JP6570644B2 - 接合材及びそれを用いた接合体 - Google Patents
接合材及びそれを用いた接合体 Download PDFInfo
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- C03C3/00—Glass compositions
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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Description
特許文献2には、ガラス基板間を封着する際に、ガラス基板と封着材料の熱膨張係数差により、レーザー封着後にガラス基板や封着部分に不当な応力が残留することによる封着強度の低下を抑制するために、ガラスフィルムの両表面に封着材料層が形成された複合封着材料が開示されている。また、封着材料が、ビスマス系ガラス粉末と耐火性フィラーとを含むことが開示されている。
特許文献2に開示された複合封着材料はガラス基板同士の封着に用いるものである。そのためガラスフィルムの両表面の封着材料層の物性については規定されておらず、特性や物性が大きく異なる被接合材同士の接合に適用することは困難である。
以下、第1の層及び第2の層を接合層という。接合層は、被接合材の特性もしくは接合体の要求特性に合わせて適宜選択することができる。接合層は、接着成分として例えば、半田、低融点ガラス、樹脂等を含む。ここで、低融点ガラスとは、軟化点が600℃以下のガラスと定義する。
基材については、第1の層及び第2の層の形成温度よりも耐熱温度が高いものであれば良く、限定されるものではない。求められる接合体の特性に合わせて、例えば、樹脂フィルム、ガラスフィルム、金属フィルム等を用いることができる。
接合材は、基材に接合層(第1の層及び第2の層)を形成させることにより作製する。接合材は、例えば以下の方法により製造できる。接合層形成ペーストを作製する。接合層形成ペーストは、接着成分である半田、低融点がガラス等の粉末と、溶剤と、バインダーと、を接着成分である半田、低融点ガラスなどの粉末と、溶剤と、バインダーとを混練することで作製できる。接合層にフィラーを混合する場合は、接合層形成ペースト作製時に、フィラーの粉末も添加する。
本発明の接合材を用いて接合する被接合材としては、被接合材に合わせて接合材を選定するため、特に限定されるものではなく、様々なものを使用することができる。例えば、金属材料同士、セラミックス材料同士、樹脂材料同士、金属材料とセラミックス、金属材料と樹脂材料、セラミックス材料と樹脂材料などの接合に適用可能である。被接合材の具体的な組み合わせとしては、SiやSiCとSUS、Cu、Al、Al−SiC、Al2O3などが好ましい。これらは、いずれも熱膨張係数の差が大きく、通常接合することが困難なため、本発明の接合材の特徴が活かされるためである。また、炭素繊維強化プラスチック(CFRP)とTiやAlの組み合わせも好ましい。これは、本発明における接合材の接合層は、樹脂と低融点ガラスや半田材の組み合わせが可能であるため、本発明の特徴が活かされるためである。その他、本発明の接合材を封着材料として用いることも可能である。
<ガラスの作製>
表1のG1〜G11は、作製・検討したガラス組成を示したものである。いずれの成分も酸化物換算の質量%(質量パーセント)で表示した。これらの低融点ガラス組成物には、環境・安全に配慮し、実質的に鉛を含有させなかった。各成分の原料は、五酸化バナジウム、酸化テルル、酸化第二鉄、五酸化リン、酸化銀、酸化タングステン、炭酸バリウム、リン酸バリウム、酸化アンチモン、炭酸カリウム、酸化ビスマス、酸化ホウ素、酸化亜鉛、酸化銅、酸化ランタンを用いた。
ステンレス板上に流し込んだガラスを平均粒子径(D50)が20μm未満になるまで粉砕し、5℃/分の昇温速度で示差熱分析(DTA)を行うことによって、軟化点(Ts)を測定した。なお、標準サンプルとしてアルミナ粉末を用いた。
接合材を作製するに当たり、まず基材の上下面に接合層を形成するために接合層形成ペーストを作製した。このとき、基材にはガラスフィルム(厚み:30μm,熱膨張係数66×10−7/℃)を用いた。表1で作製したガラスを平均粒径(D50)が約3μmになるまでジェットミルを用いて粉砕したのち、同じく約3μm程度のフィラーとして、Al、Ag、Zr2(WO4)(PO4)2(ZWP)もしくはコーディエライトを所定量加えた。この混合物に対し、バインダー樹脂としてエチルセルロースを、溶剤としてブチルカルビトールアセテートを加えて混錬し、接合層形成ペーストを作製した。また、フィラーとして樹脂成分を加える場合には、樹脂成分として三菱ガス化学製の変性ポリフェニレンエーテル(OPE2St)を加え、溶剤としてα―テルピネオールを加えて混練し、接合層形成ペーストを作製した。作製した接合層形成ペーストの構成を表2に示す。
被接合材として、Alメタライズ処理が施されたSi基板(熱膨張係数:37×10−7/℃)とNiめっきが施されたSUS630基板(熱膨張係数:110×10−7/℃)を選択した。この被接合体同士を、表2に示す接合材を用いて接合体を試作した。接合体が形成できたものを○、剥離などにより接合体を形成できなかったものを×と評価した。また、-40℃〜150℃の温度サイクル試験を行うことで接合の信頼性を評価した。このとき、5つのサンプルを評価し、100サイクル後に一つも剥離が見られなかったものを○、サンプルによっては剥離がみられたものを△とした。
Claims (14)
- 金属材料、セラミックス材料、樹脂材料および炭素繊維強化プラスチックの4種の材料うちから選ばれる2種の被接合材を接合する接合材であって、
前記接合材は、基材と、
前記基材の一方の面に配置された第1の層と、
前記基材の他方の面に配置され、前記第1の層を構成する相とは熱膨張係数の異なる相を含む第2の層と、を備え、
前記第1の層と前記第2の層とは、軟化点が600℃以下のバナジウム含有ガラスを含み、
前記第1の層に含まれるガラスと前記第2の層に含まれるガラスは軟化点が異なることを特徴とする接合材。 - 請求項1に記載の接合材であって、
前記第1の層及び前記第2の層の少なくともいずれかは、フィラーを含むことを特徴とする接合材。 - 請求項2に記載の接合材であって、
前記第1の層及び前記第2の層は、前記フィラーを含むことを特徴とする接合材。 - 請求項3に記載の接合材であって、
前記第1の層と前記第2の層とは、前記フィラーの種類が異なることを特徴とする接合材。 - 請求項3に記載の接合材であって、
前記第1の層と前記第2の層とは、前記フィラーの含有量が異なることを特徴とする接合材。 - 請求項2乃至5のいずれか一項に記載の接合材であって、
前記フィラーは、セラミックス、金属材料、樹脂の少なくともいずれかであることを特徴とする接合材。 - 請求項1乃至6のいずれか一項に記載の接合材であって、
前記ガラスの軟化点は400℃以下であることを特徴とする接合材。 - 請求項7に記載の接合材であって、
前記ガラスは、さらに、銀、テルルの少なくともいずれかを含むことを特徴とする接合材。 - 請求項1乃至8のいずれか一項に記載の接合材であって、
前記第1の層の熱膨張係数をα1、前記第2の層の熱膨張係数をα2、前記基材の熱膨張係数をαfilmとしたとき、α1 < αfilm < α2の関係を満たすことを特徴とする接合材。 - 請求項1乃至9のいずれか一項に記載の接合材であって、
前記第2の層は樹脂を含むことを特徴とする接合材。 - 請求項1乃至10のいずれか一項に記載の接合材であって、
前記基材は、金属フィルムまたは樹脂フィルムからなることを特徴とする接合材。 - 請求項1乃至11のいずれか一項に記載の接合材であって、
前記基材の厚さは300μm以下であることを特徴とする接合材。 - 請求項12に記載の接合材であって、
前記基材の厚さは50μm以下であることを特徴とする接合材。 - 金属材料、セラミックス材料、樹脂材料および炭素繊維強化プラスチックの4種の材料うちから選ばれる2種の被接合材と、請求項1乃至13のいずれか一項に記載の接合材とを備える接合体。
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