JP6231735B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6231735B2 JP6231735B2 JP2012120782A JP2012120782A JP6231735B2 JP 6231735 B2 JP6231735 B2 JP 6231735B2 JP 2012120782 A JP2012120782 A JP 2012120782A JP 2012120782 A JP2012120782 A JP 2012120782A JP 6231735 B2 JP6231735 B2 JP 6231735B2
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- 239000004065 semiconductor Substances 0.000 title claims description 286
- 239000003990 capacitor Substances 0.000 claims description 106
- 230000015572 biosynthetic process Effects 0.000 claims description 22
- 239000010410 layer Substances 0.000 description 843
- 239000000758 substrate Substances 0.000 description 44
- 239000011701 zinc Substances 0.000 description 35
- 238000010438 heat treatment Methods 0.000 description 24
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- 239000010703 silicon Substances 0.000 description 16
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- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910020994 Sn-Zn Inorganic materials 0.000 description 5
- 229910009069 Sn—Zn Inorganic materials 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 229910018120 Al-Ga-Zn Inorganic materials 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
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- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical group [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
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- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910020833 Sn-Al-Zn Inorganic materials 0.000 description 1
- 229910020944 Sn-Mg Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
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- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
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- 239000010949 copper Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
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- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
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- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- 239000004332 silver Substances 0.000 description 1
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- 238000003860 storage Methods 0.000 description 1
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thin Film Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Dram (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
図1は、少なくとも1つの容量素子と2つのトランジスタとを有する回路要素を含む半導体装置の一例である。
図1(B)の破線8000で示すように、図1(B)では導電層401と導電層701とを開口部を介して電気的に接続させている。
他の実施の形態では、絶縁層500をゲート電極及び接続電極の間に埋め込む構造について説明したが、当該構造とすることは必須の構成ではない。
他の実施の形態では、トランジスタ10及びトランジスタ20がトップゲート型のトランジスタである場合を示しているが、トランジスタ10又はトランジスタ20がボトムゲート型のトランジスタであっても良い。
他の実施の形態では、トランジスタ20の半導体層を基板上に設けた例を示しているが、半導体基板(シリコンウェハ等)を用いてトランジスタ20を形成しても良い。
実施の形態1ではノードAとトランジスタ20のゲートを電気的に接続した例を示したが、本実施の形態ではノードAとトランジスタ20のソース又はドレインの他方(図1(A)のノードF)を電気的に接続した例を図8、図9を用いて説明する。
図10は図1においてノードAとノードBとを電気的に接続した場合を示している。
半導体装置の一種であるEL表示装置(発光装置)の一例について、図12を用いて説明する。
半導体装置の一種である記憶装置の一例について、図13を用いて説明する。
図14(A)はカレントミラー回路を有する半導体装置の一例であり、図10(A)のノードBに定電流源60を電気的に接続し、且つ、ノードDに低電源電圧Vss用の電源を電気的に接続したものである。
図15(A)は半導体装置の一種である液晶表示装置の一例であり、図8(A)のノードEに容量素子70及び表示素子40の一方の電極を電気的に接続したものに対応する。
チャージポンプ回路(昇圧回路の一種)を有する半導体装置の一例について図16を用いて説明する。
倍圧整流回路(昇圧回路の一種)を有する半導体装置の一例について図17を用いて説明する。
各層の材料について説明する。
図12(EL表示装置)、図13(記憶装置)、図15(液晶表示装置)等において、トランジスタ10は、容量素子30に電荷を蓄積するか否かを制御する役割を有しているとともに、容量素子30に蓄積した電荷がA以外の他のノードに漏れないようにする役割を有している。
他の実施の形態では、共通電極として半導体層601上に接する導電層701を用いている。
図19(A)はトランジスタ10と容量素子30とを有する回路要素を含む半導体装置の一例である。
図20、図21は図19においてノードAとノードBとを電気的に接続した場合を示している。
実施の形態18では、共通電極として半導体層601上に接する導電層701を用いている。
組成比としてIn:Sn:Zn=1:1:1(原子比)のターゲットを用いて、ガス流量比をAr/O2=6/9sccm、成膜圧力を0.4Pa、成膜電力100Wとして、15nmの厚さとなるように基板上に酸化物半導体層を成膜した。
サンプルAは酸化物半導体層の成膜中に基板に意図的な加熱を施さなかった。
サンプルBは基板を200℃になるように加熱した状態で酸化物半導体層の成膜を行った。
サンプルCは基板を200℃になるように加熱した状態で酸化物半導体層の成膜を行った。
図26(A)にサンプルAのトランジスタの初期特性を示す。
サンプルB(成膜後加熱処理なし)及びサンプルC(成膜後加熱処理あり)に対してゲートBTストレス試験を行った。
20 トランジスタ
30 容量素子
40 表示素子
50 トランジスタ
60 定電流源
70 容量素子
81 ダイオード
82 ダイオード
90 容量素子
101 基板
102 絶縁層
201 半導体層
202 半導体層
300 絶縁層
401 導電層
402 導電層
411 導電層
412 導電層
413 導電層
414 導電層
500 絶縁層
550 絶縁層
601 半導体層
602 半導体層
701 導電層
702 導電層
703 導電層
704 導電層
711 導電層
712 導電層
713 導電層
714 導電層
800 絶縁層
901 導電層
902 導電層
911 導電層
912 導電層
950 絶縁層
960 導電層
961 導電層
962 導電層
963 導電層
970 絶縁層
1001 導電層
1002 EL層
1003 導電層
1004 導電層
1005 液晶層
1006 導電層
1007 基板
8000 破線
8001 破線
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9002 開口部
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Claims (1)
- トランジスタと、容量素子と、を有し、
前記トランジスタのソース電極又はドレイン電極の一方と、前記容量素子の一方の電極と、を兼ねる共通電極を有し、
前記共通電極の上方に、前記容量素子の他方の電極が配置されており、
前記トランジスタのゲートと前記共通電極とは、前記容量素子の他方の電極の上方に設けられた配線を用いて電気的に接続され、
前記配線と前記共通電極とは、前記容量素子の他方の電極に設けられた開口部を介して電気的に接続され、
前記配線と前記共通電極とが電気的に接続される領域は、前記トランジスタのチャネル形成領域を有する半導体層と重なる領域を有することを特徴とする半導体装置。
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JP6607681B2 (ja) * | 2014-03-07 | 2019-11-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI755773B (zh) * | 2014-06-30 | 2022-02-21 | 日商半導體能源研究所股份有限公司 | 發光裝置,模組,及電子裝置 |
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JP6917734B2 (ja) * | 2016-03-18 | 2021-08-11 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6832656B2 (ja) * | 2016-09-14 | 2021-02-24 | 株式会社ジャパンディスプレイ | 半導体装置の製造方法 |
TW201836020A (zh) | 2017-02-17 | 2018-10-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
WO2019220266A1 (ja) * | 2018-05-18 | 2019-11-21 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
KR20210027367A (ko) | 2018-06-29 | 2021-03-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
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