JP6657339B2 - チャンバ内流体処理装置 - Google Patents
チャンバ内流体処理装置 Download PDFInfo
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- JP6657339B2 JP6657339B2 JP2018154234A JP2018154234A JP6657339B2 JP 6657339 B2 JP6657339 B2 JP 6657339B2 JP 2018154234 A JP2018154234 A JP 2018154234A JP 2018154234 A JP2018154234 A JP 2018154234A JP 6657339 B2 JP6657339 B2 JP 6657339B2
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- 239000012530 fluid Substances 0.000 title claims description 60
- 239000012159 carrier gas Substances 0.000 claims description 69
- 238000002347 injection Methods 0.000 claims description 46
- 239000007924 injection Substances 0.000 claims description 46
- 238000012546 transfer Methods 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 11
- 238000012986 modification Methods 0.000 claims description 3
- 230000004048 modification Effects 0.000 claims description 3
- 238000010926 purge Methods 0.000 description 45
- 239000007789 gas Substances 0.000 description 29
- 238000004458 analytical method Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 12
- 238000004891 communication Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000443 aerosol Substances 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000000608 laser ablation Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000004949 mass spectrometry Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 238000004993 emission spectroscopy Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005535 acoustic phonon Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0459—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for solid samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2226—Sampling from a closed space, e.g. food package, head space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0459—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for solid samples
- H01J49/0463—Desorption by laser or particle beam, followed by ionisation as a separate step
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2226—Sampling from a closed space, e.g. food package, head space
- G01N2001/2241—Sampling from a closed space, e.g. food package, head space purpose-built sampling enclosure for emissions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
- G01N2001/383—Diluting, dispersing or mixing samples collecting and diluting in a flow of liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Optics & Photonics (AREA)
- Sampling And Sample Adjustment (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
Claims (7)
- ターゲットを収容するように構成されたチャンバであって、その内部空間に試料領域を含むチャンバと、
前記ターゲットを形成する材料をアブレートするように構成されたレーザパルスを前記試料領域に向けて前記ターゲットに照射するレーザシステムと、
前記アブレートされた材料の一部を前記試料領域の内部のキャリアガスに乗せることができるように、前記チャンバの内部の第1の位置及び第2の位置から前記試料領域に前記キャリアガスを導入するように構成されたキャリアガス注入システムと、
前記キャリアガスに乗ったアブレートされた材料の少なくとも一部を前記チャンバの外側の位置に移送するように構成された試料移送管と
を備え、
前記試料領域の一部は、前記第1の位置と前記第2の位置との間に位置しており、
前記キャリアガス注入システムは、前記アブレートされた材料の少なくとも一部を前記試料領域の内部の前記キャリアガスに乗せることができるように、実質的に第1の方向に移動する第1のキャリアガスの流れを前記試料領域に導入するとともに、実質的に前記第1の方向と異なる第2の方向に移動する第2のキャリアガスの流れを前記試料領域に導入するように構成され、
前記キャリアガス注入システムは、前記第1のキャリアガスの流れの延びる軸を横断する方向に沿って測定した前記第1のキャリアガスの流れの幅が10mmよりも大きくなるように構成されている
装置。 - 前記キャリアガス注入システムは少なくとも1つの注入ノズルを含む、請求項1に記載の装置。
- 前記少なくとも1つの注入ノズルは、
前記キャリアガスの導入流を受け入れるように構成された流入口と、
前記導入流の少なくとも1つの特性を修正して前記キャリアガスの修正された流れを形成するように構成された流体修正部と、
前記キャリアガスの前記修正された流れを前記チャンバの前記内部空間に放出するように構成された流出口と
を含み、
前記修正された流れは、前記導入流の特性と異なる少なくとも1つの特性を有している、請求項2に記載の装置。 - 前記少なくとも1つの特性は、流速、流向、断面形状、及び圧力からなる群から選択される、請求項3に記載の装置。
- 前記チャンバは、前記ターゲットが前記チャンバの前記内部空間に入る通路と、前記ターゲットが前記チャンバの内部空間から出る通路とからなる群から選択される少なくとも1つを提供するように構成されたアクセス開口部を含む、請求項1から4のいずれか一項に記載の装置。
- 前記キャリアガス注入システムは、前記チャンバ内の第1の位置及び第2の位置から前記チャンバの前記内部空間にキャリアガスを導入するように構成される、請求項1に記載の装置。
- 前記チャンバの前記内部空間の内側に配置されるターゲットホルダであって、前記チャンバの下面の上方にターゲットを支持可能な支持面を規定する基部と、前記基部を貫通する少なくとも1つの流体移送管とを有するターゲットホルダをさらに備え、
前記ターゲットホルダの一部は、前記第1の位置と前記第2の位置との間に位置している、請求項6に記載の装置。
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JP2020017935A JP6925460B2 (ja) | 2013-02-09 | 2020-02-05 | チャンバ内流体処理装置 |
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US201361762860P | 2013-02-09 | 2013-02-09 | |
US61/762,860 | 2013-02-09 |
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JP2015557081A Division JP6395186B2 (ja) | 2013-02-09 | 2014-02-06 | チャンバ内流体処理システム及びこれを用いて流体を処理する方法 |
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JP2020017935A Division JP6925460B2 (ja) | 2013-02-09 | 2020-02-05 | チャンバ内流体処理装置 |
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JP2019023638A JP2019023638A (ja) | 2019-02-14 |
JP6657339B2 true JP6657339B2 (ja) | 2020-03-04 |
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JP2015557081A Active JP6395186B2 (ja) | 2013-02-09 | 2014-02-06 | チャンバ内流体処理システム及びこれを用いて流体を処理する方法 |
JP2018154234A Active JP6657339B2 (ja) | 2013-02-09 | 2018-08-20 | チャンバ内流体処理装置 |
JP2020017935A Active JP6925460B2 (ja) | 2013-02-09 | 2020-02-05 | チャンバ内流体処理装置 |
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Country Status (8)
Country | Link |
---|---|
US (1) | US9524856B2 (ja) |
EP (1) | EP2954300B1 (ja) |
JP (3) | JP6395186B2 (ja) |
KR (1) | KR102244494B1 (ja) |
CN (1) | CN105229441B (ja) |
AU (2) | AU2014214888B2 (ja) |
TW (2) | TWI622760B (ja) |
WO (1) | WO2014124181A1 (ja) |
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2014
- 2014-02-06 US US14/174,677 patent/US9524856B2/en active Active
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- 2014-02-06 CN CN201480007996.7A patent/CN105229441B/zh active Active
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Publication number | Publication date |
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EP2954300A1 (en) | 2015-12-16 |
TWI622760B (zh) | 2018-05-01 |
JP2020101551A (ja) | 2020-07-02 |
AU2018204780B2 (en) | 2020-05-07 |
EP2954300A4 (en) | 2016-10-12 |
CN105229441B (zh) | 2019-01-29 |
KR20150133187A (ko) | 2015-11-27 |
JP2016510105A (ja) | 2016-04-04 |
JP6395186B2 (ja) | 2018-09-26 |
AU2014214888A1 (en) | 2015-07-30 |
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AU2018204780A1 (en) | 2018-07-19 |
TW201825877A (zh) | 2018-07-16 |
WO2014124181A1 (en) | 2014-08-14 |
US9524856B2 (en) | 2016-12-20 |
KR102244494B1 (ko) | 2021-04-27 |
CN105229441A (zh) | 2016-01-06 |
JP2019023638A (ja) | 2019-02-14 |
TWI666434B (zh) | 2019-07-21 |
EP2954300B1 (en) | 2021-10-13 |
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