JP6322746B1 - ワーク処理装置及び処理済ワークの製造方法 - Google Patents
ワーク処理装置及び処理済ワークの製造方法 Download PDFInfo
- Publication number
- JP6322746B1 JP6322746B1 JP2017068056A JP2017068056A JP6322746B1 JP 6322746 B1 JP6322746 B1 JP 6322746B1 JP 2017068056 A JP2017068056 A JP 2017068056A JP 2017068056 A JP2017068056 A JP 2017068056A JP 6322746 B1 JP6322746 B1 JP 6322746B1
- Authority
- JP
- Japan
- Prior art keywords
- heat
- chamber
- liquid
- vaporized
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 230000008016 vaporization Effects 0.000 claims abstract description 93
- 238000009834 vaporization Methods 0.000 claims abstract description 79
- 239000007788 liquid Substances 0.000 claims abstract description 77
- 239000006200 vaporizer Substances 0.000 claims abstract description 42
- 238000005338 heat storage Methods 0.000 claims abstract description 40
- 230000008569 process Effects 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims 2
- 239000007789 gas Substances 0.000 abstract description 48
- 239000012159 carrier gas Substances 0.000 abstract description 18
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 270
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 135
- 235000019253 formic acid Nutrition 0.000 description 135
- 238000010438 heat treatment Methods 0.000 description 10
- 239000012530 fluid Substances 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000005553 drilling Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/0011—Heating features
- B01D1/0017—Use of electrical or wave energy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
- B23K35/3612—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with organic compounds as principal constituents
- B23K35/3618—Carboxylic acids or salts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D20/00—Heat storage plants or apparatus in general; Regenerative heat-exchange apparatus not covered by groups F28D17/00 or F28D19/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D20/00—Heat storage plants or apparatus in general; Regenerative heat-exchange apparatus not covered by groups F28D17/00 or F28D19/00
- F28D20/0056—Heat storage plants or apparatus in general; Regenerative heat-exchange apparatus not covered by groups F28D17/00 or F28D19/00 using solid heat storage material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0061—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for phase-change applications
- F28D2021/0064—Vaporizers, e.g. evaporators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/014—Heaters using resistive wires or cables not provided for in H05B3/54
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/021—Heaters specially adapted for heating liquids
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/14—Thermal energy storage
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical Vapour Deposition (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
5 チャンバ
6 真空ポンプ
10 気化部
11 ブロック
12 ブロック流路
15 下流パイプ
20 熱供給器
21 埋設ヒータ
25 リボンヒータ
100 ワーク処理装置
Fq ギ酸液
W ワーク
Claims (6)
- カルボン酸の気化対象液体よりも所定の比で熱容量が大きい蓄熱体を含んで構成された気化部と、
前記気化部に熱を供給する熱供給器と、を有する気化装置と;
内部でワークの処理が行われるチャンバであって、前記気化装置における前記気化対象液体が流れる流路と前記チャンバの内部とが連通した状態で外部に対して気密にすることが可能に構成されたチャンバと;
前記チャンバの内部及び前記気化対象液体が流れる流路の内部を負圧にする真空ポンプとを備え;
前記蓄熱体は、前記気化対象液体が流れる流路である蓄熱体流路が内部に形成されて構成され;
前記所定の比は、前記気化対象液体を前記蓄熱体流路に流して前記気化対象液体を予定した割合で気化させたときに必要な熱量が前記蓄熱体から前記気化対象液体に伝達されたときに前記蓄熱体の温度低下があらかじめ決められた範囲内となる熱容量の比である;
ワーク処理装置。 - 金属のブロックで形成された蓄熱体であって、一体に形成された前記ブロックを穿孔することによりカルボン酸の気化対象液体が流れる流路である蓄熱体流路が内部に形成されて構成された蓄熱体を含んで構成された気化部と、
前記気化部に熱を供給する熱供給器と、を有する気化装置と;
内部でワークの処理が行われるチャンバであって、前記気化装置における前記気化対象液体が流れる流路と前記チャンバの内部とが連通した状態で外部に対して気密にすることが可能に構成されたチャンバと;
前記チャンバの内部及び前記気化対象液体が流れる流路の内部を負圧にする真空ポンプとを備える;
ワーク処理装置。 - 前記熱供給器は、前記蓄熱体に埋設された埋設ヒータを含んで構成された;
請求項1又は請求項2に記載のワーク処理装置。 - 前記気化部は、前記気化対象液体が流れる流路を形成する部材であって前記蓄熱体よりも熱容量が小さい低熱容量流路形成部材を、前記気化対象液体の流れ方向で前記蓄熱体の下流側に含んで構成され;
前記熱供給器は、前記低熱容量流路形成部材を加熱する下流側ヒータを含んで構成された;
請求項1乃至請求項3のいずれか1項に記載のワーク処理装置。 - 前記蓄熱体流路が曲部を含んで形成された;
請求項1乃至請求項4のいずれか1項に記載のワーク処理装置。 - 請求項1乃至請求項5のいずれか1項に記載のワーク処理装置を用いて処理されたワークを製造する方法であって;
前記チャンバの内部に前記ワークを搬入する搬入工程と;
前記気化装置において前記気化対象液体が気化されて生成された処理ガスを、前記チャンバ内に供給する処理ガス供給工程と;
前記チャンバ内において、前記処理ガスの雰囲気下で、前記ワークに所定の処理を施すワーク処理工程とを備える;
処理済ワークの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017068056A JP6322746B1 (ja) | 2017-03-30 | 2017-03-30 | ワーク処理装置及び処理済ワークの製造方法 |
PCT/JP2018/011727 WO2018181000A1 (ja) | 2017-03-30 | 2018-03-23 | ワーク処理装置及び処理済ワークの製造方法 |
EP18774172.3A EP3604999B1 (en) | 2017-03-30 | 2018-03-23 | Workpiece processing device and manufacturing method for processed workpieces |
US16/496,919 US10766085B2 (en) | 2017-03-30 | 2018-03-23 | Work processing apparatus and method for manufacturing a processed work |
CN201880005335.9A CN110100144B (zh) | 2017-03-30 | 2018-03-23 | 工件处理装置以及已处理工件的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017068056A JP6322746B1 (ja) | 2017-03-30 | 2017-03-30 | ワーク処理装置及び処理済ワークの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6322746B1 true JP6322746B1 (ja) | 2018-05-09 |
JP2018169123A JP2018169123A (ja) | 2018-11-01 |
Family
ID=62105894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017068056A Active JP6322746B1 (ja) | 2017-03-30 | 2017-03-30 | ワーク処理装置及び処理済ワークの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10766085B2 (ja) |
EP (1) | EP3604999B1 (ja) |
JP (1) | JP6322746B1 (ja) |
CN (1) | CN110100144B (ja) |
WO (1) | WO2018181000A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6476342B1 (ja) * | 2018-10-15 | 2019-02-27 | オリジン電気株式会社 | 還元ガス供給装置及び処理済対象物の製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI715161B (zh) * | 2019-08-23 | 2021-01-01 | 廣化科技股份有限公司 | 純甲酸供酸焊接系統 |
JP6879482B1 (ja) * | 2020-01-09 | 2021-06-02 | 株式会社オリジン | 酸化物除去済部材の製造方法及び酸化物除去装置 |
CN113634845A (zh) * | 2021-07-29 | 2021-11-12 | 泗洪红芯半导体有限公司 | 一种二极管免清洗的甲酸焊接装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59108632U (ja) * | 1983-01-07 | 1984-07-21 | タバイエスペツク株式会社 | 滅菌用酸化エチレンガスの気化器 |
US5318101A (en) * | 1991-06-13 | 1994-06-07 | Kim Han Joong | Thermal accumulation type heating and cooling device using heat transfer medium |
JPH08334266A (ja) * | 1995-06-09 | 1996-12-17 | Matsushita Electric Ind Co Ltd | 蓄熱部付液体燃料燃焼装置 |
JPH102616A (ja) * | 1996-06-13 | 1998-01-06 | Fujikura Ltd | 蓄熱型ヒートパイプ式給湯装置用蒸発ブロック |
JPH10218134A (ja) * | 1997-02-03 | 1998-08-18 | Toppan Printing Co Ltd | 滅菌剤の気化装置 |
WO2010099861A1 (de) * | 2009-03-04 | 2010-09-10 | Rehau Ag + Co | Klimadecke |
JP2015112603A (ja) * | 2013-12-06 | 2015-06-22 | オリジン電気株式会社 | 半田付け装置及び接合部材の製造方法 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH297507A (de) * | 1952-01-10 | 1954-03-31 | Baiker Lambert | Einrichtung zum Spritzen von thermoplastischen Materialien. |
DE2707244A1 (de) * | 1977-02-19 | 1978-09-28 | Eichenauer Fa Fritz | Elektrische einrichtung zum erwaermen oder verdampfen von fluessigkeiten |
SE433664B (sv) * | 1982-10-29 | 1984-06-04 | Leif Goran Jakobsson | Elvermd fastkroppsvermeackumulator integrerad med konventionell vermepanna elvermd fastkroppsvermeackumulator integrerad med konventionell vermepanna |
JPH06268B2 (ja) * | 1988-02-23 | 1994-01-05 | エイティックテクトロン株式会社 | リフロー半田付け方法及び装置 |
WO1994014563A1 (en) * | 1992-12-25 | 1994-07-07 | Nippon Sanso Corporation | Soldering method and apparatus |
EP0628370A4 (en) * | 1992-12-25 | 1995-05-17 | Nippon Oxygen Co Ltd | WELDING METHOD AND APPARATUS. |
US5542022A (en) * | 1993-07-01 | 1996-07-30 | Coal Tech Corp. | Compact packed bed heater system |
JP3397313B2 (ja) | 1999-12-20 | 2003-04-14 | 富士通株式会社 | 半導体装置の製造方法及び電子部品の実装方法 |
AU2001269504A1 (en) * | 2000-07-11 | 2002-01-21 | Kabushiki Kaisha Tiyoda Seisakusho | Saturated steam generator, steam sterilizer, and steam sterilization method |
JP4421119B2 (ja) * | 2001-01-11 | 2010-02-24 | 株式会社日立国際電気 | 半導体装置の製造方法 |
JP3404021B2 (ja) * | 2001-01-18 | 2003-05-06 | 富士通株式会社 | はんだ接合装置 |
US6957013B2 (en) * | 2001-06-08 | 2005-10-18 | Algas-Sdi International Llc | Fluid heater |
US6967315B2 (en) * | 2002-06-12 | 2005-11-22 | Steris Inc. | Method for vaporizing a fluid using an electromagnetically responsive heating apparatus |
US6906296B2 (en) * | 2002-06-12 | 2005-06-14 | Steris Inc. | Electromagnetically responsive heating apparatus for vaporizer |
US20130175323A1 (en) * | 2002-07-01 | 2013-07-11 | Jian Zhang | Serial thermal linear processor arrangement |
ITBO20040729A1 (it) * | 2004-11-24 | 2005-02-24 | Eurosider S A S Di Milli Ottavio | Impianto e dispositivo di riscaldamento per la verniciatura a spruzzo |
JP4601535B2 (ja) * | 2005-09-09 | 2010-12-22 | 株式会社リンテック | 低温度で液体原料を気化させることのできる気化器 |
JP2008034736A (ja) * | 2006-07-31 | 2008-02-14 | Tokyo Electron Ltd | 熱処理方法および熱処理装置 |
US7648901B2 (en) * | 2006-09-28 | 2010-01-19 | Asm Assembly Automation Ltd. | Manufacturing process and apparatus therefor utilizing reducing gas |
CN102216017B (zh) * | 2008-12-10 | 2014-04-09 | 凯文·斯蒂芬·戴维斯 | 回流焊接方法及设备 |
US9726443B2 (en) * | 2009-02-27 | 2017-08-08 | Advanced Steam Technology | Heat exchange system and method |
US8528503B2 (en) * | 2009-02-27 | 2013-09-10 | Advanced Steam Technology | Heat exchange system and method |
JP5507909B2 (ja) * | 2009-07-14 | 2014-05-28 | 東京エレクトロン株式会社 | 成膜方法 |
JP5424201B2 (ja) * | 2009-08-27 | 2014-02-26 | アユミ工業株式会社 | 加熱溶融処理装置および加熱溶融処理方法 |
AT12048U1 (de) * | 2010-03-23 | 2011-09-15 | Stefan Ing Petters | Vorrichtung zur übertragung von wärme |
JP5807221B2 (ja) * | 2010-06-28 | 2015-11-10 | アユミ工業株式会社 | 接合構造体製造方法および加熱溶融処理方法ならびにこれらのシステム |
WO2013060635A1 (en) * | 2011-10-25 | 2013-05-02 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and device for cooling soldered printed circuit boards |
CN102502943B (zh) * | 2011-11-29 | 2013-02-27 | 北京神雾环境能源科技集团股份有限公司 | 蓄热式燃烧超临界水气化氧化装置 |
JP5902107B2 (ja) * | 2013-01-24 | 2016-04-13 | オリジン電気株式会社 | 加熱接合装置及び加熱接合製品の製造方法 |
JP6144495B2 (ja) * | 2013-01-24 | 2017-06-07 | オリジン電気株式会社 | 加熱接合装置及び加熱接合製品の製造方法 |
WO2014153570A2 (en) * | 2013-03-15 | 2014-09-25 | Transtar Group, Ltd | New and improved system for processing various chemicals and materials |
JP5548813B1 (ja) * | 2013-09-30 | 2014-07-16 | オリジン電気株式会社 | ギ酸分解用装置、半田付け装置、ギ酸の分解方法 |
JP5661957B1 (ja) * | 2014-01-22 | 2015-01-28 | オリジン電気株式会社 | カルボン酸ガス濃度の推定方法及び半田付け装置 |
US20160128238A1 (en) * | 2014-10-27 | 2016-05-05 | Ebullient, Llc | Hot-swappable server with cooling line assembly |
US10184699B2 (en) * | 2014-10-27 | 2019-01-22 | Ebullient, Inc. | Fluid distribution unit for two-phase cooling system |
US20160120059A1 (en) * | 2014-10-27 | 2016-04-28 | Ebullient, Llc | Two-phase cooling system |
US20160120065A1 (en) * | 2014-10-27 | 2016-04-28 | Ebullient, Llc | Manifold for a cooling system |
US20160120071A1 (en) * | 2014-10-27 | 2016-04-28 | Ebullient, Llc | Server with cooling line assembly |
CN105716225B (zh) * | 2014-12-22 | 2020-08-11 | 株式会社堀场Stec | 流体加热器、加热块和汽化*** |
JP6418253B2 (ja) * | 2014-12-26 | 2018-11-07 | 富士電機株式会社 | 加熱冷却機器 |
CN104654580A (zh) * | 2015-02-04 | 2015-05-27 | 刘华军 | 一种蓄热式真空相变锅炉 |
JP2017068056A (ja) | 2015-09-30 | 2017-04-06 | ブラザー工業株式会社 | 熱定着装置 |
JP6799814B2 (ja) * | 2018-04-16 | 2020-12-16 | パナソニックIpマネジメント株式会社 | 気相式加熱方法及び気相式加熱装置 |
-
2017
- 2017-03-30 JP JP2017068056A patent/JP6322746B1/ja active Active
-
2018
- 2018-03-23 US US16/496,919 patent/US10766085B2/en active Active
- 2018-03-23 WO PCT/JP2018/011727 patent/WO2018181000A1/ja unknown
- 2018-03-23 EP EP18774172.3A patent/EP3604999B1/en active Active
- 2018-03-23 CN CN201880005335.9A patent/CN110100144B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59108632U (ja) * | 1983-01-07 | 1984-07-21 | タバイエスペツク株式会社 | 滅菌用酸化エチレンガスの気化器 |
US5318101A (en) * | 1991-06-13 | 1994-06-07 | Kim Han Joong | Thermal accumulation type heating and cooling device using heat transfer medium |
JPH08334266A (ja) * | 1995-06-09 | 1996-12-17 | Matsushita Electric Ind Co Ltd | 蓄熱部付液体燃料燃焼装置 |
JPH102616A (ja) * | 1996-06-13 | 1998-01-06 | Fujikura Ltd | 蓄熱型ヒートパイプ式給湯装置用蒸発ブロック |
JPH10218134A (ja) * | 1997-02-03 | 1998-08-18 | Toppan Printing Co Ltd | 滅菌剤の気化装置 |
WO2010099861A1 (de) * | 2009-03-04 | 2010-09-10 | Rehau Ag + Co | Klimadecke |
JP2015112603A (ja) * | 2013-12-06 | 2015-06-22 | オリジン電気株式会社 | 半田付け装置及び接合部材の製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6476342B1 (ja) * | 2018-10-15 | 2019-02-27 | オリジン電気株式会社 | 還元ガス供給装置及び処理済対象物の製造方法 |
TWI683714B (zh) * | 2018-10-15 | 2020-02-01 | 日商歐利生股份有限公司 | 還原氣體供給裝置及經處理之對象物的製造方法 |
WO2020079909A1 (ja) * | 2018-10-15 | 2020-04-23 | 株式会社オリジン | 還元ガス供給装置及び処理済対象物の製造方法 |
JP2020062648A (ja) * | 2018-10-15 | 2020-04-23 | 株式会社オリジン | 還元ガス供給装置及び処理済対象物の製造方法 |
CN111372716A (zh) * | 2018-10-15 | 2020-07-03 | 株式会社欧利生 | 还原气体供给装置及经处理的对象物的制造方法 |
US10933393B2 (en) | 2018-10-15 | 2021-03-02 | Origin Company, Limited | Reducing gas supplying apparatus and method for manufacturing processed target object |
CN111372716B (zh) * | 2018-10-15 | 2021-08-06 | 株式会社欧利生 | 还原气体供给装置及经处理的对象物的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110100144A (zh) | 2019-08-06 |
EP3604999A4 (en) | 2020-04-15 |
JP2018169123A (ja) | 2018-11-01 |
US20200122256A1 (en) | 2020-04-23 |
WO2018181000A1 (ja) | 2018-10-04 |
EP3604999B1 (en) | 2021-09-22 |
US10766085B2 (en) | 2020-09-08 |
CN110100144B (zh) | 2020-03-03 |
EP3604999A1 (en) | 2020-02-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6322746B1 (ja) | ワーク処理装置及び処理済ワークの製造方法 | |
US9968136B1 (en) | Heater element for a vaporization device | |
US9551071B2 (en) | Substrate support device | |
TW201341574A (zh) | 氣化原料供給裝置、具備此的基板處理裝置及氣化原料供給方法 | |
US20160379723A1 (en) | System for purifying a gaseous medium of hydrogen and method for the use thereof | |
US20240125466A1 (en) | Boiler | |
JP5687755B1 (ja) | 半田付け装置及び接合部材の製造方法 | |
JP2003273025A (ja) | 液体材料気化装置 | |
JP5884448B2 (ja) | はんだ接合装置およびはんだ接合方法 | |
JP6067061B2 (ja) | 水素生成装置及び発電設備 | |
CN114901414B (zh) | 氧化物已去除部件的制造方法以及氧化物去除装置 | |
JP2020012584A (ja) | プレート式熱交換器 | |
CN107214411A (zh) | 印刷电路板式换热器焊接***和方法 | |
EP1769874A2 (en) | Soldering apparatus | |
US20030124049A1 (en) | Catalytic reactor apparatus and method for generating high purity water vapor | |
US20190168181A1 (en) | Solid-gas reaction substance-filled reactor and method for manufacturing the same | |
CN211261719U (zh) | 一种快速调控温度的真空炉 | |
TWI837977B (zh) | 蒸鍍源和蒸鍍裝置 | |
TWI835441B (zh) | 蒸鍍用坩堝、蒸鍍源和蒸鍍裝置 | |
JP2022184228A (ja) | 硫化水素製造装置および硫化水素の製造方法 | |
JP6202223B2 (ja) | 燃料電池のアノードシステム及び燃料電池のアノードシステムの制御方法 | |
CN105719927A (zh) | 离子源 | |
JP6208463B2 (ja) | 燃料電池装置 | |
CN111424298A (zh) | 一种金属电镀前的处理设备及处理方法 | |
JP2006269155A (ja) | 燃料電池システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180313 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180409 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6322746 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |