JP6288103B2 - コンベヤ装置 - Google Patents
コンベヤ装置 Download PDFInfo
- Publication number
- JP6288103B2 JP6288103B2 JP2015544879A JP2015544879A JP6288103B2 JP 6288103 B2 JP6288103 B2 JP 6288103B2 JP 2015544879 A JP2015544879 A JP 2015544879A JP 2015544879 A JP2015544879 A JP 2015544879A JP 6288103 B2 JP6288103 B2 JP 6288103B2
- Authority
- JP
- Japan
- Prior art keywords
- conveyor
- transport
- pair
- unit
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/005—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes comprising two or more co-operating conveying elements with parallel longitudinal axes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Intermediate Stations On Conveyors (AREA)
- Relays Between Conveyors (AREA)
- Warehouses Or Storage Devices (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Description
Claims (4)
- 被搬送物の底面を支持して前記被搬送物を搬送する第1支持搬送部を有する一対の第1コンベヤ部と、
前記一対の第1コンベヤ部のそれぞれを支持すると共に前記一対の第1コンベヤ部のそれぞれを旋回させて前記被搬送物の進行方向を変化させる旋回部と、
前記被搬送物の搬送方向において前記一対の第1コンベヤ部によって挟まれていると共に、前記被搬送物の底面において搬送方向と交差する幅方向における両端部を支持して前記被搬送物を搬送する一対の第2支持搬送部を有する第2コンベヤ部と、を備え、
前記第2コンベヤ部における前記一対の第2支持搬送部と、前記第2コンベヤ部における前記一対の第2支持搬送部に駆動力を伝達する駆動軸とが、前記一対の第1コンベヤ部の間かつ平面視において前記一対の第1コンベヤ部の旋回領域の間に設けられ、
平面視において、前記一対の第1コンベヤ部の旋回領域が、前記搬送方向の両方から前記第2コンベヤ部における前記被搬送物の搬送領域に入り込むように、前記第1コンベヤ部及び前記第2コンベヤ部が配置されており、
前記一対の第1コンベヤ部の間では、前記一対の第2支持搬送部のみが前記被搬送物を支持する、コンベヤ装置。 - 前記第1コンベヤ部は、前記被搬送物の底面において搬送方向と交差する幅方向における両端部を支持して前記被搬送物を搬送する一対の前記第1支持搬送部を有している、請求項1に記載のコンベヤ装置。
- 前記第1コンベヤ部は、前記第1コンベヤ部の下方に設けられた本体部に対して旋回可能に設けられ、
前記第2コンベヤ部は、前記本体部に隣接して設けられる基部の上方に設けられると共に、平面視において前記本体部と重なるように設けられる、請求項1又は2に記載のコンベヤ装置。 - 前記第2支持搬送部は、前記被搬送物の搬送面に略平行な被搬送物支持面を有している、請求項1〜3の何れか一項に記載のコンベヤ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013223475 | 2013-10-28 | ||
JP2013223475 | 2013-10-28 | ||
PCT/JP2014/075930 WO2015064268A1 (ja) | 2013-10-28 | 2014-09-29 | コンベヤ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015064268A1 JPWO2015064268A1 (ja) | 2017-03-09 |
JP6288103B2 true JP6288103B2 (ja) | 2018-03-07 |
Family
ID=53003881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015544879A Expired - Fee Related JP6288103B2 (ja) | 2013-10-28 | 2014-09-29 | コンベヤ装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9670002B2 (ja) |
EP (1) | EP3064455A4 (ja) |
JP (1) | JP6288103B2 (ja) |
KR (1) | KR101869813B1 (ja) |
CN (1) | CN105658551B (ja) |
SG (1) | SG11201603110PA (ja) |
TW (1) | TWI567009B (ja) |
WO (1) | WO2015064268A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016225485B4 (de) * | 2016-12-19 | 2022-08-25 | Carl Zeiss Vision International Gmbh | Sicheres Fördersystem |
EP3336022A1 (de) | 2016-12-19 | 2018-06-20 | Carl Zeiss Vision International GmbH | Herstellungssystem für brillengläser |
EP3336021B1 (de) | 2016-12-19 | 2020-08-19 | Carl Zeiss Vision International GmbH | Transfereinrichtung für einen transportbehälter |
JP6861432B2 (ja) * | 2017-02-10 | 2021-04-21 | 伊東電機株式会社 | 搬送装置及びコンベヤユニット |
CH715069A1 (de) * | 2018-06-05 | 2019-12-13 | Ruggli Projects Ag | Fördereinrichtung und Verfahren zum Fördern von Tampon-Applikatoren. |
SG11202104252QA (en) * | 2018-11-02 | 2021-05-28 | Murata Machinery Ltd | Conveyor system |
JP7473201B2 (ja) | 2020-05-18 | 2024-04-23 | アイカム株式会社 | 飲食物の搬送システム |
EP3922205A1 (en) * | 2020-06-12 | 2021-12-15 | Gibotech A/S | System for arranging containers and container lids on a rack in a sterile processing department |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE793146A (fr) * | 1972-02-03 | 1973-04-16 | Windmoeller & Hoelscher | Section de transport destinee a transporter des paquets de pieces pour la fabrication de sacs |
JPS57166250A (en) * | 1981-04-03 | 1982-10-13 | Dainippon Screen Mfg Co Ltd | Conveyance positioning device of sheet material |
NL8103964A (nl) | 1981-08-26 | 1983-03-16 | Shell Int Research | Werkwijze voor het winnen van vijfwaardige vanadium verbindingen uit zure katalysator extracten. |
JPS5841725U (ja) * | 1981-09-14 | 1983-03-19 | 松下電工株式会社 | 搬送装置 |
JPH062527B2 (ja) | 1984-04-27 | 1994-01-12 | 株式会社東芝 | クリーンルーム用搬送システム |
JP2778601B2 (ja) * | 1990-03-28 | 1998-07-23 | 株式会社東京自働機械製作所 | つなぎ込みロボット |
DE4013793A1 (de) * | 1990-04-28 | 1991-10-31 | Palitex Project Co Gmbh | Spulentransportvorrichtung |
JPH062527A (ja) | 1992-06-16 | 1994-01-11 | Toyota Motor Corp | 内燃機関の排気浄化装置 |
IT1257840B (it) * | 1992-06-23 | 1996-02-13 | Gd Spa | Metodo e dispositivo per alimentare una successione di bobine ad una stazione di prelievo |
JPH09255144A (ja) * | 1996-03-21 | 1997-09-30 | Komatsu Giken Kk | 基板旋回装置 |
US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
US6572321B1 (en) * | 2000-10-05 | 2003-06-03 | Applied Materials, Inc. | Loader conveyor for substrate processing system |
DE10157161A1 (de) * | 2001-11-22 | 2003-06-12 | Knapp Logistik Automation | Fördereinrichtung zum Fördern von Fördergut auf Paletten oder dergleichen mit Richtungswechsel |
JP2003285924A (ja) * | 2002-03-28 | 2003-10-07 | Nec Machinery Corp | ワーク切断分配システム |
JP4178835B2 (ja) | 2002-05-28 | 2008-11-12 | 株式会社ダイフク | 分岐設備 |
JP2005212948A (ja) * | 2004-01-28 | 2005-08-11 | Shinmei Ind Co Ltd | コンベヤ装置 |
DE102005033946B4 (de) * | 2005-07-20 | 2018-06-28 | Bosch Rexroth Aktiengesellschaft | Fördersystem |
JP2007217078A (ja) | 2006-02-14 | 2007-08-30 | Asyst Shinko Inc | 方向転換装置 |
TWM324648U (en) | 2007-06-08 | 2008-01-01 | Contrel Technology Co Ltd | Air-levitation conveyor capable of changing feeding direction of board |
ITUD20070197A1 (it) * | 2007-10-24 | 2009-04-25 | Baccini S P A | Dispositivo e procedimento di allineamento per allineare piastre per circuiti elettronici |
DE102008010317A1 (de) * | 2008-02-21 | 2009-09-03 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung zum Befördern und Drehen stoßempfindlicher Platten in Reinsträumen |
JP2009280333A (ja) * | 2008-05-21 | 2009-12-03 | Fdk Engineering:Kk | ローラコンベア装置 |
JP5513137B2 (ja) * | 2010-01-05 | 2014-06-04 | トーヨーカネツソリューションズ株式会社 | アキュムレーションコンベヤ |
JP5563397B2 (ja) * | 2010-07-21 | 2014-07-30 | 大塚電子株式会社 | 被搬送物回転装置 |
US8776983B2 (en) * | 2012-06-26 | 2014-07-15 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Turntable device for substrate and substrate transporting system |
US8550228B1 (en) * | 2013-03-01 | 2013-10-08 | Anko Food Machine Co., Ltd. | Direction change device for conveyance of dough |
CA2873752C (en) * | 2014-01-24 | 2021-03-09 | Axium Inc. | Product orientor |
-
2014
- 2014-09-29 WO PCT/JP2014/075930 patent/WO2015064268A1/ja active Application Filing
- 2014-09-29 SG SG11201603110PA patent/SG11201603110PA/en unknown
- 2014-09-29 CN CN201480057228.2A patent/CN105658551B/zh not_active Expired - Fee Related
- 2014-09-29 KR KR1020167011313A patent/KR101869813B1/ko active IP Right Grant
- 2014-09-29 US US15/030,343 patent/US9670002B2/en not_active Expired - Fee Related
- 2014-09-29 JP JP2015544879A patent/JP6288103B2/ja not_active Expired - Fee Related
- 2014-09-29 EP EP14857155.7A patent/EP3064455A4/en not_active Withdrawn
- 2014-10-24 TW TW103136772A patent/TWI567009B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP3064455A4 (en) | 2017-06-21 |
WO2015064268A1 (ja) | 2015-05-07 |
TW201529451A (zh) | 2015-08-01 |
US9670002B2 (en) | 2017-06-06 |
CN105658551B (zh) | 2018-10-26 |
SG11201603110PA (en) | 2016-05-30 |
KR101869813B1 (ko) | 2018-06-21 |
TWI567009B (zh) | 2017-01-21 |
JPWO2015064268A1 (ja) | 2017-03-09 |
CN105658551A (zh) | 2016-06-08 |
US20160236872A1 (en) | 2016-08-18 |
KR20160064199A (ko) | 2016-06-07 |
EP3064455A1 (en) | 2016-09-07 |
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