JP6463382B2 - 検査装置及び検査システム - Google Patents
検査装置及び検査システム Download PDFInfo
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- JP6463382B2 JP6463382B2 JP2016573295A JP2016573295A JP6463382B2 JP 6463382 B2 JP6463382 B2 JP 6463382B2 JP 2016573295 A JP2016573295 A JP 2016573295A JP 2016573295 A JP2016573295 A JP 2016573295A JP 6463382 B2 JP6463382 B2 JP 6463382B2
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- 238000007689 inspection Methods 0.000 title claims description 102
- 238000003384 imaging method Methods 0.000 claims description 82
- 230000003287 optical effect Effects 0.000 claims description 51
- 230000007547 defect Effects 0.000 claims description 28
- 238000005286 illumination Methods 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
- G01N21/909—Investigating the presence of flaws or contamination in a container or its contents in opaque containers or opaque container parts, e.g. cans, tins, caps, labels
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Textile Engineering (AREA)
- Signal Processing (AREA)
- Quality & Reliability (AREA)
- Theoretical Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Eye Examination Apparatus (AREA)
- Transplanting Machines (AREA)
- Radar Systems Or Details Thereof (AREA)
Description
Claims (6)
- 明部と、該明部より暗い暗部と、を有する被検体を照明する照明部と、
前記照明部によって照明された前記被検体からの光がそれぞれ異なる光路を通過する第1の光と第2の光に分割される光路分割部と、
前記光路分割部を通過した前記第1の光の光量を低下させるフィルタと、
前記フィルタを通過した前記第1の光が結像して前記明部の画像を撮像する第1撮像部と、前記光路分割部を通過した前記第2の光が結像して前記暗部の画像を撮像する第2撮像部と、を含み、前記明部の画像と前記暗部の画像とが合成された画像を撮像する光電変換素子群と、
前記合成された画像の情報から前記被検体の前記明部及び前記暗部の欠陥の有無を検査する検査部と、
を備える、
検査装置。 - 前記被検体を回転可能に載置する保持部を備え、
前記第1撮像部及び前記第2撮像部は、それぞれ複数の光電変換素子がライン状に配列している、
請求項1に記載の検査装置。 - 前記光路分割部は、前記被検体からの光を反射及び透過して前記第1の光と前記第2の光に分割するビームスプリッターを含むプリズムを有する、
請求項1又は請求項2に記載の検査装置。 - 前記光路分割部は、それぞれ異なる角度で傾斜した隣り合う、前記被検体からの光の一部を前記第1の光として反射する第1反射面と、前記被検体からの光の他の一部を前記第2の光として反射する第2反射面と、を含む反射部材を有する、
請求項1又は請求項2に記載の検査装置。 - 前記合成された画像を表示する表示部を備える、
請求項1乃至4のいずれか1つに記載の検査装置。 - 軸を中心に回転可能な略円盤状のロータ本体と、
前記ロータ本体の外周縁で前記被検体を回転可能に支持するテーブルと、
前記被検体を上方から押さえるキャップと、
前記テーブルに載せられる前記被検体を検査する請求項1乃至5のいずれか1つに記載の検査装置と、
を備える、
検査システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015020038 | 2015-02-04 | ||
JP2015020038 | 2015-02-04 | ||
PCT/JP2016/052170 WO2016125633A1 (ja) | 2015-02-04 | 2016-01-26 | 検査装置及び検査システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016125633A1 JPWO2016125633A1 (ja) | 2017-10-12 |
JP6463382B2 true JP6463382B2 (ja) | 2019-01-30 |
Family
ID=56563983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016573295A Active JP6463382B2 (ja) | 2015-02-04 | 2016-01-26 | 検査装置及び検査システム |
Country Status (7)
Country | Link |
---|---|
US (1) | US10408766B2 (ja) |
EP (1) | EP3255415B1 (ja) |
JP (1) | JP6463382B2 (ja) |
CN (1) | CN107209126B (ja) |
DK (1) | DK3255415T3 (ja) |
ES (1) | ES2919139T3 (ja) |
WO (1) | WO2016125633A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7113627B2 (ja) * | 2018-02-05 | 2022-08-05 | 株式会社Screenホールディングス | 画像取得装置、画像取得方法および検査装置 |
US10755401B2 (en) * | 2018-12-04 | 2020-08-25 | General Electric Company | System and method for work piece inspection |
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-
2016
- 2016-01-26 EP EP16746464.3A patent/EP3255415B1/en active Active
- 2016-01-26 WO PCT/JP2016/052170 patent/WO2016125633A1/ja active Application Filing
- 2016-01-26 DK DK16746464.3T patent/DK3255415T3/da active
- 2016-01-26 ES ES16746464T patent/ES2919139T3/es active Active
- 2016-01-26 US US15/547,617 patent/US10408766B2/en active Active
- 2016-01-26 JP JP2016573295A patent/JP6463382B2/ja active Active
- 2016-01-26 CN CN201680008565.1A patent/CN107209126B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP3255415A4 (en) | 2018-01-17 |
CN107209126A (zh) | 2017-09-26 |
CN107209126B (zh) | 2019-11-26 |
JPWO2016125633A1 (ja) | 2017-10-12 |
ES2919139T3 (es) | 2022-07-22 |
EP3255415B1 (en) | 2022-06-01 |
DK3255415T3 (da) | 2022-08-01 |
EP3255415A1 (en) | 2017-12-13 |
US10408766B2 (en) | 2019-09-10 |
US20180031490A1 (en) | 2018-02-01 |
WO2016125633A1 (ja) | 2016-08-11 |
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