JP6205824B2 - パワーモジュール - Google Patents
パワーモジュール Download PDFInfo
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- JP6205824B2 JP6205824B2 JP2013094353A JP2013094353A JP6205824B2 JP 6205824 B2 JP6205824 B2 JP 6205824B2 JP 2013094353 A JP2013094353 A JP 2013094353A JP 2013094353 A JP2013094353 A JP 2013094353A JP 6205824 B2 JP6205824 B2 JP 6205824B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Dispersion Chemistry (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
(実施例1)
オクチル酸鉄を20質量ppm添加した。
(実施例2)
オクチル酸鉄を50質量ppm添加した。
(実施例3)
オクチル酸鉄を75質量ppm添加した。
(実施例4)
オクチル酸鉄を100質量ppm添加した。
(比較例1)
オクチル酸鉄を未添加(添加量0質量ppm)。
(比較例2)
オクチル酸鉄を10質量ppm添加した。
(比較例3)
オクチル酸鉄を120質量ppm添加した。
各試料を200℃の熱風乾燥機中に6000時間放置した後、熱風乾燥機から試料を取り出し、室温まで冷却した後、目視による外観異常の有無の観察と絶縁耐圧の測定を実施した。目視観察は、シリコーンゲルにクラックの発生がなかったものを正常と判定した。
測定温度:25℃、
カットオフ電流:5mA、
昇圧条件:AC2.0kVから10秒ごとに0.2kV昇圧。
表1に、実施例1〜4及び比較例1〜3の評価結果を示す。なお、表1には、オクチル酸を添加したシリコーンゲルについて、絶縁性、シリコーンゲル中のオクチル酸の沈降性及び針入度を評価した結果を併せて示している。このシリコーンゲルの絶縁性については、(ヒューレットパッカード社製、ハイレジスタンスメーター4339A)により評価し、1013Ωcm以上の場合を○印、1013Ωcm未満の場合を×印で評価した。また、オクチル酸の沈降性については、50cm3ビーカにゲルを50cm3採取し、24h放置後の外観を目視観察し、ビーカ底部に添加剤の沈降が無いか確認して、沈降のない場合を○印、沈降がある場合を×印で評価した。更に、シリコーンゲルの針入度については、上述した80℃の熱風乾燥機中で60分加熱して硬化させた後のシリコーンゲルについてJIS K2220に準拠して、1/4コーンにより評価した。
これに対して、オクチル酸鉄を未添加又は10質量ppmで添加した比較例1、比較例2は、200℃、6000時間後の試料にクラックが発生しており、絶縁耐圧も低かった。また、オクチル酸鉄を120質量ppm添加した比較例3は、オクチル酸鉄がシリコーンゲル内で均一分散しておらず、沈降が生じていた。
11 IGBTチップ
12 セラミックス絶縁基板
13 ベースプレート
14 ケース
15 金属端子
16 金属ワイヤ
17 蓋
18 シリコーンゲル
Claims (6)
- 1又は2以上のパワー半導体チップと、該パワー半導体チップを収容するケースと、該ケース内に充填され前記パワー半導体チップを封止し、メチル基を具備するシリコーンゲルと、を備え、
前記シリコーンゲルが、鉄錯体を20〜100質量ppm含有する耐熱性シリコーンゲルよりなることを特徴とするパワーモジュール。 - 前記鉄錯体が、オクチル酸鉄である請求項1記載のパワーモジュール。
- 前記シリコーンゲルが、二液付加硬化型シリコーンゲルである請求項1又は2記載のパワーモジュール。
- 前記耐熱性シリコーンゲルが、針入度が50〜120である請求項1〜3のいずれか1項に記載のパワーモジュール。
- 200℃、6000時間の加速寿命試験後の絶縁耐圧が6kV以上である請求項1〜4のいずれか1項に記載のパワーモジュール。
- 前記パワー半導体チップが、IGBTを含む請求項1〜5のいずれか1項に記載のパワーモジュール。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013094353A JP6205824B2 (ja) | 2013-04-26 | 2013-04-26 | パワーモジュール |
US14/262,076 US9035446B2 (en) | 2013-04-26 | 2014-04-25 | Power module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013094353A JP6205824B2 (ja) | 2013-04-26 | 2013-04-26 | パワーモジュール |
Publications (2)
Publication Number | Publication Date |
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JP2014216558A JP2014216558A (ja) | 2014-11-17 |
JP6205824B2 true JP6205824B2 (ja) | 2017-10-04 |
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JP2013094353A Active JP6205824B2 (ja) | 2013-04-26 | 2013-04-26 | パワーモジュール |
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US (1) | US9035446B2 (ja) |
JP (1) | JP6205824B2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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US9478473B2 (en) * | 2013-05-21 | 2016-10-25 | Globalfoundries Inc. | Fabricating a microelectronics lid using sol-gel processing |
JP6276424B2 (ja) * | 2014-12-16 | 2018-02-07 | 京セラ株式会社 | 回路基板および電子装置 |
EP3163608A4 (en) * | 2015-04-28 | 2017-11-01 | Shindengen Electric Manufacturing Co., Ltd. | Semiconductor module and production method for semiconductor module |
JP6526229B2 (ja) * | 2015-11-12 | 2019-06-05 | 三菱電機株式会社 | パワーモジュール |
JP6537627B2 (ja) | 2015-11-27 | 2019-07-03 | 三菱電機株式会社 | 電力用半導体装置 |
EP3258487B1 (en) | 2016-06-15 | 2020-08-05 | ABB Schweiz AG | High voltage power electronics module for subsea applications |
WO2018026402A1 (en) * | 2016-08-03 | 2018-02-08 | Ferro Corporation | Passivation glasses for semiconductor devices |
JP2018170362A (ja) * | 2017-03-29 | 2018-11-01 | 株式会社東芝 | 半導体モジュール |
EP3730530A4 (en) | 2018-01-16 | 2020-11-11 | Hitachi Chemical Company, Ltd. | HARDENABLE RESIN COMPOSITION, SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURING A SEMICONDUCTOR COMPONENT |
EP3518278A1 (en) | 2018-01-30 | 2019-07-31 | Infineon Technologies AG | Power semiconductor module and method for producing the same |
JP6648868B1 (ja) | 2018-03-29 | 2020-02-14 | 日立化成株式会社 | 成形体の製造方法、及び電子部品装置の製造方法 |
US11884820B2 (en) | 2018-08-03 | 2024-01-30 | Shin-Etsu Chemical Co., Ltd. | Silicone gel composition and cured product thereof, and power module |
EP3955282A1 (de) * | 2020-08-11 | 2022-02-16 | Siemens Aktiengesellschaft | Leistungsmodul mit mindestens einer leistungseinheit |
JPWO2022181281A1 (ja) * | 2021-02-25 | 2022-09-01 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0813928B2 (ja) * | 1990-05-22 | 1996-02-14 | 信越化学工業株式会社 | シリコーンゴム組成物 |
JP3718350B2 (ja) | 1998-08-10 | 2005-11-24 | 富士高分子工業株式会社 | 熱伝導性・電気絶縁性シリコーンゴム組成物およびシリコーンゲル組成物 |
US6252029B1 (en) * | 1998-09-30 | 2001-06-26 | Dow Corning Toray Silicone Co. Ltd. | Hydroxyphenyl group-containing organosilicon compound, and method for manufacturing same |
US7790292B2 (en) * | 1999-05-18 | 2010-09-07 | Sabic Innovative Plastics Ip B.V. | Polysiloxane copolymers, thermoplastic composition, and articles formed therefrom |
JP2003165906A (ja) * | 2001-11-29 | 2003-06-10 | Ge Toshiba Silicones Co Ltd | シリコーンゲル組成物およびシリコーンゲル |
JP3815778B2 (ja) * | 2002-01-10 | 2006-08-30 | 信越化学工業株式会社 | 低ブリード性ゲル状硬化物を与える硬化性組成物 |
JP2005023166A (ja) * | 2003-06-30 | 2005-01-27 | Toshiba Lighting & Technology Corp | 自己修復性樹脂組成物、この樹脂組成物を用いた照明装置用部品及び照明装置 |
JP2005206761A (ja) | 2004-01-26 | 2005-08-04 | Ge Toshiba Silicones Co Ltd | 耐熱性シリコーン組成物 |
JP2006206721A (ja) * | 2005-01-27 | 2006-08-10 | Kansai Electric Power Co Inc:The | 高耐熱合成高分子化合物及びこれで被覆した高耐電圧半導体装置 |
JP4703374B2 (ja) | 2005-11-04 | 2011-06-15 | 信越化学工業株式会社 | シリコーンゲル組成物 |
TWI404791B (zh) * | 2006-08-22 | 2013-08-11 | Mitsubishi Chem Corp | A semiconductor light emitting device, a lighting device, and an image display device |
US20080194441A1 (en) * | 2007-02-09 | 2008-08-14 | Fujifilm Corporation | Grease composition, viscous agent, and mechanical element |
CN101939396B (zh) * | 2007-09-19 | 2012-11-21 | 东丽株式会社 | 电子部件用粘合剂组合物及使用其的电子部件用粘合剂片材 |
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JP2009149736A (ja) * | 2007-12-19 | 2009-07-09 | Momentive Performance Materials Inc | 熱伝導性シリコーンゲル組成物 |
JP5538872B2 (ja) * | 2009-12-24 | 2014-07-02 | 東レ・ダウコーニング株式会社 | シリコーンエラストマー組成物 |
JP6048416B2 (ja) * | 2011-01-26 | 2016-12-21 | ダウ コーニング コーポレーションDow Corning Corporation | 高温安定熱伝導性材料 |
JP2012227516A (ja) * | 2011-04-05 | 2012-11-15 | Nitto Denko Corp | 封止シート、発光ダイオード装置およびその製造方法 |
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2013
- 2013-04-26 JP JP2013094353A patent/JP6205824B2/ja active Active
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JP2014216558A (ja) | 2014-11-17 |
US9035446B2 (en) | 2015-05-19 |
US20140319669A1 (en) | 2014-10-30 |
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