JP6560110B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP6560110B2 JP6560110B2 JP2015233110A JP2015233110A JP6560110B2 JP 6560110 B2 JP6560110 B2 JP 6560110B2 JP 2015233110 A JP2015233110 A JP 2015233110A JP 2015233110 A JP2015233110 A JP 2015233110A JP 6560110 B2 JP6560110 B2 JP 6560110B2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- workpiece
- chuck table
- carry
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015233110A JP6560110B2 (ja) | 2015-11-30 | 2015-11-30 | 切削装置 |
TW105132911A TWI691018B (zh) | 2015-11-30 | 2016-10-12 | 切削裝置 |
KR1020160158016A KR102463660B1 (ko) | 2015-11-30 | 2016-11-25 | 절삭 장치 |
CN201611071041.5A CN107030902B (zh) | 2015-11-30 | 2016-11-28 | 切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015233110A JP6560110B2 (ja) | 2015-11-30 | 2015-11-30 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017103274A JP2017103274A (ja) | 2017-06-08 |
JP6560110B2 true JP6560110B2 (ja) | 2019-08-14 |
Family
ID=59018191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015233110A Active JP6560110B2 (ja) | 2015-11-30 | 2015-11-30 | 切削装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6560110B2 (zh) |
KR (1) | KR102463660B1 (zh) |
CN (1) | CN107030902B (zh) |
TW (1) | TWI691018B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7045841B2 (ja) * | 2017-12-08 | 2022-04-01 | 株式会社ディスコ | 切削装置 |
JP7032122B2 (ja) * | 2017-12-22 | 2022-03-08 | 株式会社ディスコ | 切削装置 |
CN108573905B (zh) * | 2018-04-14 | 2020-12-01 | 芜湖拓达电子科技有限公司 | 一种半导体元件清洗设备及其使用方法 |
JP7165510B2 (ja) * | 2018-05-25 | 2022-11-04 | 株式会社ディスコ | 搬送用治具及び交換方法 |
JP7490304B2 (ja) * | 2020-04-08 | 2024-05-27 | 株式会社ディスコ | 切削装置及び搬送システム |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4339452B2 (ja) * | 1999-07-09 | 2009-10-07 | 株式会社ディスコ | Csp基板分割装置 |
JP4616969B2 (ja) * | 2000-06-16 | 2011-01-19 | 株式会社ディスコ | 切断機 |
JP2002359211A (ja) * | 2001-05-30 | 2002-12-13 | Disco Abrasive Syst Ltd | 切削機 |
TWI272673B (en) * | 2001-11-21 | 2007-02-01 | Disco Corp | Cutting machine |
JP4532895B2 (ja) * | 2003-12-18 | 2010-08-25 | 株式会社ディスコ | 板状物の切削装置 |
KR20060029927A (ko) * | 2004-10-04 | 2006-04-07 | 삼성전자주식회사 | 복수의 소잉 블레이드를 갖는 반도체 소잉 장치 |
JP4571851B2 (ja) * | 2004-11-30 | 2010-10-27 | 株式会社ディスコ | 切削装置 |
JP4813855B2 (ja) * | 2005-09-12 | 2011-11-09 | 株式会社ディスコ | 切削装置および加工方法 |
DE102007050471A1 (de) * | 2007-10-23 | 2009-04-30 | MAPAL Fabrik für Präzisionswerkzeuge Dr. Kress KG | Werkzeug zur spanenden Bearbeitung von Werkstücken |
WO2009066602A1 (ja) * | 2007-11-19 | 2009-05-28 | Tokyo Seimitsu Co., Ltd. | ダイシング方法 |
JP5026235B2 (ja) * | 2007-11-29 | 2012-09-12 | キヤノンマシナリー株式会社 | 基板切断装置 |
JP5420226B2 (ja) * | 2008-11-07 | 2014-02-19 | アピックヤマダ株式会社 | 切断装置 |
JP5386276B2 (ja) * | 2009-09-02 | 2014-01-15 | 株式会社ディスコ | 切削装置 |
JP5406676B2 (ja) * | 2009-11-10 | 2014-02-05 | 株式会社ディスコ | ウエーハの加工装置 |
JP5619559B2 (ja) * | 2010-10-12 | 2014-11-05 | 株式会社ディスコ | 加工装置 |
JP2013008823A (ja) * | 2011-06-24 | 2013-01-10 | Disco Abrasive Syst Ltd | 切断装置 |
JP5947010B2 (ja) * | 2011-09-15 | 2016-07-06 | 株式会社ディスコ | 分割装置 |
JP5785069B2 (ja) * | 2011-12-05 | 2015-09-24 | 株式会社ディスコ | 切削装置 |
JP6214901B2 (ja) * | 2013-04-04 | 2017-10-18 | 株式会社ディスコ | 切削装置 |
JP6441737B2 (ja) * | 2015-04-28 | 2018-12-19 | 株式会社ディスコ | 切削装置 |
-
2015
- 2015-11-30 JP JP2015233110A patent/JP6560110B2/ja active Active
-
2016
- 2016-10-12 TW TW105132911A patent/TWI691018B/zh active
- 2016-11-25 KR KR1020160158016A patent/KR102463660B1/ko active IP Right Grant
- 2016-11-28 CN CN201611071041.5A patent/CN107030902B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR102463660B1 (ko) | 2022-11-03 |
TW201727820A (zh) | 2017-08-01 |
TWI691018B (zh) | 2020-04-11 |
CN107030902B (zh) | 2020-05-26 |
JP2017103274A (ja) | 2017-06-08 |
CN107030902A (zh) | 2017-08-11 |
KR20170063379A (ko) | 2017-06-08 |
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