JP6701249B2 - 真空ポンプの為の冷却体、及びその製造方法 - Google Patents

真空ポンプの為の冷却体、及びその製造方法 Download PDF

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JP6701249B2
JP6701249B2 JP2018047592A JP2018047592A JP6701249B2 JP 6701249 B2 JP6701249 B2 JP 6701249B2 JP 2018047592 A JP2018047592 A JP 2018047592A JP 2018047592 A JP2018047592 A JP 2018047592A JP 6701249 B2 JP6701249 B2 JP 6701249B2
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Prior art keywords
tool
workpiece
cooling body
cavity
cooling
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Japanese (ja)
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JP2018178996A (ja
Inventor
エアハルト・ハラパト
ヴォルフガング・ゼーンゲン
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Milling Processes (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2018047592A 2017-04-12 2018-03-15 真空ポンプの為の冷却体、及びその製造方法 Active JP6701249B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17166278.6A EP3388682B1 (de) 2017-04-12 2017-04-12 Vakuumpumpe mit einem kühlkörper und verfahren zur herstellung des kühlkörpers
EP17166278.6 2017-04-12

Publications (2)

Publication Number Publication Date
JP2018178996A JP2018178996A (ja) 2018-11-15
JP6701249B2 true JP6701249B2 (ja) 2020-05-27

Family

ID=58547361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018047592A Active JP6701249B2 (ja) 2017-04-12 2018-03-15 真空ポンプの為の冷却体、及びその製造方法

Country Status (2)

Country Link
EP (1) EP3388682B1 (de)
JP (1) JP6701249B2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102082895B1 (ko) * 2018-02-02 2020-04-20 엘에스엠트론 주식회사 유압트랜스미션용 냉각장치
CN114535675B (zh) * 2022-04-02 2023-04-25 徐州乔南仪表有限公司 一种铣铁开槽用的刀具及其开槽方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755542Y2 (de) * 1976-09-06 1982-12-01
AT377644B (de) * 1981-07-30 1985-04-10 Elin Union Ag Kuehlkoerper fuer zwangsoelumlaufkuehlung
JPS6052307A (ja) * 1983-09-02 1985-03-25 今田　淳一 部材結合装置
JP2715752B2 (ja) * 1991-10-31 1998-02-18 住友金属工業株式会社 ヒートシンク放熱フィンとその製造方法
RU2044606C1 (ru) * 1993-04-30 1995-09-27 Николай Николаевич Зубков Способ получения поверхностей с чередующимися выступами и впадинами (варианты) и инструмент для его осуществления
JP4394268B2 (ja) * 1999-09-27 2010-01-06 株式会社日立製作所 スクロール式流体機械
KR100401074B1 (ko) * 2001-11-16 2003-10-10 발레오만도전장시스템스코리아 주식회사 냉각성을 개선한 진공펌프 장착형 발전기
US6779593B1 (en) * 2003-04-30 2004-08-24 Hewlett-Packard Development Company, L.P. High performance cooling device with heat spreader
US20060054311A1 (en) * 2004-09-15 2006-03-16 Andrew Douglas Delano Heat sink device with independent parts
GB0512292D0 (en) * 2005-06-16 2005-07-27 Global Cross Search Ltd A heat dissipating fan
JP2007135307A (ja) * 2005-11-10 2007-05-31 Tokyo Parts Ind Co Ltd ファン付き偏心ロータと同ロータを備えた扁平コアレス型ファン付き振動モータ及び同モータの携帯機器搭載構造。
WO2007084014A1 (en) * 2006-01-18 2007-07-26 Swashpump Technologies Limited Enhancements for swash plate pumps
JP2007198153A (ja) * 2006-01-24 2007-08-09 Anest Iwata Corp スクロール流体機械
JP6195722B2 (ja) * 2013-03-29 2017-09-13 アネスト岩田株式会社 スクロール式流体機械
JP2018053795A (ja) * 2016-09-28 2018-04-05 三井精機工業株式会社 スクロールコンプレッサの冷却機構

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Publication number Publication date
EP3388682A1 (de) 2018-10-17
JP2018178996A (ja) 2018-11-15
EP3388682B1 (de) 2021-11-17

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