JP6431605B2 - インクジェットプリントヘッド - Google Patents
インクジェットプリントヘッド Download PDFInfo
- Publication number
- JP6431605B2 JP6431605B2 JP2017523276A JP2017523276A JP6431605B2 JP 6431605 B2 JP6431605 B2 JP 6431605B2 JP 2017523276 A JP2017523276 A JP 2017523276A JP 2017523276 A JP2017523276 A JP 2017523276A JP 6431605 B2 JP6431605 B2 JP 6431605B2
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- JP
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- Prior art keywords
- resistors
- resistor
- window
- printhead
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 239000004020 conductor Substances 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 11
- 238000002161 passivation Methods 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 7
- 238000007639 printing Methods 0.000 description 19
- 239000010408 film Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 10
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- 238000013461 design Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
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- 230000000873 masking effect Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004448 titration Methods 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 229910008807 WSiN Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
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- 230000008021 deposition Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
Claims (15)
- プリントヘッドを作製するための方法であって、
開始ウェーハの上に導体層を堆積するステップであって、前記開始ウェーハは、プリントヘッドの制御電子回路を含むことからなる、ステップと、
前記ウェーハを横断する単一の抵抗窓を形成するために、前記導体層中に単一の細長い窓をエッチングするステップと、
前記導体層及び抵抗窓の上に抵抗層を堆積するステップと、
複数のトレース及び複数の抵抗器を形成するために、前記抵抗層及び導体層をエッチングするステップと、
前記トレース及び抵抗器の上にパッシベーション膜を堆積するステップと、
前記パッシベーション膜の上に耐キャビテーション膜を堆積するステップと、
前記パッシベーション膜の上にプライマー層を形成するステップと、
前記プライマー層の上に流れ構造を形成するステップと、
前記流れ構造の上にキャップ及びノズルを形成するステップ
を含み、
前記複数の抵抗器の長さは、前記抵抗窓の対向するエッジによって画定されることからなる、方法。 - 実質的に同じ長さの抵抗器を形成するために、前記単一の細長い窓を実質的に一定の幅でエッチングするステップを含む、請求項1の方法。
- 異なる長さの抵抗器を形成するために、前記単一の細長い窓を異なる幅でエッチングするステップを含む、請求項1の方法。
- 前記対向するエッジのうちの一方のエッジに沿って前記抵抗器の端を揃えるステップを含む、請求項3の方法。
- インク供給室に沿って前記抵抗器の端を揃えるステップを含む、請求項4の方法。
- 前記単一の細長い窓の前記異なる幅の間の部分を面取りするステップを含む、請求項3の方法。
- 長さが異なる抵抗器を交互に形成するために、前記単一の細長い窓が交互に配置された2つの異なる幅を有するようにするステップを含む、請求項3〜6のいずれかの方法。
- 幅が相対的に広い抵抗器と幅が相対的に狭い抵抗器にエネルギーが供給されたときに、該幅が相対的に広い抵抗器と該幅が相対的に狭い抵抗器によって互いに異なるサイズの液滴が噴射されるようにするために、前記抵抗層及び導体層を2つの異なる幅でエッチングして、該幅が相対的に広い抵抗器と該幅が相対的に狭い抵抗器の交互のパターンを形成するステップを含む、請求項1〜7のいずれかの方法。
- 前記幅が相対的に狭い抵抗器よりも長さが長くなるように前記幅が相対的に広い抵抗器を形成するステップを含む、請求項8の方法。
- 前記耐キャビテーション膜の上に誘電体層を堆積するステップを含む、請求項1〜9のいずれかの方法。
- プリントヘッドであって、
前記プリントヘッド内の導電層内の単一の抵抗窓と、
前記単一の抵抗窓の上に堆積された抵抗膜中に形成された複数の抵抗器
を備え、
前記複数の抵抗器は2つの異なる幅を有し、
前記幅が異なる抵抗器の各々は、エネルギーが供給されると、異なる大きさの液滴を噴射することができ、
前記複数の抵抗器の長さは、前記抵抗窓の対向するエッジによって画定されることからなる、プリントヘッド。 - 実質的に同じオーバーエネルギーを提供するために、前記複数の抵抗器の各々は、実質的に同じ長さを有することからなる、請求項11のプリントヘッド。
- 前記単一の抵抗窓は、相対的に短い抵抗器と相対的に長い抵抗器を交互に設けるために異なる幅を交互に有し、前記相対的に短い抵抗器は、前記相対的に長い抵抗器よりも幅が狭いことからなる、請求項11のプリントヘッド。
- 前記交互に設けられる相対的に短い抵抗器と相対的に長い抵抗器は、前記対向するエッジのうちの一方のエッジに沿って揃えられることからなる、請求項13のプリントヘッド。
- プリントバーを備えるプリンターであって、
前記プリントバーはプリントヘッドを備え、
前記プリントヘッドは、
直線配列をなす複数のノズルと、
前記プリントヘッド内の導電層内の単一の抵抗窓と、
前記単一の抵抗窓の上に堆積された抵抗膜中に形成された複数の抵抗器と、
前記複数の抵抗器の各々に実質的に同じ噴射パルスを与えるように構成されたコントローラ
を備え、
前記抵抗器の各々は前記ノズルの各々の下にあり、
前記複数の抵抗器は、幅が相対的に狭い抵抗器と幅が相対的に広い抵抗器を含み、幅が相対的に狭い抵抗器の各々は、幅が相対的に広い抵抗器に隣接して配置され、
前記幅が相対的に狭い抵抗器と前記幅が相対的に広い抵抗器のそれぞれの上にあるそれぞれの前記ノズルは互いに異なるサイズの液滴を噴射し、
前記複数の抵抗器の長さは、前記抵抗窓の対向するエッジによって画定されることからなる、プリンター。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2014/063183 WO2016068945A1 (en) | 2014-10-30 | 2014-10-30 | Ink jet printhead |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017533129A JP2017533129A (ja) | 2017-11-09 |
JP6431605B2 true JP6431605B2 (ja) | 2018-11-28 |
Family
ID=55858048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017523276A Expired - Fee Related JP6431605B2 (ja) | 2014-10-30 | 2014-10-30 | インクジェットプリントヘッド |
Country Status (5)
Country | Link |
---|---|
US (2) | US10457048B2 (ja) |
EP (1) | EP3212419B1 (ja) |
JP (1) | JP6431605B2 (ja) |
CN (1) | CN107073955B (ja) |
WO (1) | WO2016068945A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107073955B (zh) * | 2014-10-30 | 2018-10-12 | 惠普发展公司,有限责任合伙企业 | 喷墨打印头 |
US20210008875A1 (en) * | 2018-03-08 | 2021-01-14 | Hewlett-Packard Development Company, L.P. | Measuring physical parameters |
US11088325B2 (en) * | 2019-01-18 | 2021-08-10 | Universal Display Corporation | Organic vapor jet micro-print head with multiple gas distribution orifice plates |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4746935A (en) * | 1985-11-22 | 1988-05-24 | Hewlett-Packard Company | Multitone ink jet printer and method of operation |
US5107276A (en) | 1989-07-03 | 1992-04-21 | Xerox Corporation | Thermal ink jet printhead with constant operating temperature |
US5428376A (en) | 1993-10-29 | 1995-06-27 | Hewlett-Packard Company | Thermal turn on energy test for an inkjet printer |
JPH07153603A (ja) | 1993-11-26 | 1995-06-16 | Hitachi Koki Co Ltd | インクジェット用発熱抵抗体の製造方法及びインクジェットプリンタ |
US6022098A (en) | 1995-08-10 | 2000-02-08 | Fuji Xerox Co., Ltd. | Ink-jet recorder |
US6113221A (en) | 1996-02-07 | 2000-09-05 | Hewlett-Packard Company | Method and apparatus for ink chamber evacuation |
US6543884B1 (en) * | 1996-02-07 | 2003-04-08 | Hewlett-Packard Company | Fully integrated thermal inkjet printhead having etched back PSG layer |
US6137510A (en) * | 1996-11-15 | 2000-10-24 | Canon Kabushiki Kaisha | Ink jet head |
US6234612B1 (en) * | 1997-03-25 | 2001-05-22 | Lexmark International, Inc. | Ink jet printing apparatus having first and second print cartridges receiving energy pulses from a common drive circuit |
RU2143343C1 (ru) | 1998-11-03 | 1999-12-27 | Самсунг Электроникс Ко., Лтд. | Микроинжектор и способ изготовления микроинжектора |
JP3697089B2 (ja) * | 1998-11-04 | 2005-09-21 | キヤノン株式会社 | インクジェットヘッド用基体、インクジェットヘッド、インクジェットカートリッジおよびインクジェット記録装置 |
US6513896B1 (en) | 2000-03-10 | 2003-02-04 | Hewlett-Packard Company | Methods of fabricating fit firing chambers of different drop weights on a single printhead |
US6467864B1 (en) | 2000-08-08 | 2002-10-22 | Lexmark International, Inc. | Determining minimum energy pulse characteristics in an ink jet print head |
US6457814B1 (en) * | 2000-12-20 | 2002-10-01 | Hewlett-Packard Company | Fluid-jet printhead and method of fabricating a fluid-jet printhead |
JP2003145769A (ja) | 2001-11-12 | 2003-05-21 | Canon Inc | 回路基板の製造方法、および液体吐出ヘッドの製造方法 |
JP3927854B2 (ja) | 2002-04-23 | 2007-06-13 | キヤノン株式会社 | インクジェット記録ヘッド |
JP2005153435A (ja) | 2003-11-28 | 2005-06-16 | Ricoh Co Ltd | 液滴吐出ヘッド、液体カートリッジ及び画像形成装置 |
GB0500114D0 (en) | 2005-01-06 | 2005-02-09 | Koninkl Philips Electronics Nv | Inkjet print head |
US7517040B2 (en) | 2005-03-23 | 2009-04-14 | Fujifilm Corporation | Liquid ejection apparatus with plural heating elements |
JP5006663B2 (ja) | 2006-03-08 | 2012-08-22 | キヤノン株式会社 | 液体吐出ヘッド |
US7837886B2 (en) | 2007-07-26 | 2010-11-23 | Hewlett-Packard Development Company, L.P. | Heating element |
KR20090015207A (ko) | 2007-08-08 | 2009-02-12 | 삼성전자주식회사 | 잉크젯 화상형성장치 및 그 제어방법 |
KR20090062012A (ko) | 2007-12-12 | 2009-06-17 | 삼성전자주식회사 | 잉크젯 헤드 및 그 제조방법 |
ATE547249T1 (de) | 2008-05-08 | 2012-03-15 | Canon Kk | Druckelementsubstrat, druckkopf und druckvorrichtung |
US8540349B2 (en) | 2008-06-23 | 2013-09-24 | Eastman Kodak Company | Printhead having isolated heater |
EP2401153B1 (en) * | 2009-02-24 | 2014-04-09 | Hewlett-Packard Development Company, L.P. | Printhead and method of fabricating the same |
US8210660B2 (en) | 2009-11-23 | 2012-07-03 | Lexmark International, Inc. | High volume ink delivery manifold for a page wide printhead |
US8651625B2 (en) * | 2010-04-29 | 2014-02-18 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
US8939552B2 (en) * | 2011-01-31 | 2015-01-27 | Hewlett-Packard Development Company, L.P. | Thermal fluid-ejection echanism having heating resistor on cavity sidewalls |
US8439477B2 (en) | 2011-07-26 | 2013-05-14 | Eastman Kodak Company | Method of characterizing array of resistive heaters |
CN103857829B (zh) * | 2011-10-14 | 2016-12-07 | 惠普发展公司,有限责任合伙企业 | 电阻器 |
US8727499B2 (en) * | 2011-12-21 | 2014-05-20 | Hewlett-Packard Development Company, L.P. | Protecting a fluid ejection device resistor |
EP2828088B1 (en) | 2012-07-03 | 2020-05-27 | Hewlett-Packard Development Company, L.P. | Fluid ejection apparatus |
JP6289234B2 (ja) * | 2014-04-15 | 2018-03-07 | キヤノン株式会社 | 記録素子基板及び液体吐出装置 |
CN107073955B (zh) * | 2014-10-30 | 2018-10-12 | 惠普发展公司,有限责任合伙企业 | 喷墨打印头 |
-
2014
- 2014-10-30 CN CN201480083116.4A patent/CN107073955B/zh not_active Expired - Fee Related
- 2014-10-30 JP JP2017523276A patent/JP6431605B2/ja not_active Expired - Fee Related
- 2014-10-30 US US15/521,285 patent/US10457048B2/en not_active Expired - Fee Related
- 2014-10-30 WO PCT/US2014/063183 patent/WO2016068945A1/en active Application Filing
- 2014-10-30 EP EP14905040.3A patent/EP3212419B1/en active Active
-
2019
- 2019-09-19 US US16/576,223 patent/US11186089B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3212419B1 (en) | 2019-12-04 |
CN107073955A (zh) | 2017-08-18 |
EP3212419A4 (en) | 2018-05-30 |
US10457048B2 (en) | 2019-10-29 |
US20170313077A1 (en) | 2017-11-02 |
US20200009867A1 (en) | 2020-01-09 |
WO2016068945A1 (en) | 2016-05-06 |
JP2017533129A (ja) | 2017-11-09 |
US11186089B2 (en) | 2021-11-30 |
EP3212419A1 (en) | 2017-09-06 |
CN107073955B (zh) | 2018-10-12 |
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