JP6336220B2 - パワー半導体装置 - Google Patents
パワー半導体装置 Download PDFInfo
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- JP6336220B2 JP6336220B2 JP2017553585A JP2017553585A JP6336220B2 JP 6336220 B2 JP6336220 B2 JP 6336220B2 JP 2017553585 A JP2017553585 A JP 2017553585A JP 2017553585 A JP2017553585 A JP 2017553585A JP 6336220 B2 JP6336220 B2 JP 6336220B2
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- 239000004065 semiconductor Substances 0.000 title claims description 61
- 239000000758 substrate Substances 0.000 claims description 15
- 235000018290 Musa x paradisiaca Nutrition 0.000 claims description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 240000005561 Musa balbisiana Species 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 241000234295 Musa Species 0.000 description 7
- 238000005452 bending Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/02—Arrangements of circuit components or wiring on supporting structure
- H05K7/06—Arrangements of circuit components or wiring on supporting structure on insulating boards, e.g. wiring harnesses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1027—IV
- H01L2924/10272—Silicon Carbide [SiC]
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Inverter Devices (AREA)
- Die Bonding (AREA)
- Power Conversion In General (AREA)
- Connecting Device With Holders (AREA)
Description
まず、本発明の実施の形態1に係るパワー半導体装置について説明する前に、これと関連するパワー半導体装置(以下、「関連半導体装置」と記す)について説明する。
以上のような本実施の形態1によれば、電極2とナット4とがスタッドボルト5によって電気的に接続される。これにより、関連半導体装置の製造時に行わる電極の他端における曲げ工程が必要でなくなり、電極2及びナット4などの配置、位置関係及び寸法に余裕を持たせることができる。この結果、電極2のコストの低下、及び、組立性の向上化が期待できる。また、電極の他端における曲げ工程を省くことにより、ケース割れ等による不良を低減することができる。
図3は、本発明の実施の形態2に係るパワー半導体装置の構成を示す断面図である。以下、本実施の形態2に係るパワー半導体装置のうち、実施の形態1と同じまたは類似する構成要素については同じ参照符号を付し、異なる部分について主に説明する。
以上のような本実施の形態2によれば、実施の形態1と同様の効果を得ることができる。また、ボルト6を用いることによって、接合部を強化することができるので、パワー半導体装置の信頼性を高めることができる。
図4及び図5は、本発明の実施の形態3に係るパワー半導体装置の構成を示す断面図である。以下、本実施の形態3に係るパワー半導体装置のうち、実施の形態1と同じまたは類似する構成要素については同じ参照符号を付し、異なる部分について主に説明する。
以上のような本実施の形態3によれば、実施の形態1と同様の効果を得ることができる。また、バナナプラグ7を備えることによって、ねじ締めが不要となるので、組立性を向上させることができる。また、部品数の低減も期待できる。
図6は、本発明の実施の形態4に係るパワー半導体装置の構成を示す断面図である。以下、本実施の形態4に係るパワー半導体装置のうち、実施の形態1と同じまたは類似する構成要素については同じ参照符号を付し、異なる部分について主に説明する。
以上のような本実施の形態4によれば、実施の形態1と同様の効果を得ることができる。また、外部配線との接続用のボルト8をナット4に挿通することにより、部品数を低減することができる。
Claims (7)
- 半導体チップが配設された基板と、
一端が前記基板に固定され、前記基板に対し立設状に設けられた電極と、
前記電極を収容し、前記電極の他端に対向する部分を有する絶縁性のケースと、
前記ケースの前記部分において前記ケースに挿通された導電性のナットと、
前記電極の前記他端と前記ナットとを電気的に接続する導電部品と
を備える、パワー半導体装置。 - 請求項1に記載のパワー半導体装置であって、
前記導電部品の一端は前記電極の前記他端と接続され、
前記導電部品の他端は前記ナットの途中まで係合されている、パワー半導体装置。 - 請求項2に記載のパワー半導体装置であって、
前記導電部品は、スタッドボルト、ボルト、または、バナナプラグを含む、パワー半導体装置。 - 請求項1に記載のパワー半導体装置であって、
前記導電部品は、
頭部が前記ケースの外側に配設され、中間部が前記ナットに挿通され、ねじ先が前記電極の前記他端と接続された、外部配線との接続用のボルトを含む、パワー半導体装置。 - 請求項4に記載のパワー半導体装置であって、
前記電極の前記他端には弾性部が設けられ、
前記ボルトの前記ねじ先が前記電極の前記弾性部と接続された、パワー半導体装置。 - 請求項1から請求項5のうちのいずれか1項に記載のパワー半導体装置であって、
前記ナットは、
前記ケースの外面から突出し、前記ケースの内面から突出している、パワー半導体装置。 - 請求項1から請求項5のうちのいずれか1項に記載のパワー半導体装置であって、
前記半導体チップは炭化珪素からなる、パワー半導体装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2015/084132 WO2017094180A1 (ja) | 2015-12-04 | 2015-12-04 | パワー半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JPWO2017094180A1 JPWO2017094180A1 (ja) | 2018-02-22 |
JP6336220B2 true JP6336220B2 (ja) | 2018-06-06 |
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JP2017553585A Active JP6336220B2 (ja) | 2015-12-04 | 2015-12-04 | パワー半導体装置 |
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US (1) | US10483175B2 (ja) |
JP (1) | JP6336220B2 (ja) |
CN (1) | CN108369943B (ja) |
DE (1) | DE112015007166T5 (ja) |
WO (1) | WO2017094180A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6760127B2 (ja) | 2017-02-24 | 2020-09-23 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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GB1052661A (ja) * | 1963-01-30 | 1900-01-01 | ||
US4278990A (en) * | 1979-03-19 | 1981-07-14 | General Electric Company | Low thermal resistance, low stress semiconductor package |
JPH09321216A (ja) * | 1996-05-27 | 1997-12-12 | Toshiba Corp | 電力用半導体装置 |
JP4092071B2 (ja) * | 2000-11-30 | 2008-05-28 | 三菱電機株式会社 | 半導体パワーモジュール |
JP4569473B2 (ja) | 2006-01-04 | 2010-10-27 | 株式会社日立製作所 | 樹脂封止型パワー半導体モジュール |
JP2007235004A (ja) * | 2006-03-03 | 2007-09-13 | Mitsubishi Electric Corp | 半導体装置 |
JP5479703B2 (ja) * | 2008-10-07 | 2014-04-23 | 株式会社東芝 | 半導体装置及びその製造方法 |
CN103430306B (zh) * | 2011-03-16 | 2016-06-29 | 富士电机株式会社 | 半导体模块及其制造方法 |
SG11201403635SA (en) * | 2012-03-16 | 2014-10-30 | Sumitomo Bakelite Co | Resin composition for encapsulation and electronic device using the same |
CN104919589B (zh) * | 2012-10-15 | 2019-01-29 | 富士电机株式会社 | 半导体装置 |
JP5812974B2 (ja) * | 2012-12-05 | 2015-11-17 | 三菱電機株式会社 | 半導体装置 |
JP6421050B2 (ja) * | 2015-02-09 | 2018-11-07 | 株式会社ジェイデバイス | 半導体装置 |
-
2015
- 2015-12-04 DE DE112015007166.0T patent/DE112015007166T5/de active Granted
- 2015-12-04 WO PCT/JP2015/084132 patent/WO2017094180A1/ja active Application Filing
- 2015-12-04 US US15/758,349 patent/US10483175B2/en active Active
- 2015-12-04 CN CN201580084964.1A patent/CN108369943B/zh active Active
- 2015-12-04 JP JP2017553585A patent/JP6336220B2/ja active Active
Also Published As
Publication number | Publication date |
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WO2017094180A1 (ja) | 2017-06-08 |
US10483175B2 (en) | 2019-11-19 |
CN108369943B (zh) | 2021-07-06 |
JPWO2017094180A1 (ja) | 2018-02-22 |
CN108369943A (zh) | 2018-08-03 |
US20180261517A1 (en) | 2018-09-13 |
DE112015007166T5 (de) | 2018-08-09 |
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