent/WO2018146986A1/ja unknown
- 2018-02-06 TW TW107104072A patent/TWI729266B/zh active
-
2019
- 2019-07-28 IL IL268311A patent/IL268311A/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN110225868A (zh) | 2019-09-10 |
JPWO2018146986A1 (ja) | 2019-12-12 |
CN110225868B (zh) | 2021-02-26 |
KR20190102049A (ko) | 2019-09-02 |
TW201830557A (zh) | 2018-08-16 |
SG11201906971VA (en) | 2019-08-27 |
KR102227859B1 (ko) | 2021-03-15 |
EP3581521A4 (en) | 2020-11-18 |
IL268311A (en) | 2019-09-26 |
EP3581521B1 (en) | 2021-08-11 |
WO2018146986A1 (ja) | 2018-08-16 |
US11222803B2 (en) | 2022-01-11 |
EP3581521A1 (en) | 2019-12-18 |
US20200035534A1 (en) | 2020-01-30 |
TWI729266B (zh) | 2021-06-01 |
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