JP6744378B2 - 鉛含有量が低減された圧電セラミック材料 - Google Patents
鉛含有量が低減された圧電セラミック材料 Download PDFInfo
- Publication number
- JP6744378B2 JP6744378B2 JP2018206407A JP2018206407A JP6744378B2 JP 6744378 B2 JP6744378 B2 JP 6744378B2 JP 2018206407 A JP2018206407 A JP 2018206407A JP 2018206407 A JP2018206407 A JP 2018206407A JP 6744378 B2 JP6744378 B2 JP 6744378B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic material
- piezoelectric ceramic
- optionally
- ratio
- piezoceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims description 31
- 239000000203 mixture Substances 0.000 claims description 51
- 229910052758 niobium Inorganic materials 0.000 claims description 44
- 229910052745 lead Inorganic materials 0.000 claims description 42
- 238000005245 sintering Methods 0.000 claims description 29
- 229910010293 ceramic material Inorganic materials 0.000 claims description 16
- 239000011734 sodium Substances 0.000 claims description 16
- 229910052709 silver Inorganic materials 0.000 claims description 12
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 229910052748 manganese Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000005469 granulation Methods 0.000 claims description 4
- 230000003179 granulation Effects 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 3
- 239000002002 slurry Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 238000005266 casting Methods 0.000 claims description 2
- 238000002485 combustion reaction Methods 0.000 claims description 2
- 239000008187 granular material Substances 0.000 claims description 2
- 238000010298 pulverizing process Methods 0.000 claims 1
- 239000010955 niobium Substances 0.000 description 56
- 239000011133 lead Substances 0.000 description 51
- 239000011572 manganese Substances 0.000 description 27
- 238000007792 addition Methods 0.000 description 13
- 239000000919 ceramic Substances 0.000 description 6
- 238000009413 insulation Methods 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 238000010344 co-firing Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000002490 spark plasma sintering Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
- C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62695—Granulation or pelletising
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
- C04B2235/3203—Lithium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3289—Noble metal oxides
- C04B2235/3291—Silver oxides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3294—Antimony oxides, antimonates, antimonites or oxide forming salts thereof, indium antimonate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3296—Lead oxides, plumbates or oxide forming salts thereof, e.g. silver plumbate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
- C04B2235/725—Metal content
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/768—Perovskite structure ABO3
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
(K1−yNay)1−x}(Nb1−z−wTazSbw)O3の主成分、およびさらなる元素として、(1)パラジウム、銀、金、ルテニウム、ロジウム、レニウム、オスミウム、イリジウムおよびプラチナ、または(2)ニッケル、鉄、マンガン、銅、亜鉛、または(3)マグネシウム、カルシウム、ストロンチウムおよびバリウムから選択される少なくとも1つの金属元素を含む無鉛圧電セラミック組成物を記載している。
(2012)2521−2527)などの代替焼結法が提案されている。これらの方法は、コスト効率の良い大量生産に適していないか、大きな焼結体積の熱慣性により工業規模で実施することができない。
(KxNayLi1−x−y)a(MnuTavSbwNb1−u−v−w)O3のニオブ酸カリウムナトリウム(PSN)系の、無鉛圧電セラミック材料であって、
式中、0<x<1y;0<y<1;0<u<0.01;0<v<0.3;0≦w<0.2、
0.95<a<1.05;x+y≦1
である無鉛圧電セラミック材料が想定される。
k重量%のPb+l重量%のNb+m重量%のAg、
式中、
0<k<0.5;0<l<1;0≦m<1である。
(KxNayLi1−x−y)a(MnuTavSbwNb1−u−v−w)O3を有し、
式中、0<x<1y;0<y<1;0<u<0.01;0<v<0.3;0≦w<0.2、および
0.95<a<1.05;x+y≦1であり、
Pb、Nb、および任意にAgを含む基本組成に加えて、さらなる成分を含み、Pb、NbおよびAgの重量分率は圧電セラミック材料の全重量に対して以下のように選択されることを特徴とする:
k重量%のPb+l重量%のNb+m重量%のAg、
式中、0<k<0.5;0<l<1;0≦m<1である。
(KxNayLi1−x−y)a(MnuTavSbwNb1−u−v−w)O3のニオブ酸カリウムナトリウム(PSN)系の圧電セラミック材料における、圧電セラミック材料の焼結間隔を増加させるためのPb、Nb、および任意にAgの混合物の使用に関し、
式中、
0<x<1y;0<y<1;0<u<0.01;0<v<0.3;0≦w<0.2、および
0.95<a<1.05;x+y≦1であり、
添加されるPb、NbおよびAgの含有量が圧電セラミック材料全体に対して重量パーセントで以下のとおりであるように、Pb、Nbおよび任意にAgの混合物の添加が行われる:
k重量%のPb+l重量%のNb+m重量%のAg、
式中、0<k<0.5:0<l<1:0≦m<1である。
(KxNayLi1−x−y)a(MnuTavSbwNb1−u−v−w)O3に関する。
実施例1〜7:微粉砕
実施例8:スプレー造粒中の添加
tanδ:≦50×10−3
S3(室温):>0.6×10−3
Emax:≧2kV/mm
組成物
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
この組成物は、焼結間隔が≦20Kの先行技術に相当する。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
酸化物の混合物として+0.1重量%Pb+0.09重量%Nbが添加される。本発明によるこの組成物は、焼結間隔の30Kへの広がりを示す。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
酸化物の混合物として+0.2重量%Pb+0.179%重量%Nbが添加される。本発明によるこの組成物は、焼結間隔の30Kへの広がりを示す。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
予備成形されたか焼物として+0.1重量%Pb+0.09%重量%Nbが添加される。本発明によるこの組成物は、焼結間隔の30Kへの広がりを示す。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
予備成形されたか焼物として+0.2重量%Pb+0.179%重量%Nbが添加される。本発明によるこの組成物は、焼結間隔の30Kへの広がりを示す。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
酸化物の混合物として+0.1重量%Pb+0.022%重量%Nb+0.013重量%Mnが添加される。この組成物は、焼結間隔の広がりを示さない。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
酸化物の混合物として+0.1重量%Pb+0.03%重量%Nb+0.009重量%Mnが添加される。本発明によるこの組成物は、焼結間隔の40Kへの広がりを示す。
組成物:
(K0.44Na0.52Li0.04)0.998(Mn0.005[Ta0.10Sb0.06Nb0.84]0.995)O3
予備成形されたか焼物として+0.1重量%Pb+0.09%重量%Nbが添加される。本発明によるこの組成物は、焼結間隔の40Kへの広がりを示す。この実施形態では、材料の処理を工業規模で連続的に行い、PbおよびNbの添加をスプレー造粒中に行った。
Claims (12)
- 基本組成として(KxNayLi1−x−y)a(MnuTavSbwNb1−u−v−w)O3 を有するニオブ酸カリウムナトリウム(PSN)系組成物、を含む、圧電セラミック材料であって、
式中、0<x<y;0<y<1;0<u<0.01;0<v<0.3;0≦w<0.2、および
0.95<a<1.05;x+y≦1であり、
Pb、Nb、および任意にAgを含有し、
前記圧電セラミック材料全体におけるPb、Nb、およびAgの含有量が、k重量%のPb+l重量%のNb+m重量%のAgに従い、
式中、
0.001<k≦0.1;0.022<l≦0.09;0≦m<1であることを特徴とする、圧電セラミック材料。 - k:lの比率は1:0.9〜1:0.3の範囲にあることを特徴とする、請求項1に記載の圧電セラミック材料。
- k重量%のPb、l重量%のNb、およびn重量%のMnの混合物の添加を特徴とし、n:lの比率は0.05:0.30〜0.15:0.30の範囲にある、請求項1又は2に記載の圧電セラミック材料。
- k:n:lの比率は1:0.09:0.30であることを特徴とする、請求項3に記載の圧電セラミック材料。
- 前記Pb、およびNb、並びに任意にAg、および任意にMnが、熱的に予備焼成されたか焼物として添加される、請求項1〜4の少なくとも一項に記載の圧電セラミック材料。
- 前記Pb、及びNbがメタニオブ酸鉛(PbNb 2 O 6 )として添加される、請求項1〜4の少なくとも一項に記載の圧電セラミック材料。
- 請求項1〜6のうちの一項に記載の圧電セラミック材料を製造する方法であって、
・前記ニオブ酸カリウムナトリウム(PSN)系組成物の原料混合物を製造するステップと、
・前記ニオブ酸カリウムナトリウム(PSN)系組成物のか焼物を製造するステップと、
・か焼物を微粉砕するステップと、
・スプレー造粒によって粒状物を製造する、または、多層プロセス用流延スラリーもしくは同時焼成プロセス用流延スラリーを製造するステップと、
・焼結することを含む処理をさらに行うステップと
を特徴とし、前記ステップは記載順に行われる、方法。 - 請求項1〜6のうちの一項に記載の圧電セラミック材料が適用されている圧電セラミック多層アクチュエータ。
- 基本組成として(KxNayLi1−x−y)a(MnuTavSbwNb1−u−v−w)O3 を有するニオブ酸カリウムナトリウム(PSN)系組成物を含む圧電セラミック材料における、圧電セラミック材料の焼結間隔(sintering interval)を増加させるためのPb、Nb、および任意にAgを含有する混合物の使用であって、
式中、0<x<y;0<y<1;0<u<0.01;0<v<0.3;0≦w<0.2、および
0.95<a<1.05;x+y≦1であり、
Pb、NbおよびAgの含有量が前記圧電セラミック材料全体に対して重量パーセントで以下のとおりであるように、Pb、Nb、および任意にAgを含有する混合物の添加が行われる使用:
k重量%のPb+l重量%のNb+m重量%のAg、
式中、0.001<k≦0.1:0.022<l≦0.09:0≦m<1であり、
前記焼結間隔は、下記で示される前記圧電セラミック材料の必要な特性が、材料の燃焼の間に達成される2つの温度仕様によって境界が決定される範囲である:
tanδ:≦50×10−3
S 3 (室温):>0.6×10−3
Emax:≧2kV/mm。 - k:lの比率は1:0.9〜1:0.3の範囲にあることを特徴とする、請求項9に記載の使用。
- k重量%のPb、l重量%のNb、およびn重量%のMnの混合物の添加を特徴とし、n:lの比率は0.05:0.30〜0.15:0.30の範囲にある、請求項9または10に記載の使用。
- k:n:lの比率は1:0.09:0.30であることを特徴とする、請求項11に記載の使用。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013013182 | 2013-08-07 | ||
DE102013013182.0 | 2013-08-07 | ||
DE102014111285.7A DE102014111285A1 (de) | 2013-08-07 | 2014-08-07 | Piezokeramischer Werkstoff mit reduziertem Bleigehalt |
DE102014111285.7 | 2014-08-07 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016532695A Division JP2016528151A (ja) | 2013-08-07 | 2014-08-07 | 鉛含有量が低減された圧電セラミック材料 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2019055908A JP2019055908A (ja) | 2019-04-11 |
JP2019055908A5 JP2019055908A5 (ja) | 2019-05-30 |
JP6744378B2 true JP6744378B2 (ja) | 2020-08-19 |
Family
ID=52389003
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016532695A Pending JP2016528151A (ja) | 2013-08-07 | 2014-08-07 | 鉛含有量が低減された圧電セラミック材料 |
JP2018206407A Expired - Fee Related JP6744378B2 (ja) | 2013-08-07 | 2018-11-01 | 鉛含有量が低減された圧電セラミック材料 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016532695A Pending JP2016528151A (ja) | 2013-08-07 | 2014-08-07 | 鉛含有量が低減された圧電セラミック材料 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10910550B2 (ja) |
EP (1) | EP3030537B1 (ja) |
JP (2) | JP2016528151A (ja) |
CN (1) | CN105555736B (ja) |
DE (1) | DE102014111285A1 (ja) |
DK (1) | DK3030537T5 (ja) |
WO (1) | WO2015018915A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK3145493T3 (da) | 2014-05-18 | 2022-10-31 | Childrens Medical Center | Fremgangsmåder og sammensætninger vedrørende exosomer |
JP6760001B2 (ja) * | 2016-11-15 | 2020-09-23 | セイコーエプソン株式会社 | 圧電素子、及び、圧電素子応用デバイス |
CN107008636B (zh) * | 2017-05-11 | 2019-08-16 | 上海师范大学 | 一种无铅压电单晶高频超声换能器及其制备方法 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62191423A (ja) * | 1986-02-19 | 1987-08-21 | Denki Kagaku Kogyo Kk | 易焼結性鉛含有酸化物粉末の製造方法 |
DE3635532A1 (de) * | 1986-10-18 | 1988-04-28 | Philips Patentverwaltung | Verfahren zur herstellung von bariumtitanat batio(pfeil abwaerts)3(pfeil abwaerts) |
JP2762309B2 (ja) * | 1989-12-22 | 1998-06-04 | マルコン電子株式会社 | 誘電体磁器組成物及びこれを使用した電子部品 |
JPH07172837A (ja) * | 1993-12-22 | 1995-07-11 | Sumitomo Sitix Corp | 誘電体磁器組成物 |
EP1346966B1 (en) * | 2002-03-20 | 2008-09-24 | Denso Corporation | Piezoelectric ceramic composition, its production method and piezoelectric device |
DE10234787C1 (de) | 2002-06-07 | 2003-10-30 | Pi Ceramic Gmbh Keramische Tec | Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material |
EP1382588B9 (en) | 2002-07-16 | 2012-06-27 | Denso Corporation | Piezoelectric ceramic composition and method of production of same |
JP2004244300A (ja) * | 2003-01-23 | 2004-09-02 | Denso Corp | 圧電磁器組成物及びその製造方法,並びに圧電素子及び誘電素子 |
JP4513948B2 (ja) * | 2003-12-22 | 2010-07-28 | Tdk株式会社 | 圧電磁器およびその製造方法 |
JP2006105964A (ja) * | 2004-09-13 | 2006-04-20 | Denso Corp | 圧電センサ |
JP5118294B2 (ja) * | 2004-09-29 | 2013-01-16 | 日本碍子株式会社 | 圧電/電歪磁器組成物、圧電/電歪体、及び圧電/電歪膜型素子 |
KR100904618B1 (ko) | 2005-04-28 | 2009-06-25 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전체 자기 조성물, 및 이 압전체 자기 조성물의제조방법, 및 압전 세라믹 전자부품 |
EP1876155B1 (en) | 2005-04-28 | 2016-03-09 | Murata Manufacturing Co., Ltd. | Piezoelectric porcelain composition and piezoelectric ceramic electronic component |
JP2006315909A (ja) * | 2005-05-12 | 2006-11-24 | Univ Nagoya | 圧電セラミックス |
DE112006003755B4 (de) | 2006-02-17 | 2011-06-01 | Murata Mfg. Co., Ltd., Nagaokakyo-shi | Piezoelektrische Keramikzusammensetzung |
JP2007258280A (ja) | 2006-03-20 | 2007-10-04 | Tdk Corp | 積層型圧電素子 |
US7803282B2 (en) * | 2006-09-04 | 2010-09-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive body, manufacturing method of the same, and piezoelectric/electrostrictive element |
JP5073370B2 (ja) * | 2007-02-19 | 2012-11-14 | 日本碍子株式会社 | 誘電体デバイス及びその製造方法 |
US7727584B2 (en) * | 2007-02-19 | 2010-06-01 | Ngk Insulators, Ltd. | Dielectric device and its manufacturing method |
JP2009132598A (ja) * | 2007-11-08 | 2009-06-18 | Ngk Insulators Ltd | 圧電/電歪体、及び圧電/電歪素子 |
JP5256804B2 (ja) | 2008-03-19 | 2013-08-07 | Tdk株式会社 | 圧電磁器及びそれを用いた圧電素子 |
CN102449423A (zh) * | 2009-07-21 | 2012-05-09 | 古河电气工业株式会社 | 扁平性热管及其制造方法 |
CN101857436B (zh) * | 2010-06-12 | 2013-03-13 | 中国地质大学(武汉) | 一类铌酸钾钠基无铅压电陶瓷粉体的制备方法 |
DE102010041567A1 (de) | 2010-09-28 | 2012-03-29 | Siemens Aktiengesellschaft | Bleifreier, texturierter piezokeramischer Werkstoff mit Haupt- und Nebenphase und anisometrischen Keimen, Verfahren zum Herstellen eines piezokeramischen Bauteils mit dem Werkstoff und Verwendung dazu |
CN102390997B (zh) * | 2011-08-17 | 2014-01-29 | 广州金升阳科技有限公司 | 高耐压铌酸钾钠基无铅压电陶瓷及其制备方法和用途 |
CN102910906A (zh) * | 2012-10-22 | 2013-02-06 | 天津大学 | 一种高性能铌酸钾钠基无铅压电陶瓷及其制备方法 |
-
2014
- 2014-08-07 CN CN201480050911.3A patent/CN105555736B/zh not_active Expired - Fee Related
- 2014-08-07 US US14/909,786 patent/US10910550B2/en active Active
- 2014-08-07 DE DE102014111285.7A patent/DE102014111285A1/de not_active Withdrawn
- 2014-08-07 JP JP2016532695A patent/JP2016528151A/ja active Pending
- 2014-08-07 WO PCT/EP2014/067036 patent/WO2015018915A1/de active Application Filing
- 2014-08-07 DK DK14750209.0T patent/DK3030537T5/en active
- 2014-08-07 EP EP14750209.0A patent/EP3030537B1/de active Active
-
2018
- 2018-11-01 JP JP2018206407A patent/JP6744378B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2019055908A (ja) | 2019-04-11 |
US20160190430A1 (en) | 2016-06-30 |
DE102014111285A1 (de) | 2015-02-12 |
US10910550B2 (en) | 2021-02-02 |
EP3030537A1 (de) | 2016-06-15 |
JP2016528151A (ja) | 2016-09-15 |
CN105555736B (zh) | 2018-01-16 |
DK3030537T5 (en) | 2018-04-03 |
CN105555736A (zh) | 2016-05-04 |
EP3030537B1 (de) | 2017-12-13 |
WO2015018915A1 (de) | 2015-02-12 |
DK3030537T3 (en) | 2018-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6744378B2 (ja) | 鉛含有量が低減された圧電セラミック材料 | |
JP4945801B2 (ja) | 圧電素子、及び圧電素子の製造方法 | |
JP2004002069A (ja) | 圧電磁器の製造方法および圧電素子の製造方法 | |
KR100601068B1 (ko) | 압전자기 및 그 제조방법, 및 압전소자 | |
JP2008156220A (ja) | 圧電磁器組成物および積層型圧電素子 | |
JPWO2012086449A1 (ja) | 圧電セラミックス、圧電セラミックス部品、及び該圧電セラミックス部品を用いた圧電デバイス | |
JP2004075449A (ja) | 圧電磁器組成物、圧電磁器組成物の製造方法および圧電セラミック部品 | |
JP4995412B2 (ja) | 圧電磁器組成物及びこれを用いた圧電素子 | |
JP2004155601A (ja) | 圧電磁器組成物 | |
JP4640092B2 (ja) | 積層型圧電素子及びその製造方法 | |
JP2007258301A (ja) | 積層型圧電素子及びその製造方法 | |
JP3923064B2 (ja) | 積層型圧電素子及びその製造方法 | |
JP2006248829A (ja) | 圧電磁器組成物、その製造方法、及び圧電素子 | |
JP2004168603A (ja) | 圧電磁器組成物 | |
JP2004035350A (ja) | 圧電磁器組成物 | |
JP2007230839A (ja) | 圧電磁器組成物、積層型圧電素子及びその製造方法 | |
JP2003238248A (ja) | 圧電磁器組成物と圧電デバイス | |
JP2001253772A (ja) | 圧電磁器組成物及びその製造方法 | |
JP4828570B2 (ja) | 圧電磁器組成物、圧電磁器組成物の製造方法および圧電セラミック部品 | |
JPWO2008078487A1 (ja) | 圧電磁器組成物及び圧電素子 | |
JP4424177B2 (ja) | 圧電磁器および圧電素子 | |
JP2005320224A (ja) | 圧電磁器および圧電素子 | |
Wathore et al. | Effect of silver electrode annealing temperature on electrical properties of sodium potassium niobate based ceramics | |
JP2006169032A (ja) | 圧電磁器組成物および圧電素子 | |
JP3966882B2 (ja) | 圧電磁器組成物の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190415 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191030 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20200129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200330 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200714 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200730 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6744378 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |