JP6284278B2 - 穿孔検査装置 - Google Patents
穿孔検査装置 Download PDFInfo
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- JP6284278B2 JP6284278B2 JP2015181555A JP2015181555A JP6284278B2 JP 6284278 B2 JP6284278 B2 JP 6284278B2 JP 2015181555 A JP2015181555 A JP 2015181555A JP 2015181555 A JP2015181555 A JP 2015181555A JP 6284278 B2 JP6284278 B2 JP 6284278B2
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- 238000007689 inspection Methods 0.000 title claims description 40
- 238000005553 drilling Methods 0.000 title claims description 9
- 238000005286 illumination Methods 0.000 claims description 71
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000011156 evaluation Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 238000012876 topography Methods 0.000 claims description 10
- 238000003491 array Methods 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000003086 colorant Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000011796 hollow space material Substances 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/06—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor with illuminating arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2407—Optical details
- G02B23/2461—Illumination
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/10—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths
- H04N23/12—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths with one sensor only
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/698—Control of cameras or camera modules for achieving an enlarged field of view, e.g. panoramic image capture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
- G01N2021/9542—Inspecting the inner surface of hollow bodies, e.g. bores using a probe
- G01N2021/9544—Inspecting the inner surface of hollow bodies, e.g. bores using a probe with emitter and receiver on the probe
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/555—Constructional details for picking-up images in sites, inaccessible due to their dimensions or hazardous conditions, e.g. endoscopes or borescopes
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Surgery (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Medical Informatics (AREA)
- Public Health (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Biophysics (AREA)
- Molecular Biology (AREA)
- Animal Behavior & Ethology (AREA)
- Veterinary Medicine (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Astronomy & Astrophysics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
4 内面
6 穿孔
8 加工物
10 測定ヘッド
12 軸
14 座標系
16 光学系
18 画像撮影機
20 評価機器
22 照明機器
24 第一の光源配列
24’ 第三の光源配列
26 光学系16の縁
28 支持体
30 発光ダイオード
32 第二の光源配列
34 発光ダイオード
36 正のファイ方向
36’ 負のファイ方向
Claims (14)
- 加工物(8)の回転対称又はほぼ回転対称な穴である穿孔(6)の内面(6)を検査する穿孔検査装置(2)であって、
画像撮影機(18)及びその後に配置された評価機器(20)と画像を伝送する形で接続された光学系(16)が配置された、前記穿孔(6)の軸線方向を向いた軸方向を規定する測定ヘッド(10)と、
この光学系(16)により捕捉される内面(4)の撮影範囲を照明する照明機器(22)と、
を備えた、穿孔検査装置(2)において、
この照明機器(22)が、内面(4)のトポグラフィの陰影画像を生成するために、検査すべき内面(4)を異なる照明方向から照明するように構成、設置されていることと、 この評価機器(20)が、画像撮影機(18)により撮影した陰影画像に基づき、このトポグラフィを検出するように構成、設置されていることと、
当該の照明機器(22)が、第二の照明方向から内面(4)を照明する少なくとも一つの第二の光源配列(32)を備え、当該の第二の光源配列(32)が円周方向に接する異なる方向から内面(4)を照明するように構成、設置されていることと、
当該の第二の光源配列(32)が回転対称又はほぼ回転対称に内面(4)を照明するように構成、設置されており、当該の第二の光源配列(32)が円周方向にリング形状に配置された複数の光源を有することと、
当該の光学系(16)が、全方向視界の光学系であることと、
を特徴とする穿孔検査装置。 - 当該の照明機器(22)が、第一の照明方向から内面(4)を照明する少なくとも一つの第一の光源配列(24)を備えていることを特徴とする請求項1に記載の検査装置。
- 当該の第一の光源配列(24)が半径方向から内面(4)を照明するように構成、設置されていることを特徴とする請求項2に記載の検査装置。
- 当該の第一の光源配列(24)が回転対称又はほぼ回転対称に内面(4)を照明するように構成、設置されていることを特徴とする請求項2又は3に記載の検査装置。
- 当該の第一の光源配列(24)が円周方向にリング形状に配置された複数の光源を有することを特徴とする請求項2から4までのいずれか一つに記載の検査装置。
- 当該の光源の少なくとも一部が発光ダイオード(30,34)であることを特徴とする請求項5に記載の検査装置。
- 当該の照明機器(22)が、軸方向に互いに間隔を開けた、互いに対向する方向に照射する少なくとも二つの光源配列(24,24’)を有することを特徴とする請求項2から6までのいずれか一つに記載の検査装置。
- 当該の第一の光源配列(24,24’)及び第二の光源配列(32)を駆動するための制御手段を備えていることを特徴とする請求項2から7までのいずれか一つに記載の検査装置。
- 当該の制御手段が、異なる照明方向から時間的に順番に内面(4)を照明するように構成、設置されていることを特徴とする請求項8に記載の検査装置。
- 当該の第一の光源配列(24)及び第二の光源配列(32)の各照明方向に独自の照明色が対応付けられていることと、
画像撮影機(18)がカラーセンサを備えていることと、
を特徴とする請求項2から9までのいずれか一つに記載の検査装置。 - 当該の測定ヘッド(10)には、測定ヘッド(10)を軸方向に段階的又は連続的に送るための送り機器が配備されていることを特徴とする請求項1から10までのいずれか一つに記載の検査装置。
- 少なくとも測定ヘッド(10)が、有利には、照明機器(22)を含む測定ヘッド(10)が、検査すべき穿孔(6)に挿入することが可能な内視鏡として構成されていることを特徴とする請求項1から11までのいずれか一つに記載の検査装置。
- 当該の画像撮影機(18)がデジタル画像撮影機(画像センサ)であることと、
当該の評価機器(20)がデジタル評価機器であることと、
の一つ以上を特徴とする請求項1から12までのいずれか一つに記載の検査装置。 - 当該の評価機器が、画像撮影機(18)により撮影された陰影画像をシェープフロムシェーディング方法に基づき評価するように構成、設置されていることを特徴とする請求項1から13までのいずれか一つに記載の検査装置。
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DE102014114304.3 | 2014-10-01 | ||
DE102014114304 | 2014-10-01 |
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JP2016070924A JP2016070924A (ja) | 2016-05-09 |
JP6284278B2 true JP6284278B2 (ja) | 2018-02-28 |
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JP2015188155A Pending JP2016070934A (ja) | 2014-10-01 | 2015-09-25 | 内腔検査装置 |
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US (2) | US9983149B2 (ja) |
JP (2) | JP6284278B2 (ja) |
CN (2) | CN105486694B (ja) |
DE (3) | DE102014118753A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014118753A1 (de) * | 2014-10-01 | 2016-04-07 | Jenoptik Industrial Metrology Germany Gmbh | Prüfvorrichtung |
DE202015009460U1 (de) | 2015-08-12 | 2017-10-12 | Jenoptik Industrial Metrology Germany Gmbh | Bohrungsinspektionsvorrichtung |
DE102016107135A1 (de) | 2016-04-18 | 2017-10-19 | Jenoptik Industrial Metrology Germany Gmbh | Messanordnung |
DE102016208949B4 (de) * | 2016-05-24 | 2018-08-16 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung und Verfahren zum Vermessen der Geometrie der Innenwand von Bohrungen |
DE102016122695A1 (de) | 2016-07-20 | 2018-01-25 | Jenoptik Industrial Metrology Germany Gmbh | Oberflächenmessvorrichtung |
US9905026B1 (en) * | 2016-09-14 | 2018-02-27 | The Boeing Company | Photogrammetric identification of locations for performing work |
CN106383130A (zh) * | 2016-10-25 | 2017-02-08 | 广东技术师范学院 | 一种基于机器视觉的短钢管表面缺陷检测装置 |
US10582169B2 (en) | 2016-12-23 | 2020-03-03 | Lumileds Llc | Compensating for vignetting |
DE102017106741B4 (de) | 2017-03-29 | 2019-11-14 | Jenoptik Industrial Metrology Germany Gmbh | Oberflächenmessgerät |
DE102018103420A1 (de) | 2018-02-15 | 2019-08-22 | Jenoptik Industrial Metrology Germany Gmbh | Messgerät zur Oberflächen- oder Konturmessung |
CN111213053A (zh) * | 2018-07-27 | 2020-05-29 | 合刃科技(深圳)有限公司 | 基于相干光的微细管内壁检测装置及方法 |
CN109490327A (zh) * | 2018-11-14 | 2019-03-19 | 中国航发动力股份有限公司 | 一种内窥镜检测空心轴/管内壁的工装及其方法 |
DE102019105059A1 (de) | 2018-12-19 | 2020-06-25 | Jenoptik Industrial Metrology Germany Gmbh | Verfahren zum Betreiben eines Oberflächenmessgeräts |
CN111426470A (zh) * | 2018-12-24 | 2020-07-17 | 罗伯特·博世有限公司 | 用于检查用于无级变速器的传动带的方法和装置 |
DE102019106851B4 (de) | 2019-03-18 | 2023-06-07 | Jenoptik Industrial Metrology Germany Gmbh | Kalibrierverfahren und Kalibrierhilfsmittel |
CN109945812B (zh) * | 2019-03-22 | 2020-12-08 | 北京航空航天大学 | 一种转轴更换机构及橡塑轴封的密封区域接触宽度监测方法 |
DE102020108182A1 (de) | 2019-05-07 | 2020-11-12 | Jenoptik Industrial Metrology Germany Gmbh | Oberflächenmessgerät |
CN110260816A (zh) * | 2019-06-26 | 2019-09-20 | 湖南省鹰眼在线电子科技有限公司 | 一种基于白光干涉的背钻孔深度测量装置和方法 |
JP7240076B2 (ja) * | 2019-08-02 | 2023-03-15 | 株式会社エデックリンセイシステム | 円筒内面撮像装置 |
TW202200995A (zh) * | 2020-06-24 | 2022-01-01 | 由田新技股份有限公司 | 孔洞檢測系統以及孔洞檢測方法 |
US11754390B2 (en) * | 2021-01-21 | 2023-09-12 | The Boeing Company | Method, system, and apparatus for optical measurement |
CN113483692B (zh) * | 2021-06-23 | 2023-08-29 | 苏州中科全象智能科技有限公司 | 一种孔检测光学*** |
DE102022102155B4 (de) | 2022-01-31 | 2023-12-28 | Jenoptik Industrial Metrology Germany Gmbh | Kalibrierhilfsmittel und Verfahren zur Herstellung des Kalibrierhilfsmittels |
DE102022125115A1 (de) | 2022-09-29 | 2024-04-04 | Jenoptik Industrial Metrology Germany Gmbh | Optisches Messverfahren |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5910850Y2 (ja) * | 1978-05-30 | 1984-04-04 | 動力炉・核燃料開発事業団 | テレビジヨンカメラによる目視検査装置 |
JPS6210724Y2 (ja) * | 1979-10-17 | 1987-03-13 | ||
JPS6328405Y2 (ja) * | 1979-12-24 | 1988-08-01 | ||
DE3232904A1 (de) | 1982-09-04 | 1984-03-08 | Robert Bosch Gmbh, 7000 Stuttgart | Sonde zum automatischen pruefen von oberflaechen |
JPH05149885A (ja) * | 1991-04-26 | 1993-06-15 | Sekiyu Sangyo Kasseika Center | 管内検査装置 |
DE4320845C1 (de) | 1993-06-23 | 1994-10-27 | Fraunhofer Ges Forschung | Anordnung zur Messung von Streulicht in Bohrungen von Werkstücken oder in Rohren |
JPH07191269A (ja) * | 1993-12-27 | 1995-07-28 | Y S Opt:Kk | 内面観察装置 |
DE4416493A1 (de) | 1994-05-10 | 1995-11-16 | Bosch Gmbh Robert | Oberflächenprüfvorrichtung |
WO1997032180A1 (en) * | 1996-02-19 | 1997-09-04 | Philips Electronics N.V. | Device comprising diffuse foreground illumination for detecting an electronic component, and component-mounting machine provided with such a detection device |
DE10131780A1 (de) * | 2000-07-07 | 2002-03-07 | Bosch Gmbh Robert | Interferometrische Messvorrichtung |
US7744528B2 (en) * | 2003-02-26 | 2010-06-29 | Infinite Biomedical Technologies, Llc | Methods and devices for endoscopic imaging |
US6677598B1 (en) * | 2003-04-29 | 2004-01-13 | Axcelis Technologies, Inc. | Beam uniformity and angular distribution measurement system |
DE10325443A1 (de) * | 2003-06-05 | 2004-12-23 | Robert Bosch Gmbh | Interferometrische Messvorrichtung |
DE102004017229A1 (de) * | 2004-04-05 | 2005-12-22 | Robert Bosch Gmbh | Interferometrisches System für den Einsatz von Sonderoptiken |
DE102004045808A1 (de) * | 2004-09-22 | 2006-04-06 | Robert Bosch Gmbh | Optische Messvorrichtung zur Vermessung von mehreren Flächen eines Messobjektes |
JP5398524B2 (ja) * | 2006-05-09 | 2014-01-29 | コーニンクレッカ フィリップス エヌ ヴェ | 対象物内部の3次元イメージングのためのイメージングシステム及びこの作動方法 |
DE102007031358B4 (de) | 2007-07-05 | 2023-03-16 | Jenoptik Industrial Metrology Germany Gmbh | Vorrichtung zur Abbildung der Innenfläche eines zylindrischen Hohlraums |
US8636653B2 (en) * | 2008-06-09 | 2014-01-28 | Capso Vision, Inc. | In vivo camera with multiple sources to illuminate tissue at different distances |
DE102009019459B4 (de) * | 2009-05-04 | 2012-02-02 | Hommel-Etamic Gmbh | Vorrichtung zur Abbildung der Innenfläche eines Hohlraumes in einem Werkstück |
JP2011017615A (ja) * | 2009-07-09 | 2011-01-27 | High Energy Accelerator Research Organization | 白色干渉法による管内面の形状測定装置及び方法 |
US20110080588A1 (en) * | 2009-10-02 | 2011-04-07 | Industrial Optical Measurement Systems | Non-contact laser inspection system |
CN201532383U (zh) * | 2009-10-26 | 2010-07-21 | 四川理工学院 | 管井内窥探头的驱动装置 |
JP5903893B2 (ja) * | 2010-06-25 | 2016-04-13 | コニカミノルタ株式会社 | プローブ |
DE102011079068A1 (de) * | 2011-07-13 | 2013-01-17 | Robert Bosch Gmbh | Verfahren und Vorrichtung für eine Rundumsichtinspektion |
DE102011117618B4 (de) * | 2011-11-04 | 2019-07-18 | Jenoptik Industrial Metrology Germany Gmbh | Vorrichtung zur Abbildung der Innenfläche eines Hohlraumes in einem Werkstück |
DE102012004339B4 (de) | 2012-03-07 | 2013-09-26 | Jenoptik Industrial Metrology Germany Gmbh | Messkörper einer pneumatischen Messvorrichtung |
US20140055582A1 (en) * | 2012-08-27 | 2014-02-27 | Joseph R. Demers | Endoscopic calibration method and apparatus |
DE102012018580B4 (de) | 2012-09-20 | 2015-06-11 | Jenoptik Industrial Metrology Germany Gmbh | Messvorrichtung und Messverfahren zur Inprozess-Messung an Prüflingen während eines Bearbeitungsvorganges an einer Bearbeitungsmaschine, insbesondere einer Schleifmaschine |
CN103393392B (zh) * | 2013-06-19 | 2015-08-26 | 西安电子科技大学 | 深度与强度可调式的探头激光共聚焦显微内窥镜*** |
US20150346115A1 (en) * | 2014-05-30 | 2015-12-03 | Eric J. Seibel | 3d optical metrology of internal surfaces |
DE102014113553B3 (de) | 2014-09-19 | 2015-09-17 | Jenoptik Industrial Metrology Germany Gmbh | Kurbellagerflanken-Messvorrichtung |
DE102014118753A1 (de) * | 2014-10-01 | 2016-04-07 | Jenoptik Industrial Metrology Germany Gmbh | Prüfvorrichtung |
DE102014118756B4 (de) | 2014-12-16 | 2017-07-27 | Jenoptik Industrial Metrology Germany Gmbh | Messvorrichtung |
-
2014
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- 2014-12-17 DE DE102014118844.6A patent/DE102014118844B4/de active Active
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- 2015-09-24 CN CN201510613409.5A patent/CN105486694B/zh active Active
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- 2015-09-29 CN CN201510631335.8A patent/CN105486695A/zh active Pending
- 2015-09-30 US US14/871,354 patent/US9983149B2/en active Active
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CN105486694A (zh) | 2016-04-13 |
DE102014118753A1 (de) | 2016-04-07 |
US9983149B2 (en) | 2018-05-29 |
DE102014118844A1 (de) | 2016-04-07 |
DE102014118844B4 (de) | 2016-11-03 |
CN105486694B (zh) | 2019-03-19 |
DE202014010793U1 (de) | 2016-08-29 |
JP2016070924A (ja) | 2016-05-09 |
US20160187264A1 (en) | 2016-06-30 |
US20160187265A1 (en) | 2016-06-30 |
CN105486695A (zh) | 2016-04-13 |
JP2016070934A (ja) | 2016-05-09 |
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