JP6105429B2 - アクチュエータ装置 - Google Patents
アクチュエータ装置 Download PDFInfo
- Publication number
- JP6105429B2 JP6105429B2 JP2013156808A JP2013156808A JP6105429B2 JP 6105429 B2 JP6105429 B2 JP 6105429B2 JP 2013156808 A JP2013156808 A JP 2013156808A JP 2013156808 A JP2013156808 A JP 2013156808A JP 6105429 B2 JP6105429 B2 JP 6105429B2
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- JP
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- Prior art keywords
- diaphragm
- electrode layer
- gap
- node
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010410 layer Substances 0.000 description 80
- 229920002120 photoresistant polymer Polymers 0.000 description 27
- 239000000758 substrate Substances 0.000 description 23
- 239000011521 glass Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 238000009713 electroplating Methods 0.000 description 10
- 238000005452 bending Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Description
Claims (1)
- プリンタのジェットスタックのアクチュエータ装置であって、
導電トレースおよび電極を備える電極層であって、前記電極は前記導電トレースと電気的に結合される電極層、ならびに、
隙間によって前記電極層からオフセットされるダイヤフラムであって、
前記電極層に面する平面状の第1表面、
前記第1表面の反対側で前記電極層から離れる側に面する非平面状の第2表面であって、前記電極層と実質的に平行に配置され、かつ前記電極と整列するピストン部分を含み、前記ピストン部分が、前記ダイヤフラムの前記第1表面及び前記電極層から離れるように延びる突出部を含む、第2表面、および
前記ピストン部分を少なくとも部分的に取り囲む屈曲凹部、
を備えるダイヤフラムを備え、
前記ダイヤフラムは、電流が前記電極に印加されると、前記屈曲凹部の近位で曲がるように構成され、これにより、前記ピストン部分が前記電極層と相対的に動いて前記電極層と実質的に平行に維持され、
前記ダイヤフラムの前記平面状の第1表面と前記電極層との間の前記隙間に設けられた隙間スタンドオフ誘電体をさらに含み、前記隙間スタンドオフ誘電体は、前記ダイヤフラムの前記平面状の第1表面および前記導電トレースに物理的に接触し、
前記屈曲凹部が規定される前記ダイヤフラムの厚さより大きい厚さを有するノード部分をさらに備え、前記ノード部分は、前記隙間スタンドオフ誘電体と結合されて、前記ノード部分は全体的に前記電極層に対して固定される、
アクチュエータ装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/567,514 | 2012-08-06 | ||
US13/567,514 US8684500B2 (en) | 2012-08-06 | 2012-08-06 | Diaphragm for an electrostatic actuator in an ink jet printer |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014031009A JP2014031009A (ja) | 2014-02-20 |
JP2014031009A5 JP2014031009A5 (ja) | 2016-09-15 |
JP6105429B2 true JP6105429B2 (ja) | 2017-03-29 |
Family
ID=50025080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013156808A Expired - Fee Related JP6105429B2 (ja) | 2012-08-06 | 2013-07-29 | アクチュエータ装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8684500B2 (ja) |
JP (1) | JP6105429B2 (ja) |
KR (1) | KR101979032B1 (ja) |
CN (1) | CN103568564B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014205117A1 (de) * | 2014-03-19 | 2015-09-24 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Membran und Verfahren zu deren Herstellung |
US10488502B2 (en) * | 2017-04-26 | 2019-11-26 | General Electric Company | Ultrasound probe with thin film flex circuit and methods of providing same |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4374707A (en) | 1981-03-19 | 1983-02-22 | Xerox Corporation | Orifice plate for ink jet printing machines |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
US5685491A (en) | 1995-01-11 | 1997-11-11 | Amtx, Inc. | Electroformed multilayer spray director and a process for the preparation thereof |
JPH10211697A (ja) * | 1997-01-30 | 1998-08-11 | Ricoh Co Ltd | 記録ヘッド |
US6100477A (en) * | 1998-07-17 | 2000-08-08 | Texas Instruments Incorporated | Recessed etch RF micro-electro-mechanical switch |
JP2003053974A (ja) * | 2001-08-08 | 2003-02-26 | Nano Dynamics Inc | 圧電式インクジェットプリンタヘッドとその製造方法 |
US6608268B1 (en) * | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
US7052117B2 (en) * | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
US7188931B2 (en) * | 2004-11-22 | 2007-03-13 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
JP2007143342A (ja) * | 2005-11-21 | 2007-06-07 | Seiko Epson Corp | 静電アクチュエータ、液滴吐出ヘッド及び液滴吐出装置並びにそれらの製造方法 |
JP5311579B2 (ja) * | 2006-05-19 | 2013-10-09 | コーニンクレッカ フィリップス エヌ ヴェ | インクジェットヘッド用静電アクチュエータ |
JP2008030337A (ja) * | 2006-07-31 | 2008-02-14 | Ricoh Co Ltd | 液体吐出ヘッド、液体吐出装置、画像形成装置 |
US7630121B2 (en) * | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
CN102202895B (zh) * | 2008-10-31 | 2014-06-25 | 惠普开发有限公司 | 静电液体喷射致动机构及静电液体喷射装置 |
-
2012
- 2012-08-06 US US13/567,514 patent/US8684500B2/en active Active
-
2013
- 2013-07-29 JP JP2013156808A patent/JP6105429B2/ja not_active Expired - Fee Related
- 2013-07-29 KR KR1020130089360A patent/KR101979032B1/ko active IP Right Grant
- 2013-07-30 CN CN201310324286.4A patent/CN103568564B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20140036005A1 (en) | 2014-02-06 |
JP2014031009A (ja) | 2014-02-20 |
KR20140019734A (ko) | 2014-02-17 |
KR101979032B1 (ko) | 2019-05-15 |
CN103568564A (zh) | 2014-02-12 |
US8684500B2 (en) | 2014-04-01 |
CN103568564B (zh) | 2016-03-23 |
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