JP6265346B2 - 距離計測装置 - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
- G01S17/26—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves wherein the transmitted pulses use a frequency-modulated or phase-modulated carrier wave, e.g. for pulse compression of received signals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4861—Circuits for detection, sampling, integration or read-out
- G01S7/4863—Detector arrays, e.g. charge-transfer gates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4865—Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/1461—Pixel-elements with integrated switching, control, storage or amplification elements characterised by the photosensitive area
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Description
この1次関数によれば、理想的には各制御パルス電圧TW(1),TW(2),TW(3)の印加に応じて蓄積される電子数は、時間差tdがT1−T0<td≦T1の範囲で、下記式(2)によって計算できる。
さらに、算出回路11は、算出された時間差tdを基に対象物Saまでの距離Lを、光の速さをc[m/s]として、下記式(4)により算出して出力する。
なお、上記式(4)によって測定可能な距離Lの範囲は、下記式(5)で計算される値の範囲となり、画素Xijのインパルス応答の応答時間T0に比例する。
また、ショットノイズが支配的な状態において測定可能な距離Lの分解能σLは、下記式(6)で計算される値となり、蓄積電子数N1の平方根に反比例し、画素Xijのインパルス応答の応答時間T0に比例する。例えば、蓄積電子数N1=106、応答時間T0=100psec、パラメータrの取りうる値を0〜0.5とした場合は、測定可能な距離Lの範囲は15mm、測定可能な分解能σLは=10.6μm〜13μmとなる。
により算出される(fmは変調周波数)。ここで、この場合の計測可能な距離dの範囲L及び分解能σLは、下記式(8)により計算される。距離dの範囲Lは、変調周波数fmに反比例する。また、計測可能な距離dの分解能σLは、変調周波数fmに反比例し、蓄積電子数NSの平方根に反比例する。
例えば、蓄積電子数Ns=106の場合で、距離分解能を10μm以下にしたい場合には、変調周波数fmを3.75GHzに設定する必要がある。このような変調周波数の実現は、ロックイン検出のための変調ゲートパルスの供給が困難になるために現実的ではない。
例えば、蓄積電子数Ns=106の場合で、距離分解能を10μm以下にしたい場合には、照射光のパルス幅T0を67psec以下に設定する必要がある。このような狭いパルス幅の照明光を精度よく生成することは困難である。その結果、従来方式の正弦波変調方式及びパルス変調方式では、計測の分解能を小さくしながら測定精度を保つことは困難である。
この2次関数によれば、理想的には各制御パルス電圧TW(1),TW(2),TW(3)の印加に応じて蓄積される電子数は、下記式(11)によって計算できる。
この関係を利用して、算出回路11は、光の飛行時間である時間差tdを、下記式(12)を用いて算出する。
さらに、算出回路11は、対象物Saまでの距離Lを、下記式(13)により算出して出力することができる。
この関係を利用して、算出回路11は、光の飛行時間である時間差tdを、下記式(15)を用いて算出する。
さらに、算出回路11は、対象物Saまでの距離Lを、下記式(16)により算出して出力することができる。
この場合の計測可能な距離の分解能σLは、下記式(17)により計算される。計測可能な距離の分解能σLは、遅延差ΔTに比例し、蓄積電子数N2の平方根に反比例する。
Claims (6)
- 入射光を電荷に変換する受光部と、電荷を蓄積する電荷蓄積部と、前記電荷を排出する電荷排出部と、前記受光部から前記電荷蓄積部への電荷の転送、及び前記受光部から前記電荷排出部への電荷の転送を制御するゲート電極とを有する光電変換素子と、
対象物に向けた前記受光部の応答時間よりも十分短いパルス幅のパルス光の照射タイミングを制御し、前記照射タイミングを基準にして少なくとも2種類の位相の制御パルス電圧を生成し前記ゲート電極に印加するように制御する制御部と、
前記2種類の位相の制御パルス電圧のそれぞれの印加に伴って前記電荷蓄積部に蓄積された第1及び第2の電荷を、第1及び第2の電気信号としてそれぞれ読み出す電荷読出部と、
前記第1及び第2の電気信号を基に前記対象物までの距離を算出する算出部と、
を備える距離計測装置。 - 前記算出部は、前記受光部のインパルス応答特性を近似することにより、前記第1及び前記第2の電気信号の比を基に前記距離を算出する、
請求項1記載の距離計測装置。 - 前記算出部は、前記受光部のインパルス応答特性を1次関数或いは2次関数で近似する、
請求項2記載の距離計測装置。 - 前記制御部は、前記2種類の位相と異なる位相の制御パルス電圧をさらに生成するように制御し、
前記電荷読出部は、該制御パルスの印加に伴って電荷蓄積部に蓄積された第3の電荷を、第3の電気信号としてさらに読み出し、
前記算出部は、前記第3の電気信号によって補正された前記第1及び第2の電気信号を基に前記対象物までの距離を算出する、
請求項1〜3のいずれか1項に記載の距離計測装置。 - 前記光電変換素子は、前記受光部が複数配列されて構成されている、
請求項1〜4のいずれか1項に記載の距離計測装置。 - 前記光電変換素子は、バッファ回路をさらに有し、
前記制御パルス電圧は、前記バッファ回路を介して前記ゲート電極に印加されるように構成されている、
請求項1〜5のいずれか1項に記載の距離計測装置。
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PCT/JP2014/059947 WO2014181619A1 (ja) | 2013-05-10 | 2014-04-04 | 距離計測装置 |
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US11953567B2 (en) | 2020-09-08 | 2024-04-09 | Analog Devices International Unlimited Company | Magnetic multi-turn sensor and method of manufacture |
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CN106374224B (zh) * | 2015-07-23 | 2019-09-27 | 同方威视技术股份有限公司 | 电磁波成像***及天线阵列信号校正方法 |
EP3301480A1 (en) * | 2016-10-03 | 2018-04-04 | Xenomatix NV | System and method for determining a distance to an object |
JP6957901B2 (ja) * | 2017-03-03 | 2021-11-02 | セイコーエプソン株式会社 | 周波数比測定装置および物理量センサー |
FR3078851B1 (fr) * | 2018-03-07 | 2020-02-14 | Teledyne E2V Semiconductors Sas | Camera de vision a mesure de temps de vol optimisee pour environnement multi-cameras |
US11881151B2 (en) * | 2019-06-07 | 2024-01-23 | Stereyo Bv | Method for producing an image by a display and recording said image by a camera |
US11290671B2 (en) * | 2020-09-01 | 2022-03-29 | Pixart Imaging Inc. | Pixel circuit outputting pulse width signals and performing analog operation |
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JP2000346643A (ja) * | 1999-06-09 | 2000-12-15 | Hamamatsu Photonics Kk | 光位置検出装置および距離センサ |
JP2007121116A (ja) | 2005-10-28 | 2007-05-17 | Sharp Corp | 光学式測距装置 |
KR101030263B1 (ko) * | 2006-11-30 | 2011-04-22 | 고쿠리츠 다이가꾸 호우진 시즈오까 다이가꾸 | 반도체 거리 측정 소자 및 고체 촬상 장치 |
DE102010043768B3 (de) * | 2010-09-30 | 2011-12-15 | Ifm Electronic Gmbh | Lichtlaufzeitkamera |
JP5675469B2 (ja) * | 2011-03-31 | 2015-02-25 | 本田技研工業株式会社 | 測距システム |
JP5635938B2 (ja) * | 2011-03-31 | 2014-12-03 | 本田技研工業株式会社 | 固体撮像装置 |
JP6501403B2 (ja) * | 2014-02-07 | 2019-04-17 | 国立大学法人静岡大学 | イメージセンサ |
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US11953567B2 (en) | 2020-09-08 | 2024-04-09 | Analog Devices International Unlimited Company | Magnetic multi-turn sensor and method of manufacture |
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US20160124091A1 (en) | 2016-05-05 |
JPWO2014181619A1 (ja) | 2017-02-23 |
US10132927B2 (en) | 2018-11-20 |
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