CN111213053A - 基于相干光的微细管内壁检测装置及方法 - Google Patents
基于相干光的微细管内壁检测装置及方法 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
一种基于相干光的微细管(101)内壁检测装置(100)及方法,装置(100)包括:相干光发射器(108),用于产生相干光,经过第一透镜(105)、半透半反镜(104)和光纤(103)传输至检测探头(102);检测探头(102),用于将相干光投射到微细管(101)内壁上,并将反射相干光通过光纤(103)、半透半反镜(104)和第二透镜(106)传输至相干光接收器(107);相干光接收器(107),用于根据反射相干光得到微细管(101)内壁的散斑图像;并将微细管(101)内壁的散斑图像传输至图形处理器(109);图像处理器(109),用于根据微细管(101)内壁的散斑图像,确定微细管(101)内壁的缺陷类型。采用该装置解决现有技术对微细管内壁缺陷无法进行检测的问题。
Description
PCT国内申请,说明书已公开。
Claims (10)
- PCT国内申请,权利要求书已公开。
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PCT/CN2018/097662 WO2020019348A1 (zh) | 2018-07-27 | 2018-07-27 | 基于相干光的微细管内壁检测装置及方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113702400A (zh) * | 2021-08-09 | 2021-11-26 | 复旦大学 | 基于全景技术的管道内壁缺陷检测***及其检测方法 |
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CN115389538B (zh) * | 2022-08-09 | 2023-12-29 | 深圳市埃芯半导体科技有限公司 | X射线分析装置及方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2631697A1 (fr) * | 1988-05-17 | 1989-11-24 | Hispano Suiza Sa | Appareil pour le controle optique du profil interne d'un tube ou d'un alesage |
JPH08286120A (ja) * | 1995-04-13 | 1996-11-01 | Kubota Corp | 管内検査装置 |
CN101701922A (zh) * | 2009-11-19 | 2010-05-05 | 西北工业大学 | 一种光学无损检测环形内壁表面的装置 |
CN102608124A (zh) * | 2012-04-06 | 2012-07-25 | 天津大学 | 微细管道管内缺陷及形貌测量装置及方法 |
JP2013066559A (ja) * | 2011-09-21 | 2013-04-18 | Fujifilm Corp | 光干渉断層画像処理方法及びその装置 |
CN103063684A (zh) * | 2012-12-20 | 2013-04-24 | 西安石油大学 | 一种管道内壁全景图显示与缺陷定位方法 |
CN103673880A (zh) * | 2013-12-06 | 2014-03-26 | 上海新跃仪表厂 | 基于复合反射镜的微小孔内壁视觉检测***及其检测方法 |
CN104568983A (zh) * | 2015-01-06 | 2015-04-29 | 浙江工业大学 | 基于主动式全景视觉的管道内部功缺陷检测装置及方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040189987A1 (en) * | 2000-11-15 | 2004-09-30 | Quest Integrated Inc. | A method for reformer tube in situ inspection radius calculation |
DE102004045808A1 (de) * | 2004-09-22 | 2006-04-06 | Robert Bosch Gmbh | Optische Messvorrichtung zur Vermessung von mehreren Flächen eines Messobjektes |
DE102014118753A1 (de) * | 2014-10-01 | 2016-04-07 | Jenoptik Industrial Metrology Germany Gmbh | Prüfvorrichtung |
US9955088B2 (en) * | 2016-06-10 | 2018-04-24 | The Boeing Company | Hyperspectral borescope system |
CN108037190A (zh) * | 2017-11-03 | 2018-05-15 | 大连理工大学 | 一种基于神经网络的高温炉管损伤级别智能评定方法 |
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- 2018-07-27 CN CN201880067108.9A patent/CN111213053A/zh active Pending
- 2018-07-27 WO PCT/CN2018/097662 patent/WO2020019348A1/zh active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2631697A1 (fr) * | 1988-05-17 | 1989-11-24 | Hispano Suiza Sa | Appareil pour le controle optique du profil interne d'un tube ou d'un alesage |
US4967092A (en) * | 1988-05-17 | 1990-10-30 | Societe Anonyme Dite Hispano-Suiza | Apparatus for optically checking the inner profile of a tube or bore |
JPH08286120A (ja) * | 1995-04-13 | 1996-11-01 | Kubota Corp | 管内検査装置 |
CN101701922A (zh) * | 2009-11-19 | 2010-05-05 | 西北工业大学 | 一种光学无损检测环形内壁表面的装置 |
JP2013066559A (ja) * | 2011-09-21 | 2013-04-18 | Fujifilm Corp | 光干渉断層画像処理方法及びその装置 |
CN102608124A (zh) * | 2012-04-06 | 2012-07-25 | 天津大学 | 微细管道管内缺陷及形貌测量装置及方法 |
CN103063684A (zh) * | 2012-12-20 | 2013-04-24 | 西安石油大学 | 一种管道内壁全景图显示与缺陷定位方法 |
CN103673880A (zh) * | 2013-12-06 | 2014-03-26 | 上海新跃仪表厂 | 基于复合反射镜的微小孔内壁视觉检测***及其检测方法 |
CN104568983A (zh) * | 2015-01-06 | 2015-04-29 | 浙江工业大学 | 基于主动式全景视觉的管道内部功缺陷检测装置及方法 |
Non-Patent Citations (3)
Title |
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孙立根,朱立光著, 中国地质大学出版社, pages: 134 - 138 * |
李晓舟: "微小尺寸零件表面缺陷光学检测方法", 《兵工学报》, 31 July 2011 (2011-07-31) * |
陆文俊: "小孔径工件的内外壁视觉检测***研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》, 15 June 2015 (2015-06-15) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113702400A (zh) * | 2021-08-09 | 2021-11-26 | 复旦大学 | 基于全景技术的管道内壁缺陷检测***及其检测方法 |
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