JP6637612B2 - 磁気トンネル接合素子の製造方法およびプラズマ処理装置 - Google Patents
磁気トンネル接合素子の製造方法およびプラズマ処理装置 Download PDFInfo
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Description
Claims (9)
- 磁気トンネル接合素子の製造方法において、
厚さが2nm以下である第1の磁性膜と、Mg、Zn、Alのいずれか1つを少なくとも含む酸化膜と、を有し、前記第1の磁性膜と前記酸化膜との界面が膜面方向である多層膜を形成する工程と、
前記多層膜上にパターニングされたマスク層を形成する工程と、
水素ガスと窒素ガスとの混合ガスを用いて前記多層膜をプラズマエッチングする工程とを有し、
前記混合ガスの流量に対する前記水素ガスの流量の比が50%以下であることを特徴とする磁気トンネル接合素子の製造方法。 - 請求項1に記載の磁気トンネル接合素子の製造方法において、
前記第1の磁性膜は前記酸化膜よりも上方に形成され、
前記混合ガスの流量に対する前記水素ガスの流量の比を第1の流量比にして前記第1の磁性膜をプラズマエッチングし、
前記混合ガスの流量に対する前記水素ガスの流量の比を第2の流量比にして前記酸化膜をプラズマエッチングし、
前記第1の流量比における前記マスク層のエッチングレートに対する前記第1の磁性膜のエッチングレートの比は、前記第2の流量比における前記マスク層のエッチングレートに対する前記第1の磁性膜のエッチングレートの比よりも高く、
前記第2の流量比を50%以下とすることを特徴とする磁気トンネル接合素子の製造方法。 - 請求項2に記載の磁気トンネル接合素子の製造方法において、
前記多層膜は、前記酸化膜の下方に形成される第2の磁性膜を有し、
前記第2の流量比により前記第2の磁性膜をプラズマエッチングすることを特徴とする磁気トンネル接合素子の製造方法。 - 請求項1に記載の磁気トンネル接合素子の製造方法において、
前記多層膜のプラズマエッチングは、添加ガスを前記混合ガスに加えて行われ、
前記添加ガスは、He、Ne、Ar、Kr、Xeのいずれか1つを少なくとも含む希ガスまたはCO、CO 2 、Oのいずれか1つを少なくとも含むガスであることを特徴とする磁気トンネル接合素子の製造方法。 - 請求項1ないし請求項4のいずれか一項に記載の磁気トンネル接合素子の製造方法において、
前記第1の磁性膜は、CoFeB膜であり、
前記酸化膜は、MgO膜であることを特徴とする磁気トンネル接合素子の製造方法。 - 請求項1ないし請求項4のいずれか一項に記載の磁気トンネル接合素子の製造方法において、
前記マスク層は、Ta膜であることを特徴とする磁気トンネル接合素子の製造方法。 - 厚さが2nm以下である第1の磁性膜と、Mg、Zn、Alのいずれか1つを少なくとも含む酸化膜と、を有し、前記第1の磁性膜と前記酸化膜との界面が膜面方向である多層膜を形成された基板がプラズマ処理されるリアクタと、誘導磁場を発生させる誘導アンテナと、前記誘導アンテナに高周波電力を供給する高周波電源と、プラズマ発光の変動をモニタすることにより前記プラズマ処理の終了を判定する終点判定装置と、ガスを前記リアクタに供給する第1のマスフローコントローラおよび第2のマスフローコントローラとを備えるプラズマ処理装置において、
前記多層膜は、水素ガスと窒素ガスの混合ガスを用いてプラズマエッチングされ、
前記水素ガスの流量は、前記終点判定装置からの信号を基に前記第1のマスフローコントローラにより制御され、
前記窒素ガスの流量は、前記終点判定装置からの信号を基に前記第2のマスフローコントローラにより制御され、
前記混合ガスの流量に対する前記水素ガスの流量の比は、前記終点判定装置からの信号を基に第1の流量比から第2の流量比に変更され、
前記第2の流量比は、50%以下であることを特徴とするプラズマ処理装置。 - 請求項7に記載のプラズマ処理装置において、
前記第1の磁性膜は、前記酸化膜の上方に形成され、
前記信号は、前記終点判定装置が前記酸化膜を検知したとき、送信されることを特徴とするプラズマ処理装置。 - 請求項7に記載のプラズマ処理装置において、
前記第1の流量比における前記多層膜上にパターニングされたマスク層のエッチングレートに対する前記第1の磁性膜のエッチングレートの比は、前記第2の流量比における前記マスク層のエッチングレートに対する前記第1の磁性膜のエッチングレートの比よりも高いことを特徴とするプラズマ処理装置。
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CN104916774B (zh) * | 2015-04-20 | 2017-11-17 | 北京航空航天大学 | 一种基于金属掺杂的有机磁隧道结及制造方法 |
US9564577B1 (en) | 2015-11-16 | 2017-02-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | MRAM device and fabrication method |
CN107958950B (zh) | 2016-10-14 | 2020-09-22 | 中电海康集团有限公司 | Mtj器件的制作方法、mtj器件及stt-mram |
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US10833255B2 (en) | 2020-11-10 |
KR102149243B1 (ko) | 2020-08-31 |
SG11201807339WA (en) | 2020-04-29 |
TW201916417A (zh) | 2019-04-16 |
KR20190034137A (ko) | 2019-04-01 |
CN109819664A (zh) | 2019-05-28 |
TWI722285B (zh) | 2021-03-21 |
DE112017000726T5 (de) | 2018-11-15 |
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