JP6657094B2 - 導電性ターゲット材料 - Google Patents
導電性ターゲット材料 Download PDFInfo
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- JP6657094B2 JP6657094B2 JP2016539356A JP2016539356A JP6657094B2 JP 6657094 B2 JP6657094 B2 JP 6657094B2 JP 2016539356 A JP2016539356 A JP 2016539356A JP 2016539356 A JP2016539356 A JP 2016539356A JP 6657094 B2 JP6657094 B2 JP 6657094B2
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- 239000013077 target material Substances 0.000 title claims description 134
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 85
- 229910052799 carbon Inorganic materials 0.000 claims description 74
- 239000000843 powder Substances 0.000 claims description 38
- TWQULNDIKKJZPH-UHFFFAOYSA-K trilithium;phosphate Chemical compound [Li+].[Li+].[Li+].[O-]P([O-])([O-])=O TWQULNDIKKJZPH-UHFFFAOYSA-K 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 30
- 239000000203 mixture Substances 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 239000003792 electrolyte Substances 0.000 claims description 20
- 238000000151 deposition Methods 0.000 claims description 19
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims description 18
- 229910001416 lithium ion Inorganic materials 0.000 claims description 18
- 230000006835 compression Effects 0.000 claims description 17
- 238000007906 compression Methods 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 13
- 238000002490 spark plasma sintering Methods 0.000 claims description 10
- 229910018119 Li 3 PO 4 Inorganic materials 0.000 claims description 9
- 238000007731 hot pressing Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 4
- MJIJRASHNGNNQI-UHFFFAOYSA-K tricalcium lithium phosphate Chemical compound [Li+].P(=O)([O-])([O-])[O-].[Ca+2].[Ca+2].[Ca+2] MJIJRASHNGNNQI-UHFFFAOYSA-K 0.000 claims 1
- 150000002642 lithium compounds Chemical class 0.000 description 30
- 229910001386 lithium phosphate Inorganic materials 0.000 description 30
- 238000004544 sputter deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000005056 compaction Methods 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052744 lithium Inorganic materials 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910018068 Li 2 O Inorganic materials 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 238000001493 electron microscopy Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 238000005546 reactive sputtering Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910013184 LiBO Inorganic materials 0.000 description 2
- 229910013367 LiBP Inorganic materials 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 229910021386 carbon form Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 229910052729 chemical element Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000001036 glow-discharge mass spectrometry Methods 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 238000000879 optical micrograph Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- -1 Li 2 SO 4 Chemical class 0.000 description 1
- 229910012305 LiPON Inorganic materials 0.000 description 1
- 229910020346 SiS 2 Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- NRJJZXGPUXHHTC-UHFFFAOYSA-N [Li+].[O--].[O--].[O--].[O--].[Zr+4].[La+3] Chemical compound [Li+].[O--].[O--].[O--].[O--].[Zr+4].[La+3] NRJJZXGPUXHHTC-UHFFFAOYSA-N 0.000 description 1
- CPTCUNLUKFTXKF-UHFFFAOYSA-N [Ti].[Zr].[Mo] Chemical compound [Ti].[Zr].[Mo] CPTCUNLUKFTXKF-UHFFFAOYSA-N 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002051 biphasic effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009694 cold isostatic pressing Methods 0.000 description 1
- 238000009838 combustion analysis Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002411 thermogravimetry Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
- F27B7/20—Details, accessories, or equipment peculiar to rotary-drum furnaces
- F27B7/34—Arrangements of heating devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
- H01J37/3429—Plural materials
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/013—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics containing carbon
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- C04B35/447—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on phosphates, e.g. hydroxyapatite
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- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C1/00—Combustion apparatus specially adapted for combustion of two or more kinds of fuel simultaneously or alternately, at least one kind of fuel being either a fluid fuel or a solid fuel suspended in a carrier gas or air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F23C1/00—Combustion apparatus specially adapted for combustion of two or more kinds of fuel simultaneously or alternately, at least one kind of fuel being either a fluid fuel or a solid fuel suspended in a carrier gas or air
- F23C1/06—Combustion apparatus specially adapted for combustion of two or more kinds of fuel simultaneously or alternately, at least one kind of fuel being either a fluid fuel or a solid fuel suspended in a carrier gas or air lump and pulverulent fuel
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- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C1/00—Combustion apparatus specially adapted for combustion of two or more kinds of fuel simultaneously or alternately, at least one kind of fuel being either a fluid fuel or a solid fuel suspended in a carrier gas or air
- F23C1/10—Combustion apparatus specially adapted for combustion of two or more kinds of fuel simultaneously or alternately, at least one kind of fuel being either a fluid fuel or a solid fuel suspended in a carrier gas or air liquid and pulverulent fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C5/00—Disposition of burners with respect to the combustion chamber or to one another; Mounting of burners in combustion apparatus
- F23C5/08—Disposition of burners
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D1/00—Burners for combustion of pulverulent fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D17/00—Burners for combustion conjointly or alternatively of gaseous or liquid or pulverulent fuel
- F23D17/007—Burners for combustion conjointly or alternatively of gaseous or liquid or pulverulent fuel liquid or pulverulent fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23K—FEEDING FUEL TO COMBUSTION APPARATUS
- F23K3/00—Feeding or distributing of lump or pulverulent fuel to combustion apparatus
- F23K3/02—Pneumatic feeding arrangements, i.e. by air blast
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
- F27B7/20—Details, accessories, or equipment peculiar to rotary-drum furnaces
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- F27D99/0001—Heating elements or systems
- F27D99/0033—Heating elements or systems using burners
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- H—ELECTRICITY
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- H01M10/05—Accumulators with non-aqueous electrolyte
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- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
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- H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
- H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
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- H01M6/00—Primary cells; Manufacture thereof
- H01M6/40—Printed batteries, e.g. thin film batteries
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
- C04B2235/3203—Lithium oxide or oxide-forming salts thereof
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/422—Carbon
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- C—CHEMISTRY; METALLURGY
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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Description
− 本質的に1つのリチウム化合物及び炭素を含有する粉末混合物を製造する工程、
− この粉末混合物を型に導入する工程、及び
− 圧力及び/又は温度によりこの粉末混合物を圧縮する工程。
− リン酸リチウム及び炭素の粉末混合物を製造する工程、
− この粉末混合物を型に導入する工程、及び
− 圧力及び/又は温度によりこの粉末混合物を圧縮する工程。
− 粉末及び/又は粉末混合物を乾燥する工程、
− 機械的処理工程、
− 処理したブランクを1又はそれ以上の支持要素と結合させる工程
である。
3.64μmの体積加重平均粒径を有するリン酸リチウム粉末(D50=3.09μm、D90=6.81μm)を3.88μmの体積流量加重平均粒径を有する炭素粉末(D50=3.49μm、D90=6.81μm)5原子%と、タービュラ(Turbula)ミキサー中で30分間、混合した。このようにして得られた粉末混合物をホットプレスのグラファイトモールドに導入し、その中で、875℃の温度で約3MPaの押圧力でアルゴン雰囲気下、2時間圧縮して、261×241mmの寸法及び10mmの厚さのターゲット材料を得た。このようにして得られたターゲット材料をサンドブラストで清浄にし、次いで、乾燥条件下に加工して最終形状とした。銅バックプレートへの結合により、完成したターゲットが製造された。
3.64μmの体積加重平均粒径を有するリン酸リチウム粉末(D50=3.09μm、D90=6.81μm)を3.88μmの体積流量加重平均粒径を有する炭素粉末(D50=3.49μm、D90=6.81μm)10原子%と、タービュラ(Turbula)ミキサー中で30分間、混合した。このようにして得られた粉末混合物をスパークプラズマ焼結(SPS)系のグラファイトモールドに導入し、その中で、20バールの圧力下、875℃の温度で圧縮した。これを1時間保持し、73.5mmの直径及び5mmの厚さを有するディスク状のターゲット材料を得た。このようにして得られたターゲット材料を、次いで、乾燥加工工程により摩砕し、結合工程により、銅バックプレートに結合して、完成したターゲットを得た。
実施例1及び2と同様にして製造された、リン酸リチウム及び炭素(10原子%)を含有してなる本発明の導電性ターゲット材料からなるターゲットを使用して、アルゴン(7.5×10−3ミリバール)雰囲気下に10W/cm2の入力電力でDCスパッタリング実験を行なうことにより、蒸着速度を確認した。990秒の期間に,1.5μmの層厚が達成された。この層の4点測定法に依る電気伝導度の測定は、測定し得る電導度を示さなかった。
Claims (10)
- リン酸三リチウム(Li3PO4)及び炭素並びに典型的な不純物を含有する導電性ターゲット材料であって、3〜20原子%の間の炭素を含有し、該含有される炭素が、50%を超える比率で、元素状で出現することを特徴とする導電性ターゲット材料。
- ターゲット材料が、ターゲット材料の一側面からターゲット材料の反対側の面へ浸透する少なくとも1つの炭素クラスターを、含有することを特徴とする請求項1に記載の導電性ターゲット材料。
- ターゲット材料が、炭素がリン酸三リチウムに富む領域の周りにネットワーク形状で存在する2相ミクロ構造を、有することを特徴とする請求項1又は2に記載の導電性ターゲット材料。
- ターゲット材料が、ターゲット材料の切断面において測定して、3%〜20%の間の炭素面積比率を有することを特徴とする請求項1〜3のいずれか1項に記載の導電性ターゲット材料。
- ターゲット材料の電気伝導度が0.01S/mm以上であることを特徴とする請求項1〜4のいずれか1項に記載の導電性ターゲット材料。
- ターゲット材料の熱拡散率が2.5mm2/秒以上であることを特徴とする請求項1〜5のいずれか1項に記載の導電性ターゲット材料。
- ターゲット材料が10〜20ppm/Kの熱膨張係数を有することを特徴とする請求項1〜6のいずれか1項に記載の導電性ターゲット材料。
- 薄膜バッテリーのためのリチウムイオン電解質層の蒸着のための、請求項1〜7のいずれか1項に記載の導電性ターゲット材料の使用。
- 請求項1に記載の導電性ターゲット材料の製造方法であって、以下の工程を有することを特徴とする製造方法。
− リン酸三リチウム及び炭素を含有する粉末混合物を製造する工程、
− この粉末混合物を型に導入する工程、及び
− 圧力又は温度によりこの粉末混合物を圧縮する工程。 - 前記圧縮工程がホットプレス(HP)又はスパークプラズマ焼結(SPS)によって実施されることを特徴とする請求項9に記載の導電性ターゲット材料の製造方法。
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