JP6567970B2 - 複合基板の製法 - Google Patents
複合基板の製法 Download PDFInfo
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- JP6567970B2 JP6567970B2 JP2015528189A JP2015528189A JP6567970B2 JP 6567970 B2 JP6567970 B2 JP 6567970B2 JP 2015528189 A JP2015528189 A JP 2015528189A JP 2015528189 A JP2015528189 A JP 2015528189A JP 6567970 B2 JP6567970 B2 JP 6567970B2
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- 239000000758 substrate Substances 0.000 title claims description 248
- 239000002131 composite material Substances 0.000 title claims description 56
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 230000010287 polarization Effects 0.000 claims description 84
- 238000005530 etching Methods 0.000 claims description 44
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 22
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 14
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 13
- 238000010884 ion-beam technique Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 238000005304 joining Methods 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 4
- 230000007935 neutral effect Effects 0.000 claims description 3
- 239000002253 acid Substances 0.000 description 38
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 238000010897 surface acoustic wave method Methods 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0435—Modification of the thickness of an element of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0442—Modification of the thickness of an element of a non-piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/045—Modification of the area of an element
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/071—Mounting of piezoelectric or electrostrictive parts together with semiconductor elements, or other circuit elements, on a common substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
一方の面が分極マイナス面、もう一方の面が分極プラス面である圧電基板と、
前記圧電基板の前記分極プラス面と直接接合により接合された支持基板と、
を備えたものである。
圧電基板として、弾性波の伝搬方向がX軸方向であり、X軸を回転軸としてY軸及びZ軸を42°回転させたLT42°Y板(厚さ250μm)を用意した。また、支持基板として、Si(111)板(厚さ230μm)を用意した。両基板を2×10-6(Pa)の真空チャンバーに投入し、圧電基板の分極プラス面及び支持基板の片面にアルゴンビームを60秒照射した。照射後、両基板の照射面同士をコンタクトさせ、2000kgで加圧し、直接接合により両基板を接合した。これと同じ条件でアルゴンビームを照射した圧電基板の分極プラス面の算術平均粗さRaをAFM(測定面積は10μm四方)で測定したところ、0.3nmであった。またこのときの分極プラス面の除去量は、1nmであった。接合体を真空チャンバーから取り出し、圧電基板を30μmまで研削した。その後、ダイヤモンドスラリー(粒径1μm)を滴下しながら錫定盤で圧電基板を25μmまで研磨した。更に、コロイダルシリカ(粒径20nm)を滴下しながら、ウレタンパッドで圧電基板を20μmまで研磨した。研磨後の接合体の接合強度をクラックオープニング法にて評価したところ、表面エネルギーは1.8J/cm2であった。その後、研磨後の接合体を65℃のフッ硝酸に1分間浸漬し、圧電基板表面の加工変質層をエッチングにより除去して複合基板を得た。このときのエッチング量は20nm、エッチング後の表面粗さはRaで0.3nm、エッチング後の接合界面の剥離の長さ(接合界面の外周縁から基板中心に向かって剥離が進んだ長さ、図3(d)参照)は0.1mmであった。
実施例1において、圧電基板の分極マイナス面と支持基板の片面とを直接接合した。アルゴンビームを照射した圧電基板の分極マイナス面の算術平均粗さRaをAFM(測定面積は10μm四方)で測定したところ、0.5nmであった。またこのときの分極マイナス面の除去量は、1nmであった。研磨後の接合体の接合強度をクラックオープニング法にて評価したところ、表面エネルギーは1.5J/cm2であった。接合体につき、圧電基板の分極プラス面側を研削・研磨したあとフッ硝酸に10分間浸漬して加工変質層をエッチングした以外は、実施例1と同様にして複合基板を得た。このときのエッチング量は23nm、エッチング後の表面粗さはRaで0.5nm、エッチング後の接合界面の剥離の長さは0.5mmであった。
Claims (3)
- 一方の面が分極マイナス面、もう一方の面が分極プラス面である圧電基板の分極プラス面と支持基板の片面とを直接接合法で接合することにより複合基板を製造する接合工程を含み、
前記圧電基板としてタンタル酸リチウム基板又はニオブ酸リチウム基板を用意し、前記支持基板としてシリコン基板又はガラス基板を使用し、
前記直接接合法で接合するための処理には、前記分極プラス面への不活性ガスのイオンビームの照射、プラズマの照射及び中性原子ビームの照射のいずれかが含まれる、
複合基板の製法。 - 前記接合工程で得られた複合基板のうち前記圧電基板の前記分極マイナス面を研削・研磨する薄板化工程と、
前記薄板化工程後に前記分極マイナス面に発生した加工変質層をフッ硝酸又はフッ酸によってエッチングするエッチング工程と、
を含み、
前記圧電基板及び前記支持基板として、フッ硝酸又はフッ酸によるエッチングレートが前記分極プラス面よりも前記分極マイナス面の方が大きく、前記分極マイナス面よりも前記支持基板の方が大きいものを使用する、
請求項1に記載の複合基板の製法。 - 前記支持基板として前記圧電基板よりも熱膨張係数が小さいものを使用する、
請求項1又は2に記載の複合基板の製法。
Applications Claiming Priority (3)
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JP2013154505 | 2013-07-25 | ||
JP2013154505 | 2013-07-25 | ||
PCT/JP2014/065182 WO2015012005A1 (ja) | 2013-07-25 | 2014-06-09 | 複合基板及びその製法 |
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JPWO2015012005A1 JPWO2015012005A1 (ja) | 2017-03-02 |
JP6567970B2 true JP6567970B2 (ja) | 2019-08-28 |
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US (2) | US10211389B2 (ja) |
JP (1) | JP6567970B2 (ja) |
KR (1) | KR102256902B1 (ja) |
CN (1) | CN105409119B (ja) |
DE (1) | DE112014003430T5 (ja) |
TW (1) | TWI659609B (ja) |
WO (1) | WO2015012005A1 (ja) |
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WO2015012005A1 (ja) | 2013-07-25 | 2015-01-29 | 日本碍子株式会社 | 複合基板及びその製法 |
TWD174921S (zh) * | 2014-12-17 | 2016-04-11 | 日本碍子股份有限公司 | 複合基板之部分 |
WO2017013968A1 (ja) | 2015-07-17 | 2017-01-26 | 株式会社村田製作所 | 弾性波装置 |
TWI599445B (zh) * | 2015-09-15 | 2017-09-21 | Ngk Insulators Ltd | Method of manufacturing a composite substrate |
FR3042649B1 (fr) * | 2015-10-20 | 2019-06-21 | Soitec | Procede de fabrication d'une structure hybride |
WO2019059381A1 (ja) * | 2017-09-22 | 2019-03-28 | 株式会社トクヤマ | Iii族窒化物単結晶基板 |
CN111149296B (zh) * | 2017-10-24 | 2023-09-19 | 京瓷株式会社 | 复合基板以及使用其的弹性波元件 |
JP2019097145A (ja) * | 2017-11-22 | 2019-06-20 | 住友金属鉱山株式会社 | 表面弾性波素子用複合基板とその製造方法 |
JP2022512700A (ja) * | 2018-10-16 | 2022-02-07 | 国立大学法人東北大学 | 弾性波デバイス |
WO2020148908A1 (ja) * | 2019-01-18 | 2020-07-23 | 住友電気工業株式会社 | 接合体及び表面弾性波デバイス |
CN111755594B (zh) * | 2019-03-27 | 2023-04-07 | 中电科技德清华莹电子有限公司 | 一种超薄压电单晶箔的制作方法及其应用 |
WO2020209190A1 (ja) * | 2019-04-08 | 2020-10-15 | 株式会社村田製作所 | 弾性波装置及びマルチプレクサ |
WO2021006056A1 (ja) * | 2019-07-05 | 2021-01-14 | 株式会社村田製作所 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
JP7510416B2 (ja) | 2019-07-05 | 2024-07-03 | 株式会社村田製作所 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
JP7443808B2 (ja) * | 2020-02-19 | 2024-03-06 | 住友金属鉱山株式会社 | 圧電性酸化物単結晶基板の製造方法 |
JP7501889B2 (ja) * | 2020-03-25 | 2024-06-18 | 三安ジャパンテクノロジー株式会社 | 接合ウエハの製造方法と弾性波デバイスの製造方法 |
CN111740009B (zh) * | 2020-06-17 | 2022-05-24 | 上海新硅聚合半导体有限公司 | 一种基于离子束增强腐蚀的压电晶圆表面处理方法 |
WO2022269721A1 (ja) * | 2021-06-21 | 2022-12-29 | 国立大学法人東北大学 | 弾性表面波デバイス |
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