CN111213053A - 基于相干光的微细管内壁检测装置及方法 - Google Patents

基于相干光的微细管内壁检测装置及方法 Download PDF

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Publication number
CN111213053A
CN111213053A CN201880067108.9A CN201880067108A CN111213053A CN 111213053 A CN111213053 A CN 111213053A CN 201880067108 A CN201880067108 A CN 201880067108A CN 111213053 A CN111213053 A CN 111213053A
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defect
wall
coherent light
microtube
calculation results
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王星泽
舒远
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Heren Technology Shenzhen Co ltd
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Heren Technology Shenzhen Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954Inspecting the inner surface of hollow bodies, e.g. bores

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

一种基于相干光的微细管(101)内壁检测装置(100)及方法,装置(100)包括:相干光发射器(108),用于产生相干光,经过第一透镜(105)、半透半反镜(104)和光纤(103)传输至检测探头(102);检测探头(102),用于将相干光投射到微细管(101)内壁上,并将反射相干光通过光纤(103)、半透半反镜(104)和第二透镜(106)传输至相干光接收器(107);相干光接收器(107),用于根据反射相干光得到微细管(101)内壁的散斑图像;并将微细管(101)内壁的散斑图像传输至图形处理器(109);图像处理器(109),用于根据微细管(101)内壁的散斑图像,确定微细管(101)内壁的缺陷类型。采用该装置解决现有技术对微细管内壁缺陷无法进行检测的问题。

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PCT国内申请,说明书已公开。

Claims (10)

  1. PCT国内申请,权利要求书已公开。
CN201880067108.9A 2018-07-27 2018-07-27 基于相干光的微细管内壁检测装置及方法 Pending CN111213053A (zh)

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Cited By (1)

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CN113702400A (zh) * 2021-08-09 2021-11-26 复旦大学 基于全景技术的管道内壁缺陷检测***及其检测方法

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CN115389538B (zh) * 2022-08-09 2023-12-29 深圳市埃芯半导体科技有限公司 X射线分析装置及方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113702400A (zh) * 2021-08-09 2021-11-26 复旦大学 基于全景技术的管道内壁缺陷检测***及其检测方法

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Application publication date: 20200529